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1. 发明授权

US08510686B2 Inverse lithography for high transmission attenuated phase shift mask design and creation 有权
标题翻译：用于高透射衰减相移掩模设计和创建的反光刻技术
公开(公告)号：US08510686B2
公开(公告)日：2013-08-13
申请号：US13250971
申请日：2011-09-30
申请人： Eric Henri Jan Hendrickx , Alexander V. Tritchkov , Kyohei Sakajiri
发明人： Eric Henri Jan Hendrickx , Alexander V. Tritchkov , Kyohei Sakajiri
IPC分类号： G06F17/50
CPC分类号： G03F1/32 , G03F1/36
摘要： Various implementations of the invention provide for generation of a high transmission phase shift mask layout through inverse lithography techniques. In various implementations of the present invention, a set of mask data having a plurality of pixels is generated. The transmission value associated with each pixel may then be determined through an inverse lithography technique. With various implementations of the invention, the inverse lithography technique identifies an objective function, minimizes the objective function in relation to a simulation of the optical lithographic process, such that the transmission value, which is greater than 6%, may be determined.
摘要翻译：本发明的各种实施方案通过反光刻技术提供高透射相移掩模布局的产生。在本发明的各种实现中，生成具有多个像素的一组掩码数据。然后可以通过反光刻技术来确定与每个像素相关联的传输值。通过本发明的各种实施方案，逆光刻技术识别目标函数，使与光学光刻工艺的模拟相关的目标函数最小化，使得可以确定大于6％的透射值。

2. 发明授权

US08302039B2 Secure exchange of information in electronic design automation 有权
标题翻译：在电子设计自动化中安全交换信息
公开(公告)号：US08302039B2
公开(公告)日：2012-10-30
申请号：US12758640
申请日：2010-04-12
申请人： John G. Ferguson , Fedor G. Pikus , Kyohei Sakajiri , Laurence W. Grodd
发明人： John G. Ferguson , Fedor G. Pikus , Kyohei Sakajiri , Laurence W. Grodd
IPC分类号： G06F17/50 , G06F21/00 , G06F12/14 , H04L29/06
CPC分类号： G06Q40/04 , H04L9/0838 , H04L2209/16
摘要： Described herein are methods and systems for secure exchange of information related to electronic design automation. Information deemed sensitive and otherwise worthy of protection may be secured by methods such as encryption, obfuscation and other security measures. The secured information may be provided to an electronic design automation tool for processing without revealing at least some of the secured information. For instance, rule files related to integrated circuit manufacturability may be selectively annotated to indicate portions thereof deserving of protection. An encryption tool may be used to secure the information so indicated and generate a file comprising secured information related to electronic design automation. An electronic design automation tool may then unlock and use the secured information without revealing the same. For instance, the tool may be a physical verification tool capable of verifying whether any of the one or more integrated circuit layouts may violate one or more of the secured rules. An error report may be generated without revealing the secured rules.
摘要翻译：这里描述了用于安全地交换与电子设计自动化相关的信息的方法和系统。被视为敏感而其他值得保护的信息可以通过加密，混淆和其他安全措施等方法来保护。可以将安全信息提供给电子设计自动化工具用于处理，而不暴露至少一些安全信息。例如，可以选择性地注释与集成电路可制造性相关的规则文件，以指示其应得到保护的部分。可以使用加密工具来保护所指示的信息，并生成包括与电子设计自动化有关的安全信息的文件。然后，电子设计自动化工具可以解锁和使用安全信息，而不会泄露它们。例如，该工具可以是能够验证一个或多个集成电路布局中的任一个是否可能违反一个或多个安全规则的物理验证工具。可能会生成错误报告，而不会泄露安全规则。

3. 发明申请

US20110004856A1 Inverse Mask Design and Correction for Electronic Design 审中-公开
标题翻译：电子设计反面设计与校正
公开(公告)号：US20110004856A1
公开(公告)日：2011-01-06
申请号：US12710352
申请日：2010-02-22
申请人： Yuri Granik , Kyohei Sakajiri
发明人： Yuri Granik , Kyohei Sakajiri
IPC分类号： G06F17/50
CPC分类号： G03F1/36
摘要： Various implementations of the invention provide for the generation of “smooth” mask contours by inverse mask transmission derivation and by subsequently “smoothing” the derived mask contours by proximity correction.
摘要翻译：本发明的各种实现提供了通过逆掩模传输导出产生“平滑”掩模轮廓，并且随后通过接近校正“平滑”导出的掩模轮廓。

