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    • 1. 发明专利
    • Simple vibration range additional type measuring device for structure
    • 简单的振动范围结构的附加类型测量装置
    • JP2003004520A
    • 2003-01-08
    • JP2001190893
    • 2001-06-25
    • Masahito AbeYozo FujinoImv KkHiroshi Kurabayashiアイエムブイ株式会社浩 倉林陽三 藤野雅人 阿部
    • FUJINO YOZOABE MASAHITOKURABAYASHI HIROSHIONOE MASARU
    • G01L1/00G01H1/08
    • PROBLEM TO BE SOLVED: To provide a convenient simple vibration range additional type measuring device preventing a structure from tilting or falling by constantly measuring fatigue of the structure.
      SOLUTION: The device comprises a sensor means 2 detecting vibration of the structure, a comparator circuit means 6 generating an output signal for each setting level every time when each amplitude waveform signal output from the sensor means 2 within a finite time exceeds each of a plurally set levels, counter means 7a-7h connected to output terminals of each setting level for the comparator means 6, counting the output signal for each setting level and then generating display output signals when the number of counts exceeds a specified number of settings, and display means 8a-8h connected to these counter means 7a-7h, respectively, providing a certain display when the display output signals are input.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:为了提供方便的简单的振动范围附加型测量装置,通过不断地测量结构的疲劳来防止结构倾斜或下降。 解决方案:该装置包括检测结构的振动的传感器装置2,每当从有限时间内从传感器装置2输出的每个振幅波形信号超过多个的每个时,每个设定电平产生输出信号的比较器电路装置6 设定电平,与比较器装置6的每个设定电平的输出端连接的计数装置7a-7h,对每个设定电平进行输出信号的计数,然后当计数数超过指定数量的设定时产生显示输出信号,并显示 分别连接到这些计数装置7a-7h的装置8a-8h,当输入显示输出信号时提供一定的显示。
    • 5. 发明授权
    • Chemical vapor deposition apparatus and cleaning method thereof
    • 化学气相沉积设备及其清洁方法
    • US06312569B1
    • 2001-11-06
    • US09172141
    • 1998-10-14
    • Hidenao SuzukiTsutomu NakadaMasahito AbeMasao Saitoh
    • Hidenao SuzukiTsutomu NakadaMasahito AbeMasao Saitoh
    • C25F100
    • C23C16/4401Y10S156/916
    • A chemical vapor deposition apparatus for depositing a thin film of highly dielectric materials for giga-capacity memory devices can reliably clean reaction products formed within the deposition chamber without sacrificing the production efficiency. The apparatus comprises a hermetic deposition chamber containing a substrate holding section for supporting a substrate, and a gas supply head disposed opposite to the substrate holding section for directing a gaseous feed material onto the substrate. There are provided a trapping member supporting device for supporting a trapping member so as to be opposite to a target cleaning area inside the deposition chamber, and a plasma generation device for generating a plasma between the target cleaning area and the trapping member supported by the trapping member supporting device.
    • 用于沉积用于千兆容量存储器件的高介电材料薄膜的化学气相沉积设备可以可靠地清洁沉积室内形成的反应产物而不牺牲生产效率。 该装置包括一个包含用于支撑衬底的衬底保持部分的气密淀积室和一个与衬底保持部分相对设置的用于将气体进料材料引导到衬底上的气体供给头。 提供了一种捕获构件支撑装置,用于支撑捕获构件以与沉积室内的目标清洁区域相对;以及等离子体产生装置,用于在目标清洁区域和由捕获物支撑的捕获构件之间产生等离子体 会员支持装置。