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1. 发明授权

US08807203B2 Titanium-based thermal ground plane 有权
标题翻译：钛基热地面
公开(公告)号：US08807203B2
公开(公告)日：2014-08-19
申请号：US13055111
申请日：2009-07-21
申请人： Noel C. MacDonald , Carl D. Meinhart , Changsong Ding , Payam Bozorgi , Gaurav Soni , Brian D. Piorek
发明人： Noel C. MacDonald , Carl D. Meinhart , Changsong Ding , Payam Bozorgi , Gaurav Soni , Brian D. Piorek
IPC分类号： F28D15/04 , H05K7/20
CPC分类号： F28D15/04 , F28D15/046 , H01L23/427 , H01L2924/0002 , Y10T29/4935 , H01L2924/00
摘要： Titanium-based thermal ground planes are described. A thermal ground plane in accordance with the present invention comprises a titanium substrate comprising a plurality of pillars, wherein the plurality of Ti pillars can be optionally oxidized to form nanostructured titania coated pillars, and a vapor cavity, in communication with the plurality of titanium pillars, for transporting thermal energy from one region of the thermal ground plane to another region of the thermal ground plane.
摘要翻译：描述了钛基热接地平面。根据本发明的热接地平面包括包括多个柱的钛基底，其中可以任选地氧化多个Ti柱以形成纳米结构的二氧化钛涂覆的柱，以及与多个钛柱连通的蒸气腔用于将热能从热接地平面的一个区域传送到热接地平面的另一个区域。

2. 发明授权

US07718552B2 Nanostructured titania 有权
标题翻译：纳米结构二氧化钛
公开(公告)号：US07718552B2
公开(公告)日：2010-05-18
申请号：US11397165
申请日：2006-04-04
申请人： Zuruzi Abu Samah , Noel C. MacDonald , Marcus Ward , Martin Moskovits , Andrei Kolmakov , Cyrus R. Safinya
发明人： Zuruzi Abu Samah , Noel C. MacDonald , Marcus Ward , Martin Moskovits , Andrei Kolmakov , Cyrus R. Safinya
IPC分类号： H01L21/469
CPC分类号： G01N27/125 , Y10S977/781 , Y10S977/784 , Y10S977/811 , Y10S977/888 , Y10S977/89 , Y10T428/24331
摘要： A method and device of nanostructured titania that is crack free. A method in accordance with the present invention comprises depositing a Ti film on a surface, depositing a masking layer on the Ti film, etching said masking layer to expose a limited region of the Ti film, the limited region being of an area less than a threshold area, oxidizing the exposed limited region of the Th.ucsbi film, and annealing the exposed limited region of the Ti film.
摘要翻译：纳米结构二氧化钛的无裂纹的方法和装置。根据本发明的方法包括在表面上沉积Ti膜，在Ti膜上沉积掩模层，蚀刻所述掩模层以暴露Ti膜的有限区域，该有限区域的面积小于氧化暴露的Th.ucsbi膜的限制区域，并退火Ti膜的暴露的限制区域。

3. 发明授权

US07504757B2 Multi-finger z-actuator 有权
标题翻译：多指z致动器
公开(公告)号：US07504757B2
公开(公告)日：2009-03-17
申请号：US11375860
申请日：2006-03-15
申请人： Kanakasabapathi Subramanian , Xiaojun T. Huang , Noel C. MacDonald
发明人： Kanakasabapathi Subramanian , Xiaojun T. Huang , Noel C. MacDonald
IPC分类号： H02N1/00 , G02B26/08
CPC分类号： B81C1/00626 , B81B2201/033 , H01L21/3086
摘要： Multi-level structures are formed in a semiconductor substrate by first forming a pattern of lines or structures of different widths. Width information on the pattern is decoded by processing steps into level information to form a MEMS structure. The pattern is etched to form structures having a first floor. The structures are oxidized until structures of thinner width are substantially fully oxidized. A portion of the oxide is then etched to expose the first floor. The first floor is then etched to form a second floor. The oxide is then optionally removed, leaving a multi-level structure. In one embodiment, high aspect ratio comb actuators are formed using the multi-level structure process.
摘要翻译：通过首先形成不同宽度的线或结构的图案，在半导体衬底中形成多层结构。图案上的宽度信息通过处理步骤被解码成级信息以形成MEMS结构。蚀刻图案以形成具有一层的结构。结构被氧化，直到较薄宽度的结构基本上被完全氧化。然后蚀刻一部分氧化物以露出第一层。然后蚀刻第一层以形成二楼。然后任选地除去氧化物，留下多层结构。在一个实施例中，使用多层结构工艺形成高纵横比梳状致动器。

