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    • 1. 发明授权
    • Method for forming contact hole
    • 形成接触孔的方法
    • US08709946B2
    • 2014-04-29
    • US13364252
    • 2012-02-01
    • Meng-Feng TsaiYi-Shiang ChangChia-Chi LinI-Hsin ChenChia-Ming Wu
    • Meng-Feng TsaiYi-Shiang ChangChia-Chi LinI-Hsin ChenChia-Ming Wu
    • H01L21/44
    • H01L21/76816H01L21/0273H01L21/0337H01L21/0338H01L21/31144
    • A method for forming contact holes includes following steps. A substrate including a dense region and an isolation region is provided. A material layer is formed on the substrate. Sacrificed patterns are formed on the material layer in the dense region, wherein there is a first opening between the two adjacent sacrificed patterns. A spacer is formed on each of two sides of each of the sacrificed patterns, wherein the spacers are separated from each other. The sacrificed patterns are removed to form a second opening between two adjacent spacers. A planar layer is formed to fill up the second openings. A first slit is formed in the planar layer, wherein the first slit exposes a portion of the material layer under the second openings. The portion of the material layer exposed by the first slit is removed to form third openings in the material layer.
    • 形成接触孔的方法包括以下步骤。 提供了包括密集区域和隔离区域的衬底。 在基板上形成材料层。 牺牲图案形成在致密区域的材料层上,其中在两个相邻的牺牲图案之间存在第一开口。 在每个牺牲图案的两侧的每一侧上形成间隔件,其中间隔件彼此分离。 去除牺牲的图案以在两个相邻间隔物之间​​形成第二开口。 形成平面层以填充第二开口。 第一狭缝形成在平面层中,其中第一狭缝暴露第二开口下方的材料层的一部分。 去除由第一狭缝暴露的材料层的部分以在材料层中形成第三开口。
    • 2. 发明申请
    • METHOD FOR FORMING CONTACT HOLE
    • 形成接触孔的方法
    • US20130137270A1
    • 2013-05-30
    • US13364252
    • 2012-02-01
    • Meng-Feng TsaiYi-Shiang ChangChia-Chi LinI-Hsin ChenChia-Ming Wu
    • Meng-Feng TsaiYi-Shiang ChangChia-Chi LinI-Hsin ChenChia-Ming Wu
    • H01L21/32
    • H01L21/76816H01L21/0273H01L21/0337H01L21/0338H01L21/31144
    • A method for forming contact holes includes following steps. A substrate including a dense region and an isolation region is provided. A material layer is formed on the substrate. Sacrificed patterns are formed on the material layer in the dense region, wherein there is a first opening between the two adjacent sacrificed patterns. A spacer is formed on each of two sides of each of the sacrificed patterns, wherein the spacers are separated from each other. The sacrificed patterns are removed to form a second opening between two adjacent spacers. A planar layer is formed to fill up the second openings. A first slit is formed in the planar layer, wherein the first slit exposes a portion of the material layer under the second openings. The portion of the material layer exposed by the first slit is removed to form third openings in the material layer.
    • 形成接触孔的方法包括以下步骤。 提供了包括密集区域和隔离区域的衬底。 在基板上形成材料层。 牺牲图案形成在致密区域的材料层上,其中在两个相邻的牺牲图案之间存在第一开口。 在每个牺牲图案的两侧的每一侧上形成间隔件,其中间隔件彼此分离。 去除牺牲的图案以在两个相邻间隔物之间​​形成第二开口。 形成平面层以填充第二开口。 第一狭缝形成在平面层中,其中第一狭缝暴露第二开口下方的材料层的一部分。 去除由第一狭缝暴露的材料层的部分以在材料层中形成第三开口。
    • 3. 发明授权
    • Electrical connector with terminal retention mechanism
    • 带端子保持机构的电连接器
    • US06736650B1
    • 2004-05-18
    • US10420107
    • 2003-04-21
    • I-Hsin ChenChien-Sen HuangZhi-Kai Guo
    • I-Hsin ChenChien-Sen HuangZhi-Kai Guo
    • H01K1200
    • H01R13/4368H01R12/716
    • An electrical connector (1) includes a dielectric housing (10), a plurality of terminals (13) received in the housing, and a retention mechanism (12) pivotally attached to the housing. The housing defines a plurality of terminal-passages (108) and first mating members (103). Each of terminals includes a bent portion (134). The retention mechanism has an elongate stopper member (120). A pair of cantilevers (122) depends from the stopper member. A second mating member (1222) is formed on each of the cantilevers, for engaging one of the first mating members. Thus the stopper member is rotatable between a first position in which the stopper is protected from thermal warp or deformation, and a second position in which the terminals are secured in the corresponding terminal-passages.
    • 电连接器(1)包括绝缘壳体(10),容纳在壳体中的多个端子(13)和枢转地附接到壳体的保持机构(12)。 壳体限定多个端子通道(108)和第一配合构件(103)。 每个端子包括弯曲部分(134)。 保持机构具有细长的止动件(120)。 一对悬臂(122)由止动件构成。 第二配合构件(1222)形成在每个悬臂上,用于接合第一配合构件中的一个。 因此,止动件可以在第一位置和第二位置之间转动,在该第一位置中止动件不受热翘曲或变形,其中端子固定在相应的端子通道中。