会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明申请
    • ROBOT EDGE CONTACT GRIPPER
    • 机器人边缘联系人
    • US20110241367A1
    • 2011-10-06
    • US13036876
    • 2011-02-28
    • Martin HosekJayaraman KrishnasamyLeonard T. Lilliston, III
    • Martin HosekJayaraman KrishnasamyLeonard T. Lilliston, III
    • H01L21/683
    • H01L21/68707H01L21/67742H01L21/67766H01L21/67781
    • An apparatus for gripping a substrate on its peripheral edge including a substrate support having proximate and distal ends, at least one distal rest pad disposed at the distal end, the at least one distal rest pad includes a back stop portion and is configured to support the peripheral edge of the substrate, at least one proximate rest pad disposed at the proximate end, the at least one proximate rest pad being configured to support the peripheral edge of the substrate, and an active contact member assembly disposed at the proximate end, the active contact member assembly including a pusher member, a contact member and a rotatable coupling member that are reciprocably movable towards the distal end for urging the substrate against the back stop portion, the contact member being rotatably secured to the pusher member and free to rotate about an axis of the rotatable coupling member.
    • 一种用于在其周缘上抓住基底的装置,包括具有近端和远端的基底支撑件,设置在远端的至少一个远端固定垫,所述至少一个远端休息垫包括后挡块部分, 至少一个邻近的安置垫,设置在所述近端处,所述至少一个邻近的衬垫被配置为支撑所述衬底的周边边缘,以及设置在所述近端的有源接触构件组件,所述活动 接触构件组件,包括推动构件,接触构件和可旋转的联接构件,所述推动构件,接触构件和可旋转的联接构件能够朝向远端可往复移动,用于将基板推靠在后止挡部分上,接触构件可旋转地固定到推动器构件并且可围绕 可旋转联接构件的轴线。
    • 2. 发明授权
    • Time-optimal trajectories for robotic transfer devices
    • 机器人传输设备的时间优化轨迹
    • US09517558B2
    • 2016-12-13
    • US14342035
    • 2012-08-30
    • Jayaraman KrishnasamyMartin Hosek
    • Jayaraman KrishnasamyMartin Hosek
    • B25J9/16H01L21/67H01L21/677G05B19/416
    • B25J9/1664G05B19/416G05B2219/40449G05B2219/40466H01L21/67259H01L21/67742H01L21/67766
    • A time-optimal trajectory generation method, for a robotic manipulator having a transport path with at least one path segment, comprising generating a forward time-optimal trajectory of the manipulator along the at least one path segment from a start point of the at least one path segment towards an end point of the at least one path segment, generating a reverse time-optimal trajectory of the manipulator along the at least one path segment from the end point towards the start point of the at least one path segment, and combining the time-optimal forward and reverse trajectories to obtain a complete time-optimal trajectory, where the forward and reverse trajectories of the at least one path segment are blended together with a smoothing bridge joining the time-optimal forward and reverse trajectories in a position-velocity reference frame with substantially no discontinuity between the time-optimal forward and reverse trajectories.
    • 一种用于具有至少一个路径段的传输路径的机器人操纵器的时间优化轨迹生成方法,包括从所述至少一个路径段的起始点沿着所述至少一个路径段生成所述操纵器的前向时间最优轨迹 路径段朝向所述至少一个路径段的终点,从所述至少一个路径段的终点向起始点沿着所述至少一个路径段产生所述操纵器的反时间最优轨迹,并将 时间最佳的正向和反向轨迹以获得完整的时间最优轨迹,其中至少一个路径段的前向和后向轨迹与平滑桥混合在一起,该平滑桥连接时间最优的前进和后退轨迹,位置速度 参考帧在时间最优的正向和反向轨迹之间基本上没有不连续性。
    • 3. 发明授权
    • Robot edge contact gripper
    • 机器人边缘接触夹具
    • US08801069B2
    • 2014-08-12
    • US13036876
    • 2011-02-28
    • Martin HosekJayaraman KrishnasamyLeonard T. Lilliston, III
    • Martin HosekJayaraman KrishnasamyLeonard T. Lilliston, III
    • H01L21/683B65G49/07
    • H01L21/68707H01L21/67742H01L21/67766H01L21/67781
    • An apparatus for gripping a substrate on its peripheral edge including a substrate support having proximate and distal ends, at least one distal rest pad disposed at the distal end, the at least one distal rest pad includes a back stop portion and is configured to support the peripheral edge of the substrate, at least one proximate rest pad disposed at the proximate end, the at least one proximate rest pad being configured to support the peripheral edge of the substrate, and an active contact member assembly disposed at the proximate end, the active contact member assembly including a pusher member, a contact member and a rotatable coupling member that are reciprocably movable towards the distal end for urging the substrate against the back stop portion, the contact member being rotatably secured to the pusher member and free to rotate about an axis of the rotatable coupling member.
