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1. 发明申请

US20100317179A1 METHOD FOR MAKING INTEGRATED CIRCUIT DEVICE 审中-公开
标题翻译：制造集成电路设备的方法
公开(公告)号：US20100317179A1
公开(公告)日：2010-12-16
申请号：US12382419
申请日：2009-03-16
申请人： Juha T. RANTALA , Jyri PAULASAARI , Janne KYLMA , Turo T. TORMANEN , Jarkko PIETIKAINEN , Nigel HACKER , Admir HADZIC
发明人： Juha T. RANTALA , Jyri PAULASAARI , Janne KYLMA , Turo T. TORMANEN , Jarkko PIETIKAINEN , Nigel HACKER , Admir HADZIC
IPC分类号： H01L21/28 , H01L21/768
CPC分类号： C09D183/14 , C08G77/50 , H01B3/46 , H01L21/02126 , H01L21/02282 , H01L21/3122 , H01L21/76822 , H01L21/76837 , H01L23/5329 , H01L2924/0002 , H01L2924/12044 , Y10T428/31663 , H01L2924/00
摘要： A method for making an integrated circuit device by: forming a plurality of transistors on a semiconductor substrate; forming multilayer interconnects by depositing a layer of metal; patterning the metal layer; depositing a first dielectric material, depositing a second dielectric material, patterning the first and second dielectric materials; and depositing a via filling metal material into the patterned areas; or, alternatively, by forming transistors on a substrate; depositing one of an electrically insulating or electrically conducting material; patterning said one of an electrically insulating or electrically conducting material; and depositing the other of the electrically insulating or electrically conducting material, so as to form a layer over said transistors having both electrically insulating and electrically conducting portions; wherein the first dielectric material, which is an organosiloxane material, and the electrically insulating material each has a carbon to silicon ratio of 1.5 to 1 or more.
摘要翻译：一种制造集成电路器件的方法，包括：在半导体衬底上形成多个晶体管; 通过沉积一层金属形成多层互连; 图案化金属层; 沉积第一电介质材料，沉积第二介电材料，图案化第一和第二电介质材料; 以及将通孔填充金属材料沉积到图案化区域中; 或者，通过在衬底上形成晶体管; 沉积电绝缘或导电材料之一; 图案化所述电绝缘或导电材料之一; 以及沉积所述电绝缘或导电材料中的另一个，以便在所述晶体管上形成具有电绝缘和导电部分的层; 其中作为有机硅氧烷材料的第一介电材料和电绝缘材料各自具有1.5至1或更大的碳硅比。

2. 发明授权

US6087465A Melt-processible poly (ester urethane) and a process for the preparation thereof 失效
标题翻译：可熔融加工的聚（酯氨基甲酸酯）及其制备方法
公开(公告)号：US6087465A
公开(公告)日：2000-07-11
申请号：US765402
申请日：1997-01-31
申请人： Jukka Seppala , Mika Harkonen , Kari Hiltunen , Minna Malin , Janne Kylma
发明人： Jukka Seppala , Mika Harkonen , Kari Hiltunen , Minna Malin , Janne Kylma
IPC分类号： A61K47/30 , C05G3/00 , C08G18/42 , C08G63/06 , C08G63/60 , C08L23/00 , C08L101/00 , D01F6/70 , D01F6/78
CPC分类号： C08G18/4283 , C08G63/06 , C08G2101/00 , C08G2230/00
摘要： The invention concerns a novel melt-processible poly(ester urethane) and a process and a prepolymer for the preparation thereof. The poly(ester urethane) contains structural units derived from a polyester and structural units derived from a diisocyanate and, according to the invention, the bonds between the structural units are at least mainly comprised of urethane bonds, the number average molar mass, M.sub.n, of the prepolymer is at least 10,000 g/mol, its mass-average molar mass, M.sub.w, is over 20,000 g/mol and its molar mass distribution, expressed as the ratio of M.sub.w /M.sub.n, is over 2, and the prepolymer is essentially free from free isocyanate groups. The poly(ester urethane) is hydrolytically decomposable and it can be used as a biodegradable polymer, e.g., for manufacturing injection molded pieces and thermoformed and blow molded packages, bags, sacks and bottles, for coating of sacks, bags and films made of paper or cardboard, and for manufacturing fibers and non-woven fabrics.
摘要翻译： PCT No.PCT / FI95 / 00396 Sec。 371日期1997年1月31日 102（e）日期1997年1月31日PCT提交1995年7月7日PCT公布。公开号WO96 / 01863 日期1996年1月25日本发明涉及一种新型的可熔融加工的聚（酯氨基甲酸酯）及其制备方法和预聚物。聚（酯氨基甲酸酯）含有衍生自聚酯的结构单元和衍生自二异氰酸酯的结构单元，根据本发明，结构单元之间的键至少主要由氨基甲酸酯键，数均摩尔质量Mn，的预聚物为至少10,000g / mol，其质均平均摩尔质量Mw为20,000g / mol以上，以Mw / Mn比表示的摩尔质量分数大于2，预聚物基本上为不含游离异氰酸酯基团。聚（酯氨基甲酸酯）可水解分解，可用作可生物降解的聚合物，例如用于制造注塑件和热成型和吹塑成型包装，袋，袋和瓶子，用于包装纸袋，袋和纸制成的纸或纸板，以及用于制造纤维和无纺织物。

