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1. 发明授权

US08194386B2 Arrangement of MEMS devices having series coupled capacitors 有权
标题翻译：具有串联耦合电容器的MEMS器件的布置
公开(公告)号：US08194386B2
公开(公告)日：2012-06-05
申请号：US12158668
申请日：2006-12-18
申请人： Peter G. Steeneken , Kevin R. Boyle , Antonius J. M. De Graauw , Theodoor G. S. M. Rijks , Jozef T. M. Van Beek
发明人： Peter G. Steeneken , Kevin R. Boyle , Antonius J. M. De Graauw , Theodoor G. S. M. Rijks , Jozef T. M. Van Beek
IPC分类号： H01G5/00
CPC分类号： H01G5/38
摘要： A tuneable capacitor arrangement for RF use has two series coupled MEMS variable capacitors (C1,C2;C4,C5,C6,C7), varied according to a control signal. The series coupling enables the capacitor to withstand a higher voltage since this is shared by the individual capacitors in a series coupled arrangement. An increase in size of electrodes for each capacitor is compensated by a reduction in size of the springs supporting movable electrodes. These springs can have a larger stiffness value since the capacitance is larger. This means shorter springs, which can also result in a reduction in problems of stiction, resistance, and slow switching. The capacitances have a fixed and a movable electrode, with the RF signal coupled to the fixed electrode to avoid the springs needing to carry an RF signal. This can reduce the problems of inductance and resistance in the springs.
摘要翻译：用于RF使用的可调谐电容器布置具有根据控制信号而变化的两个串联耦合的MEMS可变电容器（C1，C2; C4，C5，C6，C7）。串联耦合使得电容器能够承受更高的电压，因为这是由串联耦合布置的各个电容器共享的。通过减少支撑可动电极的弹簧的尺寸来补偿每个电容器的电极尺寸的增加。这些弹簧可以具有较大的刚度值，因为电容较大。这意味着较短的弹簧，这也可能导致静电，电阻和慢速切换的问题的减少。电容具有固定和可移动电极，RF信号耦合到固定电极以避免弹簧需要携带RF信号。这可以减少弹簧中电感和电阻的问题。

2. 发明授权

US08367215B2 Radio-frequency microelectromechanical systems and method of manufacturing such systems 有权
标题翻译：射频微机电系统及其制造方法
公开(公告)号：US08367215B2
公开(公告)日：2013-02-05
申请号：US10578027
申请日：2004-10-26
申请人： Jacob M. J. Den Toonder , Auke R. Van Dijken , Theodoor G. S. M. Rijks , Jozef T. M. Van Beek
发明人： Jacob M. J. Den Toonder , Auke R. Van Dijken , Theodoor G. S. M. Rijks , Jozef T. M. Van Beek
IPC分类号： B32B15/00
CPC分类号： B81B3/0072 , B81B2203/0118 , H01H1/0036 , H01H59/0009 , H01H2001/0052 , Y10T428/31678
摘要： An RF MEMS device comprising one or more free-standing thin films configured for motion in response to actuation or stimulation, the one or more thin films comprising an alloy of aluminum and magnesium, and optionally one or more further materials. The resultant thin film has improved hardness and reduced creep relative to conventional thin films.
摘要翻译： RF MEMS器件包括被配置为响应于致动或刺激而运动的一个或多个独立的薄膜，所述一个或多个薄膜包括铝和镁的合金以及任选的一种或多种其它材料。所得薄膜相对于常规薄膜具有改善的硬度和降低的蠕变。

