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1. 发明申请

WO2005094205A3 VERY HIGH ENERGY, HIGH STABILITY GAS DISCHARGE LASER SURFACE TREATMENT SYSTEM 审中-公开
标题翻译：高能量，高稳定性气体放电激光表面处理系统
公开(公告)号：WO2005094205A3
公开(公告)日：2007-08-09
申请号：PCT/US2004024160
申请日：2004-07-26
申请人： TCZ GMBH , DAS PALASH P , BOLLIGER BRUCE E , PATEL PARTHIV , KLENE BRIAN C , MELCHER PAUL C , SAETHRE ROBERT B
发明人： DAS PALASH P , BOLLIGER BRUCE E , PATEL PARTHIV , KLENE BRIAN C , MELCHER PAUL C , SAETHRE ROBERT B
IPC分类号： H01S3/22 , B23K26/00 , B23K26/06 , B23K26/40 , H01S3/00 , H01S3/097 , H01S3/225 , H01S3/23
CPC分类号： B23K26/0604 , B23K26/0624 , B23K2201/40 , C30B29/06 , C30B33/02 , C30B35/00 , H01S3/0057 , H01S3/097 , H01S3/225 , H01S3/2253 , H01S3/2333 , H01S3/2366
摘要： A gas discharge laser crystallization apparatus and method for performing a transformation of a crystal makeup or orientation in the substrate of a workpiece is disclosed with may comprise, a multichambers laser system comprising, a first laser unit, and laser timing and control module, the timing and control module operates to create a gas discharge transiting the second discharge region, within plus or minus 3 ns and as a POPO, combining optics combine the out beams, and time creates pulse separation in the combined output a preselected time plus or minus 3 ns.
摘要翻译：公开了一种气体放电激光结晶装置和用于在工件的基板中进行晶体化妆或取向的变换的方法，其可以包括：多室激光系统，包括第一激光单元和激光定时和控制模块，定时并且控制模块操作以在正或负3ns内产生经过第二放电区域的气体放电，并且作为POPO，组合光学器件组合出射束，并且时间在组合输出中产生预选时间加或减3ns 。

2. 发明申请

WO2007038216A2 WEB-BASED METHOD FOR INFORMATION SEARCHES 审中-公开
标题翻译：基于WEB的信息搜索方法
公开(公告)号：WO2007038216A2
公开(公告)日：2007-04-05
申请号：PCT/US2006036876
申请日：2006-09-20
申请人： CYMER INC , AKINS ROBERT P , KLENE BRIAN C , CEFALO ALBERT P , CRAY WILLIAM C
发明人： AKINS ROBERT P , KLENE BRIAN C , CEFALO ALBERT P , CRAY WILLIAM C
IPC分类号： G06F15/16
CPC分类号： H04L67/16 , H04L63/10 , H04L67/28 , H04L67/2809
摘要： A method of providing the service of obtaining information for a client is disclosed, which may comprise, providing a search service brokering internet location; providing an information search identification internet location accessible on or through the search service brokering internet location; providing an information search reference internet location associated with the information search identification internet location; and providing access to a searcher to the information search reference internet location to log in a reference. The search service brokering internet location may comprise a search service broker web-site; and the search identification internet location may comprise a search service broker web-site search web-page; and, the search reference internet location may comprise a search service broker web-site reference web-page. The method may also comprise date stamping the log in of a reference.
摘要翻译：公开了一种为客户提供获取信息的服务的方法，该方法可以包括：提供搜索服务中介互联网位置; 提供可通过或通过搜索服务经纪互联网位置访问的信息搜索识别互联网位置; 提供与信息搜索识别互联网位置相关联的信息搜索参考互联网位置; 以及向信息搜索参考互联网位置提供对搜索者的访问以登录参考。搜索服务经纪互联网位置可以包括搜索服务经纪商网站; 并且搜索识别互联网位置可以包括搜索服务经纪商网站搜索网页; 并且，搜索参考互联网位置可以包括搜索服务经纪人网站参考网页。该方法还可以包括日期戳记参考的日志。

