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1. 发明授权

US07180145B2 Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods 有权
标题翻译：微机电系统（MEMS）可变电容器装置，系统及相关方法
公开(公告)号：US07180145B2
公开(公告)日：2007-02-20
申请号：US10736283
申请日：2003-12-15
申请人： Francois-Xavier Musalem , Arthur S. Morris, III , John Richard Gilbert , Siebe Bouwstra , Randy J. Richards
发明人： Francois-Xavier Musalem , Arthur S. Morris, III , John Richard Gilbert , Siebe Bouwstra , Randy J. Richards
IPC分类号： H01G5/01
CPC分类号： H01G5/16 , H01G5/04 , H01G5/08 , H01G5/10 , H01G5/18 , H01G5/38 , H01P1/127
摘要： Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided.
摘要翻译：提供微机电系统（MEMS）可变电容器装置，系统及相关方法。

2. 发明授权

US07388316B2 Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods 有权
标题翻译：微机电系统（MEMS）可变电容器装置，系统及相关方法
公开(公告)号：US07388316B2
公开(公告)日：2008-06-17
申请号：US11122379
申请日：2005-05-05
申请人： Francois-Xavier Musalem , Arthur S. Morris, III , John Richard Gilbert , Siebe Bouwstra , Randy J. Richards
发明人： Francois-Xavier Musalem , Arthur S. Morris, III , John Richard Gilbert , Siebe Bouwstra , Randy J. Richards
IPC分类号： H01G5/01
CPC分类号： H01G5/16 , H01G5/04 , H01G5/08 , H01G5/10 , H01G5/18 , H01G5/38 , H01P1/127
摘要： Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a method for varying the capacitance of two conductive plates is provided. The method can include providing a micro-electro-mechanical system (MEMS) variable capacitor. The variable capacitor can include first and second actuation electrodes wherein one of the actuation electrodes is movable with respect to the other actuation electrode when a voltage is applied across the first and second actuation electrodes. Further, the variable capacitor can include first and second capacitive electrodes. The method can include applying a voltage to the first and second actuation electrodes for movement of at least one of the capacitive electrodes in a substantially straight direction with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes.
摘要翻译：提供微机电系统（MEMS）可变电容器装置，系统及相关方法。根据一个实施例，提供了一种用于改变两个导电板的电容的方法。该方法可以包括提供微机电系统（MEMS）可变电容器。可变电容器可以包括第一和第二致动电极，其中当跨越第一和第二致动电极施加电压时，其中一个致动电极可相对于另一个致动电极移动。此外，可变电容器可以包括第一和第二电容电极。该方法可以包括将电压施加到第一和第二致动电极，用于在施加电压跨越第一和第二致动电极时使电容电极中的至少一个在相对于另一个电容电极的基本上直的方向上移动，以改变第一和第二电容电极之间的电容。

3. 发明申请

US20060291135A1 Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods 有权
公开(公告)号：US20060291135A1
公开(公告)日：2006-12-28
申请号：US11313300
申请日：2005-12-20
申请人： Francois-Xavier Musalem , Siebe Bouwstra , Arthur Morris
发明人： Francois-Xavier Musalem , Siebe Bouwstra , Arthur Morris
IPC分类号： H01G7/00
CPC分类号： H01G5/16 , H01G5/04 , H01G5/08 , H01G5/10 , H01G5/18 , H01G5/38 , H01P1/127
摘要： Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a method for varying the capacitance of two conductive plates is provided. The method can include providing a micro-electro-mechanical system (MEMS) variable capacitor. The variable capacitor can include first and second actuation electrodes wherein one of the actuation electrodes is movable with respect to the other actuation electrode when a voltage is applied across the first and second actuation electrodes. Further, the variable capacitor can include first and second capacitive electrodes. The method can include applying a voltage to the first and second actuation electrodes for movement of at least one of the capacitive electrodes in a substantially straight direction with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes.

