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1. 发明申请

US20060291135A1 Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods 有权
公开(公告)号：US20060291135A1
公开(公告)日：2006-12-28
申请号：US11313300
申请日：2005-12-20
申请人： Francois-Xavier Musalem , Siebe Bouwstra , Arthur Morris
发明人： Francois-Xavier Musalem , Siebe Bouwstra , Arthur Morris
IPC分类号： H01G7/00
CPC分类号： H01G5/16 , H01G5/04 , H01G5/08 , H01G5/10 , H01G5/18 , H01G5/38 , H01P1/127
摘要： Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a method for varying the capacitance of two conductive plates is provided. The method can include providing a micro-electro-mechanical system (MEMS) variable capacitor. The variable capacitor can include first and second actuation electrodes wherein one of the actuation electrodes is movable with respect to the other actuation electrode when a voltage is applied across the first and second actuation electrodes. Further, the variable capacitor can include first and second capacitive electrodes. The method can include applying a voltage to the first and second actuation electrodes for movement of at least one of the capacitive electrodes in a substantially straight direction with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes.

2. 发明申请

US20050224916A1 Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods 有权
标题翻译：微机电系统（MEMS）可变电容器装置，系统及相关方法
公开(公告)号：US20050224916A1
公开(公告)日：2005-10-13
申请号：US11122379
申请日：2005-05-05
申请人： Francois-Xavier Musalem , Arthur Morris , John Gilbert , Siebe Bouwstra , Randy Richards
发明人： Francois-Xavier Musalem , Arthur Morris , John Gilbert , Siebe Bouwstra , Randy Richards
IPC分类号： A63H13/16 , H01G5/01 , H01G5/011 , H01G5/04 , H01G5/08 , H01G5/10 , H01G5/16 , H01G5/18 , H01G5/38 , H01L21/20 , H01L29/93 , H01P1/10
CPC分类号： H01G5/16 , H01G5/04 , H01G5/08 , H01G5/10 , H01G5/18 , H01G5/38 , H01P1/127
摘要： Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a method for varying the capacitance of two conductive plates is provided. The method can include providing a micro-electro-mechanical system (MEMS) variable capacitor. The variable capacitor can include first and second actuation electrodes wherein one of the actuation electrodes is movable with respect to the other actuation electrode when a voltage is applied across the first and second actuation electrodes. Further, the variable capacitor can include first and second capacitive electrodes. The method can include applying a voltage to the first and second actuation electrodes for movement of at least one of the capacitive electrodes in a substantially straight direction with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes.
摘要翻译：提供微机电系统（MEMS）可变电容器装置，系统及相关方法。根据一个实施例，提供了一种用于改变两个导电板的电容的方法。该方法可以包括提供微机电系统（MEMS）可变电容器。可变电容器可以包括第一和第二致动电极，其中当跨越第一和第二致动电极施加电压时，其中一个致动电极可相对于另一个致动电极移动。此外，可变电容器可以包括第一和第二电容电极。该方法可以包括将电压施加到第一和第二致动电极，用于在施加电压跨越第一和第二致动电极时使电容电极中的至少一个在相对于另一个电容电极的基本上直的方向上移动，以改变第一和第二电容电极之间的电容。

3. 发明授权

US07180145B2 Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods 有权
标题翻译：微机电系统（MEMS）可变电容器装置，系统及相关方法
公开(公告)号：US07180145B2
公开(公告)日：2007-02-20
申请号：US10736283
申请日：2003-12-15
申请人： Francois-Xavier Musalem , Arthur S. Morris, III , John Richard Gilbert , Siebe Bouwstra , Randy J. Richards
发明人： Francois-Xavier Musalem , Arthur S. Morris, III , John Richard Gilbert , Siebe Bouwstra , Randy J. Richards
IPC分类号： H01G5/01
CPC分类号： H01G5/16 , H01G5/04 , H01G5/08 , H01G5/10 , H01G5/18 , H01G5/38 , H01P1/127
摘要： Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided.
摘要翻译：提供微机电系统（MEMS）可变电容器装置，系统及相关方法。

