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1. 发明授权

US09517558B2 Time-optimal trajectories for robotic transfer devices 有权
标题翻译：机器人传输设备的时间优化轨迹
公开(公告)号：US09517558B2
公开(公告)日：2016-12-13
申请号：US14342035
申请日：2012-08-30
申请人： Jayaraman Krishnasamy , Martin Hosek
发明人： Jayaraman Krishnasamy , Martin Hosek
IPC分类号： B25J9/16 , H01L21/67 , H01L21/677 , G05B19/416
CPC分类号： B25J9/1664 , G05B19/416 , G05B2219/40449 , G05B2219/40466 , H01L21/67259 , H01L21/67742 , H01L21/67766
摘要： A time-optimal trajectory generation method, for a robotic manipulator having a transport path with at least one path segment, comprising generating a forward time-optimal trajectory of the manipulator along the at least one path segment from a start point of the at least one path segment towards an end point of the at least one path segment, generating a reverse time-optimal trajectory of the manipulator along the at least one path segment from the end point towards the start point of the at least one path segment, and combining the time-optimal forward and reverse trajectories to obtain a complete time-optimal trajectory, where the forward and reverse trajectories of the at least one path segment are blended together with a smoothing bridge joining the time-optimal forward and reverse trajectories in a position-velocity reference frame with substantially no discontinuity between the time-optimal forward and reverse trajectories.
摘要翻译：一种用于具有至少一个路径段的传输路径的机器人操纵器的时间优化轨迹生成方法，包括从所述至少一个路径段的起始点沿着所述至少一个路径段生成所述操纵器的前向时间最优轨迹路径段朝向所述至少一个路径段的终点，从所述至少一个路径段的终点向起始点沿着所述至少一个路径段产生所述操纵器的反时间最优轨迹，并将时间最佳的正向和反向轨迹以获得完整的时间最优轨迹，其中至少一个路径段的前向和后向轨迹与平滑桥混合在一起，该平滑桥连接时间最优的前进和后退轨迹，位置速度参考帧在时间最优的正向和反向轨迹之间基本上没有不连续性。

2. 发明授权

US09222804B2 System and method for position sensing 有权
标题翻译：位置检测系统和方法
公开(公告)号：US09222804B2
公开(公告)日：2015-12-29
申请号：US13599930
申请日：2012-08-30
申请人： Martin Hosek
发明人： Martin Hosek
IPC分类号： G01B7/14 , G01D5/22
CPC分类号： G01D5/2266
摘要： A system for position sensing includes an incremental track including a plurality of sectors and a measurement subsystem. The measurement subsystem includes at least two differential read-heads each having at least one primary coil and at least two differential secondary coils, the at least two differential secondary coils of one of the at least two differential read-heads configured to generate output signals having their amplitudes modulated by the sectors of the incremental track and the at least two differential secondary coils of the other of said two differential read-heads configured to generate output signals having their amplitudes modulated by the sectors of the incremental track.
摘要翻译：用于位置检测的系统包括包括多个扇区的增量轨迹和测量子系统。测量子系统包括至少两个差分读取头，每个差分读取头具有至少一个初级线圈和至少两个差分次级线圈，所述至少两个差分读取头之一的至少两个差分次级线圈被配置为产生具有所述两个差分读取头中的另一个的所述增量磁道的扇区和所述至少两个差分次级线圈的幅度被调制，所述至少两个差分次级线圈被配置为产生具有由所述增量磁道的扇区调制的幅度的输出信号。

3. 发明授权

US08801069B2 Robot edge contact gripper 有权
标题翻译：机器人边缘接触夹具
公开(公告)号：US08801069B2
公开(公告)日：2014-08-12
申请号：US13036876
申请日：2011-02-28
申请人： Martin Hosek , Jayaraman Krishnasamy , Leonard T. Lilliston, III
发明人： Martin Hosek , Jayaraman Krishnasamy , Leonard T. Lilliston, III
IPC分类号： H01L21/683 , B65G49/07
CPC分类号： H01L21/68707 , H01L21/67742 , H01L21/67766 , H01L21/67781
摘要： An apparatus for gripping a substrate on its peripheral edge including a substrate support having proximate and distal ends, at least one distal rest pad disposed at the distal end, the at least one distal rest pad includes a back stop portion and is configured to support the peripheral edge of the substrate, at least one proximate rest pad disposed at the proximate end, the at least one proximate rest pad being configured to support the peripheral edge of the substrate, and an active contact member assembly disposed at the proximate end, the active contact member assembly including a pusher member, a contact member and a rotatable coupling member that are reciprocably movable towards the distal end for urging the substrate against the back stop portion, the contact member being rotatably secured to the pusher member and free to rotate about an axis of the rotatable coupling member.
摘要翻译：一种用于在其周缘上抓住基底的装置，包括具有近端和远端的基底支撑件，设置在远端的至少一个远端固定垫，所述至少一个远端休息垫包括后挡块部分，至少一个邻近的安置垫，设置在所述近端处，所述至少一个邻近的衬垫被配置为支撑所述衬底的周边边缘，以及设置在所述近端的有源接触构件组件，所述活动接触构件组件，包括推动构件，接触构件和可旋转的联接构件，所述推动构件，接触构件和可旋转的联接构件能够朝向远端可往复移动，用于将基板推靠在后止挡部分上，接触构件可旋转地固定到推动器构件并且可围绕可旋转联接构件的轴线。

