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1. 发明授权

US06439050B1 Compensated integrated micro-machined yaw rate sensor with quadrature switching 失效
标题翻译：具有正交切换的补偿集成微加工偏航率传感器
公开(公告)号：US06439050B1
公开(公告)日：2002-08-27
申请号：US09522667
申请日：2000-03-10
申请人： Francois-Xavier Musalem , William R. Betts , Roger Diels
发明人： Francois-Xavier Musalem , William R. Betts , Roger Diels
IPC分类号： G01P900
CPC分类号： G01C19/5719 , G01P2015/084
摘要： An integrated circuit combines micro-machined elements, piezoelectric elements and signal processing components as part of a compensated oscillating gyroscopic sensor for angular motion detection. An oscillating mass is supported on a number of flexible beams micro-machined into an integrated circuit device, such as a silicon CMOS device. Several Piezo-electric elements, deposited on the beams, are provided to excite the mass and to measure the accelerations. Integrated in the device are electronic circuitry that initiates and maintains the oscillation and electronic circuitry that detects and measures the subsequent motion. Additional circuitry is also provided to eliminate the effects of quadrature oscillation and to determine the Coriolis acceleration and thus the magnitude of the external perturbing velocity.
摘要翻译：集成电路将微加工元件，压电元件和信号处理部件组合为用于角运动检测的补偿振荡陀螺传感器的一部分。振动质量块被支撑在微加工成集成电路器件（例如硅CMOS器件）的许多柔性梁上。提供沉积在梁上的几个压电元件以激发质量并测量加速度。集成在设备中的是电子电路，其启动并维护振荡和电子电路，以检测和测量随后的运动。还提供了附加电路以消除正交振荡的影响并确定科里奥利加速度并因此确定外部扰动速度的大小。

2. 发明授权

US06265712B1 IR sensor with reflective calibration 失效
标题翻译：红外传感器带反光校准
公开(公告)号：US06265712B1
公开(公告)日：2001-07-24
申请号：US09262896
申请日：1999-03-10
申请人： Olivier Charlier , William R. Betts , Roger Diels
发明人： Olivier Charlier , William R. Betts , Roger Diels
IPC分类号： G01J504
CPC分类号： G01J5/522 , G01J5/04 , G01J5/08 , G01J5/0806 , G01J5/0875 , G01J5/10
摘要： A self-calibrating infrared (IR) sensing device having the capability to measure the attenuation effects of surface contamination on the transmission window and to adjust the gain of the sensor accordingly so as to counter the attenuation. The IR sensing device includes an IR sensor mounted in a housing having an IR transparent window that allows IR radiation originating from outside the housing to be directed toward the sensor. The IR sensor includes a thermally isolated area of IR-absorbing material coupled to a temperature measuring unit. IR radiation impinging on the sensor is absorbed, thereby raising the temperature of the IR absorbing material. The temperature measuring unit measures the increase in temperature and generates a proportional electronic signal indicative of the temperature. The electronic signal is received and processed by a processor. An IR radiator is also included within the sensing device housing. When activated, the radiator emits IR radiation that passes through the window and is lost to the outside if there is no contamination. If the surface of the window is contaminated, the radiation raises the temperature of the contaminants. This increase in temperature results in a return signal (i.e., IR emissions from the contaminants) that is detected by the sensor. The magnitude of the return signal indicates the amount of contaminant on the surface of the window. The return signal is detected and measured by the IR sensor, and is used to signal a warning and/or determine the amount of gain necessary to compensate for the loss of true signal caused by the presence of the contamination.
摘要翻译：一种自校准红外（IR）感测装置，其具有测量传输窗口上的表面污染的衰减效应并相应地调节传感器的增益的能力，以便抵消衰减。 IR感测装置包括安装在具有IR透明窗口的壳体中的IR传感器，其允许源自壳体外部的IR辐射被引向传感器。 IR传感器包括耦合到温度测量单元的IR吸收材料的热隔离区域。吸收在传感器上的红外辐射被吸收，从而提高IR吸收材料的温度。温度测量单元测量温度的升高并产生指示温度的比例电子信号。电子信号由处理器接收和处理。感测装置壳体内还包括红外辐射器。当激活时，散热器发射通过窗户的红外辐射，如果没有污染物，它将丢失到外部。如果窗户的表面被污染，辐射会提高污染物的温度。这种温度升高导致由传感器检测到的返回信号（即来自污染物的IR发射）。返回信号的大小表示窗口表面上的污染物的量。返回信号由IR传感器检测和测量，并用于发出警告信号和/或确定补偿因污染物的存在引起的真实信号丢失所必需的增益量。

