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1. 发明申请

US20080203285A1 Charged particle beam measurement equipment, size correction and standard sample for correction 有权
标题翻译：带电粒子束测量设备，尺寸校正和标准样品进行校正
公开(公告)号：US20080203285A1
公开(公告)日：2008-08-28
申请号：US12010852
申请日：2008-01-30
申请人： Yasunari Sohda , Yoshinori Nakayama , Hajime Koyanagi , Keiichiro Hitomi
发明人： Yasunari Sohda , Yoshinori Nakayama , Hajime Koyanagi , Keiichiro Hitomi
IPC分类号： G01D18/00
CPC分类号： H01J37/28 , B82Y15/00 , H01J2237/2826
摘要： Correction of widths obtained by measurement of a sample with the use of a scanning electron microscope is executed with greater precision. Use is made of a standard sample 40 for correction comprising a plurality of correction mark members 42a, 42b, . . . , the respective correction mark members 42a, 42b, being lined up at specified intervals kept therebetween in a specified direction, and respective widths thereof, in the specified direction, differing from each other so as to be of respective sizes as pre-set. Measurement of the respective widths of the correction mark members 42a, 42b, . . . is made to obtain respective measurement widths while authorized widths of the respective widths of the correction mark members 42a, 42b, . . . are kept stored in an image processing unit of the scanning electron microscope to thereby find differences between the respective measurement widths, and authorized widths corresponding thereto, and the differences are stored as respective correction functions, which are used in correcting the measurement width of the sample.
摘要翻译：以更高的精度执行通过使用扫描电子显微镜测量样品获得的宽度的校正。使用由用于校正的标准样品40组成，包括多个校正标记构件42,4a，42b。。。，各个校正标记部件42,4a，42b以规定的间隔排列成规定的方向，并且在规定的方向上保持其各自的宽度彼此不同，从而具有预先设定的各自的尺寸。校正标记部件42,4a，42b，...的各自宽度的测量。。。被制成以获得相应的测量宽度，同时校正标记部件42,4a，42b的相应宽度的授权宽度。。。保存在扫描电子显微镜的图像处理单元中，从而发现各测量宽度与其对应的授权宽度之间的差异，并且将这些差值存储为用于校正样品的测量宽度的各种校正函数。

2. 发明申请

US20080121791A1 STANDARD REFERENCE COMPONENT FOR CALIBRATION, FABRICATION METHOD FOR THE SAME, AND SCANNING ELECTRON MICROSCOPE USING THE SAME 有权
标题翻译：用于校准的标准参考组件，相同的制造方法和使用其的扫描电子显微镜
公开(公告)号：US20080121791A1
公开(公告)日：2008-05-29
申请号：US11939596
申请日：2007-11-14
申请人： Yoshinori Nakayama , Yasunari Sohda , Keiichiro Hitomi , Hajime Koyanagi
发明人： Yoshinori Nakayama , Yasunari Sohda , Keiichiro Hitomi , Hajime Koyanagi
IPC分类号： H01J37/26 , G01D18/00
CPC分类号： H01J37/28 , H01J37/244 , H01J37/263 , H01J2237/24578 , H01J2237/2816 , H01J2237/2823 , H01J2237/2826 , H01J2237/30433 , H01J2237/3142 , H01J2237/31732
摘要： The present invention provides a standard reference component for calibration for performing magnification calibration used in the scanning electron microscope with high precision, and provides a scanning electron microscope technique using it. Provided is a standard reference component for calibration for calibrating a scanning electron microscope that measures a length of a pattern in an observation area from information on the intensity of secondary electrons or reflected electrons generated by scanning an incident electron beam in the observation area on a measuring sample, having: a first substrate on which a multiple-layer is laminated and a second substrate with a recess for holding the first substrate, wherein the first substrate is held in the recess of the second substrate so that a normal direction of the multiple-layer surface may be roughly perpendicular to a normal direction of the second substrate surface, and the multiple-layer has a multiple-layer structure of a film containing silicon and a film containing molybdenum.
摘要翻译：本发明提供了一种用于校准的标准参考部件，用于以高精度执行扫描电子显微镜中使用的放大校准，并提供使用它的扫描电子显微镜技术。提供了用于校准扫描电子显微镜的标准参考部件，该扫描电子显微镜从关于通过扫描观察区域中的入射电子束产生的二次电子或反射电子的强度的信息来测量观察区域中的图案的长度具有：层叠有多层的第一基板和具有用于保持所述第一基板的凹部的第二基板，其中，所述第一基板保持在所述第二基板的所述凹部中，层表面可以大致垂直于第二基板表面的法线方向，并且多层具有含硅的膜和含有钼的膜的多层结构。