3. 发明申请

WO2003021732A1 LASER LITHOGRAPHY LIGHT SOURCE WITH BEAM DELIVERY 审中-公开
标题翻译：激光光刻光源与光束交付
公开(公告)号：WO2003021732A1
公开(公告)日：2003-03-13
申请号：PCT/US2002/026400
申请日：2002-08-19
申请人： CYMER, INC. , KLENE, Brian, C. , DAS, Palash, P. , GROVE, Steven, L. , ERSHOV, Alexander, I. , SMITH, Scott, T. , PAN, Xiaojiang, J. , SANDSTROM, Richard, L.
发明人： KLENE, Brian, C. , DAS, Palash, P. , GROVE, Steven, L. , ERSHOV, Alexander, I. , SMITH, Scott, T. , PAN, Xiaojiang, J. , SANDSTROM, Richard, L.
IPC分类号： H01S3/22
CPC分类号： G03F7/70933 , G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/0057 , H01S3/0071 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/0943 , H01S3/097 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/11 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： The present invention provides a modular high repetition rate ultraviolet gas discharge laser (4) light source for a production line machine. The system includes an enclosed and purged beam path for delivery the laser beam to a desired location such as the entrance port of the production line machine. In preferred embodiments, the production line machine is a lithography machine (2) and two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band send beam which is amplified in the second discharge chamber. The MOPA system is capable of output pulse energies approximately double the comparable single chamber laser system with greatly improved beam quality. A pulse stretcher more than doubles the output pulse length resulting in a reduction in pulse power (mJ/ns) as compared to prior art laser systems. This preferred embodiment is capable throughout the operating life of the lithography system, despite substantially degradation of optical components.
摘要翻译：本发明提供一种用于生产线机器的模块化高重复率紫外线气体放电激光（4）光源。该系统包括用于将激光束传送到期望位置（例如生产线机器的入口）的封闭和清除的光束路径。在优选实施例中，生产线机器是光刻机（2），并且提供两个单独的放电室，其中之一是主振荡器的一部分，其产生在第二放电室中被放大的非常窄的带发射光束。 MOPA系统能够以大大提高的光束质量将相当的单室激光器系统的输出脉冲能量大约翻倍。与现有技术的激光系统相比，脉冲放大器使输出脉冲长度加倍，导致脉冲功率（mJ / ns）的降低。尽管光学部件基本上已经衰减，但是该优选实施例能够在光刻系统的整个工作寿命期间。

4. 发明申请

WO2007038216A3 WEB-BASED METHOD FOR INFORMATION SEARCHES 审中-公开
公开(公告)号：WO2007038216A3
公开(公告)日：2007-04-05
申请号：PCT/US2006/036876
申请日：2006-09-20
申请人： CYMER, INC. , AKINS, Robert, P. , KLENE, Brian, C. , CEFALO, Albert, P. , CRAY, William, C.
发明人： AKINS, Robert, P. , KLENE, Brian, C. , CEFALO, Albert, P. , CRAY, William, C.
IPC分类号： G06F17/30
摘要： A method of providing the service of obtaining information for a client is disclosed, which may comprise, providing a search service brokering internet location; providing an information search identification internet location accessible on or through the search service brokering internet location; providing an information search reference internet location associated with the information search identification internet location; and providing access to a searcher to the information search reference internet location to log in a reference. The search service brokering internet location may comprise a search service broker web-site; and the search identification internet location may comprise a search service broker web-site search web-page; and, the search reference internet location may comprise a search service broker web-site reference web-page. The method may also comprise date stamping the log in of a reference.

