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1. 发明授权

US08941968B2 Heated electrostatic chuck including mechanical clamp capability at high temperature 有权
标题翻译：加热静电卡盘包括高温下的机械夹紧能力
公开(公告)号：US08941968B2
公开(公告)日：2015-01-27
申请号：US13152735
申请日：2011-06-03
申请人： Perry J. I. Justesen , Allan D. Weed , William Davis Lee , Ashwin M. Purohit , Robert D. Rathmell , Gary M. Cook
发明人： Perry J. I. Justesen , Allan D. Weed , William Davis Lee , Ashwin M. Purohit , Robert D. Rathmell , Gary M. Cook
IPC分类号： H01L21/687 , H01L21/683
CPC分类号： H01L21/68728 , H01L21/6831
摘要： An electrostatic clamp is provided, having a clamping plate, wherein a clamping surface of the clamping plate is configured to contact the workpiece. A voltage applied to one or more electrodes selectively electrostatically attracts the workpiece to the clamping surface. One or more auxiliary clamping members are further provided wherein the one or more auxiliary clamping members are configured to selectively secure at least a portion of the workpiece to the clamping surface. A temperature monitoring device configured to determine a temperature of the workpiece is provided, and a controller is configured to selectively clamp the workpiece to the clamping surface via a control of the voltage to the one or more electrodes and the one or more auxiliary clamping members, based, at least in part, on the temperature of the workpiece.
摘要翻译：提供了一种具有夹板的静电夹具，其中夹持板的夹紧表面构造成接触工件。施加到一个或多个电极的电压选择性地静电将工件吸引到夹紧表面。还提供了一个或多个辅助夹紧构件，其中一个或多个辅助夹紧构件构造成选择性地将至少一部分工件固定到夹紧表面。提供了一种被配置为确定工件的温度的温度监视装置，并且控制器被配置为经由对一个或多个电极和一个或多个辅助夹紧构件的电压的控制来选择性地将工件夹紧到夹紧表面，至少部分地基于工件的温度。

2. 发明申请

US20080067436A1 System for magnetic scanning and correction of an ion beam 有权
标题翻译：用于磁扫描和离子束校正的系统
公开(公告)号：US20080067436A1
公开(公告)日：2008-03-20
申请号：US11523148
申请日：2006-09-19
申请人： Bo H. Vanderberg , Robert D. Rathmell , Edward C. Eisner
发明人： Bo H. Vanderberg , Robert D. Rathmell , Edward C. Eisner
IPC分类号： H01J37/08
CPC分类号： H01J37/026 , H01J37/1475 , H01J37/3171 , H01J2237/004 , H01J2237/0041 , H01J2237/055
摘要： A magnetic scanner employs constant magnetic fields to mitigate zero field effects. The scanner includes an upper pole piece and a lower pole piece that generate an oscillatory time varying magnetic field across a path of an ion beam and deflect the ion beam in a scan direction. A set of entrance magnets are positioned about an entrance of the scanner and generate a constant entrance magnetic field across the path of the ion beam. A set of exit magnets are positioned about an exit of the scanner and generate a constant exit magnetic field across the path of the ion beam.
摘要翻译：磁扫描仪采用恒定磁场来减轻零场效应。该扫描器包括上极片和下极片，其在离子束的路径上产生振荡时变磁场并使扫描方向偏转离子束。一组入口磁体围绕扫描器的入口定位，并且在离子束的路径上产生恒定的入射磁场。一组出口磁体围绕扫描器的出口定位，并在离子束的路径上产生恒定的出射磁场。

3. 发明授权

US07022984B1 Biased electrostatic deflector 有权
标题翻译：偏置静电导流板
公开(公告)号：US07022984B1
公开(公告)日：2006-04-04
申请号：US11047238
申请日：2005-01-31
申请人： Robert D. Rathmell , Bo H. Vanderberg , Youngzhang Huang
发明人： Robert D. Rathmell , Bo H. Vanderberg , Youngzhang Huang
IPC分类号： H01J40/00 , H01J47/00 , G21G51/00
CPC分类号： H01J37/3171 , H01J37/05 , H01J2237/053 , H01J2237/303 , H01J2237/31705
摘要： Angular electrostatic filters and methods of filtering that remove energy contaminants from a ribbon shaped ion beam are disclosed. An angular electrostatic filter comprises a top deflection plate and a bottom deflection plate extending from an entrance side to an exit side of the filter. The bottom deflection plate is substantially parallel to the top deflection plate and includes an angle portion. An entrance focus electrode is positioned on the entrance side of the filter and an exit focus electrode is positioned on the exit side of the filter and both serve to focus the ion beam. Edge electrodes are positioned between the top and bottom deflection plates and at sides of the filter to mitigate edge effects. A negative bias is also applied to the top and bottom plates to mitigate space charge by elevating the beam energy.
摘要翻译：公开了角膜静电过滤器和从带状离子束去除能量污染物的过滤方法。角度静电过滤器包括顶部偏转板和从过滤器的入口侧到出口侧延伸的底部偏转板。底部偏转板基本上平行于顶部偏转板并且包括角部分。入口聚焦电极位于过滤器的入口侧，出射聚焦电极位于过滤器的出口侧，并且两者都用于聚焦离子束。边缘电极位于顶部和底部偏转板之间以及位于过滤器侧面以减轻边缘效应。顶板和底板也施加负偏压，以通过提升光束能量来减轻空间电荷。