4. 发明授权

US06439050B1 Compensated integrated micro-machined yaw rate sensor with quadrature switching 失效
标题翻译：具有正交切换的补偿集成微加工偏航率传感器
公开(公告)号：US06439050B1
公开(公告)日：2002-08-27
申请号：US09522667
申请日：2000-03-10
申请人： Francois-Xavier Musalem , William R. Betts , Roger Diels
发明人： Francois-Xavier Musalem , William R. Betts , Roger Diels
IPC分类号： G01P900
CPC分类号： G01C19/5719 , G01P2015/084
摘要： An integrated circuit combines micro-machined elements, piezoelectric elements and signal processing components as part of a compensated oscillating gyroscopic sensor for angular motion detection. An oscillating mass is supported on a number of flexible beams micro-machined into an integrated circuit device, such as a silicon CMOS device. Several Piezo-electric elements, deposited on the beams, are provided to excite the mass and to measure the accelerations. Integrated in the device are electronic circuitry that initiates and maintains the oscillation and electronic circuitry that detects and measures the subsequent motion. Additional circuitry is also provided to eliminate the effects of quadrature oscillation and to determine the Coriolis acceleration and thus the magnitude of the external perturbing velocity.
摘要翻译：集成电路将微加工元件，压电元件和信号处理部件组合为用于角运动检测的补偿振荡陀螺传感器的一部分。振动质量块被支撑在微加工成集成电路器件（例如硅CMOS器件）的许多柔性梁上。提供沉积在梁上的几个压电元件以激发质量并测量加速度。集成在设备中的是电子电路，其启动并维护振荡和电子电路，以检测和测量随后的运动。还提供了附加电路以消除正交振荡的影响并确定科里奥利加速度并因此确定外部扰动速度的大小。

5. 发明授权

US07586164B2 Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods 有权
标题翻译：微机电系统（MEMS）可变电容器装置，系统及相关方法
公开(公告)号：US07586164B2
公开(公告)日：2009-09-08
申请号：US11313300
申请日：2005-12-20
申请人： Francois-Xavier Musalem , Siebe Bouwstra , Arthur S. Morris
发明人： Francois-Xavier Musalem , Siebe Bouwstra , Arthur S. Morris
IPC分类号： H01G5/01
CPC分类号： H01G5/16 , H01G5/04 , H01G5/08 , H01G5/10 , H01G5/18 , H01G5/38 , H01P1/127
摘要： Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a method for varying the capacitance of two conductive plates is provided. The method can include providing a micro-electro-mechanical system (MEMS) variable capacitor. The variable capacitor can include first and second actuation electrodes wherein one of the actuation electrodes is movable with respect to the other actuation electrode when a voltage is applied across the first and second actuation electrodes. Further, the variable capacitor can include first and second capacitive electrodes. The method can include applying a voltage to the first and second actuation electrodes for movement of at least one of the capacitive electrodes in a substantially straight direction with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes.
摘要翻译：提供微机电系统（MEMS）可变电容器装置，系统及相关方法。根据一个实施例，提供了一种用于改变两个导电板的电容的方法。该方法可以包括提供微机电系统（MEMS）可变电容器。可变电容器可以包括第一和第二致动电极，其中当跨越第一和第二致动电极施加电压时，其中一个致动电极可相对于另一个致动电极移动。此外，可变电容器可以包括第一和第二电容电极。该方法可以包括将电压施加到第一和第二致动电极，用于在施加电压跨越第一和第二致动电极时使电容电极中的至少一个在相对于另一个电容电极的基本上直的方向上移动，以改变第一和第二电容电极之间的电容。

6. 发明授权

US07388316B2 Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods 有权
标题翻译：微机电系统（MEMS）可变电容器装置，系统及相关方法
公开(公告)号：US07388316B2
公开(公告)日：2008-06-17
申请号：US11122379
申请日：2005-05-05
申请人： Francois-Xavier Musalem , Arthur S. Morris, III , John Richard Gilbert , Siebe Bouwstra , Randy J. Richards
发明人： Francois-Xavier Musalem , Arthur S. Morris, III , John Richard Gilbert , Siebe Bouwstra , Randy J. Richards
IPC分类号： H01G5/01
CPC分类号： H01G5/16 , H01G5/04 , H01G5/08 , H01G5/10 , H01G5/18 , H01G5/38 , H01P1/127
摘要： Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a method for varying the capacitance of two conductive plates is provided. The method can include providing a micro-electro-mechanical system (MEMS) variable capacitor. The variable capacitor can include first and second actuation electrodes wherein one of the actuation electrodes is movable with respect to the other actuation electrode when a voltage is applied across the first and second actuation electrodes. Further, the variable capacitor can include first and second capacitive electrodes. The method can include applying a voltage to the first and second actuation electrodes for movement of at least one of the capacitive electrodes in a substantially straight direction with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes.
摘要翻译：提供微机电系统（MEMS）可变电容器装置，系统及相关方法。根据一个实施例，提供了一种用于改变两个导电板的电容的方法。该方法可以包括提供微机电系统（MEMS）可变电容器。可变电容器可以包括第一和第二致动电极，其中当跨越第一和第二致动电极施加电压时，其中一个致动电极可相对于另一个致动电极移动。此外，可变电容器可以包括第一和第二电容电极。该方法可以包括将电压施加到第一和第二致动电极，用于在施加电压跨越第一和第二致动电极时使电容电极中的至少一个在相对于另一个电容电极的基本上直的方向上移动，以改变第一和第二电容电极之间的电容。

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