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    • 4. 发明申请
    • A METHOD FOR MANUFACTURING A THIN FILM TRANSISTOR USING POLY SILICON
    • 使用聚硅制造薄膜晶体管的方法
    • WO2003052833A1
    • 2003-06-26
    • PCT/KR2002/000131
    • 2002-01-29
    • SAMSUNG ELECTRONICS CO., LTD.SONG, Jean, HoCHOI, Joon, HooCHOI, Beom-RakKANG, Myung-KooKANG, Sook-Young
    • SONG, Jean, HoCHOI, Joon, HooCHOI, Beom-RakKANG, Myung-KooKANG, Sook-Young
    • H01L29/786
    • H01L29/66757H01L29/78675
    • A manufacturing method of a thin film transistor. An amorphous silicon thin film is formed on an insulating substrate, and is crystallized by a lateral solidification process with illumination of laser beams into the amorphous silicon thin film to form a polysilicon thin film. Next, protrusion portions protruding from the surface of the polysilicon thin film are removed by plasma dry-etching using a gas mixture including Cl 2 , SF 6 and Ar at the ratio of 3:1:2 to smooth the surface of the polysilicon thin film, and the semiconductor layer is formed by patterning the polysilicon thin film. A gate insulating film covering the semiconductor layer is formed and a gate electrode is formed on the gate insulating film opposite the semiconductor layer. A source region and a drain region opposite each other with respect to the gate electrode are formed by implanting impurities into I the semiconductor layer and a source electrode and drain electrode are forined to be electrically connected to the source region and drain region.
    • 薄膜晶体管的制造方法。 在绝缘基板上形成非晶硅薄膜,并通过横向固化工艺使激光束照射到非晶硅薄膜中而形成多晶硅薄膜而结晶。 接下来,通过使用包含Cl 2,SF 6和Ar的气体混合物以3:1:2的比例通过等离子体干法蚀刻去除从多​​晶硅薄膜的表面突出的突出部分,以平滑多晶硅薄膜的表面,并且 通过图案化多晶硅薄膜形成半导体层。 形成覆盖半导体层的栅极绝缘膜,并且在与半导体层相对的栅极绝缘膜上形成栅电极。 通过将杂质注入到半导体层中而形成源极区域和相对于栅极电极相对的漏极区域,源电极和漏极电极被电连接到源极区域和漏极区域。