4. 发明申请

US20050224916A1 Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods 有权
标题翻译：微机电系统（MEMS）可变电容器装置，系统及相关方法
公开(公告)号：US20050224916A1
公开(公告)日：2005-10-13
申请号：US11122379
申请日：2005-05-05
申请人： Francois-Xavier Musalem , Arthur Morris , John Gilbert , Siebe Bouwstra , Randy Richards
发明人： Francois-Xavier Musalem , Arthur Morris , John Gilbert , Siebe Bouwstra , Randy Richards
IPC分类号： A63H13/16 , H01G5/01 , H01G5/011 , H01G5/04 , H01G5/08 , H01G5/10 , H01G5/16 , H01G5/18 , H01G5/38 , H01L21/20 , H01L29/93 , H01P1/10
CPC分类号： H01G5/16 , H01G5/04 , H01G5/08 , H01G5/10 , H01G5/18 , H01G5/38 , H01P1/127
摘要： Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a method for varying the capacitance of two conductive plates is provided. The method can include providing a micro-electro-mechanical system (MEMS) variable capacitor. The variable capacitor can include first and second actuation electrodes wherein one of the actuation electrodes is movable with respect to the other actuation electrode when a voltage is applied across the first and second actuation electrodes. Further, the variable capacitor can include first and second capacitive electrodes. The method can include applying a voltage to the first and second actuation electrodes for movement of at least one of the capacitive electrodes in a substantially straight direction with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes.
摘要翻译：提供微机电系统（MEMS）可变电容器装置，系统及相关方法。根据一个实施例，提供了一种用于改变两个导电板的电容的方法。该方法可以包括提供微机电系统（MEMS）可变电容器。可变电容器可以包括第一和第二致动电极，其中当跨越第一和第二致动电极施加电压时，其中一个致动电极可相对于另一个致动电极移动。此外，可变电容器可以包括第一和第二电容电极。该方法可以包括将电压施加到第一和第二致动电极，用于在施加电压跨越第一和第二致动电极时使电容电极中的至少一个在相对于另一个电容电极的基本上直的方向上移动，以改变第一和第二电容电极之间的电容。

5. 发明授权

US07586164B2 Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods 有权
标题翻译：微机电系统（MEMS）可变电容器装置，系统及相关方法
公开(公告)号：US07586164B2
公开(公告)日：2009-09-08
申请号：US11313300
申请日：2005-12-20
申请人： Francois-Xavier Musalem , Siebe Bouwstra , Arthur S. Morris
发明人： Francois-Xavier Musalem , Siebe Bouwstra , Arthur S. Morris
IPC分类号： H01G5/01
CPC分类号： H01G5/16 , H01G5/04 , H01G5/08 , H01G5/10 , H01G5/18 , H01G5/38 , H01P1/127
摘要： Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a method for varying the capacitance of two conductive plates is provided. The method can include providing a micro-electro-mechanical system (MEMS) variable capacitor. The variable capacitor can include first and second actuation electrodes wherein one of the actuation electrodes is movable with respect to the other actuation electrode when a voltage is applied across the first and second actuation electrodes. Further, the variable capacitor can include first and second capacitive electrodes. The method can include applying a voltage to the first and second actuation electrodes for movement of at least one of the capacitive electrodes in a substantially straight direction with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes.
摘要翻译：提供微机电系统（MEMS）可变电容器装置，系统及相关方法。根据一个实施例，提供了一种用于改变两个导电板的电容的方法。该方法可以包括提供微机电系统（MEMS）可变电容器。可变电容器可以包括第一和第二致动电极，其中当跨越第一和第二致动电极施加电压时，其中一个致动电极可相对于另一个致动电极移动。此外，可变电容器可以包括第一和第二电容电极。该方法可以包括将电压施加到第一和第二致动电极，用于在施加电压跨越第一和第二致动电极时使电容电极中的至少一个在相对于另一个电容电极的基本上直的方向上移动，以改变第一和第二电容电极之间的电容。