4. 发明授权

US06881966B2 Hybrid magnetic/electrostatic deflector for ion implantation systems 有权
标题翻译：用于离子注入系统的混合磁/静电偏转器
公开(公告)号：US06881966B2
公开(公告)日：2005-04-19
申请号：US10461702
申请日：2003-06-13
申请人： Victor M. Benveniste , Robert D. Rathmell , Yongzhang Huang
发明人： Victor M. Benveniste , Robert D. Rathmell , Yongzhang Huang
IPC分类号： H01J27/18 , H01J37/00 , H01J37/05 , H01J37/147 , H01J37/30 , H01J37/317
CPC分类号： H01J37/3171 , H01J37/05 , H01J37/147 , H01J2237/057
摘要： A magnetic deflector for an ion beam is disclosed and comprises first and second coils. The coils are positioned above and below the beam, respectively, and extend along a width of the beam. Current passes through the coils to generate a magnetic field therebetween that is generally perpendicular to a direction of travel of the beam along substantially the entire width thereof. In another aspect of the invention, a method of deflecting a beam prior to implantation into a workpiece is disclosed. The method includes determining one or more properties associated with the beam and selectively activating one of a magnetic deflection module and an electrostatic deflection module based on the determination.
摘要翻译：公开了用于离子束的磁偏转器，并且包括第一和第二线圈。线圈分别位于梁的上方和下方，并沿着梁的宽度延伸。电流通过线圈以产生它们之间的磁场，其大致垂直于梁的大致整个宽度的行进方向。在本发明的另一方面，公开了一种在植入植入工件之前偏转光束的方法。该方法包括确定与光束相关联的一个或多个属性，并且基于该确定选择性地激活磁偏转模块和静电偏转模块中的一个。

5. 发明授权

US06534775B1 Electrostatic trap for particles entrained in an ion beam 失效
标题翻译：用于夹带在离子束中的颗粒的静电捕集器
公开(公告)号：US06534775B1
公开(公告)日：2003-03-18
申请号：US09654380
申请日：2000-09-01
申请人： Eric R. Harrington , Victor M. Benveniste , Michael A. Graf , Robert D. Rathmell
发明人： Eric R. Harrington , Victor M. Benveniste , Michael A. Graf , Robert D. Rathmell
IPC分类号： H01J3730
CPC分类号： H01J37/3171 , H01J3/40 , H01J37/026 , H01J37/3002 , H01J2237/004 , H01J2237/022 , H01J2237/31705
摘要： A system for inhibiting the transport of contaminant particles with an ion beam includes a pair of electrodes that provide opposite electric fields through which the ion beam travels. A particle entrained in the ion beam is charged to a polarity matching the polarity of ion beam when traveling through a first of the electric fields. The downstream electrode provides another electric field for repelling the positively charged particle away from the direction of beam travel.
摘要翻译：用于抑制用离子束输送污染物颗粒的系统包括一对电极，其提供相反的电场，离子束通过该电场传播。夹带在离子束中的颗粒在穿过第一电场时被充电到与离子束的极性相匹配的极性。下游电极提供另一个电场，用于驱除带正电的粒子远离光束移动的方向。

