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1. 发明授权

US08831060B2 Laser 有权
标题翻译：激光
公开(公告)号：US08831060B2
公开(公告)日：2014-09-09
申请号：US13805363
申请日：2011-06-10
申请人： Ulrich Weichmann , Matthias Alexander Wilhelm Fechner , Fabian Reichert , Herbert Walter Klaus Petermann , Gunter Huber
发明人： Ulrich Weichmann , Matthias Alexander Wilhelm Fechner , Fabian Reichert , Herbert Walter Klaus Petermann , Gunter Huber
IPC分类号： H01S3/14 , H01S3/08 , C09K11/77 , H01S3/16 , H04N9/31 , H01S3/06 , H01S3/091 , H01S3/00 , H01S3/0933 , H01S3/09 , H01S3/0941 , H01S3/23 , H01S5/323
CPC分类号： H01S3/08 , C09K11/7718 , H01S3/00 , H01S3/0602 , H01S3/09 , H01S3/091 , H01S3/0933 , H01S3/0941 , H01S3/09415 , H01S3/1603 , H01S3/1668 , H01S3/2391 , H01S5/32341 , H04N9/3161
摘要： The invention relates to a laser (1) for emitting laser light in the visible spectral range. A rare earth doped anisotropic crystal (2) comprising a 5d-4f transition is arranged within a laser resonator (7, 8), and a pumping light source (3) pumps the crystal (2) for generating laser light in the visible spectral range by using the 5d-4f transition. The 5d-4f transition of the rare earth doped anisotropic crystal comprises an absorption band extending over several nm. Thus, pump light having a wavelength within a relatively broad wavelength range can be used. This reduces the requirements with respect to the wavelength accuracy of the pumping light source and, thus, more pumping light sources of an amount of produced pumping light sources can be used for assembling the laser, thereby reducing the amount of rejects.
摘要翻译：本发明涉及一种用于在可见光谱范围内发射激光的激光器（1）。在激光谐振器（7,8）内布置包括5d-4f跃迁的稀土掺杂各向异性晶体（2），泵浦光源（3）泵送用于产生可见光谱范围内的激光的晶体（2）通过使用5d-4f转换。稀土掺杂各向异性晶体的5d-4f跃迁包括延伸几nm的吸收带。因此，可以使用波长在相对宽的波长范围内的泵浦光。这降低了对于泵浦光源的波长精度的要求，因此，可以使用一定数量的产生的泵浦光源的更多的泵浦光源来组装激光器，从而减少了废品的数量。

2. 发明申请

US20130248764A1 METHOD FOR INCREASING THE CONTENT OF CE3+ IN LASER MATERIALS 审中-公开
标题翻译：增加CE3 +在激光材料中的含量的方法
公开(公告)号：US20130248764A1
公开(公告)日：2013-09-26
申请号：US13989566
申请日：2011-12-02
申请人： Ulrich Weichmann , Matthias Alexander Wilhelm Fechner , Fabian Reichert , Herbert Walter Klaus Petermann , Gunter Huber
发明人： Ulrich Weichmann , Matthias Alexander Wilhelm Fechner , Fabian Reichert , Herbert Walter Klaus Petermann , Gunter Huber
IPC分类号： C30B9/04 , C30B29/26 , C09K11/77
CPC分类号： C30B9/04 , C09K11/7718 , C30B9/00 , C30B29/24 , C30B29/26 , C30B33/02
摘要： The invention relates to a method of making Ce3+ containing laser materials with a fast cooling rate. This has been shown to dramatically increase the absorption rate of the 4f-5d-transition of Ce3+ within the laser material
摘要翻译：本发明涉及制备具有快速冷却速度的含Ce 3+激光材料的方法。已经显示出，激光材料中Ce3 +的4f-5d转变的吸收率显着增加

3. 发明授权

US4529313A Ring interferometer 失效
标题翻译：环形干涉仪
公开(公告)号：US4529313A
公开(公告)日：1985-07-16
申请号：US333816
申请日：1981-12-23
申请人： Klaus Petermann , Peter Russer
发明人： Klaus Petermann , Peter Russer
IPC分类号： G01C19/72 , G01P3/36 , G01B9/02 , G01C19/64
CPC分类号： G01C19/72
摘要： A ring interferometer comprises a light source, an optical beam splitting device for receiving light from the light source, a light path encircling an area at least once and opening at both ends into the optical beam splitting device and a photodetector for detecting light from the light path. The light which enters the light path and is coupled to the optical beam splitting device at both ends passes through the light path in both directions. The light then reunites in the beam splitting device and thereby is brought into interference which is detected by the photodetector. The light source is chosen to produce light which has a coherence time which is substantially shorter than the propagation time of light through the light path.
摘要翻译：环形干涉仪包括光源，用于接收来自光源的光的光束分离装置，包围至少一次并在两端开口的区域的光路进入光束分离装置和用于检测来自光的光的光电检测器路径。进入光路并且耦合到两端的光束分离装置的光在两个方向上通过光路。然后，光束在分束装置中重聚，从而被光检测器检测到的干涉。选择光源以产生具有明显短于通过光路的光的传播时间的相干时间的光。