4. 发明授权

US06794217B2 Single crystal silicon micromirror and array 有权
标题翻译：单晶硅微镜和阵列
公开(公告)号：US06794217B2
公开(公告)日：2004-09-21
申请号：US10403098
申请日：2003-04-01
申请人： Seung B. Lee , Noel C. MacDonald
发明人： Seung B. Lee , Noel C. MacDonald
IPC分类号： H01L2100
CPC分类号： G02B26/0841
摘要： A micromirror is fabricated in a substrate by defining a mirror platform on a first side of the substrate, defining an actuator structure corrected to the platform on a second side of the substrate, and then releasing the mirror platform for motion with the actuator. The actuator may be a comb drive structure having interdigitated movable finger electrodes connected to the mirror platform and stationary finger electrodes mounted on the substrate. The movable and stationary finger electrodes preferably are asymmetrical, and when activated, controllably move the mirror platform either horizontally or vertically with respect to the surface of the substrate. The comb drive structure may be connected at one of its ends to a torsional support beam secured to the substrate, for torsional motion of the mirror platform with respect to the substrate. Alternatively, the comb drive may be connected at both ends to spaced torsional support beams for vertical motion of the platform with respect to the substrate. In the latter case, the actuator preferably includes spaced hinges to allow expansion of the actuator length.
摘要翻译：通过在衬底的第一侧上限定一个反射镜平台，在衬底的第二面上限定一个校准到该平台的致动器结构，然后释放用于与该致动器一起运动的反射镜平台，从而将微镜制造在衬底中。致动器可以是梳状驱动结构，其具有连接到镜台的交错可动指状电极和安装在基板上的固定指状电极。可移动和固定的手指电极优选地是不对称的，并且当被激活时，相对于衬底的表面可水平地或垂直地可控地移动镜面平台。梳状驱动结构可以在其一端连接到固定的扭转支撑梁到基板，用于反射镜平台相对于基板的扭转运动。或者，梳状驱动器可以在两端连接到间隔的扭转支撑梁，用于平台相对于基板的垂直运动。在后一种情况下，致动器优选地包括间隔开的铰链以允许致动器长度的膨胀。

5. 发明授权

US06541831B2 Single crystal silicon micromirror and array 有权
标题翻译：单晶硅微镜和阵列
公开(公告)号：US06541831B2
公开(公告)日：2003-04-01
申请号：US09761860
申请日：2001-01-18
申请人： Seung B. Lee , Noel C. MacDonald
发明人： Seung B. Lee , Noel C. MacDonald
IPC分类号： H01L2982
CPC分类号： G02B26/0841
摘要： A micromirror is fabricated in a substrate by defining a mirror platform on a first side of the substrate, defining an actuator structure corrected to the platform on a second side of the substrate, and then releasing the mirror platform for motion with the actuator. The actuator may be a comb drive structure having interdigitated movable finger electrodes connected to the mirror platform and stationary finger electrodes mounted on the substrate. The movable and stationary finger electrodes preferably are asymmetrical, and when activated, controllably move the mirror platform either horizontally or vertically with respect to the surface of the substrate. The comb drive structure may be connected at one of its ends to a torsional support beam secured to the substrate, for torsional motion of the mirror platform with respect to the substrate. Alternatively, the comb drive may be connected at both ends to spaced torsional support beams for vertical motion of the platform with respect to the substrate. In the latter case, the actuator preferably includes spaced hinges to allow expansion of the actuator length.
摘要翻译：通过在衬底的第一侧上限定一个反射镜平台，在衬底的第二面上限定一个校准到该平台的致动器结构，然后释放用于与该致动器一起运动的反射镜平台，从而将微镜制造在衬底中。致动器可以是梳状驱动结构，其具有连接到镜台的交错可动指状电极和安装在基板上的固定指状电极。可移动和固定的手指电极优选地是不对称的，并且当被激活时，相对于衬底的表面可水平地或垂直地可控地移动镜面平台。梳状驱动结构可以在其一端连接到固定的扭转支撑梁到基板，用于反射镜平台相对于基板的扭转运动。或者，梳状驱动器可以在两端连接到间隔的扭转支撑梁，用于平台相对于基板的垂直运动。在后一种情况下，致动器优选地包括间隔开的铰链以允许致动器长度的膨胀。

