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    • 1. 发明授权
    • Nitride semiconductor, nitride semiconductor crystal growth method, and nitride semiconductor light emitting element
    • 氮化物半导体,氮化物半导体晶体生长方法和氮化物半导体发光元件
    • US08652948B2
    • 2014-02-18
    • US12744163
    • 2008-11-20
    • Hideyoshi HorieKaori Kurihara
    • Hideyoshi HorieKaori Kurihara
    • H01L21/20
    • H01L33/0075C30B25/02C30B29/403H01L21/0237H01L21/02433H01L21/02458H01L21/0254H01L21/0262H01L21/02658H01L33/007H01L33/16
    • During the growth of a nitride semiconductor crystal on a nonpolar face nitride substrate, such as an m-face, the gas that constitutes the main flow in the process of heating up to a relatively high temperature range, before growth of the nitride semiconductor layer, (the atmosphere to which the main nitride face of the substrate is exposed) and the gas that constitutes the main flow until growth of first and second nitride semiconductor layers is completed (the atmosphere to which the main nitride face of the substrate is exposed) are primarily those that will not have an etching effect on the nitride, while no Si source is supplied at the beginning of growth of the nitride semiconductor layer. Therefore, nitrogen atoms are not desorbed from near the nitride surface of the epitaxial substrate, thus suppressing the introduction of defects into the epitaxial film. This also makes epitaxial growth possible with a surface morphology of excellent flatness.
    • 在氮化物半导体层生长之前,在非极性面状氮化物衬底(例如m面)上生长氮化物半导体晶体的过程中,在加热到较高温度范围的过程中构成主流的气体, (暴露基板的主氮化物面的气氛)和构成主流的气体直到第一和第二氮化物半导体层的生长完成(衬底的主氮化物面露出的气氛)为止 主要是那些不会对氮化物具有蚀刻效果的那些,而在氮化物半导体层的生长开始时不提供Si源。 因此,氮原子不会从外延衬底的氮化物表面附近脱附,从而抑制了向外延膜的缺陷的引入。 这也使得外延生长可能具有优异的平坦度的表面形态。
    • 2. 发明申请
    • NITRIDE SEMICONDUCTOR
    • 氮化物半导体
    • US20110253974A1
    • 2011-10-20
    • US13112564
    • 2011-05-20
    • Hideyoshi HORIEKaori Kurihara
    • Hideyoshi HORIEKaori Kurihara
    • H01L33/06
    • H01L33/06H01L21/0237H01L21/0254H01L21/02573H01L21/02609H01L21/0262H01L33/0025H01L33/02H01L33/16H01L33/18H01L33/32H01L33/325
    • To provide a high-quality nitride semiconductor ensuring high emission efficiency of a light-emitting element fabricated. In the present invention, when obtaining a nitride semiconductor by sequentially stacking a one conductivity type nitride semiconductor part, a quantum well active layer structure part, and a another conductivity type nitride semiconductor part opposite the one conductivity type, the crystal is grown on a base having a nonpolar principal nitride surface, the one conductivity type nitride semiconductor part is formed by sequentially stacking a first nitride semiconductor layer and a second nitride semiconductor layer, and the second nitride semiconductor layer has a thickness of 400 nm to 20 mm and has a nonpolar outermost surface. By virtue of selecting the above-described base for crystal growth, an electron and a hole, which are contributing to light emission, can be prevented from spatial separation based on the QCSE effect and efficient radiation is realized. Also, by setting the thickness of the second nitride semiconductor layer to an appropriate range, the nitride semiconductor surface can avoid having extremely severe unevenness.
    • 提供确保所制造的发光元件的高发射效率的高质量氮化物半导体。 在本发明中,当通过依次层叠一个导电型氮化物半导体部件,量子阱活性层结构部分和与一种导电类型相反的另一导电型氮化物半导体部件来获得氮化物半导体时,晶体生长在基底 具有非极性主氮化物表面的情况下,通过依次层叠第一氮化物半导体层和第二氮化物半导体层而形成一个导电型氮化物半导体部,第二氮化物半导体层的厚度为400nm〜20mm,具有非极性 最外面。 通过选择上述用于晶体生长的基底,可以防止基于QCSE效应的有助于发光的电子和空穴进行空间分离,并且实现有效的辐射。 此外,通过将第二氮化物半导体层的厚度设定在适当的范围,氮化物半导体表面可以避免具有非常严重的不均匀性。
    • 3. 发明授权
    • Light emitting device
    • 发光装置
    • US07977682B2
    • 2011-07-12
    • US12278798
    • 2007-01-26
    • Hideyoshi Horie
    • Hideyoshi Horie
    • H01L33/00
    • H01L33/38H01L33/20
    • Provided is a compound light emitting device which facilitates easy connection of power supply lines, and has a high emission intensity in-plane uniformity. The light emitting device includes a first-conduction-type cladding layer, active layer structure, and second-conduction-type cladding layer each containing a III-V compound semiconductor. The first-conduction-type cladding layer and second-conduction-type cladding layer sandwich the active layer structure. The light emitting device includes a first-conduction-type-side electrode (7) for injecting carriers into the first-conduction-type cladding layer, and a second-conduction-type-side electrode (6) for injecting carriers into the second-conduction-type cladding layer. The first-conduction-type-side electrode (7) has an opening (7p). The second-conduction-type-side electrode (6) has a main-electrode-portion (6-0) partially surrounded by the first-conduction-type-side electrode (7), and extracting portions (6-1, 6-2) for extracting the main-electrode-portion (6-0) outside the first-conduction-type-side electrode (7) though the opening (7p). The main-electrode-portion (6-0) is a part of a constant-width figure. The interval between the outer edge of the main-electrode-portion (6-0) and the inner edge of the first-conduction-type-side electrode (7) is almost constant.
