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    • 6. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07652917B2
    • 2010-01-26
    • US12260124
    • 2008-10-29
    • Yasushi OkaKazuyoshi Shiba
    • Yasushi OkaKazuyoshi Shiba
    • G11C11/34G11C16/04
    • H01L27/115G11C16/0433H01L27/11521H01L27/11558
    • In a data program/erase device of a nonvolatile memory cell, data are re-written by means of an FN tunnel current of an entire channel surface. In a buried n-well of a semiconductor substrate in a flash memory formation region, p wells are placed in the form isolated from each other. In each of the p wells, a capacitor portion, a capacitor portion for programming/erasing data and an MIS•FET for reading data are placed. In the capacitor portion for programming/erasing data, rewriting (programming and erasing) of data is performed by means of an FN tunnel current of an entire channel surface.
    • 在非易失性存储单元的数据编程/擦除装置中,通过整个通道表面的FN隧道电流重写数据。 在闪速存储器形成区域中的半导体衬底的掩埋n阱中,p阱以彼此分离的形式放置。 在每个p阱中,放置电容器部分,用于编程/擦除数据的电容器部分和用于读取数据的MIS.FET。 在用于编程/擦除数据的电容器部分中,通过整个通道表面的FN隧道电流来执行数据的重写(编程和擦除)。
    • 10. 发明申请
    • SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME
    • 半导体器件及其制造方法
    • US20080211001A1
    • 2008-09-04
    • US12013470
    • 2008-01-13
    • Kazuyoshi ShibaHideyuki YashimaYasushi Oka
    • Kazuyoshi ShibaHideyuki YashimaYasushi Oka
    • H01L27/06H01L21/28
    • H01L27/105H01L27/1052H01L27/11526H01L27/11529H01L29/7833
    • Provided is a semiconductor device having, over the main surface of a semiconductor substrate, a main circuit region and a memory cell array of a flash memory. The memory cell array has a floating gate electrode for accumulating charges of data, while the main circuit region has a gate electrode of MIS•FET constituting the main circuit. In the main circuit region, an insulating film made of a silicon nitride film is formed to cover the gate electrode, whereby miniaturization of elements in the main circuit region is not impaired. The memory cell array has no such insulating film. This means that the upper surface of the floating gate electrode is not contiguous to the insulating film but is covered directly with an interlayer insulating film. According to such a constitution, leakage of electrons from the floating gate electrode of the memory cell array can be suppressed or prevented and the flash memory thus obtained has improved data retention characteristics.
    • 提供一种半导体器件,其在半导体衬底的主表面上具有闪存的主电路区域和存储单元阵列。 存储单元阵列具有用于累积数据电荷的浮栅电极,而主电路区域具有构成主电路的MIS.FET的栅电极。 在主电路区域中,形成由氮化硅膜构成的绝缘膜,以覆盖栅电极,从而不损害主电路区域中元件的小型化。 存储单元阵列不具有这种绝缘膜。 这意味着浮栅电极的上表面不与绝缘膜邻接,而是直接用层间绝缘膜覆盖。 根据这种结构,可以抑制或防止电子从存储单元阵列的浮置栅电极泄漏,从而获得的闪速存储器具有改善的数据保持特性。