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    • 1. 发明申请
    • HIGH THROUGHPUT LASER ABLATION PROCESSES AND STRUCTURES FOR FORMING CONTACT HOLES IN SOLAR CELLS
    • 用于在太阳能电池中形成接触孔的高通量激光吸收过程和结构
    • WO2013028433A1
    • 2013-02-28
    • PCT/US2012/050950
    • 2012-08-15
    • SUNPOWER CORPORATIONKIM, TaeseokHARLEY, GabrielSMITH, David, D.COUSINS, Peter, John
    • KIM, TaeseokHARLEY, GabrielSMITH, David, D.COUSINS, Peter, John
    • H01L31/00
    • H01L31/1804H01L31/022441H01L31/0682Y02E10/547Y02P70/521
    • Contact holes of solar cells (300) are formed by laser ablation to accommodate various solar cell designs. Throughput of the solar cell ablation process is improved by incorporating linear base diffusion regions with narrow width, for example as compared to an overlying metal contact. Throughput of the solar cell ablation process may also be improved by having contact holes to base diffusion regions that are perpendicular to contact holes to emitter diffusion regions. To allow for continuous laser scanning, a laser blocking layer may be located over an interlayer dielectric to prevent contact hole formation on certain regions, such as regions where a metal contact of one polarity may electrically shunt to a diffusion region of opposite polarity. In a hybrid design, a solar cell may have both linear and dotted base diffusion regions. An electro-optical modulator may be employed to allow for continuous laser scanning in dotted base diffusion designs.
    • 通过激光烧蚀形成太阳能电池(300)的接触孔,以适应各种太阳能电池设计。 通过结合具有窄宽度的线性基极扩散区域,例如与覆盖的金属接触相比,改善了太阳能电池烧蚀过程的吞吐量。 通过将与接触孔垂直的基底扩散区域的接触孔设置到发射极扩散区域,也可以改善太阳能电池烧蚀过程的吞吐量。 为了允许连续激光扫描,激光阻挡层可以位于层间电介质上方,以防止在某些区域(例如一个极性的金属接触可以电分流到相反极性的扩散区域的区域)上的接触孔形成。 在混合设计中,太阳能电池可以具有线性和点状的基极扩散区域。 可以使用电光调制器来允许在虚点扩散设计中的连续激光扫描。