4. 发明授权

US5993545A Crucible for growing single crystals, process for making the same and use of the same 失效
标题翻译：用于生长单晶的坩埚，制造相同的过程和使用相同
公开(公告)号：US5993545A
公开(公告)日：1999-11-30
申请号：US5327
申请日：1998-01-09
申请人： David Francis Lupton , Jorg Schielke , Manfred Weigelt , Klaus Petermann , Eric Mix , Livio Fornasiero
发明人： David Francis Lupton , Jorg Schielke , Manfred Weigelt , Klaus Petermann , Eric Mix , Livio Fornasiero
IPC分类号： C30B11/00 , C30B15/10 , C30B29/22 , C30B35/00
CPC分类号： C30B35/002 , C30B11/002 , C30B15/10 , Y10T117/1032 , Y10T117/108
摘要： A sintered rhenium crucible, highly suitable for growing single crystals from refractory metal oxides, for example by the Czochralski technique, is formed of fine rhenium powder, by sintering. A compact is formed by cold isostatic pressing and thereafter the compact is sintered at 500-2800.degree. C. to obtain a sintered crucible. Product density is limited to 88-95% of theroretical in order to maximize creep resistance.
摘要翻译：烧结的铼坩埚由熔融金属氧化物生长的单晶，例如通过Czochralski技术生产，是通过烧结由细铼粉末形成的。通过冷等静压法形成压块，然后在500-2800℃下烧结压块以获得烧结坩埚。产品密度限于88-95％的理论值，以最大化抗蠕变性。

5. 发明授权

US5280189A Semiconductor element with a silicon layer 失效
标题翻译：具有硅层的半导体元件
公开(公告)号：US5280189A
公开(公告)日：1994-01-18
申请号：US941051
申请日：1992-12-02
申请人： Bernd Schuppert , Armin Splett , Joachim Schmidtchen , Klaus Petermann
发明人： Bernd Schuppert , Armin Splett , Joachim Schmidtchen , Klaus Petermann
IPC分类号： G02B6/12 , G02B6/42 , G02F1/015 , G02F1/025 , H01L31/10 , H01L31/105 , H01L31/108 , H01L29/165 , H01L31/00
CPC分类号： H01L31/105 , G02B6/12004 , G02B6/42 , G02F1/025 , G02F2001/0151 , G02F2202/105
摘要： In a semiconductor element is shown having a silicon layer, a waveguide comprising silicon and a diode structure connected with external, conductive contacts. The diode structure is provided in such an arrangement to the waveguide that the diode structure can be influenced by electron hole pairs generated by photons in the waveguide. In order to create a semiconductor element with an optical waveguide and an integrated diode structure, in which high losses in the optical waveguide are avoided, the waveguide is weakly doped, and a germanium-rich layer is a component of the diode structure. The semiconductor element is well suited as a component in integrated optics for optical-electrical conversion.
摘要翻译：在具有硅层（1），含硅波导（2）和连接到外部导电触点（6,7）的二极管结构的半导体部件中，二极管结构与波导（2）的布置在它可以受到光子在波导（2）中产生的电子 - 空穴对的影响。为了构建具有光波导（2）的半导体部件和其中避免了光波导（2）的高损耗的集成二极管结构，波导（2）被轻微掺杂，锗层是二极管结构的一部分。该半导体元件适用于光电转换的集成光学元件。

6. 发明授权

US4359775A Semiconductor laser 失效
标题翻译：半导体激光器
公开(公告)号：US4359775A
公开(公告)日：1982-11-16
申请号：US178568
申请日：1980-08-15
申请人： Peter Marschall , Klaus Petermann , Ewald Schlosser , Hans-Peter Vollmer , Claus Wolk
发明人： Peter Marschall , Klaus Petermann , Ewald Schlosser , Hans-Peter Vollmer , Claus Wolk
IPC分类号： H01S5/00 , H01S5/20 , H01S5/323 , H01S3/19
CPC分类号： H01S5/32308 , H01S5/20 , H01S5/2059
摘要： A semi-conductor laser comprising a crystal having a sequence of layers forming a heterostructure diode and which includes a laser active zone interposed between a pair of semiconductor layers. Each of these semi-conductor layers has a band gap which is greater than that of the layers within the laser active zone. The laser active zone includes a first semiconductor layer having a given band gap, and at least second and third semiconductor layers each having a band gap which is greater than that of the first layer. The first layer is contiguous with and interposed between semiconductor layers each having a band gap which is greater than that of said first layer and forms a pn-junction with one of those contiguous layers. A strip-shaped region of a uniform conductivity type diffused from the surface of the crystal penetrates into at least one layer of the laser active zone but does not penetrate into the first layer.
摘要翻译：一种半导体激光器，包括具有形成异质结构二极管的层序列的晶体，并且包括插入在一对半导体层之间的激光器活性区域。这些半导体层中的每一个具有比激光活性区内的层的带隙大的带隙。激光活性区域包括具有给定带隙的第一半导体层，以及至少第二和第三半导体层，每个半导体层的带隙大于第一层的带隙。第一层与每个具有大于所述第一层的带隙的带隙相邻并且插入在半导体层之间并且与这些邻接层之一形成pn结。从晶体表面扩散的均匀导电类型的条状区域穿透至激光活性区域的至少一层，但不会渗入第一层。

