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1. 发明授权

US06841789B2 Apparatus for surface modification of polymer, metal and ceramic materials using ion beam 失效
标题翻译：使用离子束对聚合物，金属和陶瓷材料进行表面改性的设备
公开(公告)号：US06841789B2
公开(公告)日：2005-01-11
申请号：US09957896
申请日：2001-09-21
申请人： Seok-Keun Koh , Hyung Jin Jung , Won Kook Choi , Jung Cho
发明人： Seok-Keun Koh , Hyung Jin Jung , Won Kook Choi , Jung Cho
IPC分类号： C08J7/00 , C23C14/46 , C23C14/48 , C23C16/44 , C23C16/48 , C23F4/00 , D06B19/00 , H01J37/317 , H01J37/32 , H01J3/26
CPC分类号： H01J37/3277 , C23C16/4417 , C23C16/486 , D06B19/00 , H01J37/317 , H01J2237/338
摘要： An apparatus for surface modification of a polymer, metal and ceramic material using an ion beam (IB) is disclosed, which is capable of supplying and controlling a voltage (220) applied to a material to be surface-modified so that an ion beam (IB) energy irradiated to the material is controlled, differentiating the degree of the vacuum of a reaction gas in a portion of a vacuum chamber in which the ion beam is irradiated from that in a portion in which the ion beam is generated, and also being applicable for both-side irradiating processing and continuous processing.
摘要翻译：公开了一种使用离子束（IB）对聚合物，金属和陶瓷材料进行表面改性的设备，其能够提供和控制施加到待表面改性的材料上的电压（220），使得离子束 IB）照射到材料上的能量被控制，区分离子束被照射的真空室的一部分中的反应气体的真空度与产生离子束的部分的反应气体的真空度，并且也是适用于双面照射处理和连续加工。

2. 发明授权

US6162512A Process for modifying surfaces of nitride, and nitride having surfaces modified thereby 失效
标题翻译：用于修饰氮化物表面的方法和具有由其改性的表面的氮化物
公开(公告)号：US6162512A
公开(公告)日：2000-12-19
申请号：US839373
申请日：1997-04-18
申请人： Seok Keun Koh , Hyung Jin Jung , Won Kook Choi , Yong Bai Son
发明人： Seok Keun Koh , Hyung Jin Jung , Won Kook Choi , Yong Bai Son
IPC分类号： C08J7/00 , B01J19/00 , C01B21/072 , C03C21/00 , C04B35/581 , C04B41/00 , C04B41/51 , C04B41/52 , C04B41/80 , C04B41/88 , C04B41/89 , C23C14/02 , C23C14/18 , C23C14/20 , H01L23/373 , C23C14/08 , C23C14/06 , H05H1/00
CPC分类号： C04B41/009 , C04B41/0045 , C04B41/5127 , C04B41/52 , C04B41/80 , C04B41/88 , C04B41/89 , C23C14/022 , C23C14/185 , C23C14/20 , H01J2237/316 , C04B41/0027 , C04B41/4556 , C04B41/5031 , C04B41/4529 , C04B35/581
摘要： A process for modifying a nitride surface includes irradiating energized ion particles onto the nitride surface while blowing a reactive gas directly on the nitride surface under a vacuum condition. An aluminum nitride for a direct bond copper (DBC) can be obtained by forming a thin copper film on the thusly modified nitride.
摘要翻译：用于改变氮化物表面的方法包括在氮化物表面上照射通电离子颗粒，同时在真空条件下直接在氮化物表面上吹送反应性气体。通过在这样改性的氮化物上形成薄的铜膜，可以获得直接键合铜（DBC）的氮化铝。