    • 一种用于在其周缘上抓住基底的装置,包括具有近端和远端的基底支撑件,设置在远端的至少一个远端固定垫,所述至少一个远端休息垫包括后挡块部分, 至少一个邻近的安置垫,设置在所述近端处,所述至少一个邻近的衬垫被配置为支撑所述衬底的周边边缘,以及设置在所述近端的有源接触构件组件,所述活动 接触构件组件,包括推动构件,接触构件和可旋转的联接构件,所述推动构件,接触构件和可旋转的联接构件能够朝向远端可往复移动,用于将基板推靠在后止挡部分上,接触构件可旋转地固定到推动器构件并且可围绕 可旋转联接构件的轴线。
    • 4. 发明申请
    • TIME-OPTIMAL TRAJECTORIES FOR ROBOTIC TRANSFER DEVICES
    • 用于机器人传输设备的时间优化TRAJECTORIES
    • US20140249675A1
    • 2014-09-04
    • US14342035
    • 2012-08-30
    • Jayaraman KrishnasamyMartin Hosek
    • Jayaraman KrishnasamyMartin Hosek
    • B25J9/16
    • B25J9/1664G05B19/416G05B2219/40449G05B2219/40466H01L21/67259H01L21/67742H01L21/67766
    • A time-optimal trajectory generation method, for a robotic manipulator having a transport path with at least one path segment, comprising generating a forward time-optimal trajectory of the manipulator along the at least one path segment from a start point of the at least one path segment towards an end point of the at least one path segment, generating a reverse time-optimal trajectory of the manipulator along the at least one path segment from the end point towards the start point of the at least one path segment, and combining the time-optimal forward and reverse trajectories to obtain a complete time-optimal trajectory, where the forward and reverse trajectories of the at least one path segment are blended together with a smoothing bridge joining the time-optimal forward and reverse trajectories in a position-velocity reference frame with substantially no discontinuity between the time-optimal forward and reverse trajectories.
    • 一种用于具有至少一个路径段的传输路径的机器人操纵器的时间优化轨迹生成方法,包括从所述至少一个路径段的起始点沿着所述至少一个路径段生成所述操纵器的前向时间最优轨迹 路径段朝向所述至少一个路径段的终点,从所述至少一个路径段的终点向起始点沿着所述至少一个路径段产生所述操纵器的反时间最优轨迹,并将 时间最佳的正向和反向轨迹以获得完整的时间最优轨迹,其中至少一个路径段的前向和后向轨迹与平滑桥混合在一起,该平滑桥连接时间最优的前进和后退轨迹,位置速度 参考帧在时间最优的正向和反向轨迹之间基本上没有不连续性。
    • 8. 发明授权
    • High speed substrate aligner apparatus
    • 高速基板对准器
    • US08403619B2
    • 2013-03-26
    • US13030926
    • 2011-02-18
    • Jairo Terra MouraMartin HosekTodd BottomleyUlysses Gilchrist
    • Jairo Terra MouraMartin HosekTodd BottomleyUlysses Gilchrist
    • H01L21/68
    • H01L21/681Y10S414/136Y10S414/141
    • In accordance to an exemplary embodiment of the disclosed embodiments, a substrate aligner apparatus is presented, the substrate aligner apparatus having a frame adapted to allow a substrate transporter to transport a substrate to and from the aligner apparatus, an inverted chuck capable of holding the substrate and movably connected to the frame by a chuck driveshaft engaged to the inverted chuck for moving the inverted chuck relative to the frame and effecting alignment of the substrate, a sensing device located between the chuck and chuck driveshaft for detecting a position determining feature of the substrate, and a substrate transfer mechanism movably connected to the frame and located inside the frame below the inverted chuck for moving the substrate from the inverted chuck to the substrate transporter.
    • 根据所公开的实施例的示例性实施例,呈现基板对准器装置,衬底对准器装置具有框架,该框架适于允许衬底输送器将基板输送到对准器装置和从校准器装置输送基板,能够保持衬底的倒置卡盘 并且通过卡盘驱动轴可动地连接到所述框架,所述卡盘驱动轴接合到所述倒置的卡盘,用于相对于所述框架移动所述倒置的卡盘并实现所述基板的对准;位于所述卡盘和卡盘驱动轴之间的感测装置,用于检测所述基板的位置确定特征 以及可移动地连接到框架并且位于倒置卡盘下方的框架内部的基板传送机构,用于将基板从倒置卡盘移动到基板运送器。
    • 10. 发明申请
    • SYSTEM AND METHOD FOR POSITION SENSING
    • 用于位置感测的系统和方法
    • US20130057263A1
    • 2013-03-07
    • US13599930
    • 2012-08-30
    • Martin Hosek
    • Martin Hosek
    • G01B7/14
    • G01D5/2266
    • A system for position sensing includes an incremental track including a plurality of sectors and a measurement subsystem. The measurement subsystem includes at least two differential read-heads each having at least one primary coil and at least two differential secondary coils, the at least two differential secondary coils of one of the at least two differential read-heads configured to generate output signals having their amplitudes modulated by the sectors of the incremental track and the at least two differential secondary coils of the other of said two differential read-heads configured to generate output signals having their amplitudes modulated by the sectors of the incremental track.
    • 用于位置检测的系统包括包括多个扇区的增量轨迹和测量子系统。 测量子系统包括至少两个差分读取头,每个差分读取头具有至少一个初级线圈和至少两个差分次级线圈,所述至少两个差分读取头之一的至少两个差分次级线圈被配置为产生具有 所述两个差分读取头中的另一个的所述增量磁道的扇区和所述至少两个差分次级线圈的幅度被调制,所述至少两个差分次级线圈被配置为产生具有由所述增量磁道的扇区调制的幅度的输出信号。