3. 发明授权

US06369386B1 IR sensor with reflective calibration 有权
标题翻译：红外传感器带反光校准
公开(公告)号：US06369386B1
公开(公告)日：2002-04-09
申请号：US09287465
申请日：1999-04-07
申请人： Olivier Charlier , William R. Betts , Roger Diels
发明人： Olivier Charlier , William R. Betts , Roger Diels
IPC分类号： G01J504
CPC分类号： G01J5/04 , G01J5/08 , G01J5/0806 , G01J5/0875 , G01J5/10 , G01J5/522
摘要： A self-calibrating infrared (IR) sensing device having the capability to measure the attenuation effects of surface contamination on the transmission window and to adjust the gain of the sensor accordingly so as to counter the attenuation. The IR sensing device includes an IR sensor mounted in a housing having an IR transparent window that allows IR radiation originating from outside the housing to be directed toward the sensor. The IR sensor includes a thermally isolated area of IR-absorbing material coupled to a temperature measuring unit. IR radiation impinging on the sensor is absorbed, thereby raising the temperature of the IR absorbing material. The temperature measuring unit measures the increase in temperature and generates a proportional electronic signal indicative of the temperature. The electronic signal is received and processed by a processor. An IR radiator is also included within the sensing device housing. When activated, the radiator emits IR radiation that passes through the window and is lost to the outside if there is no contamination. If the surface of the window is contaminated, the radiation raises the temperature of the contaminants. This increase in temperature results in a return signal (i.e., IR emissions from the contaminants) that is detected by the sensor. A mirror element is also included within the sensing device. The mirror element focuses radiation from the remote target onto the sensor, and it reflects IR radiation emitted by the IR radiator onto the window. The magnitude of the return signal indicates the amount of contaminant on the surface of the window. The return signal is detected and measured by the IR sensor, and is used to signal a warning and/or determine the amount of gain necessary to compensate for the loss of true signal caused by the presence of the contamination.
摘要翻译：一种自校准红外（IR）感测装置，其具有测量传输窗口上的表面污染的衰减效应并相应地调节传感器的增益的能力，以便抵消衰减。 IR感测装置包括安装在具有IR透明窗口的壳体中的IR传感器，其允许源自壳体外部的IR辐射被引向传感器。 IR传感器包括耦合到温度测量单元的IR吸收材料的热隔离区域。吸收在传感器上的红外辐射被吸收，从而提高IR吸收材料的温度。温度测量单元测量温度的升高并产生指示温度的比例电子信号。电子信号由处理器接收和处理。感测装置壳体内还包括红外辐射器。当激活时，散热器发射通过窗户的红外辐射，如果没有污染物，它将丢失到外部。如果窗户的表面被污染，辐射会提高污染物的温度。这种温度升高导致由传感器检测到的返回信号（即来自污染物的IR发射）。传感装置中还包括镜子元件。镜子元件将来自远程目标的辐射聚焦到传感器上，并将IR辐射器发射的红外辐射反射到窗户上。返回信号的大小表示窗口表面上的污染物的量。返回信号由IR传感器检测和测量，并用于发出警告信号和/或确定补偿因污染物的存在引起的真实信号丢失所必需的增益量。

4. 发明授权

US06917089B2 Integrated sensor packages and methods of making the same 有权
标题翻译：集成传感器封装及其制作方法
公开(公告)号：US06917089B2
公开(公告)日：2005-07-12
申请号：US10831489
申请日：2004-04-22
申请人： Johan Schuurmans , William R. Betts , Roger Diels , Adrian Hill
发明人： Johan Schuurmans , William R. Betts , Roger Diels , Adrian Hill
IPC分类号： G01L9/00 , H01L21/44 , H01L21/48 , H01L21/50 , H01L23/31 , H01L29/82 , H01L43/00
CPC分类号： G01L19/147 , B29C33/06 , B60C23/0408 , G01L19/141 , G01L19/148 , H01L21/50 , H01L21/56 , H01L23/315 , H01L31/0203 , H01L2224/48091 , H01L2224/48137 , H01L2224/8592 , H01L2924/00014 , H01L2224/45099
摘要： Elements of a sensor system are encapsulated into a single package. The sensor elements are covered with a flexible gel coat and then inserted into a molding tool cavity. Each element may be individually coated with a gel blob, or all elements may by coated with a single gel blob. One or more retractable pins are incorporated into the molding tool and in their normal position are each in contact with the gel. A molding compound is injected into the cavity so as to encapsulate the device and gel coat. When the pins are extracted and the device ejected from the molding cavity, one or more passageways in the molding are left defined by the pins. The passageways expose the flexible gel covering the device elements to the atmosphere. For pressure sensitive elements, the gel, being flexible, transfers the local air pressure to the pressure sensitive element. For optical elements, the exposed gel is preferably removed to allow for the passage of radiation to and from the device elements. Alternatively, or in addition, an optically transmitting gel is used so as to allow for the passage of radiation at specific wavelengths.
摘要翻译：传感器系统的元件被封装成单个封装。传感器元件用柔性凝胶涂层覆盖，然后插入模制工具腔中。每个元件可以单独地涂覆有凝胶斑块，或者所有元素可以通过涂覆单个凝胶斑点。一个或多个可缩回销被并入模制工具中，并且在其正常位置各自与凝胶接触。将模塑料注入空腔中以封装装置和凝胶涂层。当销被抽出并且装置从模制腔排出时，模制件中的一个或多个通道由销定义。通道将覆盖设备元件的柔性凝胶暴露在大气中。对于压敏元件，凝胶是柔性的，将局部空气压力传递到压敏元件。对于光学元件，优选去除暴露的凝胶以允许辐射通过和从设备元件通过。或者或另外，使用光学透射凝胶以允许在特定波长的辐射通过。