3. 发明授权

US06051115A Adhesive strength increasing method for metal thin film 失效
标题翻译：金属薄膜的粘合强度增加方法
公开(公告)号：US06051115A
公开(公告)日：2000-04-18
申请号：US893153
申请日：1997-07-15
申请人： Hong Kyu Jang , Seok Keun Koh , Hyung Jin Jung , Won Kook Choi
发明人： Hong Kyu Jang , Seok Keun Koh , Hyung Jin Jung , Won Kook Choi
IPC分类号： C23C14/10 , C23C14/18 , C23C14/58 , C23C14/34
CPC分类号： C23C14/5833 , C23C14/185 , C23C14/58
摘要： An adhesive strength increasing method which does not need a bulky apparatus such as an ion implantation apparatus and prevent the characteristic of a material from being degraded by using a high level current ion of a low level energy, thus increasing an adhesive strength between a metal thin film and a glass substrate. In the present invention, a metal is deposited on a substrate an inert gas or a reactive gas having a predetermined energy is irradiatd to the deposited metal thin film, and then the metal thin film is sealed, thus increasing an adhesive strength between a metal thin film and a glass substrate.
摘要翻译：一种粘合强度增加方法，其不需要诸如离子注入装置的体积大的装置，并且通过使用低水平能量的高电流离子来防止材料的特性劣化，从而增加金属薄片薄膜和玻璃基板。在本发明中，将金属沉积在基板上，将惰性气体或具有预定能量的反应性气体照射到沉积的金属薄膜上，然后将金属薄膜密封，从而增加金属薄膜薄膜和玻璃基板。

4. 发明授权

US5855683A Thin film deposition apparatus 失效
标题翻译：薄膜沉积装置
公开(公告)号：US5855683A
公开(公告)日：1999-01-05
申请号：US797255
申请日：1997-02-07
申请人： Seok Keun Koh , Hong Kyu Jang , Hyung Jin Jung , Won Kook Choi
发明人： Seok Keun Koh , Hong Kyu Jang , Hyung Jin Jung , Won Kook Choi
IPC分类号： C23C16/54 , C23C14/32 , H01J37/32 , C23C16/00
CPC分类号： H01J37/32422 , C23C14/32
摘要： An improved thin film deposition apparatus which is capable of easily increasing the temperature of a crucible using low electric power, for thus reducing the maintenance cost of the system, and fabricating a thin film having a constant characteristic by using a lower current density variation based on a distance, for thus increasing the reliability of a thin film device, whereby it is possible to fabricate a more compact product and to more easily maintain the system, which includes a heat shielding cylindrical chamber, a cylindrical chamber located within the heat shielding cylindrical chamber, a crucible section including a crucible and a heat filament arranged at an inner and lower portion of the cylindrical chamber, an ionization section having an anode and an ionization filament arranged in an upper portion inside the cylindrical chamber, and a magnet for enhancing an ionization efficiency, an upper and lower filament support for supporting the heater filament and the ionization filament, an upper and lower flange, to which the upper and lower filaments are fixed, arranged in the cylindrical chamber in order for the upper and lower filaments to be detachable, and a grounding plate extended from the heat shielding plate and the electromagnetic field blocking cylindrical chamber located at the upper direction of the crucible section and forming of an acceleration electrode system together with the upper flange.
摘要翻译：一种改进的薄膜沉积装置，其能够使用低功率容易地增加坩埚的温度，从而降低系统的维护成本，并且通过使用基于以下的电流密度变化来制造具有恒定特性的薄膜距离，从而提高薄膜器件的可靠性，由此可以制造更紧凑的产品并且更容易地保持包括隔热圆柱形室的系统，位于隔热圆柱形室内的圆柱形室包括坩埚和布置在圆筒形室的内部和下部的热丝的坩埚部分，具有设置在圆筒形室内部上部的阳极和电离丝的离子化部分和用于增强电离的磁体效率，用于支撑加热丝和电离的上，下丝支撑灯丝，上，下灯丝固定在其上的上下法兰，布置在圆筒形室中，以便上下灯丝可拆卸，并且从隔热板延伸的接地板和电磁场阻塞圆柱形室位于坩埚部分的上方，并与上凸缘一起形成加速电极系统。