3. 发明授权

US08580596B2 Front end micro cavity 有权
标题翻译：前端微腔
公开(公告)号：US08580596B2
公开(公告)日：2013-11-12
申请号：US12421935
申请日：2009-04-10
申请人： Petrus H. C. Magnee , Jan Jacob Koning , Jozef T. M. Van Beek
发明人： Petrus H. C. Magnee , Jan Jacob Koning , Jozef T. M. Van Beek
IPC分类号： H01L21/00
CPC分类号： B81C1/00246 , B81B2201/0271 , B81B2207/015
摘要： The present invention relates to a method of forming a micro cavity having a micro electrical mechanical system (MEMS) in a process, such as a CMOS process. MEMS resonators are being intensively studied in many research groups and some first products have recently been released. This type of device offers a high Q-factor, small size, high level of integration and potentially low cost. These devices are expected to replace bulky quartz crystals in high-precision oscillators and may also be used as RF filters. The oscillators can be used in time-keeping and frequency reference applications such as RF modules in mobile phones, devices containing blue-tooth modules and other digital and telecommunication devices.
摘要翻译：本发明涉及在诸如CMOS工艺的工艺中形成具有微电机械系统（MEMS）的微腔的方法。许多研究组正在密切研究MEMS谐振器，最近发布了一些首批产品。这种类型的器件具有高Q因子，小尺寸，高集成度和潜在的低成本。这些器件有望在高精度振荡器中代替笨重的石英晶体，也可以用作RF滤波器。振荡器可用于时移和频率参考应用，如移动电话中的RF模块，包含蓝牙模块的设备和其他数字和电信设备。

4. 发明授权

US08058952B2 MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator 有权
标题翻译： MEMS谐振器，其制造方法和MEMS振荡器
公开(公告)号：US08058952B2
公开(公告)日：2011-11-15
申请号：US12158986
申请日：2006-12-18
申请人： Jozef T. M. Van Beek , Bart Van Velzen
发明人： Jozef T. M. Van Beek , Bart Van Velzen
IPC分类号： H03H9/24 , H03H9/125 , H03H3/007 , H03B5/30
CPC分类号： H03H9/02448 , H03H3/0072 , H03H9/2447 , H03H2009/02496 , Y10T29/42
摘要： The invention relates to a MEMS resonator comprising a first electrode, a movable element (48) comprising a second electrode, the movable element (48) at least being movable towards the first electrode, the first electrode and the movable element (48) being separated by a gap (46, 47) having sidewalls. According to the invention, the MEMS resonator is characterized in that the gap (46, 47) has been provided with a dielectric layer (60) on at least one of the sidewalls.
摘要翻译：本发明涉及一种MEMS谐振器，其包括第一电极，包括第二电极的可移动元件（48），所述可移动元件（48）至少可朝向所述第一电极移动，所述第一电极和所述可移动元件（48）被分离通过具有侧壁的间隙（46,47）。根据本发明，MEMS谐振器的特征在于间隙（46,47）在至少一个侧壁上设置有介电层（60）。

5. 发明授权

US07847649B2 MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator 有权
标题翻译： MEMS谐振器，其制造方法和MEMS振荡器
公开(公告)号：US07847649B2
公开(公告)日：2010-12-07
申请号：US12158985
申请日：2006-12-18
申请人： Jozef T. M. Van Beek , Hans-Peter Loebl , Frederik W. M. Vanhelmont
发明人： Jozef T. M. Van Beek , Hans-Peter Loebl , Frederik W. M. Vanhelmont
IPC分类号： H03B5/30
CPC分类号： H03H9/02448 , H03H3/0072 , H03H9/2447 , H03H2009/02496 , Y10T29/42
摘要： The invention relates to a MEMS resonator comprising a movable element (48), the movable element (48) comprising a first part (A) having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and the movable element (48) further comprising a second part (B) having a second Young's modulus and a second temperature coefficient of the second. Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient, at least, at operating conditions of the MEMS resonator, and a cross-sectional area of the first part (A) and the cross-sectional area of the second part (B) being such that the absolute temperature coefficient of the Young's modulus of the first part (A) multiplied by the cross-sectional area of the first part (A) does not deviate more than 20% from the absolute temperature coefficient of the Young's modulus of the second part (B) multiplied by the cross-sectional area of the second part (B), the cross-sectional areas being measured locally and perpendicularly to the movable element (48).
摘要翻译：本发明涉及一种包括可移动元件（48）的MEMS谐振器，所述可移动元件（48）包括具有第一杨氏模量和第一杨氏模量的第一温度系数的第一部分（A）和可移动元件（48））还包括具有第二杨氏模量和第二部分的第二温度系数的第二部分（B）。至少在MEMS谐振器的操作条件下，第二温度系数与第一温度系数的符号相反的杨氏模量，以及第一部分（A）和横截面的横截面积第二部分（B）的面积使得第一部分（A）的杨氏模量的绝对温度系数乘以第一部分（A）的横截面积不超过绝对值的20％第二部分（B）的杨氏模量的温度系数乘以第二部分（B）的横截面面积，横截面面积被局部地和垂直于可移动元件（48）测量。