4. 发明授权

US08545165B2 High speed substrate aligner apparatus 有权
标题翻译：高速基板对准器
公开(公告)号：US08545165B2
公开(公告)日：2013-10-01
申请号：US11179745
申请日：2005-07-11
申请人： Jairo T. Moura , Martin Hosek , Todd Bottomley , Ulysses Gilchrist
发明人： Jairo T. Moura , Martin Hosek , Todd Bottomley , Ulysses Gilchrist
IPC分类号： H01L21/68
CPC分类号： H01L21/681 , H01L21/67748 , H01L21/68 , H01L21/682 , H01L21/68707 , H01L21/68728 , H01L21/68785 , H01L21/68792
摘要： A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates.
摘要翻译：衬底对准器提供最小的衬底运送器延伸和缩回运动，以快速对准衬底而没有背面损伤，同时增加衬底处理的吞吐量。在一个实施例中，对准器具有连接到框架的倒置卡盘，具有能够将基板从卡盘传送到运输工具而不旋转重新定位基板的基板输送系统。倒置的卡盘消除了基板基准的对准器阻塞，并且与传送系统一起，允许运送器在对准期间保持在框架内。在另一个实施例中，对准器具有连接到框架的可旋转传感器头和具有用于在对准期间支撑衬底的透明搁板的衬底支撑件，以便在对准期间运输器能够保持在框架内。独立于支撑垫上的基准位置执行基板对准。在其它实施例中，衬底支撑件采用缓冲系统来缓冲衬底内部的衬底，从而可快速地交换衬底。

5. 发明申请

US20130121798A1 ROBOT SYSTEM WITH INDEPENDENT ARMS 有权
标题翻译：具有独立机构的机器人系统
公开(公告)号：US20130121798A1
公开(公告)日：2013-05-16
申请号：US13670004
申请日：2012-11-06
申请人： Martin Hosek
发明人： Martin Hosek
IPC分类号： H01L21/677 , B25J18/00
CPC分类号： H01L21/677 , B25J9/043 , B25J11/0095 , B25J18/00 , H01L21/67742 , H01L21/67766 , Y10S901/23 , Y10T74/20317
摘要： A substrate handling robot drive comprising a drive chassis for one or more robot arms. A first housing is movable with respect to the chassis and includes at least a first shaft and a first motor subsystem driving the first shaft. A Z-axis drives the first housing. A second housing is movable with respect to the chassis includes at least a second shaft and a second motor subsystem driving the second shaft. A Z-axis drive for the second housing is independently movable with respect to the Z-axis drive for the first housing.
摘要翻译：一种基板处理机器人驱动器，包括用于一个或多个机器人臂的驱动机架。第一壳体可相对于底盘移动，并且至少包括驱动第一轴的第一轴和第一电动机子系统。 Z轴驱动第一个外壳。第二壳体可相对于底盘移动，包括至少第二轴和驱动第二轴的第二电动机子系统。用于第二壳体的Z轴驱动器可独立地相对于第一壳体的Z轴驱动器移动。

6. 发明申请

US20130000860A1 System and method for making a structured magnetic material via layered particle deposition 有权
标题翻译：通过层状颗粒沉积制造结构化磁性材料的系统和方法
公开(公告)号：US20130000860A1
公开(公告)日：2013-01-03
申请号：US13507447
申请日：2012-06-29
申请人： Martin Hosek , Sripati Sah
发明人： Martin Hosek , Sripati Sah
IPC分类号： B22D23/00 , B22C9/00 , B22D27/02
CPC分类号： B22D23/003 , B22F3/115 , C23C4/18 , C23C6/00 , H01F1/24 , H01F3/08 , H01F41/0246 , Y10T428/24413
摘要： A system for making a material having domains with insulated boundaries is provided. The system includes a droplet spray subsystem configured to create molten alloy droplets and direct the molten alloy droplets to a surface, a spray subsystem configured to direct a spray of an agent at deposited droplets on the surface. The agent creates insulation layers on the deposited droplets such that the droplets form a material having domains with insulated boundaries on the surface.
摘要翻译：提供一种用于制造具有绝缘边界的区域的材料的系统。该系统包括液滴喷射子系统，该液滴喷射子系统构造成产生熔融的合金液滴并将熔融的合金液滴引导到一个表面，喷雾子系统构造成引导在沉积的液滴上的试剂的喷雾。该试剂在沉积的液滴上产生绝缘层，使得液滴形成具有在表面上具有绝缘边界的畴的材料。