6. 发明授权

US6075867A Micromechanical microphone 失效
标题翻译：微机麦克风
公开(公告)号：US6075867A
公开(公告)日：2000-06-13
申请号：US981714
申请日：1998-03-19
申请人： Jesper Bay , Siebe Bouwstra , Ole Hansen
发明人： Jesper Bay , Siebe Bouwstra , Ole Hansen
IPC分类号： H04R1/22 , H04R19/00 , H04R19/04 , H04R25/00
CPC分类号： H04R19/00
摘要： A Micromechanical Microphone is formed with a housing and a transducer therein. The housing has a sound inlet on one side of the transducer and a pressure compensation hole on the opposite side. A sealing diaphragm is placed on each side of the transducer to seal it against humidity, dust and dirt. The transducer may be a capacitive transducer with an external bias or an electret based transducer. The microphone is useful in small devices such as hearing aides.
摘要翻译： PCT No.PCT / DK96 / 00276 Sec。 371日期：1998年3月19日 102（e）1998年3月19日PCT PCT 1996年6月21日PCT公布。第WO97 / 01258号公报日期1997年1月9日Micromechanical麦克风在其中形成有壳体和换能器。外壳在换能器一侧有一个声音入口，另一侧有一个压力补偿孔。在传感器的每一侧放置一个密封隔膜以将其密封以防止湿度，灰尘和污垢。换能器可以是具有外部偏置或基于驻极体的换能器的电容式换能器。麦克风在小型设备（如助听器）中非常有用。

7. 再颁专利

USRE42347E1 Solid state silicon-based condenser microphone 有权
公开(公告)号：USRE42347E1
公开(公告)日：2011-05-10
申请号：US11903207
申请日：2007-09-20
申请人： Pirmin Rombach , Matthias Müllenborn , Ole Hansen , Matthias Heschel , Siebe Bouwstra , Maja Amskov Gravad , Henrik Laurids Hvims , Jorgen B. Elmer, legal representative
发明人： Pirmin Rombach , Matthias Müllenborn , Ole Hansen , Matthias Heschel , Siebe Bouwstra , Maja Amskov Gravad , Henrik Laurids Hvims
IPC分类号： H04R25/00
CPC分类号： H04R19/005 , H04R19/04
摘要： A solid state silicon-based condenser microphone comprising a silicon transducer chip (1). The transducer chip includes a backplate (13) and a diaphragm (12) arranged substantially parallel to each other with a small air gap in between, thereby forming an electrical capacitor. The diaphragm (12) is movable relative to the backplate (13) in response to incident sound. An integrated electronic circuit chip (3) or ASIC is electrically coupled to the transducer chip (1). An intermediate layer (2) fixes the transducer chip (1) to the integrated electronic circuit chip (3) with the transducer chip (1) on a first side of the intermediate layer (2) and the integrated electronic circuit chip (3) on a second side of the intermediate layer (2) opposite the first side. The intermediate layer (2) has a sound inlet (4) on the same side as the ASIC giving access of sound to the diaphragm.

8. 发明授权

US6088463A Solid state silicon-based condenser microphone 有权
标题翻译：固态硅基电容麦克风
公开(公告)号：US6088463A
公开(公告)日：2000-07-11
申请号：US182668
申请日：1998-10-30
申请人： Pirmin Rombach , Matthias Mullenborn , Ole Hansen , Matthias Heschel , Siebe Bouwstra , Maja Amskov Gravad , Henrik Laurids Hvims
发明人： Pirmin Rombach , Matthias Mullenborn , Ole Hansen , Matthias Heschel , Siebe Bouwstra , Maja Amskov Gravad , Henrik Laurids Hvims
IPC分类号： H04R19/00 , H04R25/00
CPC分类号： H04R19/005 , H04R19/04
摘要： A solid state silicon-based condenser microphone comprising a silicon transducer chip (1). The transducer chip includes a backplate (13) and a diaphragm (12) arranged substantially parallel to each other with a small air gap in between, thereby forming an electrical capacitor. The diaphragm (12) is movable relative to the backplate (13) in response to incident sound. An integrated electronic circuit chip (3) or ASIC is electrically coupled to the transducer chip (1). An intermediate layer (2) fixes the transducer chip (1) to the integrated electronic circuit chip (3) with the transducer chip (1) on a first side of the intermediate layer (2) and the integrated electronic circuit chip (3) on a second side of the intermediate layer (2) opposite the first side. The intermediate layer (2) has a sound inlet (4) on the same side as the ASIC giving access of sound to the diaphragm.
摘要翻译：一种固态硅基电容式麦克风，包括硅转换器芯片（1）。换能器芯片包括背板（13）和隔板（12），隔膜（12）基本上彼此平行地布置有间隙小的气隙，从而形成电容器。响应于入射声，隔膜（12）可相对于背板（13）移动。集成电子电路芯片（3）或ASIC电耦合到换能器芯片（1）。中间层（2）将换能器芯片（1）与中间层（2）和集成电子电路芯片（3）的第一侧上的换能器芯片（1）固定到集成电子电路芯片（3）上，所述中间层（2）的与所述第一侧相对的第二侧。中间层（2）在与ASIC相同的侧面上具有声音入口（4），从而提供对隔膜的声音的访问。