5. 发明授权

US06787441B1 Method for pretreating a polymer substrate using an ion beam for subsequent deposition of indium oxide or indium tin oxide 失效
标题翻译：使用离子束预处理聚合物衬底以后续沉积氧化铟或氧化铟锡的方法
公开(公告)号：US06787441B1
公开(公告)日：2004-09-07
申请号：US10182986
申请日：2002-11-13
申请人： Seok-Keun Koh , Young-Whoan Beag , Jun-Sik Cho , Young-Gun Han
发明人： Seok-Keun Koh , Young-Whoan Beag , Jun-Sik Cho , Young-Gun Han
IPC分类号： H01L2144
CPC分类号： C23C14/022 , C23C14/086 , C23C14/22
摘要： A method of depositing indium oxide or indium tin oxide thin film on a polymer substrate is disclosed. In the method, oxygen or argon ion beam is radiated on a polymer substrate by a constant accelerating energy in a vacuum state to modify the surface of the polymer substrate, on which an IO thin film or an ITO thin film is deposited while oxygen ion beam, argon ion beam or their mixture ion beam is being radiated in a vacuum state. In addition, ion beam is generated from a cold cathode ion source by using argon, oxygen or their mixture gas and sputtered at a target substance composed of In2O3 or In2O3 and SnO2, thereby an IO or an ITO thin film can be deposited on the surface-modified polymer substrate.
摘要翻译：公开了一种在聚合物基底上沉积氧化铟或氧化铟锡薄膜的方法。在该方法中，氧气或氩离子束在真空状态下通过恒定的加速能量辐射在聚合物衬底上，以改变聚合物衬底的表面，其上沉积有IO薄膜或ITO薄膜，而氧离子束氩离子束或其混合离子束在真空状态下被辐射。此外，通过使用氩，氧或它们的混合气体从冷阴极离子源产生离子束并溅射在由In 2 O 3或In 2 O 3和SnO 2组成的目标物质上，从而可以在表面上沉积IO或ITO薄膜改性聚合物基材。

6. 发明授权

US6059937A Sensor having tin oxide thin film for detecting methane gas and propane gas, and process for manufacturing thereof 失效
标题翻译：具有用于检测甲烷气体和丙烷气体的氧化锡薄膜的传感器及其制造方法
公开(公告)号：US6059937A
公开(公告)日：2000-05-09
申请号：US654055
申请日：1996-05-28
申请人： Seok Keun Koh , Hyung Jin Jung , Seok Kyun Song , Won Kook Choi , Dongsoo Choi , Jin Seok Jeon
发明人： Seok Keun Koh , Hyung Jin Jung , Seok Kyun Song , Won Kook Choi , Dongsoo Choi , Jin Seok Jeon
IPC分类号： G01N27/12 , C23C14/34 , C23C14/08
CPC分类号： G01N27/12
摘要： The present invention relates to a sensor for detecting hydrocarbon type gas such as methane gas and propane gas, and process for manufacturing thereof. SiO.sub.2 was deposited in 1 .mu.m by ion beam sputtering with a mixed gas (3:2) of argon and oxygen on a silicon wafer in the process. In case of a propane sensor, platinum electrode is deposited in 600 .ANG. by ion beam sputtering on a tin oxide thin film synthesized by ionized beam of which the oxygen ion energy is 0 to 500 eV by using poly alumina. In case of a methane sensor, heat treatment at 500.degree. C. was performed for 1 hour in the air in order for the thin film to be stable at high operation temperature, while heat treatment was not performed in case of propane sensor. The sensor was manufactured by adding platinum or palladium thereto by argon ion beam sputtering. The thin film type tin oxide sensor according to the present invention exhibited an excellent selectivity of 47.4% even at low temperature of 150.degree. C. at a gas concentration of 3,000 ppm in case of the methane sensor, while a sensor having high electric sensitivity and selectivity as 93.4% was obtained in case of the propane sensor.
摘要翻译：本发明涉及用于检测甲烷气和丙烷气等烃类气体的传感器及其制造方法。在此过程中，通过离子束溅射，在硅晶片上用氩和氧气的混合气体（3：2）将SiO 2沉积在1μm。在丙烷传感器的情况下，铂电极通过离子束溅射在通过使用聚氧化铝的氧离子能为0至500eV的电离束合成的氧化锡薄膜上沉积在600范围内。在甲烷传感器的情况下，在空气中在500℃下进行热处理1小时，以使薄膜在高操作温度下稳定，而在丙烷传感器的情况下不进行热处理。通过氩离子束溅射将铂或钯加入其中来制造传感器。根据本发明的薄膜型氧化锡传感器，即使在甲烷传感器的情况下，即使在低温度为150℃，在3,000ppm的气体浓度下也显示出47.4％的优异选择性，而具有高电敏感性的传感器和在丙烷传感器的情况下获得93.4％的选择性。

