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    • 1. 发明授权
    • System and method for high-speed potentiometry using scanning probe
microscope
    • 使用扫描探针显微镜进行高速电位法的系统和方法
    • US5488305A
    • 1996-01-30
    • US313758
    • 1994-09-28
    • David M. BloomFrancis HoAlfred S. Hou
    • David M. BloomFrancis HoAlfred S. Hou
    • G01Q60/38G01B5/28G01B21/30G01Q10/06G01Q70/14
    • G01Q60/32B82Y35/00G01Q10/06Y10S977/849Y10S977/852Y10S977/86Y10S977/861Y10S977/864Y10S977/868Y10S977/873
    • A potentiometry apparatus for measuring a periodic electrical waveform existing proximate the surface of a sample such as a semiconductor wafer is disclosed herein. The potentiometry apparatus includes a pulse generator for generating a sequence of electrical pulses at a pulse frequency offset from the frequency of the surface waveform by a mixing frequency. A cantilever coupled to the pulse generator serves to carry the electrical pulses to a position proximate the surface of the sample. In a capacitive displacement mode the cantilever is mechanically displaced so as to generate a time-expanded representation of the electrical surface waveform having a repetition frequency equal to the mixing frequency. During displacement mode operation an optical detection circuit may be employed to monitor deflection of the cantilever. In a tunneling current mode the cantilever is again employed to carry the electrical pulses to a position proximate the surface of the sample. In this mode a tunneling current propagating through the cantilever at the mixing frequency provides a time,expanded representation of the electrical surface waveform.
    • 本文公开了一种用于测量接近诸如半导体晶片的样品表面存在的周期性电波形的电位测量装置。 电位计装置包括脉冲发生器,用于以与混合频率的表面波形的频率偏移的脉冲频率产生电脉冲序列。 耦合到脉冲发生器的悬臂用于将电脉冲传送到靠近样品表面的位置。 在电容位移模式中,悬臂被机械移位,以产生具有等于混合频率的重复频率的电表面波形的时间扩展表示。 在位移模式操作期间,可以采用光学检测电路来监测悬臂的偏转。 在隧道电流模式中,悬臂再次用于将电脉冲运送到靠近样品表面的位置。 在这种模式下,以混合频率传播通过悬臂的隧道电流提供电表面波形的时间,扩展的表示。
    • 2. 发明授权
    • System and method of measuring high-speed electrical waveforms using
force microscopy and offset sampling frequencies
    • 使用力显微镜和偏移采样频率测量高速电波形的系统和方法
    • US5381101A
    • 1995-01-10
    • US984891
    • 1992-12-02
    • David M. BloomFrancis HoAlfred S. Hou
    • David M. BloomFrancis HoAlfred S. Hou
    • G01Q60/38G01B5/28G01B21/30G01Q10/06G01Q70/14
    • G01Q60/32B82Y35/00G01Q10/06Y10S977/849Y10S977/852Y10S977/86Y10S977/861Y10S977/864Y10S977/868Y10S977/873
    • A potentiometry apparatus for measuring a periodic electrical waveform existing proximate the surface of a sample such as a semiconductor wafer is disclosed herein. The potentiometry apparatus includes a pulse generator for generating a sequence of electrical pulses at a pulse frequency offset from the frequency of the surface waveform by a mixing frequency. A cantilever coupled to the pulse generator serves to carry the electrical pulses to a position proximate the surface of the sample. In a capacitive displacement mode the cantilever is mechanically displaced so as to generate a time-expanded representation of the electrical surface waveform having a repetition frequency equal to the mixing frequency. During displacement mode operation an optical detection circuit may be employed to monitor deflection of the cantilever. In a tunneling current mode the cantilever is again employed to carry the electrical pulses to a position proximate the surface of the sample. In this mode a tunneling current propagating through the cantilever at the mixing frequency provides a time-expanded representation of the electrical surface waveform.