5. 发明授权

US06300623B1 IR sensor with reflective calibration 有权
标题翻译：红外传感器带反光校准
公开(公告)号：US06300623B1
公开(公告)日：2001-10-09
申请号：US09287464
申请日：1999-04-07
申请人： Olivier Charlier , William R. Betts , Roger Diels
发明人： Olivier Charlier , William R. Betts , Roger Diels
IPC分类号： G01J504
CPC分类号： G01J5/04 , G01J5/08 , G01J5/0806 , G01J5/0875 , G01J5/10 , G01J5/522
摘要： A self-calibrating infrared (IR) sensing device having the capability to measure the attenuation effects of surface contamination on the transmission window and to adjust the gain of the sensor accordingly so as to counter the attenuation. The IR sensing device includes an IR sensor mounted in a housing having an IR transparent window that allows IR radiation originating from outside the housing to be directed toward the sensor. The IR sensor includes a thermally isolated area of IR-absorbing material coupled to a temperature measuring unit. IR radiation impinging on the sensor is absorbed, thereby raising the temperature of the IR absorbing material. The temperature measuring unit measures the increase in temperature and generates a proportional electronic signal indicative of the temperature. The electronic signal is received and processed by a processor. An IR radiator is also included within the sensing device housing. When activated, the radiator emits IR radiation that passes through the window and is reflected by an external mirror onto the IR sensitive element. If the surface of the window is contaminated, a portion of the reflected signal is absorbed and the attenuated signal is detected by the sensor. The relative magnitude of the attenuated signal indicates the amount of contaminant on the surface of the window. The attenuated signal is detected and measured by the IR sensor, and is used to signal a warning and/or determine the amount of gain necessary to compensate for the loss of true signal caused by the presence of the contamination.
摘要翻译：一种自校准红外（IR）感测装置，其具有测量传输窗口上的表面污染的衰减效应并相应地调节传感器的增益的能力，以便抵消衰减。 IR感测装置包括安装在具有IR透明窗口的壳体中的IR传感器，其允许源自壳体外部的IR辐射被引向传感器。 IR传感器包括耦合到温度测量单元的IR吸收材料的热隔离区域。吸收在传感器上的红外辐射被吸收，从而提高IR吸收材料的温度。温度测量单元测量温度的升高并产生指示温度的比例电子信号。电子信号由处理器接收和处理。感测装置壳体内还包括红外辐射器。当激活时，散热器发射通过窗口的IR辐射，并被外部反射镜反射到IR敏感元件上。如果窗口的表面被污染，则反射信号的一部分被吸收并且衰减的信号被传感器检测到。衰减信号的相对幅度表示窗口表面上的污染物的量。衰减信号由IR传感器检测和测量，并用于发出警告信号和/或确定补偿因污染物的存在引起的真实信号损失所必需的增益量。

6. 发明授权

US06762077B2 Integrated sensor packages and methods of making the same 有权
公开(公告)号：US06762077B2
公开(公告)日：2004-07-13
申请号：US09956469
申请日：2001-09-18
申请人： Johan Schuurmans , William R. Betts , Roger Diels , Adrian Hill
发明人： Johan Schuurmans , William R. Betts , Roger Diels , Adrian Hill
IPC分类号： H01L2144
CPC分类号： G01L19/147 , B29C33/06 , B60C23/0408 , G01L19/141 , G01L19/148 , H01L21/50 , H01L21/56 , H01L23/315 , H01L31/0203 , H01L2224/48091 , H01L2224/48137 , H01L2224/8592 , H01L2924/00014 , H01L2224/45099
摘要： Elements of a sensor system are encapsulated into a single package. The sensor elements are covered with a flexible gel coat and then inserted into a molding tool cavity. Each element may be individually coated with a gel blob, or all elements may by coated with a single gel blob. One or more retractable pins are incorporated into the molding tool and in their normal position are each in contact with the gel. A molding compound is injected into the cavity so as to encapsulate the device and gel coat. When the pins are extracted and the device ejected from the molding cavity, one or more passageways in the molding are left defined by the pins. The passageways expose the flexible gel covering the device elements to the atmosphere. For pressure sensitive elements, the gel, being flexible, transfers the local air pressure to the pressure sensitive element. For optical elements, the exposed gel is preferably removed to allow for the passage of radiation to and from the device elements. Alternatively, or in addition, an optically transmitting gel is used so as to allow for the passage of radiation at specific wavelengths.

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