5. 发明申请

WO2005094205A2 VERY HIGH ENERGY, HIGH STABILITY GAS DISCHARGE LASER SURFACE TREATMENT SYSTEM 审中-公开
标题翻译：高能量，高稳定性气体放电激光表面处理系统
公开(公告)号：WO2005094205A2
公开(公告)日：2005-10-13
申请号：PCT/US2004/024160
申请日：2004-07-26
申请人： CYMER, INC. , DAS, Palash, P. , BOLLIGER, Bruce, E. , PATEL, Parthiv , KLENE, Brian, C. , MELCHER, Paul, C. , SAETHRE, Robert, B.
发明人： DAS, Palash, P. , BOLLIGER, Bruce, E. , PATEL, Parthiv , KLENE, Brian, C. , MELCHER, Paul, C. , SAETHRE, Robert, B.
IPC分类号： B23K26/00 , B23K26/06 , B23K26/40 , H01S3/00 , H01S3/097 , H01S3/225 , H01S3/23
CPC分类号： B23K26/0604 , B23K26/0624 , B23K2201/40 , C30B29/06 , C30B33/02 , C30B35/00 , H01S3/0057 , H01S3/097 , H01S3/225 , H01S3/2253 , H01S3/2333 , H01S3/2366
摘要： A gas discharge laser crystallization apparatus and method for performing a transformation of a crystal makeup or orientation in the substrate of a workpiece is disclosed which may comprise, a multichamber laser system comprising, a first laser unit comprising, a first and second gas discharge chamber; each with a pair of elongated spaced apart opposing electrodes contained within the chamber, forming an elongated gas discharge region; a laser gas contained within the chamber comprising a halogen and a noble gas selected to produce laser light at a center wavelength optimized to the crystallization process to be carried out on the workpiece; a power supply module comprising, a DC power source; a first and a second pulse compression and voltage step up circuit connected to the DC power source and connected to the respective electrodes, comprising a multistage fractional step up transformer having a plurality of primary windings connected in series and a single secondary winding passing through each of the plurality of primary windings, and a solid state trigger switch; and a laser timing and control module operative to time the closing of the respective solid state switch based upon operating parameters of the respective first and second pulse compression and voltage step up circuit to effect operation of the first and second laser units as either a POPA configured laser system or a POPO configured laser system to produce a single output laser light pulse beam. As a POPA laser system relay optics may be operative to direct a first output laser light pulse beam from the first laser unit into the second gas discharge chamber; and, the timing and control module operates to create a gas discharge between the second pair of electrodes while the first output laser light pulse beam is transiting the second discharge region, within plus or minus 3 ns and as a POPO, combining optics combine the output beams, and timing creates pulse separation in the combined output a preselected time plus or minus 3 ns. A beam delivery unit and a pulse stretcher may be included, and timing and control may be processor controlled based on signals representing charging voltage and component temperatures in the pulse compression and voltage step up circuits.
摘要翻译：公开了一种气体放电激光结晶装置和方法，用于在工件的基板中进行晶体组成或取向的变换，其可以包括：多室激光器系统，包括：第一激光单元，包括第一和第二气体放电室; 每个具有包含在所述腔室内的一对细长间隔开的相对电极，形成细长的气体放电区域; 包含在所述室内的激光气体包括卤素和惰性气体，所述惰性气体被选择为产生对于在所述工件上进行的结晶过程优化的中心波长的激光; 电源模块，包括：直流电源; 连接到直流电源并连接到各个电极的第一和第二脉冲压缩和升压电路，包括具有串联连接的多个初级绕组的多级分数升压变压器和通过每个多个初级绕组和固态触发开关; 以及激光定时和控制模块，用于基于相应的第一和第二脉冲压缩和电压升压电路的操作参数对相应固态开关的闭合进行时间控制，以实现第一和第二激光单元的操作，作为POPA配置激光系统或POPO配置的激光系统产生单个输出的激光光束。作为POPA激光系统，中继光学器件可操作以将来自第一激光单元的第一输出激光束脉冲光引导到第二气体放电室中; 并且，正时和控制模块操作以在第二对电极之间产生气体放电，同时第一输出激光束脉冲束在正或负3ns内转移第二放电区域，并且作为POPO，组合光学器件组合输出光束和定时在组合输出中产生脉冲分离，预选时间加或减3 ns。可以包括光束传送单元和脉冲展开器，并且可以基于表示脉冲压缩和电压升压电路中的充电电压和分量温度的信号来对处理器进行控制。

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