4. 发明申请

US20080148348A1 SECURE EXCHANGE OF INFORMATION IN ELECTRONIC DESIGN AUTOMATION 审中-公开
标题翻译：电子设计自动化信息安全交换
公开(公告)号：US20080148348A1
公开(公告)日：2008-06-19
申请号：US12036816
申请日：2008-02-25
申请人： John G. Ferguson , Fedor G. Pikus , Kyohei Sakajiri , Laurence W. Grodd
发明人： John G. Ferguson , Fedor G. Pikus , Kyohei Sakajiri , Laurence W. Grodd
IPC分类号： G06F21/00 , G06F21/24
CPC分类号： G06F21/6209 , G06F2221/2137
摘要： Information related to electronic design automation may be exchanged in a secure manner. Information deemed sensitive and otherwise worthy of protection may be secured by methods such as encryption, obfuscation and other security measures. The secured information may be processed without revealing at least some of the secured information. For instance, rule files related to integrated circuit manufacturability may be selectively annotated to indicate portions thereof deserving of protection. An encryption tool may be used to secure the information related to electronic design automation. An electronic design automation tool may then unlock and use the secured information without revealing the same. In one aspect, such access or secure use of the information may depend on one or more conditions being met (e.g., a time period or a number of uses or accesses). For instance, the tool may be a physical verification tool capable of verifying whether any of the one or more integrated circuit layouts may violate one or more of the secured rules.
摘要翻译：与电子设计自动化相关的信息可以以安全的方式交换。被视为敏感而其他值得保护的信息可以通过加密，混淆和其他安全措施等方法来保护。可以处理安全信息，而不泄露至少一些安全信息。例如，可以选择性地注释与集成电路可制造性相关的规则文件，以指示其应得到保护的部分。可以使用加密工具来保护与电子设计自动化有关的信息。然后，电子设计自动化工具可以解锁和使用安全信息，而不会泄露它们。在一个方面，信息的这种访问或安全使用可以取决于满足的一个或多个条件（例如，一个时间段或多个使用或访问）。例如，该工具可以是能够验证一个或多个集成电路布局中的任一个是否可能违反一个或多个安全规则的物理验证工具。

5. 发明授权

US07222312B2 Secure exchange of information in electronic design automation 有权
标题翻译：在电子设计自动化中安全交换信息
公开(公告)号：US07222312B2
公开(公告)日：2007-05-22
申请号：US10895485
申请日：2004-07-20
申请人： John G. Ferguson , Fedor G. Pikus , Kyohei Sakajiri , Laurence W. Grodd
发明人： John G. Ferguson , Fedor G. Pikus , Kyohei Sakajiri , Laurence W. Grodd
IPC分类号： G06F17/50 , G04Q99/00 , H04L9/00 , H04L9/3213
CPC分类号： G06Q40/04 , H04L9/0838 , H04L2209/16
摘要： Described herein are methods and systems for secure exchange of information related to electronic design automation. Information deemed sensitive and otherwise worthy of protection may be secured by methods such as encryption, obfuscation and other security measures. The secured information may be provided to an electronic design automation tool for processing without revealing at least some of the secured information. For instance, rule files related to integrated circuit manufacturability may be selectively annotated to indicate portions thereof deserving of protection. An encryption tool may be used to secure the information so indicated and generate a file comprising secured information related to electronic design automation. An electronic design automation tool may then unlock and use the secured information without revealing the same. For instance, the tool may be a physical verification tool capable of verifying whether any of the one or more integrated circuit layouts may violate one or more of the secured rules. An error report may be generated without revealing the secured rules.
摘要翻译：这里描述了用于安全地交换与电子设计自动化相关的信息的方法和系统。被视为敏感而其他值得保护的信息可以通过加密，混淆和其他安全措施等方法来保护。可以将安全信息提供给电子设计自动化工具用于处理，而不暴露至少一些安全信息。例如，可以选择性地注释与集成电路可制造性相关的规则文件，以指示其应得到保护的部分。可以使用加密工具来保护所指示的信息，并生成包括与电子设计自动化有关的安全信息的文件。然后，电子设计自动化工具可以解锁和使用安全信息，而不会泄露它们。例如，该工具可以是能够验证一个或多个集成电路布局中的任一个是否可能违反一个或多个安全规则的物理验证工具。可能会生成错误报告，而不会泄露安全规则。