3. 发明授权

US06246652B1 Device using sensor for small rotation angle 失效
标题翻译：设备使用传感器小旋转角度
公开(公告)号：US06246652B1
公开(公告)日：2001-06-12
申请号：US09205399
申请日：1998-12-04
申请人： Atsushi Kikukawa , Sumio Hosaka , Hajime Koyanagi , Kimitoshi Etoh
发明人： Atsushi Kikukawa , Sumio Hosaka , Hajime Koyanagi , Kimitoshi Etoh
IPC分类号： G11B390
CPC分类号： G11B9/1409 , B82Y10/00 , G11B9/1445 , Y10S977/732 , Y10S977/834 , Y10S977/87 , Y10S977/873 , Y10S977/951
摘要： A recording and reproducing or observing apparatus based on a laser beam deflection detection method in which an object has a very small area for reflecting light. A laser beam emitted by a semiconductor laser diode passes through a collimator lens and a stop. The beam passes through the lens and stop and is reflected by a polarization beam splitter and focused by an objective lens onto a surface of a cantilever. Reflected light from the cantilever surface is focused by the lens before being received by a position sensor. Either the incident light or the reflected light passes through an optical path that is substantially 90 degrees relative to the optical axis of the other light.
摘要翻译：一种基于激光束偏转检测方法的记录和再现或观察装置，其中物体具有非常小的反射光面积。由半导体激光二极管发射的激光束通过准直透镜和光阑。光束通过透镜并停止并被偏振分束器反射并被物镜聚焦到悬臂的表面上。来自悬臂表面的反射光在被位置传感器接收之前被透镜聚焦。入射光或反射光通过相对于另一个光的光轴大致90度的光路。

4. 发明授权

US5808977A Tracking method and recording means thereby 失效
标题翻译：跟踪方法和记录装置
公开(公告)号：US5808977A
公开(公告)日：1998-09-15
申请号：US708954
申请日：1996-09-06
申请人： Hajime Koyanagi , Sumio Hosaka , Ryo Imura
发明人： Hajime Koyanagi , Sumio Hosaka , Ryo Imura
IPC分类号： G01Q90/00 , G11B5/00 , G11B7/09 , G11B9/00 , G11B11/16 , G11B13/00 , G11B7/00
CPC分类号： G11B5/00 , G11B11/16 , G11B13/00 , G11B9/14 , G11B9/1454 , G11B9/1472 , B82Y10/00 , G11B7/0901 , Y10S977/732 , Y10S977/849 , Y10S977/851 , Y10S977/86 , Y10S977/869 , Y10S977/873 , Y10S977/881
摘要： An object of the present invention is to provide a novel tracking method and device, suitable for use in a recording means applying the technology of a scanning probe microscope, for recording and/or reproducing high-density information of a size of several tens of nm or less at high speed and with high accuracy. The tracking method and device includes a recording medium having bumpy structures for tracking, which are formed on the surface thereof, a cantilever having a tip for writing in, reading out and erasing information, and means for detecting bending and torsion of the cantilever. Further, the tip and the recording medium are moved relative to each other in the direction in which a fixed end and a free end of the cantilever are coupled to each other, in a state in which the tip has been brought into proximity to or contact with the recording medium. In this state, the amount and direction of the torsion of the cantilever, or the amount of the bending thereof and the direction of the torsion thereof due to the bumpy structures are set as feedback signals so as to perform tracking.
摘要翻译：本发明的目的是提供一种新颖的跟踪方法和装置，适用于应用扫描探针显微镜技术的记录装置，用于记录和/或再现几十nm大小的高密度信息或更低，高精度。跟踪方法和装置包括：具有用于跟踪的颠簸结构的记录介质，其形成在其表面上，具有用于写入，读出和擦除信息的尖端的悬臂以及用于检测悬臂的弯曲和扭转的装置。此外，尖端和记录介质在尖端已经接近或接触的状态下沿着悬臂的固定端和自由端彼此联接的方向相对于彼此移动与记录介质。在这种状态下，悬臂的扭转量和方向，或其弯曲量以及由于颠簸结构引起的扭转方向被设定为反馈信号，以进行跟踪。

