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    • 5. 发明申请
    • MULTI-SELECTIVE POLISHING SLURRY COMPOSITION AND A SEMICONDUCTOR ELEMENT PRODUCTION METHOD USING THE SAME
    • 多选择性抛光浆料组合物及使用该组合物的半导体元件生产方法
    • WO2011010819A3
    • 2011-04-21
    • PCT/KR2010004468
    • 2010-07-09
    • IUCF HYUPARK JEA-GUNPAIK UN-GYUPARK JIN-HYUNGCUI HAOCHO JONG-YOUNGHWANG HEE-SUBLIM JAE-HYUNGKIM YE-HWAN
    • PARK JEA-GUNPAIK UN-GYUPARK JIN-HYUNGCUI HAOCHO JONG-YOUNGHWANG HEE-SUBLIM JAE-HYUNGKIM YE-HWAN
    • H01L21/304
    • H01L21/31056C09G1/02C09K3/1463H01L21/31053H01L21/3212
    • Provided are a multi-selective polishing slurry composition and a semiconductor element production method using the same. A silicon film provided with element patterns is formed on the uppermost part of a substrate having a first region and a second region. The element pattern density on the first region is higher than the element pattern density on the second region. Formed in sequence on top of the element patterns are a first silicon oxide film, a silicon nitride film and a second silicon oxide film. The substrate is subjected to chemical-mechanical polishing until the silicon film is exposed, by using a polishing slurry composition containing a polishing agent, a silicon nitride film passivation agent and a silicon film passivation agent. The polishing slurry composition may be a mixture of 100 parts by weight of a polishing agent suspension, containing a polishing agent, and from 40 to 120 parts by weight of an additive solution, and the additive solution can contain 100 parts by weight of a solvent, from 0.01 to 5 parts by weight of a silicon nitride film passivation agent and from 0.01 to 5 parts by weight of a silicon film passivation agent.
    • 本发明提供一种多选择性研磨液组合物及使用其的半导体元件制造方法。 提供有元件图案的硅膜形成在具有第一区域和第二区域的基板的最上部分上。 第一区域上的元件图案密度高于第二区域上的元件图案密度。 在元件图案上依次形成第一氧化硅膜,氮化硅膜和第二氧化硅膜。 通过使用包含抛光剂,氮化硅膜钝化剂和硅膜钝化剂的抛光浆料组合物,对衬底进行化学机械抛光直到暴露硅膜。 抛光浆料组合物可以是100重量份含有抛光剂的抛光剂悬浮液和40-120重量份添加剂溶液的混合物,并且添加剂溶液可以含有100重量份溶剂 0.01至5重量份的氮化硅膜钝化剂和0.01至5重量份的硅膜钝化剂。
    • 7. 发明申请
    • DOUBLE-SIDED LIGHT-COLLECTING ORGANIC SOLAR CELL
    • 双面收集有机太阳能电池
    • WO2011013917A3
    • 2011-04-07
    • PCT/KR2010004423
    • 2010-07-07
    • IUCF HYUPARK JEA-GUNLEE SU-HWANKIM JI-HEONKIM DAL-HO
    • PARK JEA-GUNLEE SU-HWANKIM JI-HEONKIM DAL-HO
    • H01L31/042
    • H01L27/302
    • Disclosed is a double-sided light-collecting organic solar cell. The double-sided light-collecting organic solar cell comprises: a first light-transmitting electrode; a first photoactive layer disposed on the first light-transmitting electrode; a reflective electrode disposed on the first photoactive layer; a second photoactive layer disposed on the reflective electrode; and a second light-transmitting electrode disposed on the second photoactive layer. According to the present invention, photoactive layers are formed on both sides of a reflective electrode in the middle, and light-transmitting electrodes are formed to enable light to be absorbed at both sides of a cell, to increase the light absorption of the cell and enable the production of a highly efficient organic solar cell.
    • 公开了一种双面收光有机太阳能电池。 双面收集有机太阳能电池包括:第一透光电极; 设置在第一透光电极上的第一光敏层; 设置在所述第一光活性层上的反射电极; 设置在反射电极上的第二光敏层; 以及设置在所述第二光活性层上的第二透光电极。 根据本发明,在中间的反射电极的两侧形成光敏层,并且形成透光电极以使光能够在电池的两侧被吸收,以增加电池的光吸收, 能够生产高效的有机太阳能电池。