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1. 发明申请

US20110148048A1 SEALING ARRANGEMENT 审中-公开
标题翻译：密封安排
公开(公告)号：US20110148048A1
公开(公告)日：2011-06-23
申请号：US12971001
申请日：2010-12-17
申请人： Goetz GROSSER , Hans-Juergen HEINRICH , Harald GRUNE
发明人： Goetz GROSSER , Hans-Juergen HEINRICH , Harald GRUNE
IPC分类号： F16J15/02
CPC分类号： F16J15/004 , F16J15/002
摘要： A sealing arrangement for a feedthrough is located between a first machine element and a second machine element and comprises a first sealing element, and a second sealing element disposed in the axial direction of the first machine element at a distance from the first sealing element. The inner sides of the sealing elements form a sealing operative connection with the first machine element. An intermediate space between the first sealing element and the second sealing element is divided into a first chamber and a second chamber connected to each other by an annular gap between the first machine element and the sealing arrangement. The first chamber includes an inlet for a rinsing medium and the second chamber includes a first outlet for drainage or suction of the rinsing medium and possible leakages.
摘要翻译：用于馈通的密封装置位于第一机器元件和第二机器元件之间，并且包括第一密封元件和在第一密封元件距离第一机器元件的轴向方向上设置的第二密封元件。密封元件的内侧形成与第一机器元件的密封操作连接。第一密封元件和第二密封元件之间的中间空间被分成通过第一机器元件和密封装置之间的环形间隙彼此连接的第一室和第二室。第一室包括用于冲洗介质的入口，并且第二室包括用于排出或抽吸冲洗介质的第一出口和可能的泄漏。

2. 发明申请

US20080308410A1 Redundant Anode Sputtering Method and Assembly 有权
标题翻译：冗余阳极溅射方法和装配
公开(公告)号：US20080308410A1
公开(公告)日：2008-12-18
申请号：US12092279
申请日：2006-11-06
申请人： Goetz Teschner , Falk Milde , Enno Mirring , Frank Meissner , Goetz Grosser
发明人： Goetz Teschner , Falk Milde , Enno Mirring , Frank Meissner , Goetz Grosser
IPC分类号： C23C14/00
CPC分类号： H01J37/3444 , C23C14/354 , C23C14/564 , H01J37/32532 , H01J37/3405 , H01J37/3408 , H01J37/3438
摘要： A method is provided for coating a substrate with the aid of a magnetron cathode and two electrodes which are alternately impinged upon by a positive potential and a negative potential. Also disclosed is an assembly for coating a substrate, comprising a vacuum chamber, a magnetron cathode, two electrodes, and a voltage source. A negative potential is generated at a level that is no greater than the level of the cathode potential, thus preventing the electrode that is to be cleaned from being stripped to a greater extent than the same was coated in the previous half-wave. The magnetron cathode and the electrodes are connected to the voltage source via switching elements without being galvanically such that a negative and a positive voltage generated from the voltage source can be alternatively applied to the electrodes, the level of said voltage being no greater than the cathode voltage.
摘要翻译：提供了一种借助于磁控管阴极和两个被正电位和负电位交替冲击的电极涂覆衬底的方法。还公开了一种用于涂覆基板的组件，包括真空室，磁控管阴极，两个电极和电压源。在不大于阴极电位的水平的水平下产生负电位，因此防止被清洗的电极被剥离的程度大于在前一半波中涂覆的电极的程度。磁控管阴极和电极通过开关元件而不是电流地连接到电压源，使得从电压源产生的负电压和正电压可以替代地施加到电极，所述电压的电平不大于阴极电压。

