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1. 发明授权

US5488305A System and method for high-speed potentiometry using scanning probe microscope 失效
标题翻译：使用扫描探针显微镜进行高速电位法的系统和方法
公开(公告)号：US5488305A
公开(公告)日：1996-01-30
申请号：US313758
申请日：1994-09-28
申请人： David M. Bloom , Francis Ho , Alfred S. Hou
发明人： David M. Bloom , Francis Ho , Alfred S. Hou
IPC分类号： G01Q60/38 , G01B5/28 , G01B21/30 , G01Q10/06 , G01Q70/14
CPC分类号： G01Q60/32 , B82Y35/00 , G01Q10/06 , Y10S977/849 , Y10S977/852 , Y10S977/86 , Y10S977/861 , Y10S977/864 , Y10S977/868 , Y10S977/873
摘要： A potentiometry apparatus for measuring a periodic electrical waveform existing proximate the surface of a sample such as a semiconductor wafer is disclosed herein. The potentiometry apparatus includes a pulse generator for generating a sequence of electrical pulses at a pulse frequency offset from the frequency of the surface waveform by a mixing frequency. A cantilever coupled to the pulse generator serves to carry the electrical pulses to a position proximate the surface of the sample. In a capacitive displacement mode the cantilever is mechanically displaced so as to generate a time-expanded representation of the electrical surface waveform having a repetition frequency equal to the mixing frequency. During displacement mode operation an optical detection circuit may be employed to monitor deflection of the cantilever. In a tunneling current mode the cantilever is again employed to carry the electrical pulses to a position proximate the surface of the sample. In this mode a tunneling current propagating through the cantilever at the mixing frequency provides a time,expanded representation of the electrical surface waveform.
摘要翻译：本文公开了一种用于测量接近诸如半导体晶片的样品表面存在的周期性电波形的电位测量装置。电位计装置包括脉冲发生器，用于以与混合频率的表面波形的频率偏移的脉冲频率产生电脉冲序列。耦合到脉冲发生器的悬臂用于将电脉冲传送到靠近样品表面的位置。在电容位移模式中，悬臂被机械移位，以产生具有等于混合频率的重复频率的电表面波形的时间扩展表示。在位移模式操作期间，可以采用光学检测电路来监测悬臂的偏转。在隧道电流模式中，悬臂再次用于将电脉冲运送到靠近样品表面的位置。在这种模式下，以混合频率传播通过悬臂的隧道电流提供电表面波形的时间，扩展的表示。

2. 发明授权

US5381101A System and method of measuring high-speed electrical waveforms using force microscopy and offset sampling frequencies 失效
标题翻译：使用力显微镜和偏移采样频率测量高速电波形的系统和方法
公开(公告)号：US5381101A
公开(公告)日：1995-01-10
申请号：US984891
申请日：1992-12-02
申请人： David M. Bloom , Francis Ho , Alfred S. Hou
发明人： David M. Bloom , Francis Ho , Alfred S. Hou
IPC分类号： G01Q60/38 , G01B5/28 , G01B21/30 , G01Q10/06 , G01Q70/14
CPC分类号： G01Q60/32 , B82Y35/00 , G01Q10/06 , Y10S977/849 , Y10S977/852 , Y10S977/86 , Y10S977/861 , Y10S977/864 , Y10S977/868 , Y10S977/873
摘要： A potentiometry apparatus for measuring a periodic electrical waveform existing proximate the surface of a sample such as a semiconductor wafer is disclosed herein. The potentiometry apparatus includes a pulse generator for generating a sequence of electrical pulses at a pulse frequency offset from the frequency of the surface waveform by a mixing frequency. A cantilever coupled to the pulse generator serves to carry the electrical pulses to a position proximate the surface of the sample. In a capacitive displacement mode the cantilever is mechanically displaced so as to generate a time-expanded representation of the electrical surface waveform having a repetition frequency equal to the mixing frequency. During displacement mode operation an optical detection circuit may be employed to monitor deflection of the cantilever. In a tunneling current mode the cantilever is again employed to carry the electrical pulses to a position proximate the surface of the sample. In this mode a tunneling current propagating through the cantilever at the mixing frequency provides a time-expanded representation of the electrical surface waveform.
摘要翻译：本文公开了一种用于测量接近诸如半导体晶片的样品表面存在的周期性电波形的电位测量装置。电位计装置包括脉冲发生器，用于以与混合频率的表面波形的频率偏移的脉冲频率产生电脉冲序列。耦合到脉冲发生器的悬臂用于将电脉冲传送到靠近样品表面的位置。在电容位移模式中，悬臂被机械移位，以产生具有等于混合频率的重复频率的电表面波形的时间扩展表示。在位移模式操作期间，可以采用光学检测电路来监测悬臂的偏转。在隧道电流模式中，悬臂再次用于将电脉冲运送到靠近样品表面的位置。在该模式中，以混合频率传播通过悬臂的隧穿电流提供了电表面波形的时间扩展表示。

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