    • 本文公开了一种用于测量接近诸如半导体晶片的样品表面存在的周期性电波形的电位测量装置。 电位计装置包括脉冲发生器,用于以与混合频率的表面波形的频率偏移的脉冲频率产生电脉冲序列。 耦合到脉冲发生器的悬臂用于将电脉冲传送到靠近样品表面的位置。 在电容位移模式中,悬臂被机械移位,以产生具有等于混合频率的重复频率的电表面波形的时间扩展表示。 在位移模式操作期间,可以采用光学检测电路来监测悬臂的偏转。 在隧道电流模式中,悬臂再次用于将电脉冲运送到靠近样品表面的位置。 在该模式中,以混合频率传播通过悬臂的隧穿电流提供了电表面波形的时间扩展表示。
    • 4. 发明授权
    • Photoconductive-sampling voltage measurement
    • 光电导采样电压测量
    • US06737853B2
    • 2004-05-18
    • US10004018
    • 2001-10-18
    • Kenneth R. WilsherFrancis Ho
    • Kenneth R. WilsherFrancis Ho
    • G01R3100
    • G01R19/00G01R13/347
    • A method of probing voltage comprises: establishing electrical connectivity between a conductor to be probed and a first terminal of a photoconductive switch; during a sampling interval n, applying a laser pulse to the photoconductive switch while applying a voltage to a second terminal of the photoconductive switch corresponding to a voltage sample taken during a prior sampling interval n−1, such that current flow through the photoconductive switch is dependent on any difference between voltage of the conductor and the applied voltage; converting the current flow to a voltage signal; passing the voltage signal during a gating interval and sampling the passed voltage signal to produce a voltage sample for the sampling interval n. A repetitive test pattern applied to the conductor and the sampling interval is synchronized with the repetitive test pattern. Converting the current flow to a voltage signal can comprise applying the current flow to a current-to-voltage converter having a rise time which is less than the gating interval. The voltage signal can be passed only during the gating interval so that the voltage sample is insensitive to any leakage through the photoconductive switch outside of the gating interval. Passing the voltage signal during a gating interval can comprise applying the voltage signal to a first transistor Q1 of a differential pair of transistors Q1, Q2, applying a reference voltage to a second transistor Q2 of the differential pair of transistors, and controlling common emitter current of the differential pair of transistors with an electronic switch so as to pass the voltage signal when the electronic switch is closed. Sampling the voltage signal can comprises applying the voltage signal to an analog-to-digital converter and enabling the analog-to-digital converter to prepare a digital sample of the voltage signal representing voltage on the conductor. Apparatus for carrying out the method is also provided.
    • 一种探测电压的方法包括:建立要探测的导体与光电导开关的第一端之间的电连接; 在采样间隔n期间,在对应于在先前采样间隔n-1期间采集的电压样本的光电导开关的第二端施加电压,向激光脉冲施加激光脉冲,使得通过光电导开关的电流为 取决于导体的电压和施加的电压之间的任何差异; 将电流转换成电压信号; 在选通间隔期间通过电压信号,并对通过的电压信号进行采样,以产生采样间隔n的电压采样。 应用于导体和采样间隔的重复测试图案与重复测试图案同步。 将电流转换为电压信号可以包括将电流施加到具有小于门控间隔的上升时间的电流 - 电压转换器。 电压信号只能在选通间隔期间通过,因此电压采样对通过栅极间隔外的光导开关的任何泄漏不敏感。 在门控间隔期间通过电压信号可以包括将电压信号施加到晶体管Q1,Q2的差分对的第一晶体管Q1,将参考电压施加到差分晶体管对的第二晶体管Q2,并控制公共发射极电流 具有电子开关的差分对晶体管,以便当电子开关闭合时通过电压信号。 对电压信号进行采样可以包括将电压信号施加到模数转换器并且使得模数转换器能够准备表示导体上的电压的电压信号的数字样本。 还提供了用于执行该方法的装置。
    • 9. 发明授权
    • Electrical contact probe for sampling high frequency electrical signals
    • 用于采样高频电信号的电接触探头
    • US5847569A
    • 1998-12-08
    • US694925
    • 1996-08-08
    • Francis HoDavid M. Bloom
    • Francis HoDavid M. Bloom
    • G01R1/067G01R19/25G01R31/28
    • G01R1/06772G01R19/2509Y10S977/852
    • An all-electrical high frequency contact sampling probe provides sub-micron spatial resolution and picosecond or sub-picosecond temporal resolution. In a preferred embodiment, the probe is a monolithic integration of a sampling circuit with a cantilever and probe tip, where the distance between the circuit and the tip is less than a wavelength of interest in an RF signal �V.sub.RF !. The sampling circuit �44! uses Schottky diodes �SD! for sampling the RF signal �V.sub.RF ! from a device under test at a rate determined by local oscillator signals �50, 52!. An IF signal �V.sub.IF ! produced by the sampling probe is an equivalent time representation of the RF signal. Applications include testing signals at interior nodes of high speed integrated circuits.
    • 全电高频接点采样探头提供亚微米空间分辨率和皮秒或次皮秒时间分辨率。 在优选实施例中,探针是采样电路与悬臂和探针尖端的单片整合,其中电路和尖端之间的距离小于RF信号[VRF]中感兴趣的波长。 采样电路[44]使用肖特基二极管[SD]以本地振荡器信号[50,52]确定的速率从被测器件采样RF信号[VRF]。 由采样探针产生的IF信号[VIF]是RF信号的等效时间表示。 应用包括在高速集成电路的内部节点的测试信号。