6. 发明授权

US06817003B2 Short edge management in rule based OPC 有权
标题翻译：基于规则的OPC的边缘管理
公开(公告)号：US06817003B2
公开(公告)日：2004-11-09
申请号：US10402079
申请日：2003-03-26
申请人： George P. Lippincott , Kyohei Sakajiri , Laurence W. Grodd
发明人： George P. Lippincott , Kyohei Sakajiri , Laurence W. Grodd
IPC分类号： G06F1750
CPC分类号： G06F17/5068 , G06F17/5081
摘要： The invention discloses a method and apparatus for modifying, as appropriate, the geometries of a polygon. Based on various attributes associated with the polygon and its surroundings, modification of the location of the edge segments may conditionally occur. Additionally, if these modifications occur, a method to minimize the introduction of short edges during the modification is provided.

7. 发明申请

US20100216061A1 Inverse Lithography For High Transmission Attenuated Phase Shift Mask Design And Creation 审中-公开
标题翻译：高透光衰减相移掩模设计与制作的反光刻技术
公开(公告)号：US20100216061A1
公开(公告)日：2010-08-26
申请号：US12416037
申请日：2009-03-31
申请人： Eric Henri Jan Hendrickx , Alexander V. Tritchkov , Kyohei Sakajiri
发明人： Eric Henri Jan Hendrickx , Alexander V. Tritchkov , Kyohei Sakajiri
IPC分类号： G03F1/00 , G06F17/50
CPC分类号： G03F1/32 , G03F1/36
摘要： Various implementations of the invention provide for generation of a high transmission phase shift mask layout through inverse lithography techniques. In various implementations of the present invention, a set of mask data having a plurality of pixels is generated. The transmission value associated with each pixel may then be determined through an inverse lithography technique. With various implementations of the invention, the inverse lithography technique identifies an objective function, minimizes the objective function in relation to a simulation of the optical lithographic process, such that the transmission value, which is greater than 6%, may be determined.
摘要翻译：本发明的各种实施方案通过反光刻技术提供高透射相移掩模布局的产生。在本发明的各种实现中，生成具有多个像素的一组掩码数据。然后可以通过反光刻技术来确定与每个像素相关联的传输值。通过本发明的各种实施方案，逆光刻技术识别目标函数，使与光学光刻工艺的模拟相关的目标函数最小化，使得可以确定大于6％的透射值。

8. 发明申请

US20060259978A1 Secure exchange of information in electronic design automation with license-related key generation 审中-公开
标题翻译：电子设计自动化中的信息安全交换与许可证相关的密钥生成
公开(公告)号：US20060259978A1
公开(公告)日：2006-11-16
申请号：US11393457
申请日：2006-03-29
申请人： Fedor Pikus , John Ferguson , Kyohei Sakajiri , Laurence Grodd
发明人： Fedor Pikus , John Ferguson , Kyohei Sakajiri , Laurence Grodd
IPC分类号： H04N7/16
CPC分类号： G06F17/5081 , H04L9/0833 , H04L9/0844 , H04L9/0866
摘要： Electronic data can be exchanged in a secure manner. Information deemed sensitive and otherwise worthy of protection may be secured by methods such as encryption, obfuscation and other security measures. The secured information can be processed without revealing at least some of the secured information. For instance, rule files related to integrated circuit manufacturability may be selectively annotated to indicate portions thereof deserving of protection. An encryption tool can be used to secure the information. A system can then unlock and use the secured information without revealing the same. In one desirable aspect, information can be encrypted or decrypted using a key, the key being generated based on licensing information associated with a software application.
摘要翻译：可以以安全的方式交换电子数据。被视为敏感而其他值得保护的信息可以通过加密，混淆和其他安全措施等方法来保护。可以处理安全信息，而不泄露至少一些安全信息。例如，可以选择性地注释与集成电路可制造性相关的规则文件，以指示其应得到保护的部分。可以使用加密工具来保护信息。然后，系统可以解锁和使用安全信息，而不会显示相同的信息。在一个理想的方面，可以使用密钥来加密或解密信息，所述密钥是基于与软件应用相关联的许可信息生成的。