7. 发明授权

US5965629A Process for modifying surfaces of materials, and materials having surfaces modified thereby 失效
标题翻译：用于改变材料表面的方法和具有由其修饰的表面的材料
公开(公告)号：US5965629A
公开(公告)日：1999-10-12
申请号：US835645
申请日：1997-04-11
申请人： Hyung Jin Jung , Seok Keun Koh , Won Kook Choi , Kyong Sop Han , Sik Sang Gam
发明人： Hyung Jin Jung , Seok Keun Koh , Won Kook Choi , Kyong Sop Han , Sik Sang Gam
IPC分类号： B29C35/08 , B29C59/16 , C03C17/23 , C03C23/00 , C04B41/00 , C04B41/80 , C08J7/12 , C08J3/28 , C08F2/46 , C08J7/18 , C09J5/02
CPC分类号： C04B41/009 , B29C59/16 , C03C17/23 , C03C23/0055 , C03C23/006 , C04B41/0027 , C04B41/80 , C08J7/12 , B29C2035/0872 , B29C2791/006 , C03C2217/211 , C03C2217/215 , C03C2217/23 , C03C2218/32
摘要： A process for modifying the surfaces of a polymer, ceramic, ITO or glass by irradiating energized ion particles onto the surfaces of the polymer, ceramic, ITO or glass, while blowing a reactive gas directly over the surface of the polymer, ceramic, ITO or glass under a vacuum condition, to decrease the wetting angle of the surface. The process can be widely used in the fields of polymers because it provides effects of increasing the spreading of aqueous dyestuffs, increasing adhesive strength with other materials and inhibition of light scattering by decreasing the wetting angle of the material surface.
摘要翻译：通过在聚合物，陶瓷，ITO或玻璃的表面上照射赋能的离子粒子，同时将反应性气体直接吹到聚合物，陶瓷，ITO或其表面上，来改性聚合物，陶瓷，ITO或玻璃的表面的方法玻璃在真空条件下，以减少表面的润湿角度。该方法可以广泛用于聚合物领域，因为它提供了增加水性染料的铺展性，增加与其它材料的粘合强度以及通过降低材料表面的润湿角抑制光散射的效果。