3. 发明申请

US20060180900A1 Organo-silsesquioxane polymers for forming low-k dielectrics 有权
标题翻译：用于形成低k电介质的有机倍半硅氧烷聚合物
公开(公告)号：US20060180900A1
公开(公告)日：2006-08-17
申请号：US10552663
申请日：2004-04-13
申请人： Juha Rantala , Jyri Paulasaari , Janne Kylma
发明人： Juha Rantala , Jyri Paulasaari , Janne Kylma
IPC分类号： H01L23/58 , H01L21/302
CPC分类号： C08L83/04 , C08G77/06 , C08G77/12 , C08G77/14 , C08G77/16 , C08G77/18 , C08G77/20 , C08G77/24 , C08G77/70 , H01B3/30 , H01L21/02126 , H01L21/02211 , H01L21/02282 , H01L21/3122 , H01L23/5329 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要： A low dielectric constant polymer, comprising monomeric units derived from a compound having the general formula I (R1—R2)n—Si—(X1)4-n, wherein each X1 is independently selected from hydrogen and inorganic leaving groups, R2 is an optional group and comprises an alkylene having 1 to 6 carbon atoms or an arylene, R1 is a polycycloalkyl group and n is an integer 1 to 3. The polymer has excellent electrical and mechanical properties.
摘要翻译：一种低介电常数聚合物，其包含衍生自具有通式I（R 1至R 2）的化合物的单体单元N 1 -Si- （X 1）4-n N，其中每个X 1独立地选自氢和无机离去基团，R 2， SUP>是任选的基团，并且包含具有1至6个碳原子的亚烷基或亚芳基，R 1是多环烷基，n是1至3的整数。该聚合物具有优异的电学和机械性能。

4. 发明申请

US20060058487A1 Novel polyorganosiloxane dielectric materials 有权
标题翻译：新型聚有机硅氧烷介电材料
公开(公告)号：US20060058487A1
公开(公告)日：2006-03-16
申请号：US11215303
申请日：2005-08-31
申请人： Juha Rantala , Jyri Paulasaari , Janne Kylma , Turo Tormanen , Jarkko Pietikainen , Nigel Hacker , Admir Hadzic
发明人： Juha Rantala , Jyri Paulasaari , Janne Kylma , Turo Tormanen , Jarkko Pietikainen , Nigel Hacker , Admir Hadzic
IPC分类号： C08G77/04 , C08L83/04 , B05D3/02 , B32B9/04
CPC分类号： C09D183/14 , C08G77/50 , H01B3/46 , H01L21/02126 , H01L21/02282 , H01L21/3122 , H01L21/76822 , H01L21/76837 , H01L23/5329 , H01L2924/0002 , H01L2924/12044 , Y10T428/31663 , H01L2924/00
摘要： A thin film comprising a composition obtained by polymerizing a monomer having the formula I: wherein: R1 is a hydrolysable group, R2 is a polarizability reducing organic group, and R3 is a bridging hydrocarbon group, to form a siloxane material. The invention also concerns methods for producing the thin films. The thin film can be used a low k dielectric in integrated circuit devices. The novel dielectric materials have excellent properties of planarization resulting in good local and global planarity on top a semiconductor substrate topography, which reduces or eliminates the need for chemical mechanical planarization after dielectric and oxide liner deposition.
摘要翻译：一种薄膜，其包含通过聚合具有式I的单体获得的组合物：

5. 发明申请

US20050080223A1 Biodegradable coating 有权
标题翻译：可生物降解涂料
公开(公告)号：US20050080223A1
公开(公告)日：2005-04-14
申请号：US10492555
申请日：2002-10-11
申请人： Jukka Tuominen , Janne Kylma , Jukka Seppala , Johan-Fredrik Selin
发明人： Jukka Tuominen , Janne Kylma , Jukka Seppala , Johan-Fredrik Selin
IPC分类号： C08G63/02 , C08G63/60 , C08L67/00 , C08L101/16 , C09D5/02 , C09D167/00
CPC分类号： C08L67/00 , C08G63/60 , C09D167/00
摘要： The object of the present invention is a biodegradable polymer network and methods to make it. The polymer network consists of a cross-linked polyester resin, which is composed of hydroxy acid units, structural units derived from an unsaturated bifunctional monomer, and structural units derived from a polyol monomer. The polyester resin is produced directly by a polyoon-densation reaction, after which it is cross-linked to a polymer of high molecular weight The polyester can be co-polymerised with a co-monomer increasing flexibility, or be blended with a reactive macromonomer, which adds elasticity and crosslinking density. The prepared polymer network can be especially used to coat continuous or singular objects made of fibrous, porous, biomass based or inorganic materials, or as a blending component in these, or used to impregnate these in order to induce water durability, barrier properties, elasticity, coherence or mechanical strength.
摘要翻译：本发明的目的是可生物降解的聚合物网络及其制备方法。聚合物网络由由羟基酸单元组成的交联聚酯树脂，衍生自不饱和双官能单体的结构单元和衍生自多元醇单体的结构单元组成。聚酯树脂通过多孔致密反应直接生产，然后与高分子量的聚合物交联。聚酯可以与增加柔性的共聚单体共聚，或与反应性大分子单体共混，这增加了弹性和交联密度。制备的聚合物网络可以特别用于涂覆由纤维，多孔，生物质基或无机材料制成的连续或单个物体，或作为其中的共混组分，或用于浸渍这些物质，以引起水的耐久性，阻隔性，弹性，一致性或机械强度。

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