9. 发明申请

US20050071659A1 Secure exchange of information in electronic design automation 有权
标题翻译：在电子设计自动化中安全交换信息
公开(公告)号：US20050071659A1
公开(公告)日：2005-03-31
申请号：US10895485
申请日：2004-07-20
申请人： John Ferguson , Fedor Pikus , Kyohei Sakajiri , Laurence Grodd
发明人： John Ferguson , Fedor Pikus , Kyohei Sakajiri , Laurence Grodd
IPC分类号： H04L9/08 , H04L9/30 , H04L9/00
CPC分类号： G06Q40/04 , H04L9/0838 , H04L2209/16
摘要： Described herein are methods and systems for secure exchange of information related to electronic design automation. Information deemed sensitive and otherwise worthy of protection may be secured by methods such as encryption, obfuscation and other security measures. The secured information may be provided to an electronic design automation tool for processing without revealing at least some of the secured information. For instance, rule files related to integrated circuit manufacturability may be selectively annotated to indicate portions thereof deserving of protection. An encryption tool may be used to secure the information so indicated and generate a file comprising secured information related to electronic design automation. An electronic design automation tool may then unlock and use the secured information without revealing the same. For instance, the tool may be a physical verification tool capable of verifying whether any of the one or more integrated circuit layouts may violate one or more of the secured rules. An error report may be generated without revealing the secured rules.
摘要翻译：这里描述了用于安全地交换与电子设计自动化相关的信息的方法和系统。被视为敏感而其他值得保护的信息可以通过加密，混淆和其他安全措施等方法来保护。可以将安全信息提供给电子设计自动化工具用于处理，而不暴露至少一些安全信息。例如，可以选择性地注释与集成电路可制造性相关的规则文件，以指示其应得到保护的部分。可以使用加密工具来保护所指示的信息，并生成包括与电子设计自动化有关的安全信息的文件。然后，电子设计自动化工具可以解锁和使用安全信息，而不会泄露它们。例如，该工具可以是能够验证一个或多个集成电路布局中的任一个是否可能违反一个或多个安全规则的物理验证工具。可能会生成错误报告，而不会泄露安全规则。

10. 发明授权

US06455205B1 Method and apparatus for determining phase shifts and trim masks for an integrated circuit 有权
标题翻译：用于确定集成电路的相移和修剪掩模的方法和装置
公开(公告)号：US06455205B1
公开(公告)日：2002-09-24
申请号：US10017357
申请日：2001-12-13
申请人： Nicolas Bailey Cobb , Kyohei Sakajiri
发明人： Nicolas Bailey Cobb , Kyohei Sakajiri
IPC分类号： G03H104
CPC分类号： G03F1/26 , G03F1/70 , G03F7/2026
摘要： A method and apparatus for deep sub-micron layout optimization is described. Components of an integrated circuit (IC) design (e.g., gates) can be identified and manufactured using a phase shifting process to improve circuit density and/or performance as compared to a circuit manufactured without using phase shifting processes. In one embodiment, a first mask (e.g., a phase shift mask) is generated that includes the component to be manufactured using the phase shifting process. A second mask (e.g., a trim mask) is also generated to further process the structure created using the first mask. Both masks are defined based on a region (e.g., a diffusion region) in a different layer of the integrated circuit layout than the structure (e.g., the gate) being created with the phase shifting process.
摘要翻译：描述了深亚微米布局优化的方法和装置。与不使用相移处理而制造的电路相比，可以使用相移过程来识别和制造集成电路（IC）设计（例如，门）的组件以改善电路密度和/或性能。在一个实施例中，产生包括使用相移处理来制造的部件的第一掩模（例如，相移掩模）。还产生第二掩模（例如，修剪掩模）以进一步处理使用第一掩模产生的结构。基于集成电路布局的不同层中的区域（例如，扩散区域）来定义两个掩模，而不是通过相移过程创建的结构（例如，栅极）。

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