5. 发明授权

US5467642A Scanning probe microscope and method of control error correction 失效
标题翻译：扫描探针显微镜和控制误差校正方法
公开(公告)号：US5467642A
公开(公告)日：1995-11-21
申请号：US145600
申请日：1993-11-04
申请人： Sumio Hosaka , Atsushi Kikugawa , Yukio Honda , Hajime Koyanagi , Kiyosi Nagasawa
发明人： Sumio Hosaka , Atsushi Kikugawa , Yukio Honda , Hajime Koyanagi , Kiyosi Nagasawa
IPC分类号： G01B5/28 , G01B7/00 , G01B7/34 , G01B21/30 , G01N27/00 , G01Q20/02 , G01Q20/04 , G01Q30/06 , G01Q70/04
CPC分类号： G01Q70/04 , B82Y35/00 , G01Q30/06 , Y10S977/849 , Y10S977/85 , Y10S977/86 , Y10S977/868 , Y10S977/87 , Y10S977/872 , Y10S977/873
摘要： A scanning probe microscope in which the deflection of a cantilever caused by the proximity between a stylus and a sample is detected, the relative distance between the sample and a probe at which the level of the deflection detection signal coincides with a reference level is subjected to servo control thereby to control the force exerted on the stylus to a constant level, and the relative positions of the sample and the probe are scanned to produce a three-dimensional image of the surface of the sample. In order to eliminate the error of servo control attributable to the deformation of the cantilever, the deflection detection signal is held with the cantilever set in free standing state, and the signal thus held is used to correct the level of the cantilever deflection detection signal. The servo control is effected by the detection signal thus corrected.
摘要翻译：检测由触针和样品之间的接近度引起的悬臂偏转的扫描探针显微镜，将样品与偏转检测信号的电平与参考水平重合的探针之间的相对距离进行伺服控制，从而将施加在触针上的力控制到一定水平，扫描样品和探针的相对位置以产生样品表面的三维图像。为了消除由于悬臂变形引起的伺服控制的误差，偏转检测信号由悬臂设定为自立状态而被保持的信号用于校正悬臂偏转检测信号的电平。伺服控制由如此校正的检测信号来实现。

6. 发明授权

US07683313B2 Charged particle beam measurement equipment, size correction and standard sample for correction 有权
标题翻译：带电粒子束测量设备，尺寸校正和标准样品进行校正
公开(公告)号：US07683313B2
公开(公告)日：2010-03-23
申请号：US12010852
申请日：2008-01-30
申请人： Yasunari Sohda , Yoshinori Nakayama , Hajime Koyanagi , Keiichiro Hitomi
发明人： Yasunari Sohda , Yoshinori Nakayama , Hajime Koyanagi , Keiichiro Hitomi
IPC分类号： G01D18/00
CPC分类号： H01J37/28 , B82Y15/00 , H01J2237/2826
摘要： Correction of widths obtained by measurement of a sample with the use of a scanning electron microscope is executed with greater precision. A standard sample for correction comprises a plurality of correction mark members, the respective correction mark members, being lined up at specified intervals in a specified direction, and respective widths thereof, in the specified direction, differing from each other so as to be of respective sizes as pre-set. Measurement of the respective widths of the correction mark members is made to obtain respective measurement widths while authorized widths of the correction mark members are kept stored in an image processing unit of the scanning electron microscope to thereby find differences between the respective measurement widths, and authorized widths corresponding thereto, and the differences are stored as respective correction functions to correct the measurement width of the sample.
摘要翻译：以更高的精度执行通过使用扫描电子显微镜测量样品获得的宽度的校正。用于校正的标准样本包括多个校正标记构件，各个校正标记构件在指定方向上以指定间隔排列，并且在指定方向上以相应的宽度彼此不同，以相应的方式尺寸为预设。进行校正标记部件的宽度的测量，以获得各自的测量宽度，同时将校正标记部件的授权宽度保存在扫描电子显微镜的图像处理单元中，从而发现各个测量宽度之间的差异，并且被授权相应的宽度，并且差异被存储为相应的校正函数以校正样本的测量宽度。