6. 发明授权

US06183097B2 Motion amplification based sensors 有权
标题翻译：基于运动放大的传感器
公开(公告)号：US06183097B2
公开(公告)日：2001-02-06
申请号：US09348321
申请日：1999-07-08
申请人： Mohammed T. A. Saif , Noel C. MacDonald
发明人： Mohammed T. A. Saif , Noel C. MacDonald
IPC分类号： G02B7182
CPC分类号： G01P15/0802 , G01P15/0894 , H01H1/0036 , H01H2003/463 , Y10S977/70 , Y10S977/724
摘要： A micromechanical micromotion amplifier has an integrated structure formed primarily of silicon and comprises a plurality of long slender flexible beams which are connected in a predetermined manner. The beams are released from a silicon substrate for movement with respect to fixed points of reference upon the substrate. Each beam thereby has a fixed end and a relatively moveable free end. Compressive axial force induced by axial movement, applied to the moveable end of a beam, will cause that beam to deform or buckle. Buckling occurs transversely in-plane due to a high aspect ratio profile of each beam. The amount of lateral or transverse movement of a beam due to buckling is relatively large in relation to the applied axial force or axial movement which causes it. By arranging these beams in cooperating perpendicular pairs as micromotion amplifier stages, an input axial force/movement applied to the moveable free end of a first beam generates a transverse motion or buckling movement of that beam.
摘要翻译：微机电微动力放大器具有主要由硅形成的整体结构，并且包括以预定方式连接的多个长细长柔性梁。光束从硅衬底释放，以相对于衬底上的固定参考点移动。因此，每个梁具有固定端和相对可移动的自由端。由轴向运动引起的压缩轴向力，施加到梁的可移动端，将导致梁变形或弯曲。由于每个光束的高纵横比轮廓，因此弯曲发生在平面内。由于屈曲而导致的梁的横向或横向运动的量相对于所引起的所施加的轴向力或轴向运动相对较大。通过将这些光束配置为协作的垂直对作为微型放大器级，施加到第一光束的可移动自由端的输入轴向力/运动产生该光束的横向运动或屈曲运动。

7. 发明授权

US5862003A Micromotion amplifier 失效
标题翻译：微动力放大器
公开(公告)号：US5862003A
公开(公告)日：1999-01-19
申请号：US667880
申请日：1996-06-20
申请人： Muhammad T. A. Saif , Trent Huang , Noel C. MacDonald
发明人： Muhammad T. A. Saif , Trent Huang , Noel C. MacDonald
IPC分类号： B81B3/00 , G02B26/08 , H02N1/00 , G02B7/182 , G02B5/08 , G02B26/00
CPC分类号： H02N1/008 , B81B3/0037 , G02B26/0833 , B81B2201/045 , B81B2203/0109 , B81B2203/0315 , B81B2203/051 , B81B2203/053 , B81B2203/058 , Y10S359/904 , Y10S977/70 , Y10S977/724 , Y10S977/725
摘要： A microelectromechanical micromotion amplifier generates a controlled lateral motion in response to a small deformation in the axial direction of a MEM beam or body. Lateral motion is produced by buckling of one or more long slender beams, the buckling motion being relatively large with respect to the axial motion which causes such lateral motion. The beams may be designed with a slight asymmetry to achieve gradual buckling in a desired direction. The device is capable of amplifying a driving motion in the range of 1-5 micrometers to produce a transverse motion in the range of 50-200 micrometers.
摘要翻译：微机电微动作放大器响应于MEM束或身体的轴向方向上的小变形而产生受控的横向运动。横向运动通过一根或多根细长梁的弯曲产生，相对于引起这种侧向运动的轴向运动，该弯曲运动相对较大。梁可以被设计为具有轻微的不对称性，以在期望的方向上实现逐渐的屈曲。该装置能够在1-5微米的范围内放大驱动运动，以产生在50-200微米范围内的横向运动。

