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    • 8. 发明申请
    • INTEGRATED NON-VOLATILE MEMORY AND PERIPHERAL CIRCUITRY FABRICATION
    • 集成的非易失性存储器和外围电路制造
    • WO2008122012A2
    • 2008-10-09
    • PCT/US2008/059035
    • 2008-04-01
    • SANDISK CORPORATIONKAI, JamesPHAM, TuanHIGASHITANI, MasaakiMATAMIS, GeorgeORIMOTO, Takashi
    • KAI, JamesPHAM, TuanHIGASHITANI, MasaakiMATAMIS, GeorgeORIMOTO, Takashi
    • H01L21/8247H01L27/105H01L27/115
    • H01L27/11529H01L27/105H01L27/115H01L27/11526H01L27/11536H01L27/11539
    • Non-volatile memory and integrated memory and peripheral circuitry fabrication processes are provided. Sets of charge storage regions, such as NAND strings including multiple non-volatile storage elements, are formed over a semiconductor substrate using a layer of charge storage material such as a first layer of polysilicon. An intermediate dielectric layer is provided over the charge storage regions. A layer of conductive material such as a second layer of polysilicon is deposited over the substrate and etched to form the control gates for the charge storage regions and the gate regions of the select transistors for the sets of storage elements. The first layer of polysilicon is removed from a portion of the substrate, facilitating fabrication of the select transistor gate regions from only the second layer of polysilicon. Peripheral circuitry formation is also incorporated into the fabrication process to form the gate regions for devices such as high voltage and logic transistors. The gate regions of these devices can be formed from the layer forming the control gates of the memory array.
    • 提供非易失性存储器和集成存储器和外围电路制造工艺。 使用诸如第一多晶硅层的电荷存储材料层在半导体衬底上形成诸如包括多个非易失性存储元件的NAND串的电荷存储区的集合。 中间电介质层设置在电荷存储区域的上方。 将诸如第二多晶硅层的导电材料层沉积在衬底上并被蚀刻以形成用于存储元件组的选择晶体管的电荷存储区域和栅极区域的控制栅极。 从衬底的一部分去除第一层多晶硅,便于仅从第二层多晶硅制造选择晶体管栅极区。 外围电路形成也被并入到制造过程中以形成诸如高电压和逻辑晶体管的器件的栅极区域。 这些器件的栅极区域可以由形成存储器阵列的控制栅极的层形成。
    • 10. 发明申请
    • DAMASCENE METHOD OF MAKING A NONVOLATILE MEMORY DEVICE
    • 制造非易失性存储器件的DAMASCENE方法
    • WO2011091416A1
    • 2011-07-28
    • PCT/US2011/022400
    • 2011-01-25
    • SANDISK 3D LLCPURAYATH, Vinod RobertMATAMIS, GeorgeKAI, JamesORIMOTO, Takashi
    • PURAYATH, Vinod RobertMATAMIS, GeorgeKAI, JamesORIMOTO, Takashi
    • H01L27/10H01L27/102
    • H01L27/101H01L27/1021
    • A method of making a device includes providing a first device level containing first semiconductor rails separated by first insulating features, forming a sacrificial layer over the first device level, patterning the sacrificial layer and the first semiconductor rails in the first device level to form a plurality of second rails extending in a second direction, wherein the plurality of second rails extend at least partially into the first device level and are separated from each other by rail shaped openings which extend at least partially into the first device level, forming second insulating features between the plurality of second rails, removing the sacrificial layer, and forming second semiconductor rails between the second insulating features in a second device level over the first device level. The first semiconductor rails extend in a first direction. The second semiconductor rails extend in the second direction different from the first direction.
    • 一种制造器件的方法包括提供包含由第一绝缘特征分开的第一半导体轨道的第一器件电平,在第一器件电平上形成牺牲层,在第一器件电平图形化牺牲层和第一半导体轨道以形成多个 的第二轨道沿着第二方向延伸,其中所述多个第二轨道至少部分地延伸到所述第一装置水平面并且通过至少部分地延伸到所述第一装置水平的轨道形开口彼此分开, 所述多个第二轨道,去除所述牺牲层,以及在所述第二设备水平上的第二设备水平的所述第二绝缘特征之间形成第二半导体轨道。 第一半导体轨道沿第一方向延伸。 第二半导体轨道沿与第一方向不同的第二方向延伸。