7. 发明授权

US07612334B2 Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same 有权
标题翻译：用于校准的标准参考部件，其制造方法和使用其的扫描电子显微镜
公开(公告)号：US07612334B2
公开(公告)日：2009-11-03
申请号：US11939596
申请日：2007-11-14
申请人： Yoshinori Nakayama , Yasunari Sohda , Keiichiro Hitomi , Hajime Koyanagi
发明人： Yoshinori Nakayama , Yasunari Sohda , Keiichiro Hitomi , Hajime Koyanagi
IPC分类号： H01J37/26 , H01J37/28 , G01D18/00
CPC分类号： H01J37/28 , H01J37/244 , H01J37/263 , H01J2237/24578 , H01J2237/2816 , H01J2237/2823 , H01J2237/2826 , H01J2237/30433 , H01J2237/3142 , H01J2237/31732
摘要： The present invention provides a standard reference component for calibration for performing magnification calibration used in the scanning electron microscope with high precision, and provides a scanning electron microscope technique using it. Provided is a standard reference component for calibration for calibrating a scanning electron microscope that measures a length of a pattern in an observation area from information on the intensity of secondary electrons or reflected electrons generated by scanning an incident electron beam in the observation area on a measuring sample, having: a first substrate on which a multiple-layer is laminated and a second substrate with a recess for holding the first substrate, wherein the first substrate is held in the recess of the second substrate so that a normal direction of the multiple-layer surface may be roughly perpendicular to a normal direction of the second substrate surface, and the multiple-layer has a multiple-layer structure of a film containing silicon and a film containing molybdenum.
摘要翻译：本发明提供了一种用于校准的标准参考部件，用于以高精度执行扫描电子显微镜中使用的放大校准，并提供使用它的扫描电子显微镜技术。提供了用于校准扫描电子显微镜的标准参考部件，该扫描电子显微镜从关于通过扫描观察区域中的入射电子束产生的二次电子或反射电子的强度的信息来测量观察区域中的图案的长度具有：层叠有多层的第一基板和具有用于保持所述第一基板的凹部的第二基板，其中，所述第一基板保持在所述第二基板的所述凹部中，层表面可以大致垂直于第二基板表面的法线方向，并且多层具有含硅的膜和含有钼的膜的多层结构。

8. 发明申请

US20080210867A1 Scanning Electron Microscope and Calibration of Image Distortion 有权
标题翻译：扫描电子显微镜和图像失真校准
公开(公告)号：US20080210867A1
公开(公告)日：2008-09-04
申请号：US11866426
申请日：2007-10-03
申请人： Keiichiro Hitomi , Yasunari Sohda , Yoshinori Nakayama , Hajime Koyanagi
发明人： Keiichiro Hitomi , Yasunari Sohda , Yoshinori Nakayama , Hajime Koyanagi
IPC分类号： G01N23/00 , H01J37/26
CPC分类号： H01J37/28 , H01J37/265 , H01J2237/2826
摘要： In method and apparatus for obtaining a scanning electron microscope image devoid of distortion by measuring a scanning distortion and calibrating the scanning distortion, there occurs a problem that an error takes place in dimension control owing to a scanning distortion of an electron beam. To cope with this problem, an image is obtained by scanning a predetermined region with the electron beam, a plurality of regions are selected from the image, the pattern pitch is measured in each of the regions and a scanning distortion amount is calculated from the result of measurement and then corrected.
摘要翻译：在通过测量扫描失真和校准扫描失真来获得没有失真的扫描电子显微镜图像的方法和装置中，存在由于电子束的扫描失真引起的尺寸控制中出现误差的问题。为了解决这个问题，通过用电子束扫描预定区域来获得图像，从图像中选择多个区域，在每个区域中测量图案间距，并根据结果计算扫描失真量的测量，然后校正。