3. 发明申请

US20070235328A1 POWER SUPPLY DEVICE 审中-公开
标题翻译：电源设备
公开(公告)号：US20070235328A1
公开(公告)日：2007-10-11
申请号：US11689529
申请日：2007-03-22
申请人： Goetz TESCHNER , Goetz GROSSER , Wolfgang FRIEDEMANN , Dietmar SCHULZE
发明人： Goetz TESCHNER , Goetz GROSSER , Wolfgang FRIEDEMANN , Dietmar SCHULZE
IPC分类号： C23C14/00
CPC分类号： H01J37/3405 , H01J37/3444
摘要： A high power supply device for a vacuum coating system with at least one magnetron disposed in a coating chamber comprises a line adapter for a DC power supply for converting a line voltage into a DC voltage, a line connection for supplying the line voltage, and a medium-frequency generator supplied by the DC power supply for providing a medium-frequency voltage with at least one load connection for supplying the magnetron with the medium-frequency voltage. The line adapter for the DC power supply in the medium-frequency generator are disposed in a common housing. Dimensions in the housing are adapted to dimensions of the coating chamber and the high frequency supply device is adapted to be mechanically and electrically connected to a magnetron by a connection which is direct and can be undone.
摘要翻译：一种用于真空涂覆系统的高功率供应装置，其具有设置在涂覆室中的至少一个磁控管，包括用于将线路电压转换成直流电压的直流电源的线路适配器，用于提供线路电压的线路连接，以及由直流电源提供的中频发生器，用于向中频电压提供至少一个用于向磁控管提供中频电压的负载连接。用于中频发生器中的直流电源的线路适配器设置在公共壳体中。壳体中的尺寸适于涂层室的尺寸，并且高频供应装置适于通过直接连接并可以被撤销的连接机械地和电气地连接到磁控管。

4. 发明授权

US08192598B2 End-block for a magnetron device with a rotatable target, and vacuum coating apparatus 有权
标题翻译：具有可旋转靶的磁控管装置的端块和真空镀膜装置
公开(公告)号：US08192598B2
公开(公告)日：2012-06-05
申请号：US12504700
申请日：2009-07-17
申请人： Hans-Juergen Heinrich , Goetz Grosser , Sven Haehne , Ulf Seyfert
发明人： Hans-Juergen Heinrich , Goetz Grosser , Sven Haehne , Ulf Seyfert
IPC分类号： C23C14/35
CPC分类号： H01J37/3405 , H01J37/3435
摘要： An end block for a magnetron device having a rotatable target comprises an end block housing having a pivot bearing. The end block housing is adapted on its outer side for attachment on a support unit, and the pivot bearing is adapted on an end that is accessible from outside the end block housing, for connection to the rotatable target. The end block housing is movably attached on the support unit. A vacuum coating apparatus has a vacuum chamber, a magnetron device situated in the vacuum chamber, and a rotatable target rotatably mounted on at least one such end block.
摘要翻译：用于具有可旋转靶的磁控管装置的端块包括具有枢转轴承的端块壳体。端块壳体在其外侧适于附接在支撑单元上，并且枢转轴承适于在端部壳体外部可接近的端部上，用于连接到可旋转靶。端块壳体可移动地附接在支撑单元上。真空镀膜装置具有真空室，位于真空室中的磁控管装置，以及可旋转地安装在至少一个这样的端块上的可旋转靶。

5. 发明申请

US20100012489A1 END-BLOCK FOR A MAGNETRON DEVICE WITH A ROTATABLE TARGET, AND VACUUM COATING APPARATUS 有权
标题翻译：具有可旋转目标的磁铁装置的末端块和真空涂装置
公开(公告)号：US20100012489A1
公开(公告)日：2010-01-21
申请号：US12504700
申请日：2009-07-17
申请人： Hans-Juergen HEINRICH , Goetz GROSSER , Sven HAEHNE , Ulf SEYFERT
发明人： Hans-Juergen HEINRICH , Goetz GROSSER , Sven HAEHNE , Ulf SEYFERT
IPC分类号： C23C14/34
CPC分类号： H01J37/3405 , H01J37/3435
摘要： An end block for a magnetron device having a rotatable target comprises an end block housing having a pivot bearing. The end block housing is adapted on its outer side for attachment on a support unit, and the pivot bearing is adapted on an end that is accessible from outside the end block housing, for connection to the rotatable target. The end block housing is movably attached on the support unit. A vacuum coating apparatus has a vacuum chamber, a magnetron device situated in the vacuum chamber, and a rotatable target rotatably mounted on at least one such end block.
摘要翻译：用于具有可旋转靶的磁控管装置的端块包括具有枢转轴承的端块壳体。端块壳体在其外侧适于附接在支撑单元上，并且枢转轴承适于在端部壳体外部可接近的端部上，用于连接到可旋转靶。端块壳体可移动地附接在支撑单元上。真空镀膜装置具有真空室，位于真空室中的磁控管装置，以及可旋转地安装在至少一个这样的端块上的可旋转靶。