6. 发明授权

US4816693A Apparatus and method for uniform ion dose control 失效
标题翻译：用于均匀离子剂量控制的装置和方法
公开(公告)号：US4816693A
公开(公告)日：1989-03-28
申请号：US88138
申请日：1987-08-21
申请人： Robert D. Rathmell
发明人： Robert D. Rathmell
IPC分类号： H01J37/317
CPC分类号： H01J37/3171
摘要： A uniform ion implantation dose control apparatus controls the implantation of ion particles onto at least one wafer mounted on a rotating disk in the pathway of the ion particle beam. A grounded scanning wire is repeatedly moved across the beam to produce an emission of secondary electrons which is linearly proportional to the beam particle current. The secondary electrons emitted are collected and formed into a current I.sub.s by a collector electrode. Portions of the current I.sub.s on the collector electrode are sampled. While the vacuum conditions within the beamline are good, the beams electrical current I.sub.FC is measured and the collector current I.sub.s sample is calibrated therewith so that when the beamline vacuum becomes a high pressure vacuum, additional collector current I.sub.s samples may be utilized to determine a theoretical beam current I which is a function of the beam particle current I.sub.p =I/q. This theoretical beam current I is utilized to move the rotating disk along a radial pathway perpendicular to the beam pathway at a velocity V which is proportional to the theoretical beam current I.
摘要翻译：均匀的离子注入剂量控制装置控制离子粒子束在离子粒子束通路中安装在旋转盘上的至少一个晶片上的离子粒子的注入。接地的扫描线重复地移动穿过光束，以产生与束粒子电流成线性比例的二次电子的发射。发射的二次电子通过集电极收集并形成电流Is。对集电极上的电流部分进行采样。虽然光束线内的真空条件良好，但是测量了光束电流IFC，并且利用其校准集电极电流Is采样，使得当光束线真空变为高压真空时，可以使用附加的集电极电流Is样本来确定理论光束电流I是光束粒子电流Ip = I / q的函数。该理论射束电流I被用来沿与垂直于光束通路的径向路径以与理论射束电流I成比例的速度V移动旋转盘。

7. 发明申请

US20110299217A1 HEATED ELECTROSTATIC CHUCK INCLUDING MECHANICAL CLAMP CAPABILITY AT HIGH TEMPERATURE 有权
标题翻译：加热静电夹钳，包括机械夹紧能力在高温下
公开(公告)号：US20110299217A1
公开(公告)日：2011-12-08
申请号：US13152735
申请日：2011-06-03
申请人： Perry J.I. Justesen , Allan D. Weed , William Davis Lee , Ashwin M. Purohit , Robert D. Rathmell , Gary M. Cook
发明人： Perry J.I. Justesen , Allan D. Weed , William Davis Lee , Ashwin M. Purohit , Robert D. Rathmell , Gary M. Cook
IPC分类号： H01L21/687
CPC分类号： H01L21/68728 , H01L21/6831
摘要： An electrostatic clamp is provided, having a clamping plate, wherein a clamping surface of the clamping plate is configured to contact the workpiece. A voltage applied to one or more electrodes selectively electrostatically attracts the workpiece to the clamping surface. One or more auxiliary clamping members are further provided wherein the one or more auxiliary clamping members are configured to selectively secure at least a portion of the workpiece to the clamping surface. A temperature monitoring device configured to determine a temperature of the workpiece is provided, and a controller is configured to selectively clamp the workpiece to the clamping surface via a control of the voltage to the one or more electrodes and the one or more auxiliary clamping members, based, at least in part, on the temperature of the workpiece.
摘要翻译：提供了一种具有夹板的静电夹具，其中夹持板的夹紧表面构造成接触工件。施加到一个或多个电极的电压选择性地静电将工件吸引到夹紧表面。还提供了一个或多个辅助夹紧构件，其中一个或多个辅助夹紧构件构造成选择性地将至少一部分工件固定到夹紧表面。提供了一种被配置为确定工件的温度的温度监视装置，并且控制器被配置为经由对一个或多个电极和一个或多个辅助夹紧构件的电压的控制来选择性地将工件夹紧到夹紧表面，至少部分地基于工件的温度。

8. 发明授权

US06476399B1 System and method for removing contaminant particles relative to an ion beam 有权
标题翻译：相对于离子束去除污染物颗粒的系统和方法
公开(公告)号：US06476399B1
公开(公告)日：2002-11-05
申请号：US09654379
申请日：2000-09-01
申请人： Eric R. Harrington , Victor M. Benveniste , Michael A. Graf , Robert D. Rathmell
发明人： Eric R. Harrington , Victor M. Benveniste , Michael A. Graf , Robert D. Rathmell
IPC分类号： H01J3730
CPC分类号： H01J37/026 , H01J37/3002 , H01J37/3171 , H01J2237/004 , H01J2237/022 , H01J2237/31705
摘要： A system for inhibiting the transport of contaminant particles with an ion beam includes a particle charging system for charging particles within a region through which the ion beam travels. An electric field is generated downstream relative to the charged region so as to urge charged particles away from a direction of travel for the ion beam.
摘要翻译：用于抑制用离子束输送污染物颗粒的系统包括用于在离子束行进的区域内填充颗粒的颗粒装料系统。在相对于带电区域的下游产生电场，以便使带电粒子远离离子束的行进方向。