9. 发明授权

US5633844A Optical pickup device with three beam tracking servo control using oval beams 失效
标题翻译：采用椭圆形光束的三光束跟踪伺服控制的光学拾取装置
公开(公告)号：US5633844A
公开(公告)日：1997-05-27
申请号：US364185
申请日：1994-12-27
申请人： Takanori Maeda , Hajime Koyanagi
发明人： Takanori Maeda , Hajime Koyanagi
IPC分类号： G11B7/095 , G11B7/09 , G11B7/125 , G11B7/135
CPC分类号： G11B7/1359 , G11B7/0903 , G11B7/127 , G11B7/1353 , G11B7/1398 , G11B2007/13727
摘要： An optical pickup device for writing or reading data from an optical information recording medium has a recording layer whose state changes in response to a density of intensity of an irradiated light beam and a track being used for a tracking servo control system. The device includes a first light spot irradiating element for irradiating a writing or reading light beam onto the recording layer to form a writing or reading spot and a second light spot irradiating element for irradiating at least one controlling light beam onto the recording layer to form a controlling spot having a major axis extending along the track and being longer than a transverse axis perpendicular to the major axis within a level of luminous flux density keeping an original state of the recording layer, whereby a tracking servo control signal having a sufficient level is obtained.
摘要翻译：用于从光学信息记录介质写入或读取数据的光学拾取装置具有响应于照射光束的密度和用于跟踪伺服控制系统的轨道的状态而改变的记录层。该装置包括用于将写入或读取光束照射到记录层上以形成书写或读取点的第一光点照射元件和用于将至少一个控制光束照射到记录层上的第二光点照射元件，以形成控制光斑具有在轨道上延伸的长轴，并且在保持记录层原始状态的光通量密度水平内比长轴垂直的横轴更长，从而获得具有足够电平的跟踪伺服控制信号。

10. 发明授权

US5471064A Precision machining method, precision machining apparatus and data storage apparatus using the same 失效
标题翻译：精密加工方法，精密加工装置及使用其的数据存储装置
公开(公告)号：US5471064A
公开(公告)日：1995-11-28
申请号：US120541
申请日：1993-09-14
申请人： Hajime Koyanagi , Sumio Hosaka , Ryo Imura
发明人： Hajime Koyanagi , Sumio Hosaka , Ryo Imura
IPC分类号： B82B3/00 , G01Q30/02 , G01Q60/00 , G01Q60/10 , G01Q60/12 , G01Q60/18 , G01Q60/24 , G01Q60/40 , G01Q60/56 , G01Q60/58 , G01Q70/14 , G01Q80/00 , G11B9/00 , G11B9/14 , G11B11/00 , G11B11/03 , H01J37/28 , H01J37/30
CPC分类号： B82B3/00 , B82Y10/00 , B82Y30/00 , B82Y40/00 , G11B11/007 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B9/1445 , G11B9/149 , G11B11/03 , G11B2005/0021 , H01J2237/31738 , Y10S977/856 , Y10S977/857 , Y10S977/86 , Y10S977/875 , Y10S977/879 , Y10S977/947
摘要： A method and apparatus for precision machining a surface suitable for use as a data recorder, using a scanning probe microscope (SPM) capable of observing an electrically insulating surface. The SPM includes a probe which comprises a tip having a pointed end, and also including a conductive layer applied on a surface of the tip. The tip is brought into close proximity to the surface which is to be machined and a machining voltage is applied between the tip and the surface to machine the surface.
摘要翻译：一种用于使用能够观察电绝缘表面的扫描探针显微镜（SPM）来精密加工适于用作数据记录器的表面的方法和装置。 SPM包括探针，其包括具有尖端的尖端，并且还包括施加在尖端的表面上的导电层。尖端被接近要加工的表面，并且在尖端和表面之间施加加工电压以加工表面。

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