6. 发明授权

US08493157B2 MEMS resonator for filtering and mixing 有权
标题翻译：用于过滤和混合的MEMS谐振器
公开(公告)号：US08493157B2
公开(公告)日：2013-07-23
申请号：US12999716
申请日：2009-06-18
申请人： Peter Gerard Steeneken , Jozef T. M. Van Beek , Klaus Reimann
发明人： Peter Gerard Steeneken , Jozef T. M. Van Beek , Klaus Reimann
IPC分类号： H03H9/46 , H01L41/107
CPC分类号： H03D7/00 , H03H9/02259 , H03H9/02275 , H03H9/2452 , H03H9/465 , H03H2009/02496 , H03H2009/2442
摘要： A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode.
摘要翻译：一种操作微机电系统的方法，包括：谐振器; 致动电极; 以及第一检测电极，以过滤和混合多个信号。该方法包括向致动电极施加第一交流电压信号，其中产生具有大于并包括谐振器的机械频率响应的谐振带宽的频率带宽的致动力，并且其中谐振器的位移为产生的，其被机械频率响应过滤，并且改变第一检测电极的电特性的值。该方法还包括向第一检测电极施加第二交流电压信号，其中第二电压信号与变化值混合以产生第一交流信号。在第一检测电极处检测第一交流信号。

7. 发明授权

US08269578B2 Resonator having a sideways oscillation compressing one connector while extending another 有权
标题翻译：具有侧向振荡的谐振器压缩一个连接器同时延伸另一个连接器
公开(公告)号：US08269578B2
公开(公告)日：2012-09-18
申请号：US12743355
申请日：2008-11-12
申请人： Kim Phan Le , Jozef T. M. Van Beek
发明人： Kim Phan Le , Jozef T. M. Van Beek
IPC分类号： H03H9/24 , H03H9/09 , H03H9/125 , H03H9/48
CPC分类号： H03H9/02244 , H03H9/02259 , H03H9/2463 , H03H9/505 , H03H2009/02496 , H03H2009/2442
摘要： A resonator comprises a resonator mass (34), a first connector (30) on a first side of the mass connected between the resonator mass and a first fixed mounting and a second connector (32) on a second, opposite, side of the mass connected between the resonator mass and a second fixed mounting. Drive means drives the mass (34) into a resonant mode in which it oscillates in a sideways direction, thereby compressing one of the first and second connectors while extending the other of the first and second connectors.
摘要翻译：谐振器包括谐振器块（34），连接在谐振器块与第一固定安装件之间的质量第一侧的第一连接器（30）和质量的第二相对侧上的第二连接器（32）连接在谐振器质量块和第二固定安装件之间。驱动装置驱动质量块（34）进入谐振模式，其中它在侧向振荡，从而压缩第一和第二连接器中的一个，同时延伸第一和第二连接器中的另一个。

8. 发明申请

US20110102095A1 MEMS RESONATOR FOR FILTERING AND MIXING 有权
标题翻译：用于滤波和混合的MEMS谐振器
公开(公告)号：US20110102095A1
公开(公告)日：2011-05-05
申请号：US12999716
申请日：2009-06-18
申请人： Peter Gerard Steeneken , Jozef T. M. Van Beek , Klaus Reimann
发明人： Peter Gerard Steeneken , Jozef T. M. Van Beek , Klaus Reimann
IPC分类号： H03C1/46
CPC分类号： H03D7/00 , H03H9/02259 , H03H9/02275 , H03H9/2452 , H03H9/465 , H03H2009/02496 , H03H2009/2442
摘要： A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode.
摘要翻译：一种操作微机电系统的方法，包括：谐振器; 致动电极; 以及第一检测电极，以过滤和混合多个信号。该方法包括向致动电极施加第一交流电压信号，其中产生具有大于并包括谐振器的机械频率响应的谐振带宽的频率带宽的致动力，并且其中谐振器的位移为产生的，其被机械频率响应过滤，并且改变第一检测电极的电特性的值。该方法还包括向第一检测电极施加第二交流电压信号，其中第二电压信号与变化值混合以产生第一交流信号。在第一检测电极处检测第一交流信号。