9. 发明授权

US08797706B2 Heated annulus chuck 有权
标题翻译：加热环形卡盘
公开(公告)号：US08797706B2
公开(公告)日：2014-08-05
申请号：US13154836
申请日：2011-06-07
申请人： William Davis Lee , Gary M. Cook , Perry J. I. Justesen , Ashwin M. Purohit , Robert D. Rathmell , Allan D. Weed
发明人： William Davis Lee , Gary M. Cook , Perry J. I. Justesen , Ashwin M. Purohit , Robert D. Rathmell , Allan D. Weed
IPC分类号： H01L21/687
CPC分类号： H01L21/68728 , H01L21/6831
摘要： A clamping device and method is provided for securing first and second workpieces having different sizes to a clamping device and providing thermal conditioning thereto. An electrostatic clamping plate having a diameter associated with the first workpiece surrounds a central portion of the clamp. A non-electrostatic central portion provides a heater within the annulus, wherein the central portion has a diameter associated with the second workpiece. A workpiece carrier is provided, wherein the workpiece carrier is configured to hold the second workpiece above the heater, and wherein a diameter of the workpiece carrier is associated with the electrostatic clamping plate annulus. The annulus selectively electrostatically clamps the workpiece carrier or a circumferential portion of the first workpiece to its clamping surface, therein selectively maintaining a position of the first or second workpiece with respect to the annulus or non-electrostatic central portion.
摘要翻译：提供一种夹紧装置和方法，用于将具有不同尺寸的第一和第二工件固定到夹紧装置并且向其提供热调节。具有与第一工件相关联的直径的静电夹持板围绕夹具的中心部分。非静电中心部分在环形空间内提供加热器，其中中心部分具有与第二工件相关联的直径。提供了工件载体，其中工件载体构造成将第二工件保持在加热器上方，并且其中工件载体的直径与静电夹持板环相关联。环形空间选择性地将工件载体或第一工件的圆周部分夹持到其夹紧表面，其中选择性地保持第一或第二工件相对于环形或非静电中心部分的位置。

10. 发明申请

US20110299218A1 HEATED ANNULUS CHUCK 有权
标题翻译：加热肛门栓
公开(公告)号：US20110299218A1
公开(公告)日：2011-12-08
申请号：US13154836
申请日：2011-06-07
申请人： William Davis Lee , Gary M. Cook , Perry J.I. Justesen , Ashwin M. Purohit , Robert D. Rathmell , Allan D. Weed
发明人： William Davis Lee , Gary M. Cook , Perry J.I. Justesen , Ashwin M. Purohit , Robert D. Rathmell , Allan D. Weed
IPC分类号： H01L21/687
CPC分类号： H01L21/68728 , H01L21/6831
摘要： A clamping device and method is provided for securing first and second workpieces having different sizes to a clamping device and providing thermal conditioning thereto. An electrostatic clamping plate having a diameter associated with the first workpiece surrounds a central portion of the clamp. A non-electrostatic central portion provides a heater within the annulus, wherein the central portion has a diameter associated with the second workpiece. A workpiece carrier is provided, wherein the workpiece carrier is configured to hold the second workpiece above the heater, and wherein a diameter of the workpiece carrier is associated with the electrostatic clamping plate annulus. The annulus selectively electrostatically clamps the workpiece carrier or a circumferential portion of the first workpiece to its clamping surface, therein selectively maintaining a position of the first or second workpiece with respect to the annulus or non-electrostatic central portion.
摘要翻译：提供一种夹紧装置和方法，用于将具有不同尺寸的第一和第二工件固定到夹紧装置并且向其提供热调节。具有与第一工件相关联的直径的静电夹持板围绕夹具的中心部分。非静电中心部分在环形空间内提供加热器，其中中心部分具有与第二工件相关联的直径。提供了工件载体，其中工件载体构造成将第二工件保持在加热器上方，并且其中工件载体的直径与静电夹持板环相关联。环形空间选择性地将工件载体或第一工件的圆周部分夹持到其夹紧表面，其中选择性地保持第一或第二工件相对于环形或非静电中心部分的位置。

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