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1. 发明授权

US08545165B2 High speed substrate aligner apparatus 有权
标题翻译：高速基板对准器
公开(公告)号：US08545165B2
公开(公告)日：2013-10-01
申请号：US11179745
申请日：2005-07-11
申请人： Jairo T. Moura , Martin Hosek , Todd Bottomley , Ulysses Gilchrist
发明人： Jairo T. Moura , Martin Hosek , Todd Bottomley , Ulysses Gilchrist
IPC分类号： H01L21/68
CPC分类号： H01L21/681 , H01L21/67748 , H01L21/68 , H01L21/682 , H01L21/68707 , H01L21/68728 , H01L21/68785 , H01L21/68792
摘要： A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates.
摘要翻译：衬底对准器提供最小的衬底运送器延伸和缩回运动，以快速对准衬底而没有背面损伤，同时增加衬底处理的吞吐量。在一个实施例中，对准器具有连接到框架的倒置卡盘，具有能够将基板从卡盘传送到运输工具而不旋转重新定位基板的基板输送系统。倒置的卡盘消除了基板基准的对准器阻塞，并且与传送系统一起，允许运送器在对准期间保持在框架内。在另一个实施例中，对准器具有连接到框架的可旋转传感器头和具有用于在对准期间支撑衬底的透明搁板的衬底支撑件，以便在对准期间运输器能够保持在框架内。独立于支撑垫上的基准位置执行基板对准。在其它实施例中，衬底支撑件采用缓冲系统来缓冲衬底内部的衬底，从而可快速地交换衬底。

2. 发明授权

US08918203B2 Substrate processing apparatus 有权
标题翻译：基板加工装置
公开(公告)号：US08918203B2
公开(公告)日：2014-12-23
申请号：US13417837
申请日：2012-03-12
申请人： Ulysses Gilchrist , Robert T. Caveney , Jayaraman Krishnasamy , Mitchell Drew , Jairo T. Moura
发明人： Ulysses Gilchrist , Robert T. Caveney , Jayaraman Krishnasamy , Mitchell Drew , Jairo T. Moura
IPC分类号： G06F7/00 , B25J9/04 , H01L21/677
CPC分类号： H01L21/67706 , B25J9/042 , B25J9/043 , B25J11/0095 , B25J18/04 , H01L21/67742 , Y10S901/15 , Y10S901/27 , Y10T74/20305 , Y10T74/20329
摘要： A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
摘要翻译：一种基板处理装置，包括框架，连接到框架的第一SCARA臂，包括端部执行器，构造成沿着第一径向轴线延伸和缩回; 连接到框架的第二SCARA臂，包括端部执行器，构造成沿着第二径向轴线延伸和缩回，SCARA臂具有共同的肩部旋转轴线; 并且耦合到SCARA臂的驱动部分被配置为沿着相应的径向轴线独立地延伸每个SCARA臂并且绕着共同的肩部旋转轴线旋转每个SCARA臂，其中第一径向轴线相对于第二径向轴线成角度，并且端部相应臂的效应器与相应的径向轴线对准，其中每个末端执行器构造成保持至少一个基板，并且末端执行器位于公共转移平面上。

3. 发明申请

US20120232690A1 SUBSTRATE PROCESSING APPARATUS 有权
标题翻译：基板加工设备
公开(公告)号：US20120232690A1
公开(公告)日：2012-09-13
申请号：US13417837
申请日：2012-03-12
申请人： Ulysses Gilchrist , Robert T. Caveney , Jayaraman Krishnasamy , Mitchell Drew , Jairo T. Moura
发明人： Ulysses Gilchrist , Robert T. Caveney , Jayaraman Krishnasamy , Mitchell Drew , Jairo T. Moura
IPC分类号： G06F7/00 , B25J17/00 , B25J18/00
CPC分类号： H01L21/67706 , B25J9/042 , B25J9/043 , B25J11/0095 , B25J18/04 , H01L21/67742 , Y10S901/15 , Y10S901/27 , Y10T74/20305 , Y10T74/20329
摘要： A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
摘要翻译：一种基板处理装置，包括框架，连接到框架的第一SCARA臂，包括端部执行器，构造成沿着第一径向轴线延伸和缩回; 连接到框架的第二SCARA臂，包括端部执行器，构造成沿着第二径向轴线延伸和缩回，SCARA臂具有共同的肩部旋转轴线; 并且耦合到SCARA臂的驱动部分被配置为沿着相应的径向轴线独立地延伸每个SCARA臂并且绕着共同的肩部旋转轴线旋转每个SCARA臂，其中第一径向轴线相对于第二径向轴线成角度，并且端部相应臂的效应器与相应的径向轴线对准，其中每个末端执行器构造成保持至少一个基板，并且末端执行器位于公共转移平面上。

4. 发明授权

US09601362B2 High speed substrate aligner apparatus 有权
公开(公告)号：US09601362B2
公开(公告)日：2017-03-21
申请号：US14042248
申请日：2013-09-30
申请人： Jairo T. Moura , Martin Hosek , Todd Bottomley , Ulysses Gilchrist
发明人： Jairo T. Moura , Martin Hosek , Todd Bottomley , Ulysses Gilchrist
IPC分类号： H01L21/68 , H01L21/677 , H01L21/687
CPC分类号： H01L21/681 , H01L21/67748 , H01L21/68 , H01L21/682 , H01L21/68707 , H01L21/68728 , H01L21/68785 , H01L21/68792
摘要： A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates.

5. 发明申请

US20140147234A1 HIGH SPEED SUBSTRATE ALIGNER APPARATUS 有权
标题翻译：高速基板对准机
公开(公告)号：US20140147234A1
公开(公告)日：2014-05-29
申请号：US14042248
申请日：2013-09-30
申请人： Jairo T. Moura , Martin Hosek , Todd Bottomley , Ulysses Gilchrist
发明人： Jairo T. Moura , Martin Hosek , Todd Bottomley , Ulysses Gilchrist
IPC分类号： H01L21/68
CPC分类号： H01L21/681 , H01L21/67748 , H01L21/68 , H01L21/682 , H01L21/68707 , H01L21/68728 , H01L21/68785 , H01L21/68792
摘要： A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates.
摘要翻译：衬底对准器提供最小的衬底运送器延伸和缩回运动，以快速对准衬底而没有背面损伤，同时增加衬底处理的吞吐量。在一个实施例中，对准器具有连接到框架的倒置卡盘，具有能够将基板从卡盘传送到运输工具而不旋转重新定位基板的基板输送系统。倒置的卡盘消除了基板基准的对准器阻塞，并且与传送系统一起，允许运送器在对准期间保持在框架内。在另一个实施例中，对准器具有连接到框架的可旋转传感器头和具有用于在对准期间支撑衬底的透明搁板的衬底支撑件，以便在对准期间运输器能够保持在框架内。独立于支撑垫上的基准位置执行基板对准。在其它实施例中，衬底支撑件采用缓冲系统来缓冲衬底内部的衬底，从而可快速地交换衬底。

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