9. 发明授权

US08627726B2 Pressure gauge 有权
标题翻译：压力计
公开(公告)号：US08627726B2
公开(公告)日：2014-01-14
申请号：US12601077
申请日：2008-06-04
申请人： Kim Phan Le , Jozef T. M. Van Beek
发明人： Kim Phan Le , Jozef T. M. Van Beek
IPC分类号： G01L9/06
CPC分类号： G01L21/22 , G01L9/0022 , H03H9/02259 , H03H9/2452 , H03H2009/02496
摘要： A pressure/vacuum sensor and method, comprising: driving a MEMS piezoresistive resonator (8) into resonant vibration, applying Joule heating to the resonator (8); and sensing a variable parameter that varies in response to the tendency of the resonant frequency (fo) to depend upon the temperature of the resonator (8), the temperature thereof depending upon the pressure. The variable parameter may be the resonant frequency of the resonator (8), or a change therein, or may be derived from a feedback loop, being for example a time integrated feedback signal (82) or a reading (94) of the sense current (22), the loop keeping the resonant frequency constant in opposition to the above mentioned tendency. A reference MEMS capacitive resonator (62) may be located in the vicinity of the resonator (8) for compensating purposes.
摘要翻译：一种压力/真空传感器和方法，包括：将MEMS压阻谐振器（8）驱动到共振振动中，对谐振器（8）施加焦耳加热; 以及感测响应谐振频率（fo）的趋势而变化的可变参数取决于谐振器（8）的温度，其温度取决于压力。可变参数可以是谐振器（8）的谐振频率或其中的变化，或者可以从反馈回路导出，例如时间积分反馈信号（82）或感测电流的读数（94）（22），保持谐振频率与上述趋势相反的环路的回路。参考MEMS电容谐振器（62）可以位于谐振器（8）附近用于补偿目的。

10. 发明申请

US20110204999A1 FRAME-SHAPED MEMS PIEZORESISTIVE RESONATOR 有权
标题翻译：框架形式的MEMS平衡谐振器
公开(公告)号：US20110204999A1
公开(公告)日：2011-08-25
申请号：US13123719
申请日：2009-10-13
申请人： Kim Phan Le , Jozef T. M. Van Beek
发明人： Kim Phan Le , Jozef T. M. Van Beek
IPC分类号： H03H9/24
CPC分类号： H03H9/02259 , H03H9/2431 , H03H2009/02307 , H03H2009/02354 , H03H2009/02496
摘要： A novel Si MEMS piezoresistive resonator is described. The resonator has a shape of a frame, such as a ring or a polygon frame, which has two or more anchors. Electrodes located at the outer or inner rim of the resonant structure are used to excite the structure electrostatically into resonance with a desired mode shape. One or plurality of locally doped regions on the structure is used for piezoresistive readout of the signal. In the most preferred embodiments, the structure is a ring, which has four anchors, two electrodes and four piezoresistive regions at different segments of the structure. The piezoresistive regions are alternatively located at the outer rim and inner rim of the structure in such a way that the piezoresistive signals of the same sign from different regions can be collected. Advantages of this device are large readout signal, large electrode area, robustness, suppressed out-of-plane vibration and larger usable linear range.
摘要翻译：描述了一种新颖的Si MEMS压阻谐振器。谐振器具有诸如环或多边形框架的框架的形状，其具有两个或更多个锚定件。位于谐振结构的外边缘或内边缘处的电极用于以静电激励结构以期望的模式形状的谐振。结构上的一个或多个局部掺杂区域用于信号的压阻读出。在最优选的实施例中，该结构是环，其在结构的不同部分具有四个锚固件，两个电极和四个压阻区域。压阻区域可替代地位于结构的外边缘和内边缘处，使得可以收集来自不同区域的相同符号的压阻信号。该装置的优点是大的读出信号，大的电极面积，鲁棒性，抑制的平面外振动和较大的可用的线性范围。

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