7. 发明授权

US07679806B2 Method for making optical elements for microlithography, the lens systems obtained by the method and their uses 有权
标题翻译：用于制造用于微光刻的光学元件的方法，通过该方法获得的透镜系统及其用途
公开(公告)号：US07679806B2
公开(公告)日：2010-03-16
申请号：US11369306
申请日：2006-03-07
申请人： Gunther Wehrhan , Regina Martin , Lutz Parthier , Joerg Staeblein , Martin Letz , Jochen Alkemper , Konrad Knapp , Klaus Petermann
发明人： Gunther Wehrhan , Regina Martin , Lutz Parthier , Joerg Staeblein , Martin Letz , Jochen Alkemper , Konrad Knapp , Klaus Petermann
IPC分类号： G02F1/01 , G06K7/10 , F21V9/06
CPC分类号： C30B29/28 , C30B15/00 , G02B1/02 , G02B13/143 , G03F7/70341 , G03F7/70958
摘要： The optical elements for ultraviolet radiation, especially for microlithography, are made from cubic granet, cubic spinel, cubic perovskite and/or cubic M(II)- as well as M(IV)-oxides. The optical elements are made from suitable crystals of Y3Al5O12, Lu3Al5O12, Ca3Al2Si3O12, K2NaAlF6, K2NaScF6, K2LiAlF6 and/or Na3Al2Li3F12, (Mg, Zn)Al2O4, CaAl2O4, CaB2O4 and/or LiAl5O8, BaZrO3 and/or CaCeO3. A front lens used in immersion optics for microlithography at wavelengths under 200 nm is an example of a preferred optical element of the present invention.
摘要翻译：用于紫外线辐射的光学元件，特别是用于微光刻，由立方晶粒，立方尖晶石，立方钙钛矿和/或立方M（II）以及M（IV） - 氧化物制成。光学元件由合适的Y3Al5O12，Lu3Al5O12，Ca3Al2Si3O12，K2NaAlF6，K2NaScF6，K2LiAlF6和/或Na3Al2Li3F12，（Mg，Zn）Al2O4，CaAl2O4，CaB2O4和/或LiAl5O8，BaZrO3和/或CaCeO3的晶体制成。用于200nm以下波长的微光刻的浸没光学元件的前透镜是本发明的优选光学元件的一个例子。

8. 发明申请

US20130094533A1 LASER 有权
标题翻译：激光
公开(公告)号：US20130094533A1
公开(公告)日：2013-04-18
申请号：US13805363
申请日：2011-06-10
申请人： Ulrich Weichmann , Matthias Alexander Wilhelm Fechner , Fabian Reichert , Herbert Walter Klaus Petermann , Gunter Huber
发明人： Ulrich Weichmann , Matthias Alexander Wilhelm Fechner , Fabian Reichert , Herbert Walter Klaus Petermann , Gunter Huber
IPC分类号： H01S3/08
CPC分类号： H01S3/08 , C09K11/7718 , H01S3/00 , H01S3/0602 , H01S3/09 , H01S3/091 , H01S3/0933 , H01S3/0941 , H01S3/09415 , H01S3/1603 , H01S3/1668 , H01S3/2391 , H01S5/32341 , H04N9/3161
摘要： The invention relates to a laser (1) for emitting laser light in the visible spectral range. A rare earth doped anisotropic crystal (2) comprising a 5d-4f transition is arranged within a laser resonator (7, 8), and a pumping light source (3) pumps the crystal (2) for generating laser light in the visible spectral range by using the 5d-4f transition. The 5d-4f transition of the rare earth doped anisotropic crystal comprises an absorption band extending over several nm. Thus, pump light having a wavelength within a relatively broad wavelength range can be used. This reduces the requirements with respect to the wavelength accuracy of the pumping light source and, thus, more pumping light sources of an amount of produced pumping light sources can be used for assembling the laser, thereby reducing the amount of rejects.
摘要翻译：本发明涉及一种用于在可见光谱范围内发射激光的激光器（1）。在激光谐振器（7,8）内布置包括5d-4f跃迁的稀土掺杂各向异性晶体（2），泵浦光源（3）泵送用于产生可见光谱范围内的激光的晶体（2）通过使用5d-4f转换。稀土掺杂各向异性晶体的5d-4f跃迁包括延伸几nm的吸收带。因此，可以使用波长在相对宽的波长范围内的泵浦光。这降低了对于泵浦光源的波长精度的要求，因此，可以使用一定数量的产生的泵浦光源的更多的泵浦光源来组装激光器，从而减少了废品的数量。

