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    • 1. 发明授权
    • Thin-film latent open optical detection with template-based feature
extraction
    • 薄膜潜开光学检测与基于模板的特征提取
    • US5448650A
    • 1995-09-05
    • US199350
    • 1994-02-18
    • Kamalesh DesaiMichael E. ScamanJames P. Wood
    • Kamalesh DesaiMichael E. ScamanJames P. Wood
    • G06T7/00G06K9/00
    • G06T7/0004G06T7/0002G06T2207/30141
    • Defects and latent defects are detected in connection patterns on a substrate by automated optical testing using bright field illumination and feature extraction template yielding an improved degree of feature discrimination. The feature extraction templates include angularly disposed vectors requiring detection of a predetermined (e.g. foreground) image value with a predetermined distance and a vector angularly interposed between those vectors which requires no detection of the predetermined image value within a distance which is greater than the predetermined distance. Thus, for successful detection of a defect, a portion of one of a set of templates having such a vector condition configuration must be wedged between areas of an image of a surface having the predetermined image values. This technique is implemented on commercially available automated optical inspection tools and results in avoidance of false detections even in the presence of a high density of image artifacts caused by the topologically sensitive bright field illumination employed.
    • 通过使用亮场照明和特征提取模板的自动光学测试在衬底上的连接图案中检测缺陷和潜在缺陷,产生改善的特征辨别度。 特征提取模板包括需要检测具有预定距离的预定(例如前景)图像值的角度设置的向量,以及角度地插入在这些矢量之间的向量,其不需要在大于预定距离的距离内检测到预定图像值 。 因此,为了成功地检测到缺陷,必须将具有这种矢量条件配置的一组模板中的一个的一部分楔入具有预定图像值的表面的图像的区域之间。 这种技术在市售的自动光学检测工具上实现,并且导致即使在由所采用的拓扑敏感的亮场照明引起的高密度图像伪影的存在下也避免了错误检测。
    • 2. 发明授权
    • Seed metal delete process for thin film repair solutions using direct UV laser
    • 种子金属删除工艺用于使用直接UV激光的薄膜修复解决方案
    • US06235544B1
    • 2001-05-22
    • US09295131
    • 1999-04-20
    • Peter A. FranklinCharles J. HendricksRichard P. SurprenantStephen J. Tirch, IIIThomas A. WassickJames P. Wood
    • Peter A. FranklinCharles J. HendricksRichard P. SurprenantStephen J. Tirch, IIIThomas A. WassickJames P. Wood
    • G01R3126
    • H01L21/485
    • A multilayer thin film structure (MLTF) is provided having no extraneous via-pad connection strap plated metallurgy for defective vias needing removal. The method for making or repairing the MLTF comprises determining interconnection defects in the MLTF at a thin film layer adjacent to the top metal layer of the structure, applying a top surface dielectric layer and forming vias in the layer, applying a metal conducting layer and removing the metal conducting layer for via-pad connection straps of defective vias and at the intersection of XY lines used in the repair, defining the top surface metallization including a series of orthogonal X conductor repair lines and Y conductor repair lines using a photoresist and lithography and then using a phototool to selectively expose the photoresist to define top surface strap connections needed to repair the interconnections and/or make EC's, and forming the top surface metallization using additive or subtractive metallization techniques.
    • 提供了一种多层薄膜结构(MLTF),其中没有外部通孔焊盘连接带电镀冶金用于需要去除的缺陷通孔。 用于制造或修复MLTF的方法包括:在与该结构的顶部金属层相邻的薄膜层处确定MLTF中的互连缺陷,施加顶表面介电层并在该层中形成通孔,施加金属导电层并除去 用于通孔焊盘连接带的金属导电层和用于修复的XY线的相交处,限定包括一系列正交X导体修复线的顶表面金属化和使用光致抗蚀剂和光刻的Y导体修复线, 然后使用光学工具选择性地暴露光致抗蚀剂以限定修复互连和/或制造EC所需的顶表面带连接,以及使用添加或减色金属化技术形成顶表面金属化。
    • 4. 发明授权
    • Process for environmentally safe cleaning using water-soluble polymer
based packages
    • 使用基于水溶性聚合物的包装进行环境安全清洁的方法
    • US5935366A
    • 1999-08-10
    • US694145
    • 1996-08-08
    • James P. Wood
    • James P. Wood
    • B08B9/02B08B15/02B32B25/00
    • B08B9/027B08B15/026Y10T156/1054
    • A process for preparing two connected powder transfer conduits for cleaning without releasing powder from the conduits. The conduits are connected to each other by flexible tube of a water-dissolvable material to enable powder communication between the two conduits. A sealing operation is performed to form a seal in the tube sufficient to prevent the powder communication from one side of the seal to the other. The seal is then severed to produce two tube sections where each tube section is sealed at the point of severance. A cleaning conduit is then place over at least one of the two tube sections and connected to the respective conduit. The cleaning conduit is connected to a liquid cleaning source which is adapted to deliver a cleaning liquid capable of dissolving the tube section thereunder upon contact therewith.
    • 一种用于制备两个连接的粉末输送管道用于清洁而不从管道释放粉末的方法。 导管通过可水溶性材料的柔性管彼此连接,以使两个管道之间的粉末连通。 执行密封操作以在管中形成足够的密封,以防止粉末从密封件的一侧到另一侧的连通。 然后将密封件切断以产生两个管段,其中每个管段在分离点处被密封。 然后将清洁导管放置在两个管部分中的至少一个上并连接到相应的导管。 清洁管道连接到液体清洁源,该液体清洁源适于在与其接触时输送能够溶解其中的管部分的清洁液体。