8. 发明授权

US5783641A Process for modifying surfaces of polymers, and polymers having surfaces modified by such process 失效
标题翻译：用于改性聚合物表面的方法和具有通过这种方法修饰的表面的聚合物
公开(公告)号：US5783641A
公开(公告)日：1998-07-21
申请号：US608054
申请日：1996-02-28
申请人： Seok-Keun Koh , Hyung-Jin Jung , Seok-Kyun Song , Won-Kook Choi , Young-Soo Yoon , Jun-Sik Cho
发明人： Seok-Keun Koh , Hyung-Jin Jung , Seok-Kyun Song , Won-Kook Choi , Young-Soo Yoon , Jun-Sik Cho
IPC分类号： C08J7/00 , B29C35/08 , B29C59/16 , C03B29/00 , C04B41/00 , C04B41/80 , C04B41/87 , C08J7/12 , C23C8/02 , C23C8/06 , C23C8/10 , C23C8/20 , C23C8/24 , C23C8/28 , C23C8/36 , C23C10/02 , C23C14/48 , C23C16/02 , D06P5/20 , H01L21/265 , C08K8/00
CPC分类号： C04B41/009 , B29C59/16 , C04B41/0027 , C04B41/80 , C08J7/12 , C23C10/02 , C23C8/02 , C23C8/10 , C23C8/20 , C23C8/24 , D06P5/20 , B29C2035/0872
摘要： The present invention relates to a process for modifying a polymer surface by irradiating ion particles with energy on a polymer surface, while blowing the reactive gas directly on the polymer surface under vacuum condition, to decrease the wetting angle of the polymer surface. The process for modifying the polymer surface according to the present invention can be widely used in the application fields of polymers because it provides effects of increasing the spreading of aqueous dyestuffs, increasing adhesive strength with other materials and inhibition of light scattering by decreasing the wetting angle of the polymer surface.
摘要翻译：本发明涉及通过在聚合物表面上将能量照射到聚合物表面上的离子粒子，同时在真空条件下将反应性气体直接吹到聚合物表面上来降低聚合物表面的润湿角度来改性聚合物表面的方法。根据本发明的改性聚合物表面的方法可以广泛用于聚合物的应用领域，因为它提供了增加水性染料的铺展性，增加与其它材料的粘合强度和通过降低润湿角抑制光散射的效果的聚合物表面。

9. 发明申请

US20080254219A1 Method And Device For Preparing Powder On Which Nano Metal, Alloy, And Ceramic Particles Are Uniformly Vacuum-Deposited 审中-公开
标题翻译：制备纳米金属，合金和陶瓷颗粒均匀真空沉积的粉末的方法和装置
公开(公告)号：US20080254219A1
公开(公告)日：2008-10-16
申请号：US12067901
申请日：2006-10-16
申请人： Seok Keun Koh , Young Whoan Beag , Jun Sik Cho , Jae Ho Joo , Young Gun Han , Jung Hwan Lee , Un Jung Yo
发明人： Seok Keun Koh , Young Whoan Beag , Jun Sik Cho , Jae Ho Joo , Young Gun Han , Jung Hwan Lee , Un Jung Yo
IPC分类号： C23C16/44
CPC分类号： B22F9/14 , B01J21/08 , B01J23/06 , B01J23/10 , B01J23/22 , B01J23/30 , B01J23/34 , B01J23/42 , B01J23/44 , B01J23/462 , B01J23/52 , B01J23/755 , B01J35/0013 , B01J37/0221 , B22F1/0018 , B22F2998/00 , B22F2998/10 , B82Y30/00 , C02F1/281 , C02F1/283 , C02F1/288 , C02F1/50 , C04B35/6281 , C04B35/62815 , C04B35/62842 , C04B35/62884 , C04B35/62892 , C04B2235/3217 , C04B2235/3232 , C04B2235/3244 , C04B2235/3272 , C04B2235/3418 , C23C14/223 , C23C16/4417 , B22F2201/11 , B22F2201/20 , B22F1/007 , B22F2202/01
摘要： The present invention relates to a method and device for preparing powder by depositing nano metal, alloy, ceramic particles that are excellent in size uniformity, on a surface of the powder that is a base, using a vacuum deposition method. In particular, the present invention provides a method and device for preparing the powder on which the nano metal, alloy, and ceramic particles of a very uniform size are deposited, by simultaneously performing deposition and agitation using an effective agitation means for solving a disadvantage of a conventional method where deposition and agitation are separately performed. Also, the present invention provides a method and device for preparing the powder on which nano particles are deposited, in which a nano characteristic is kept by preventing a coalescence phenomenon of nano particles even when a deposition time for increasing contents of the nano particles increases in their preparation.
摘要翻译：本发明涉及一种使用真空沉积法在基体粉末的表面上沉积尺寸均匀性优良的纳米金属，合金，陶瓷颗粒来制备粉末的方法和装置。特别地，本发明提供了一种制备粉末的方法和装置，其上沉积了非常均匀尺寸的纳米金属，合金和陶瓷颗粒，通过使用有效的搅拌装置同时进行沉积和搅拌来解决缺点分别进行沉积和搅拌的常规方法。此外，本发明提供一种制备其上沉积有纳米颗粒的粉末的方法和装置，其中通过防止纳米颗粒的聚结现象即使在增加纳米颗粒的含量的沉积时间增加时也保持纳米特性他们的准备。