9. 发明申请

US20060245043A1 Method for making optical elements for microlithography, the lens systems obtained by the method and their uses 有权
标题翻译：用于制造用于微光刻的光学元件的方法，通过该方法获得的透镜系统及其用途
公开(公告)号：US20060245043A1
公开(公告)日：2006-11-02
申请号：US11369306
申请日：2006-03-07
申请人： Gunther Wehrhan , Regina Martin , Lutz Parthier , Joerg Staeblein , Martin Letz , Jochen Alkemper , Konrad Knapp , Klaus Petermann
发明人： Gunther Wehrhan , Regina Martin , Lutz Parthier , Joerg Staeblein , Martin Letz , Jochen Alkemper , Konrad Knapp , Klaus Petermann
IPC分类号： G06K7/10
CPC分类号： C30B29/28 , C30B15/00 , G02B1/02 , G02B13/143 , G03F7/70341 , G03F7/70958
摘要： The optical elements for ultraviolet radiation, especially for microlithography, are made from cubic granatite, cubic spinel, cubic perovskite and/or cubic M(II)- as well as M(IV)-oxides. The optical elements are made from suitable crystals of Y3Al5O12, Lu3Al5O12, Ca3Al2Si3O12, K2NaAlF6, K2NaScF6, K2LiAlF6 and/or Na3Al2Li3F12, (Mg, Zn)Al2O4, CaAl2O4, CaB2O4 and/or LiAl5O8, BaZrO3 and/or CaCeO3. A front lens used in immersion optics for microlithography at wavelengths under 200 nm is an example of a preferred optical element of the present invention.
摘要翻译：用于紫外线辐射的光学元件，特别是用于微光刻，由立方晶体青瓷，立方尖晶石，立方钙钛矿和/或立方M（II） - 以及M（IV） - 氧化物制成。光学元件由合适的Y 3 N 2 O 12 N 12 O 12 N 12， 5 12 2，3 3 2 >，K 2 NaAlF 6，K 2 NaScF 6，K 2 LiAlF 6和/或Na 3 Al 2 N 2 N 2 F 12，（Mg ，Zn）Al 2 O 4，CaAl 2 O 4，CaB 2 O 3， O 4和/或LiAl 5 O 8，BaZrO 3和/或CaCeO 3， SUB>。用于200nm以下波长的微光刻的浸没光学元件的前透镜是本发明的优选光学元件的一个例子。

10. 发明申请

US20050089274A1 Planar optical apparatus for setting the chromatic dispersion in an optical system 失效
标题翻译：用于设置光学系统中的色散的平面光学装置
公开(公告)号：US20050089274A1
公开(公告)日：2005-04-28
申请号：US10850338
申请日：2004-05-19
申请人： Klaus Petermann , Fabian Kerbstadt
发明人： Klaus Petermann , Fabian Kerbstadt
IPC分类号： G02B6/34 , G02B6/12
CPC分类号： G02B6/12014 , G02B6/12021
摘要： A planar optical apparatus for setting the chromatic dispersion in an optical system, which apparatus has: a waveguide input structure with a first free-beam region, a first phase grating, connected to the first free-beam region, for spatially separating the spectral components of a signal, a second free-beam region, connected to the first phase grating, an optical element for spatially dependent modification of the phase of the spatially separated spectral components in the second free-beam region, a second phase grating, connected to the second free-beam region, for combining the spectral components, with their phase modified, and a waveguide output structure with a third free-beam region. In this case, the optical element for spatially dependent modification of the phase of the spatially separated spectral components includes a first phase plate that can be displaced in the second free-beam region.
摘要翻译：一种用于设置光学系统中的色散的平面光学装置，该装置具有：具有第一自由度区域的波导输入结构，连接到第一自由度区域的第一相位光栅，用于空间上分离光谱分量连接到第一相位光栅的第二自由光束区域，用于空间上相关地修改第二自由光束区域中的空间分离的光谱分量的相位的光学元件，连接到第二相位光栅的第二相位光栅用于组合光谱分量及其相位改变的第二自由光束区域和具有第三自由光束区域的波导输出结构。在这种情况下，用于空间上分离的光谱分量的相位的空间依赖性修改的光学元件包括可以在第二自由光束区域中移位的第一相位板。

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