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    • 4. 发明授权
    • Alignment method and a projection exposure apparatus using the same
    • 对准方法和使用其的投影曝光装置
    • US4952060A
    • 1990-08-28
    • US463886
    • 1990-01-10
    • Hideki InaFumio SakaiHitoshi Nakano
    • Hideki InaFumio SakaiHitoshi Nakano
    • H01L21/30G03F9/00H01L21/027H01L21/67H01L21/68
    • G03F9/7084
    • A projection exposure apparatus is disclosed for exposing a semiconductor wafer to a pattern, formed on a reticle, by projection using a projection lens system. The apparatus includes an alignment optical system disposed at a side of the wafer remote from the projection lens system. The alignment optical system is used to detect an alignment mark provided on the wafer, from the back of the wafer. In accordance with the detection, the wafer is moved so that its alignment mark is brought into a predetermined positional relation with the alignment optical system, whereby the reticle and the wafer are relatively aligned. With this arrangement, the wafer alignment mark can be detected without being adversely affected by a resist layer applied to the wafer surface. Thus, the reticle and the wafer can be aligned very accurately.
    • 公开了一种投影曝光装置,用于通过使用投影透镜系统的投影将半导体晶片暴露于形成在掩模版上的图案。 该装置包括配置在远离投影透镜系统的晶片侧的对准光学系统。 对准光学系统用于从晶片的背面检测设置在晶片上的对准标记。 根据检测,移动晶片使其对准标记与取向光学系统成预定的位置关系,由此标线片和晶片相对对准。 利用这种布置,可以检测晶片对准标记,而不受施加到晶片表面的抗蚀剂层的不利影响。 因此,可以非常准确地对准标线片和晶片。
    • 9. 发明授权
    • Magnetic head and magnetic recording apparatus which prevent generation
of a false magnetic head tending to disturb a previously formed
magnetic recording track
    • 磁头和磁记录装置,其防止产生假磁头倾向于干扰预先形成的磁记录磁道
    • US5774310A
    • 1998-06-30
    • US704242
    • 1996-08-28
    • Shigeyoshi TakaiFumio Sakai
    • Shigeyoshi TakaiFumio Sakai
    • G11B5/265G11B5/008G11B5/127G11B5/187G11B5/23
    • G11B5/1871G11B5/008
    • In a magnetic head including, a pair of magnetic cores, one of the magnetic cores including a first corner portion, a second corner portion and an end portion between the first and second corner portions, and another one of the magnetic cores including a third corner portion, a fourth corner portion and another end portion between the third and fourth corner portions, the first and third corner portions being opposite to each other, the second and fourth corner portions being opposite to each other, the end portion and the another end portion being opposite to each other, and high-saturation-magnetic-flux-density layers, one of the high-saturation-magnetic-flux-density layers covering the end portion and another one of the high-saturation-magnetic-flux-density layers covering the another end portion, wherein a thickness of the high-saturation-magnetic-flux-density layer on at least one of the first, second, third and fourth corner portions within an important area for preventing a false magnetic head is prevented from being less than 0.5 .mu.m.
    • 在包括一对磁芯的磁头中,一个磁芯包括第一角部,第二角部和第一和第二角部之间的端部,另一个磁芯包括第三角部 第四角部和第三角部与第四角部之间的另一端部,第一和第三角部彼此相对,第二和第四角部彼此相对,端部和另一端部 彼此相对的高饱和磁通密度层和高饱和磁通密度层,高饱和磁通密度层中的一个高饱和磁通密度层覆盖端部,另一个高饱和磁通密度层 覆盖另一端部,其中在重要区域内的第一,第二,第三和第四角部中的至少一个上的高饱和磁通密度层的厚度用于防止假 e磁头防止小于0.5微米。