6. 发明申请

US20090078572A1 MAGNETRON END-BLOCK WITH SHIELDED TARGET MOUNTING ASSEMBLY 审中-公开
标题翻译： MAGNETRON端框与屏蔽目标安装组件
公开(公告)号：US20090078572A1
公开(公告)日：2009-03-26
申请号：US12236816
申请日：2008-09-24
申请人： Hans-Juergen HEINRICH , Goetz Grosser , Thorsten Sander , Ulf Seyfert
发明人： Hans-Juergen HEINRICH , Goetz Grosser , Thorsten Sander , Ulf Seyfert
IPC分类号： C23C14/35
CPC分类号： H01J37/3435 , H01J25/50 , H01J37/3405 , H01J37/3441
摘要： A magnetron arrangement includes an end block, which has a target fastening device for rotatable coupling of a tubular target, a holding device for a magnet system arranged in the interior of the tubular target and a shield, which covers the end of a tubular target mounted in the target fastening device. An area of the shield covering the end of the tubular target is configured, so that an annular gap remaining between the target support tube and the shield, viewed from the outside, has at least one radially outward-leading section.
摘要翻译：磁控管装置包括端块，其具有用于管状靶的可旋转联接的目标紧固装置，布置在管状靶的内部的磁体系统的保持装置和覆盖安装的管状靶的端部的护罩在目标紧固装置中。覆盖管状目标端部的屏蔽区域被构造成使得从外部观察，残留在目标支撑管与屏蔽体之间的环状间隙具有至少一个径向向外的前端部。

7. 发明授权

US09117637B2 Redundant anode sputtering method and assembly 有权
标题翻译：冗余阳极溅射法和组装
公开(公告)号：US09117637B2
公开(公告)日：2015-08-25
申请号：US12092279
申请日：2006-11-06
申请人： Goetz Teschner , Falk Milde , Enno Mirring , Frank Meissner , Goetz Grosser
发明人： Goetz Teschner , Falk Milde , Enno Mirring , Frank Meissner , Goetz Grosser
IPC分类号： H01J37/34 , H01J37/32 , C23C14/35 , C23C14/56
CPC分类号： H01J37/3444 , C23C14/354 , C23C14/564 , H01J37/32532 , H01J37/3405 , H01J37/3408 , H01J37/3438
摘要： A method is provided for coating a substrate with the aid of a magnetron cathode and two electrodes which are alternately impinged upon by a positive potential and a negative potential. Also disclosed is an assembly for coating a substrate, comprising a vacuum chamber, a magnetron cathode, two electrodes, and a voltage source. A negative potential is generated at a level that is no greater than the level of the cathode potential, thus preventing the electrode that is to be cleaned from being stripped to a greater extent than the same was coated in the previous half-wave. The magnetron cathode and the electrodes are connected to the voltage source via switching elements without being galvanically such that a negative and a positive voltage generated from the voltage source can be alternatively applied to the electrodes, the level of said voltage being no greater than the cathode voltage.
摘要翻译：提供了一种借助于磁控管阴极和两个被正电位和负电位交替冲击的电极涂覆衬底的方法。还公开了一种用于涂覆基板的组件，包括真空室，磁控管阴极，两个电极和电压源。在不大于阴极电位的水平的水平下产生负电位，因此防止被清洗的电极被剥离的程度大于在前一半波中涂覆的电极的程度。磁控管阴极和电极通过开关元件而不是电流地连接到电压源，使得从电压源产生的负电压和正电压可以替代地施加到电极，所述电压的电平不大于阴极电压。

8. 发明授权

US08894522B2 Drive end-block for a rotatable magnetron 有权
标题翻译：驱动可转动磁控管的端块
公开(公告)号：US08894522B2
公开(公告)日：2014-11-25
申请号：US12421810
申请日：2009-04-10
申请人： Hans-Juergen Heinrich , Goetz Grosser , Thorsten Sander
发明人： Hans-Juergen Heinrich , Goetz Grosser , Thorsten Sander
IPC分类号： F16H7/00 , C23C14/00 , C25B11/00 , C25B13/00 , C23C14/32 , H01J37/34
CPC分类号： H01J37/3405 , H01J37/3435
摘要： A drive end block for a rotatable magnetron comprises a housing, which has a vacuum-tight rotary feedthrough extending through a wall of the housing, and a drive apparatus for generating a torque. An output end of the rotary feedthrough lies outside the housing for connection to the rotatable magnetron and a drive end of the rotary feedthrough lies inside the housing for introducing a torque. The drive apparatus is situated outside the housing of the drive end block and is connected using a torque transmission apparatus to the drive end of the rotary feedthrough so that the drive apparatus is electrically insulated from the housing and the rotary feedthrough of the drive end block.
摘要翻译：用于可旋转磁控管的驱动端块包括壳体，其具有延伸穿过壳体的壁的真空密封的旋转馈通，以及用于产生转矩的驱动装置。旋转馈通的输出端位于壳体的外部，用于连接到可旋转的磁控管，并且旋转馈通的驱动端位于壳体内部以引入转矩。驱动装置位于驱动端块的壳体的外部，并且使用扭矩传递装置连接到旋转馈通的驱动端，使得驱动装置与驱动端块的壳体和旋转馈通电绝缘。