8. 发明授权

US5726073A Compound stage MEM actuator suspended for multidimensional motion 失效
公开(公告)号：US5726073A
公开(公告)日：1998-03-10
申请号：US588919
申请日：1996-01-19
申请人： Z. Lisa Zhang , Noel C. MacDonald
发明人： Z. Lisa Zhang , Noel C. MacDonald
IPC分类号： B81B1/00 , B81B3/00 , H02N1/00 , H01L21/465
CPC分类号： H02N1/008 , B81B3/0021 , B81B3/0062 , B81C1/0019 , B82Y15/00 , B81B2201/11 , B81B2203/053 , B81B2203/055 , B81B2207/07
摘要： A microelectromechanical compound stage microactuator assembly capable of motion along x, y, and z axes for positioning and scanning integrated electromechanical sensors and actuators is fabricated from submicron suspended single crystal silicon beams. The microactuator incorporates an interconnect system for mechanically supporting a central stage and for providing electrical connections to componants of the microactuator and to devices carried thereby. The microactuator is fabricated using a modified single crystal reactive etching and metallization process which incorporates an isolation process utilizing thermal oxidation of selected regions of the device to provide insulating segments which define conductive paths from external circuitry to the actuator components and to microelectronic devices such as gated field emitters carried by the actuator.

9. 发明授权

US5640133A Capacitance based tunable micromechanical resonators 失效
标题翻译：基于电容的可调谐微机械谐振器
公开(公告)号：US5640133A
公开(公告)日：1997-06-17
申请号：US494024
申请日：1995-06-23
申请人： Noel C. MacDonald , Fred M. Bertsch , Kevin A. Shaw , Scott G. Adams
发明人： Noel C. MacDonald , Fred M. Bertsch , Kevin A. Shaw , Scott G. Adams
IPC分类号： H03H9/125 , H02N1/00 , H03H9/02 , H03H9/205 , H03H9/24 , H03H9/46
CPC分类号： H03H9/02425 , H02N1/008 , H03H9/02417 , H03H9/46 , H03H2009/02496
摘要： A tunable electromicromechanical resonator structure incorporates an electrostatic actuator which permits reduction or enhancement of the resonant frequency of the structure. The actuator consists of two sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers. One set is mounted on a movable portion of the resonator structure and one set is mounted on an adjacent fixed base on substrate, with the fingers in opposed relationship and their adjacent ends spaced apart by a gap. An adjustable bias voltage across the sets of electrodes adjusts the resonant frequency of the movable structure.
摘要翻译：可调电动机械谐振器结构包括静电致动器，其允许减小或增强结构的谐振频率。致动器由两组相对的电极指组成，每组具有多个间隔开的平行指状物。一组安装在谐振器结构的可移动部分上，一组安装在基板上的相邻的固定基座上，指状物处于相对关系，并且其相邻端部间隔开间隙。两组电极之间的可调偏压调节可移动结构的谐振频率。

10. 发明授权

US5637539A Vacuum microelectronic devices with multiple planar electrodes 失效
标题翻译：具有多个平面电极的真空微电子器件
公开(公告)号：US5637539A
公开(公告)日：1997-06-10
申请号：US586057
申请日：1996-01-16
申请人： Wolfgang Hofmann , Liang-Yuh Chen , Noel C. MacDonald
发明人： Wolfgang Hofmann , Liang-Yuh Chen , Noel C. MacDonald
IPC分类号： H01J9/02 , H01J21/10 , H01L21/461 , H01J9/00
CPC分类号： H01J9/025 , H01J21/105
摘要： A fabrication process for vacuum microelectronic devices having multiple electrode levels includes production of a first-level electrode mask on a substrate. The mask pattern is transferred to the substrate to produce a trench surrounding an emitter which is formed by thermal oxidation. The trench is filled with tungsten to form a gate electrode surrounding the emitter, and the resulting wafer is planarized. A second-level electrode is formed on the top surface of the wafer, and is planarized. Additional levels are similarly produced, and thereafter the electrodes are released.
摘要翻译：具有多个电极层的真空微电子器件的制造方法包括在衬底上制造第一级电极掩模。掩模图案被转移到衬底以产生围绕通过热氧化形成的发射极的沟槽。用钨填充沟槽以形成围绕发射极的栅电极，并将得到的晶片平坦化。第二级电极形成在晶片的顶表面上，并被平坦化。附加水平类似地产生，此后电极被释放。

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