9. 再颁专利

USRE42346E1 Solid state silicon-based condenser microphone 有权
标题翻译：固态硅基电容麦克风
公开(公告)号：USRE42346E1
公开(公告)日：2011-05-10
申请号：US10193055
申请日：2002-07-11
申请人： Pirmin Rombach , Matthias Müllenborn , Ole Hansen , Matthias Heschel , Siebe Bouwstra , Maja Amskov Gravad , Henrick Laurids Hvims , Jørgen B. Elmer, legal representative
发明人： Pirmin Rombach , Matthias Müllenborn , Ole Hansen , Matthias Heschel , Siebe Bouwstra , Maja Amskov Gravad , Henrick Laurids Hvims
IPC分类号： H04R25/00
CPC分类号： H04R19/005 , H04R19/04
摘要： A solid state silicon-based condenser microphone comprising a silicon transducer chip (1). The transducer chip includes a backplate (13) and a diaphragm (12) arranged substantially parallel to each other with a small air gap in between, thereby forming an electrical capacitor. The diaphragm (12) is movable relative to the backplate (13) in response to incident sound. An integrated electronic circuit chip (3) or ASIC is electrically coupled to the transducer chip (1). An intermediate layer (2) fixes the transducer chip (1) to the integrated electronic circuit chip (3) with the transducer chip (1) on a first side of the intermediate layer (2) and the integrated electronic circuit chip (3) on a second side of the intermediate layer (2) opposite the first side. The intermediate layer (2) has a sound inlet (4) on the same side as the ASIC giving access of sound to the diaphragm.
摘要翻译：一种固态硅基电容式麦克风，包括硅转换器芯片（1）。换能器芯片包括背板（13）和隔板（12），隔膜（12）基本上彼此平行地布置有间隙小的气隙，从而形成电容器。响应于入射声，隔膜（12）可相对于背板（13）移动。集成电子电路芯片（3）或ASIC电耦合到换能器芯片（1）。中间层（2）将换能器芯片（1）与中间层（2）和集成电子电路芯片（3）的第一侧上的换能器芯片（1）固定到集成电子电路芯片（3）上，所述中间层（2）的与所述第一侧相对的第二侧。中间层（2）在与ASIC相同的侧面上具有声音入口（4），从而提供对隔膜的声音的访问。

10. 发明申请

US20060181377A1 Switch pad and micro-switch having the same 审中-公开
标题翻译：开关板和微动开关具有相同的功能
公开(公告)号：US20060181377A1
公开(公告)日：2006-08-17
申请号：US11345379
申请日：2006-02-02
申请人： Soon-cheol Kweon , Hyung-jae Shin , Che-heung Kim , Sang-hun Lee , Mark Da Silva , Siebe Bouwstra
发明人： Soon-cheol Kweon , Hyung-jae Shin , Che-heung Kim , Sang-hun Lee , Mark Da Silva , Siebe Bouwstra
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H2059/0054 , H01H2059/0081
摘要： A switch pad for switching signal flow and a micro-switch having the same. The switch pad comprises a body formed so that as approaching opposite end portions from a central portion of the body, the body is more remotely spaced from a horizontal plane containing a top surface of the electrostatic driving unit. With the body of the switch pad formed in this manner, the switch pad can be more stably driven.
摘要翻译：用于切换信号流的开关板和具有该开关的微型开关。开关板包括主体，其形成为使得当与主体的中心部分接近相对的端部部分时，主体与包含静电驱动单元的顶表面的水平平面更远离间隔。以这种方式形成的开关垫的主体，可以更稳定地驱动开关垫。

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