9. 发明申请

US20110180390A1 REDUNDANT ANODE SPUTTERING METHOD 审中-公开
标题翻译：冗余阳极溅射方法
公开(公告)号：US20110180390A1
公开(公告)日：2011-07-28
申请号：US13080244
申请日：2011-04-05
申请人： Goetz TESCHNER , Falk MILDE , Enno MIRRING , Frank MEISSNER , Goetz GROSSER
发明人： Goetz TESCHNER , Falk MILDE , Enno MIRRING , Frank MEISSNER , Goetz GROSSER
IPC分类号： C23C14/35
CPC分类号： H01J37/3444 , C23C14/354 , C23C14/564 , H01J37/32532 , H01J37/3405 , H01J37/3408 , H01J37/3438
摘要： A method is provided for coating a substrate with the aid of a magnetron cathode and two electrodes which are alternately impinged upon by a positive potential and a negative potential. Also disclosed is an assembly for coating a substrate, comprising a vacuum chamber, a magnetron cathode, two electrodes, and a voltage source. A negative potential is generated at a level that is no greater than the level of the cathode potential, thus preventing the electrode that is to be cleaned from being stripped to a greater extent than the same was coated in the previous half-wave. The magnetron cathode and the electrodes are connected to the voltage source via switching elements without being galvanically such that a negative and a positive voltage generated from the voltage source can be alternatively applied to the electrodes, the level of said voltage being no greater than the cathode voltage.
摘要翻译：提供了一种借助于磁控管阴极和两个被正电位和负电位交替冲击的电极涂覆衬底的方法。还公开了一种用于涂覆基板的组件，包括真空室，磁控管阴极，两个电极和电压源。在不大于阴极电位的水平的水平下产生负电位，从而防止被清洗的电极被剥离的程度大于在前一半波中涂覆的电极的程度。磁控管阴极和电极通过开关元件而不是电流地连接到电压源，使得从电压源产生的负电压和正电压可以替代地施加到电极，所述电压的电平不大于阴极电压。

10. 发明申请

US20090258739A1 DRIVE END-BLOCK FOR A ROTATABLE MAGNETRON 有权
标题翻译：用于可旋转磁铁的驱动端块
公开(公告)号：US20090258739A1
公开(公告)日：2009-10-15
申请号：US12421810
申请日：2009-04-10
申请人： Hans-Juergen HEINRICH , Goetz GROSSER , Thorsten SANDER
发明人： Hans-Juergen HEINRICH , Goetz GROSSER , Thorsten SANDER
IPC分类号： F16H7/02
CPC分类号： H01J37/3405 , H01J37/3435
摘要： A drive end block for a rotatable magnetron comprises a housing, which has a vacuum-tight rotary feedthrough extending through a wall of the housing, and a drive apparatus for generating a torque. An output end of the rotary feedthrough lies outside the housing for connection to the rotatable magnetron and a drive end of the rotary feedthrough lies inside the housing for introducing a torque. The drive apparatus is situated outside the housing of the drive end block and is connected using a torque transmission apparatus to the drive end of the rotary feedthrough so that the drive apparatus is electrically insulated from the housing and the rotary feedthrough of the drive end block.
摘要翻译：用于可旋转磁控管的驱动端块包括壳体，其具有延伸穿过壳体的壁的真空密封的旋转馈通，以及用于产生转矩的驱动装置。旋转馈通的输出端位于壳体的外部，用于连接到可旋转的磁控管，并且旋转馈通的驱动端位于壳体内部以引入转矩。驱动装置位于驱动端块的壳体的外部，并且使用扭矩传递装置连接到旋转馈通的驱动端，使得驱动装置与驱动端块的壳体和旋转馈通电绝缘。

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