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    • 2. 发明授权
    • Low expansion metal-ceramic composite bodies, and methods for making same
    • 低膨胀金属 - 陶瓷复合体及其制造方法
    • US07169465B1
    • 2007-01-30
    • US10073818
    • 2002-02-11
    • Prashant G. KarandikarJai R. SinghClarence A. Andersson
    • Prashant G. KarandikarJai R. SinghClarence A. Andersson
    • B32B9/00
    • C22C47/025B22F3/1103B22F2003/1106B22F2998/00B22F2999/00B82Y10/00B82Y30/00C22C47/08C22C49/14C22C2204/00H01L23/142H01L2924/0002H01L2924/09701Y10T428/249953Y10T428/249964Y10T428/249967Y10T428/24997B22F3/1112C22C47/04C22C47/06B22F3/11B22F2201/013B22F2201/02H01L2924/00
    • A low CTE metal-ceramic composite material featuring carbon fibers reinforcing a matrix featuring silicon metal or silicon alloy. The fibers have a low coefficient of thermal expansion (CTE) in the axial direction, and preferably negative. The principles of making Si/SiC composites can be adapted to produce the instant Si matrix composites. The CTE of the composite body depends not only upon the relative CTE's of the fibers and matrix, and their relative amounts (e.g., loadings), but also upon the relative elastic moduli of the fibers and matrix. Thus, Si/SiC matrices produced by a reaction-bonding process inherently possess low CTE, but the instant inventors prefer to make such composites having relatively large fractions of unreacted silicon, thereby driving composite CTE lower still. Here, the carbon fibers are protected from reaction with the silicon infiltrant with one or more materials disposed between the fibers and the infiltrant. Providing at least a degree of toughness or impact resistance can also be realized in these composites. Laminates produce Isotropic or quasi-isotropic properties in the composite body can be realized by, for example, providing the fibers in the form of cross-plied laminates featuring the fibers in parallel or woven arrays.
    • 低CTE金属陶瓷复合材料,其特征在于碳纤维增强了具有硅金属或硅合金的基体。 纤维在轴向上的热膨胀系数(CTE)优选为负。 制备Si / SiC复合材料的原理可以适用于生产即时Si基复合材料。 复合体的CTE不仅取决于纤维和基体的相对CTE以及它们的相对量(例如载荷),而且取决于纤维和基体的相对弹性模量。 因此,通过反应连接工艺产生的Si / SiC基体固有地具有低CTE,但是本发明人优选制备具有相对大的未反应硅的分数的复合材料,从而驱动复合CTE较低。 这里,保护碳纤维免受与硅浸润剂的反应,其中一种或多种材料设置在纤维和浸润剂之间。 提供至少一定程度的韧性或抗冲击性也可以在这些复合材料中实现。 通过例如提供以平行或编织阵列的纤维为特征的交叉层叠体的形式的纤维,可以实现层合体在复合体中产生各向同性或准各向同性的特性。
    • 3. 发明授权
    • Method for brazing ceramic-containing bodies, and articles made thereby
    • 钎焊含陶瓷体的方法及由此制成的制品
    • US07270885B1
    • 2007-09-18
    • US10990279
    • 2004-11-15
    • Prashant G. KarandikarMarlene Rossing, legal representative
    • Barry R. Rossing, deceased
    • B32B9/00
    • B23K35/286B23K2101/34B23K2103/166B23K2103/18B23K2103/52C04B37/006C04B37/026C04B2237/121C04B2237/16C04B2237/36C04B2237/365C04B2237/366C04B2237/60H01L21/6831
    • Ceramic-containing bodies can be bonded to other ceramic-containing bodies, or to metals or metal-containing bodies, by way of an aluminum-silicon brazing alloy. Such alloys feature high thermal conductivity and a melting range intermediate to Cu—Sil and Au—Si. By metallizing the surface of an aluminum- or silicon-containing ceramic body, for example, with silicon or aluminum, the formation of deleterious intermetallic phases at the brazing interface is avoided. This technique is particularly useful for joining reaction-bonded silicon carbide (RBSC) composite bodies, and particularly such composite bodies that contain appreciable amounts of aluminum as a metallurgical modification of the residual silicon phase. Interestingly, when the RBSC body contains minor amounts of the aluminum alloying constituent, or none, the metallization layer is not required. The resulting bonded structures have utility as mirrors, as packaging for electronics, and in semiconductor lithography equipment, e.g., as electrostatic chucks for supporting a silicon wafer during the lithography process.
    • 含有陶瓷的物体可以通过铝硅钎焊合金与其它含陶瓷体或金属或含金属体结合。 这种合金具有高导热性和中间至Cu-Sil和Au-Si的熔化范围。 通过例如用硅或铝将含铝或硅的陶瓷体的表面金属化,可以避免在钎焊界面处形成有害的金属间相。 这种技术对于接合反应粘合的碳化硅(RBSC)复合体,特别是含有可观量的铝作为残余硅相的冶金改性的复合体特别有用。 有趣的是,当RBSC体含有少量的铝合金成分时,或者不含有金属化层。 所得到的结合结构具有作为反射镜的用途,作为用于电子器件的封装以及半导体光刻设备,例如用于在光刻工艺期间支撑硅晶片的静电卡盘。