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    • 3. 发明授权
    • Stable metallization for electronic and electromechanical devices
    • 电子和机电设备的稳定金属化
    • US06173612B1
    • 2001-01-16
    • US09187288
    • 1998-11-05
    • Ilan GoleckiMargaret Eagan
    • Ilan GoleckiMargaret Eagan
    • G01P1510
    • G01P15/097G01L1/183G01P15/0802G01P2015/0828
    • Described are various improved methods of forming electronic devices, electro-mechanical devices, force-sensing devices, and accelerometers. Also described are various improved electronic devices, electro-mechanical devices, force-sensing devices, and accelerometers. The device comprises a plurality of vibrating beams joined with a support portion and configured for movement relative to the support portion. A layer of electrically conductive material is disposed over at least some of the surface of the moveable portion and support portion, the layer comprising an inert or a noble material having a Young's modulus which is greater than that of elemental gold. Alternatively, the layer may comprise an inert material having a coefficient of expansion which is less than that of elemental gold.
    • 描述了形成电子装置,机电装置,力感测装置和加速度计的各种改进的方法。 还描述了各种改进的电子设备,机电装置,力感测装置和加速度计。 该装置包括多个与支撑部分结合的振动梁,并被配置为相对于支撑部分移动。 一层导电材料设置在可移动部分和支撑部分的至少一些表面上,该层包括具有大于元素金的杨氏模量的惰性或贵金属。 或者,该层可以包括具有小于元素金的膨胀系数的惰性材料。
    • 4. 发明授权
    • Ceramic turbine blade attachment having high temperature, high stress compliant layers and method of fabrication thereof
    • 具有高温,高应力柔性层的陶瓷涡轮叶片附件及其制造方法
    • US06811894B2
    • 2004-11-02
    • US10455830
    • 2003-06-06
    • Dave NarasimhanAlexander S. KozlovMargaret EaganMilton Ortiz
    • Dave NarasimhanAlexander S. KozlovMargaret EaganMilton Ortiz
    • B32B1500
    • F01D5/288C23C8/02C23C26/00F01D5/3084F01D5/3092F05C2201/0466F05D2300/143F05D2300/607Y02T50/67Y10T428/12611Y10T428/12771Y10T428/12778Y10T428/12847Y10T428/12854Y10T428/12875Y10T428/12889Y10T428/12937Y10T428/12944Y10T428/265
    • A nickel base single crystal compliant layer on a ceramic blade has the capability to sustain high stresses and high operating temperature. Layers of nickel and platinum bonded on a single crystal superalloy over a sputtered gold-chromium layer support the high stress levels at elevated temperature without extrusion of the soft platinum or nickel layer and without destruction of an NiO compliant surface. The compliant layers have survived stress and temperature conditions without failure to the ceramic blade and the system can be stressed/heated and unloaded/cooled repeatedly without damage to the ceramic blades. A single crystal nickel base superalloy (i.e., SC180) has high strength properties at elevated temperature. Thin layers of chromium followed by gold are e-beam evaporated on one side of a polished surface of the alloy. Pure nickel is electroplated over this e-beam gold-chromium layer. Platinum is either electroplated or plated electrolessly over the nickel layer. The structure is annealed in vacuum or inert atmosphere to allow the diffusion of gold-chromium alloy into the superalloy and permit the nickel layer and diffusion of nickel into platinum to form a multilayer structure which is metallurgically bonded. The sheet is oxidized in air to allow diffusion of the nickel layer through the platinum to come to the surface and oxidize forming nickel oxide. This nickel oxide layer acts as the load distribution layer which does not extrude and the structural integrity of the compliant layer is maintained by the high-strength single crystal superalloy.
    • 陶瓷刀片上的镍基单晶柔性层具有维持高应力和高工作温度的能力。 在溅射的金 - 铬层上结合在单晶超合金上的镍和铂层在升高的温度下支持高应力水平,而不会挤出软的铂或镍层,并且不破坏NiO柔顺表面。 柔性层在应力和温度条件下已经存活,而不会损坏陶瓷刀片,并且系统可以被重复地加压/加热和卸载/冷却,而不损坏陶瓷刀片。 单晶镍基超级合金(即SC180)在升高的温度下具有高强度性能。 在合金的抛光表面的一侧上电子束蒸发薄铬层后面的金。 在该电子束金 - 铬层上电镀纯镍。 将铂电镀或电镀在镍层上。 该结构在真空或惰性气氛中进行退火,以允许金 - 铬合金扩散到超合金中,并允许镍层和镍扩散到铂中以形成冶金结合的多层结构。 该片材在空气中被氧化以允许镍层通过铂的扩散进入表面并氧化形成的氧化镍。 该氧化镍层用作不挤出的载荷分布层,并且由高强度单晶超耐热合金维持柔顺层的结构完整性。