7. 发明申请

US20120223597A1 MULTIPLE DIMENSION POSITION SENSOR 有权
标题翻译：多尺寸位置传感器
公开(公告)号：US20120223597A1
公开(公告)日：2012-09-06
申请号：US13412392
申请日：2012-03-05
申请人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
发明人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
IPC分类号： H02K41/02
CPC分类号： G01B7/003
摘要： An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.
摘要翻译：一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的工件传送装置，以及多维位置测量装置，其包括至少一个固定在可移动部分上的场产生压板和至少一个定位的传感器组沿着传送路径并与控制器通信，场产生压板被配置为用于位置测量并推动可移动部分，所述至少一个传感器组中的每个传感器被配置为沿着对应于一个传感器的单个轴提供一个输出信号基于所述至少一个传感器组中的至少一个传感器的一个输出信号，所述多个传感器组中的所述多个传感器组中的所述多个传感器组中的至少一个传感器的一个输出信号被配置为计算所述可移动部分的多维位置，包括平面位置和间隙测量的三维位置。

8. 发明申请

US20120045300A1 HIGH SPEED SUBSTRATE ALIGNER APPARATUS 有权
标题翻译：高速基板对准机
公开(公告)号：US20120045300A1
公开(公告)日：2012-02-23
申请号：US13030926
申请日：2011-02-18
申请人： Jairo Terra Moura , Martin Hosek , Todd Bottomley , Ulysses Gilchrist
发明人： Jairo Terra Moura , Martin Hosek , Todd Bottomley , Ulysses Gilchrist
IPC分类号： H01L21/68
CPC分类号： H01L21/681 , Y10S414/136 , Y10S414/141
摘要： In accordance to an exemplary embodiment of the disclosed embodiments, a substrate aligner apparatus is presented, the substrate aligner apparatus having a frame adapted to allow a substrate transporter to transport a substrate to and from the aligner apparatus, an inverted chuck capable of holding the substrate and movably connected to the frame by a chuck driveshaft engaged to the inverted chuck for moving the inverted chuck relative to the frame and effecting alignment of the substrate, a sensing device located between the chuck and chuck driveshaft for detecting a position determining feature of the substrate, and a substrate transfer mechanism movably connected to the frame and located inside the frame below the inverted chuck for moving the substrate from the inverted chuck to the substrate transporter.
摘要翻译：根据所公开的实施例的示例性实施例，呈现基板对准器装置，衬底对准器装置具有框架，该框架适于允许衬底输送器将基板输送到对准器装置和从校准器装置输送基板，能够保持衬底的倒置卡盘并且通过卡盘驱动轴可动地连接到所述框架，所述卡盘驱动轴接合到所述倒置的卡盘，用于相对于所述框架移动所述倒置的卡盘并实现所述基板的对准;位于所述卡盘和卡盘驱动轴之间的感测装置，用于检测所述基板的位置确定特征以及可移动地连接到框架并且位于倒置卡盘下方的框架内部的基板传送机构，用于将基板从倒置卡盘移动到基板运送器。

9. 发明授权

US07946800B2 Substrate transport apparatus with multiple independently movable articulated arms 有权
标题翻译：具有多个可独立移动的铰接臂的基板输送装置
公开(公告)号：US07946800B2
公开(公告)日：2011-05-24
申请号：US11697390
申请日：2007-04-06
申请人： Martin Hosek , Ulysses Gilchrist
发明人： Martin Hosek , Ulysses Gilchrist
IPC分类号： B25J18/02
CPC分类号： B25J9/042 , H01L21/67742 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft being a common drive shaft for the at least two scara arms effecting extension and retraction of the at least two scara arms, wherein the at least two scara arms are coupled to each other so that, with the at least one drive shaft coupled to the at least two scara arms, rotation of the drive shaft effects extension and retraction of one of the at least two scara arms substantially independent of motion of another of the at least two scara arms.
摘要翻译：一种基板输送装置，包括具有至少一个驱动轴的驱动部分和至少两个可操作地联接到所述至少一个驱动轴的切割臂，所述至少一个驱动轴是用于所述至少两个扫帚臂的共同驱动轴，以及所述至少两个sc臂的收回，其中所述至少两个sc臂彼此联接，使得在所述至少一个驱动轴联接到所述至少两个sc臂的情况下，所述驱动轴的旋转实现延伸和缩回所述至少两个sc臂中的一个基本上独立于所述至少两个sc臂中另一个的运动。

10. 发明申请

US20110118855A1 SCALABLE MOTION CONTROL SYSTEM 有权
标题翻译：可调节运动控制系统
公开(公告)号：US20110118855A1
公开(公告)日：2011-05-19
申请号：US13011970
申请日：2011-01-24
申请人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
发明人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
IPC分类号： G05B13/04
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
摘要翻译：控制系统包括具有主控制器的集群架构，包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分，以及包括由主控制器控制的集群控制器的分布式控制部分。集群控制器控制一个或多个第二个遥控器的活动。第一和第二遥控器中的每一个被用于驱动一个或多个轴。

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