10. 发明授权

US07178584B2 Plasma polymerization enhancement of surface of metal for use in refrigerating and air conditioning 有权
标题翻译：用于制冷和空调的金属表面的等离子体聚合增强
公开(公告)号：US07178584B2
公开(公告)日：2007-02-20
申请号：US10952904
申请日：2004-09-30
申请人： Seok-Keun Koh , Hyung Jin Jung , Won Kook Choi , Byung Ha Kang , Ki Hwan Kim , Sam Chul Ha , Cheol Hwan Kim , Sung-Chang Choi
发明人： Seok-Keun Koh , Hyung Jin Jung , Won Kook Choi , Byung Ha Kang , Ki Hwan Kim , Sam Chul Ha , Cheol Hwan Kim , Sung-Chang Choi
IPC分类号： F28F13/18
CPC分类号： C23C16/503 , B05D1/62 , B05D3/148 , B05D5/083 , C23C16/30 , C23C16/50 , C23C16/515 , C23C16/56 , F25B47/003 , F28F13/18 , F28F2245/02 , F28F2245/04
摘要： According to the present invention, there is provided a plasma polymerization surface modification of a metal for enhancing its applicability for use in refrigerating and air conditioning such as in constructing heat exchanges, by using a DC discharge plasma, comprising the steps of: (a) positioning an anode electrode which is substantially of metal to be surface-modified and a cathode electrode in a chamber, (b) maintaining a pressure in the chamber at a predetermined vacuum level, (c) blowing a reaction gas composed of an unsaturated aliphatic hydrocarbon monomer gas or fluorine-containing monomer and silicon containing monomer gas at a predetermined pressure and a non-polymerizable gas at a predetermined pressure into the chamber, and (d) applying a voltage to the electrodes in order to obtain a DC discharge, whereby to obtain a plasma consisting of positive and negative ions and radicals generated from the unsaturated aliphatic hydrocarbon monomer gas and the non-polymerizable gas, and then forming a polymer with hydrophilicity or hydrophobicity on the surface of the anode electrode by plasma deposition, and there is also provided a plasma polymerization surface modification of a metal for enhancing its applicability for use in refrigerating and air conditioning such as in constructing heat exchanges, by using an RF plasma.
摘要翻译：根据本发明，通过使用DC放电等离子体，提供了一种金属的等离子体聚合表面改性，用于增强其在制冷和空调中的应用，例如构建热交换，其包括以下步骤：（a）将基本上要被表面改性的金属的阳极电极和阴极电极放置在室中，（b）将室内的压力保持在预定的真空度，（c）吹送由不饱和脂族烃组成的反应气体单体气体或含氟单体和预定压力的含硅单体气体和以预定压力进入室的非可聚合气体，以及（d）向电极施加电压以获得DC放电，从而获得由不饱和脂肪烃单体气体和不可聚合气体产生的正离子和负离子和自由基组成的等离子体，然后通过等离子体沉积在阳极电极的表面上形成具有亲水性或疏水性的聚合物，并且还提供金属的等离子体聚合表面改性以增强其用于制冷和空调的适用性，例如构建热交换，通过使用RF等离子体。

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