    • 提供了一种便于连接电源线并具有高发射强度的面内均匀性的复合发光装置。 发光器件包括每个含有III-V族化合物半导体的第一导电型包覆层,有源层结构和第二导电型包覆层。 第一导电型包层和第二导电型包层夹着有源层结构。 发光器件包括用于将载流子注入到第一导电型包层中的第一导电型侧电极(7)和用于将载流子注入第二导电型包层的第二导电型侧电极(6) 导电型包覆层。 第一导电型侧电极(7)具有开口部(7p)。 第二导电型侧电极(6)具有由第一导电型侧电极(7)部分地包围的主电极部(6-0),提取部(6-1,6〜 2),用于通过开口(7p)提取第一导电型侧电极(7)外部的主电极部分(6-0)。 主电极部分(6-0)是恒定宽度图的一部分。 主电极部分(6-0)的外边缘与第一导电型侧电极(7)的内边缘之间的间隔几乎恒定。
    • 6. 发明申请
    • INTEGRATED SEMICONDUCTOR LIGHT EMITTING DEVICE AND METHOD FOR MANUFACTURING SAME
    • 集成半导体发光器件及其制造方法
    • US20090315045A1
    • 2009-12-24
    • US12299253
    • 2007-04-30
    • Hideyoshi Horie
    • Hideyoshi Horie
    • H01L33/00
    • H01L27/153
    • An integrated compound semiconductor light-emitting-device capable of emitting light as a large-area plane light source, exhibiting excellent in-plane uniformity in an emission intensity is provided. The light-emitting-device comprising a plurality of light-emitting-units formed over a substrate, wherein the light-emitting-unit has a compound semiconductor thin-film crystal layer 24, 25, 26 a first and a second-conductivity-type-side electrode 27, 28; a main light-extraction direction is the side of the substrate, and the first and the second-conductivity-type-side electrode are formed on the opposite side to the light-extraction direction; the light-emitting-units are electrically separated each other by a light-emitting-unit separation-trench which is formed by removing the thin-film crystal layer from the surface to an inside portion of the buffer layer.
    • 提供了能够发光作为大面积平面光源的综合化合物半导体发光装置,其表现出优异的发射强度的面内均匀性。 该发光装置包括在基板上形成的多个发光单元,其中,发光单元具有化合物半导体薄膜晶体层24,25,26,第一和第二导电型 侧电极27,28; 主要的光提取方向是基板的一侧,并且第一和第二导电型侧电极形成在与光提取方向相反的一侧上; 发光单元由通过从缓冲层的表面到内部部分去除薄膜晶体层而形成的发光单元分离沟槽彼此电分离。
    • 9. 发明授权
    • Compound semiconductor light emitting device
    • 复合半导体发光器件
    • US06677618B1
    • 2004-01-13
    • US09453279
    • 1999-12-03
    • Hideyoshi HorieHirotaka OhtaToshinari Fujimori
    • Hideyoshi HorieHirotaka OhtaToshinari Fujimori
    • H01L3300
    • H01L33/44H01L33/30H01S5/0282
    • Disclosed compound semiconductor light emitting devices have a substrate, a compound semiconductor layer, formed on the substrate, containing a first conductive type clad layer, an active layer, and a second conductive type clad layer, and a resonator structure formed of two opposing facets of the compound semiconductor layer, wherein surfaces of the first conductive type clad layer, the active layer, and the second conductive type clad layer forming the facet of the compound semiconductor are covered with a passivation layer, wherein at least one element constituting the facet of the compound semiconductor layer is not coupled to oxygen, and wherein a portion of the passivation layer adjacent to the facet of the compound semiconductor layer contains oxygen as a structural element. The compound semiconductor light emitting devices according to the invention can stably suppress, for a long time, the surface state densities on the facets occurring on extrinsic causes, and are high performance devices with establishing both of a high output and a long lifetime.
    • 公开的化合物半导体发光器件具有形成在基板上的基板,化合物半导体层,其包含第一导电型覆盖层,有源层和第二导电型覆盖层,以及由两个相对的面 化合物半导体层,其中形成化合物半导体的面的第一导电型覆盖层,有源层和第二导电型覆盖层的表面被钝化层覆盖,其中至少一个元件构成 化合物半导体层不与氧结合,并且其中与化合物半导体层的小面相邻的钝化层的一部分含有氧作为结构元素。 根据本发明的化合物半导体发光器件可以长期稳定地抑制在外在原因上产生的面上的表面状态密度,并且是具有高输出和长寿命两者的高性能器件。