会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明授权
    • Perpendicular magnetic recording head
    • 垂直磁记录头
    • US07672081B2
    • 2010-03-02
    • US11503296
    • 2006-08-14
    • Chee-kheng LimEun-sik KimYong-su Kim
    • Chee-kheng LimEun-sik KimYong-su Kim
    • G11B5/127
    • G11B5/012G11B5/1278G11B5/3116G11B5/3146G11B2005/0029
    • A perpendicular magnetic recording head which moves in a track direction of a recording layer of a perpendicular magnetic recording medium to write information on the recording layer or read information from the recording layer. The perpendicular magnetic recording head includes: the perpendicular magnetic recording medium including a soft magnetic underlayer and the recording layer; a write head including a main pole that applies a magnetic field to, and writes information to, the recording layer and a return pole having a first end which is connected to the main pole and having a second end which is spaced apart from the main pole over an air bearing surface (ABS) of the perpendicular magnetic recording head which is adjacent to the recording layer; and a permanent magnet formed on at least one side of the write head.
    • 垂直磁记录头,其在垂直磁记录介质的记录层的轨道方向上移动以在记录层上写入信息或从记录层读取信息。 垂直磁记录头包括:包括软磁性底层和记录层的垂直磁记录介质; 写头,其包括向记录层施加磁场并向其写入信息的主极;以及返回极,其具有连接到主极的第一端,并且具有与主极间隔开的第二端 在与记录层相邻的垂直磁记录头的空气轴承表面(ABS)上; 以及形成在所述写入头的至少一侧上的永磁体。
    • 8. 发明申请
    • Multi-bit magnetic memory device using spin-polarized current and methods of manufacturing and operating the same
    • 使用自旋极化电流的多位磁存储器件及其制造和操作方法
    • US20070206405A1
    • 2007-09-06
    • US11347228
    • 2006-02-06
    • Chee-kheng LimYong-su Kim
    • Chee-kheng LimYong-su Kim
    • G11C11/00
    • H01L43/08B82Y10/00G11C11/16G11C11/5607H01L27/228
    • A multi-bit magnetic memory device using a spin-polarized current and methods of manufacturing and operating the same. The magnetic memory device includes a switching device and a magnetic storage node connected to the switching device, wherein the magnetic storage node includes a first magnetic layer, a second magnetic layer and a free magnetic layer which are vertically and separately disposed from one another. The first and second magnetic layer have transmission characteristics opposite to each other for spin-polarized electrons, and have magnetic polarizations that are opposite to each other. The free magnetic layer may include first and second free magnetic layers, which are separately disposed from each other. The magnetic storage node may further include third and fourth magnetic layers that are separately disposed between the first and second free magnetic layers.
    • 使用自旋极化电流的多位磁存储器件及其制造和操作方法。 磁存储器件包括连接到开关器件的开关器件和磁存储节点,其中磁存储节点包括彼此垂直且分开设置的第一磁性层,第二磁性层和自由磁性层。 第一和第二磁性层对于自旋极化电子具有彼此相反的传输特性,并且具有彼此相反的磁极化。 自由磁性层可以包括彼此分开设置的第一和第二自由磁性层。 磁存储节点还可以包括分开设置在第一和第二自由磁性层之间的第三和第四磁性层。
    • 10. 发明授权
    • Method to eliminate top metal corner shaping during bottom metal patterning for MIM capacitors via plasma ashing and hard masking technique
    • 用于通过等离子体灰化和硬掩蔽技术消除MIM电容器底金属图案化期间的顶部金属角成形的方法
    • US06319767B1
    • 2001-11-20
    • US09798639
    • 2001-03-05
    • Randall Cher Liang ChaTae Jong LeeAlex SeeLap ChanYeow Kheng Lim
    • Randall Cher Liang ChaTae Jong LeeAlex SeeLap ChanYeow Kheng Lim
    • H01L218242
    • H01L28/60H01L21/31122H01L21/31144H01L21/32136H01L21/32139
    • A method for fabricating a metal-insulator-metal capacitor wherein top metal corner shaping during patterning is eliminated is described. An insulating layer is provided overlying a semiconductor substrate. A composite metal stack is formed comprising a first metal layer overlying the insulating layer, a capacitor dielectric layer overlying the first metal layer, a second metal layer overlying the capacitor dielectric layer, and a hard mask layer overlying the second metal layer. A first photoresist mask is formed overlying the hard mask layer. The composite metal stack is patterned using the first photoresist mask as an etching mask whereby the patterned first metal layer forms a bottom electrode of the capacitor. A portion of the first photoresist mask is removed by plasma ashing to form a second photoresist mask narrower than the first photoresist mask. The hard mask layer is patterned using the second photoresist mask as an etching mask. The second metal layer is patterned using the hard mask layer as an etching mask whereby the second metal layer forms a top electrode of the capacitor to complete fabrication of a metal-insulator-metal capacitor.
    • 描述了一种用于制造金属 - 绝缘体 - 金属电容器的方法,其中消除了图案化期间的顶部金属角成形。 绝缘层设置在半导体衬底上。 形成复合金属堆叠,其包括覆盖绝缘层的第一金属层,覆盖第一金属层的电容器电介质层,覆盖电容器电介质层的第二金属层和覆盖第二金属层的硬掩模层。 第一光致抗蚀剂掩模形成在硬掩模层上。 使用第一光致抗蚀剂掩模将复合金属堆叠图案化为蚀刻掩模,由此图案化的第一金属层形成电容器的底部电极。 通过等离子体灰化除去第一光致抗蚀剂掩模的一部分,以形成比第一光致抗蚀剂掩模窄的第二光刻胶掩模。 使用第二光致抗蚀剂掩模将硬掩模层图案化为蚀刻掩模。 使用硬掩模层作为蚀刻掩模对第二金属层进行构图,由此第二金属层形成电容器的顶部电极,以完成金属 - 绝缘体 - 金属电容器的制造。