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    • 5. 发明授权
    • Thin film emitter-absorber apparatus and methods
    • 薄膜发射极吸收装置及方法
    • US07973696B2
    • 2011-07-05
    • US11638042
    • 2006-12-12
    • Irina PuscasuEdward A. Johnson
    • Irina PuscasuEdward A. Johnson
    • H01Q17/00H01Q15/14H04K3/00G01S7/02G01S13/00
    • H01Q15/0066G01J3/108G01N21/3504G02F1/19G02F2201/083G02F2201/307G02F2202/10G02F2203/055G02F2203/10G02F2203/11G02F2203/48H01Q15/006
    • Methods and apparatus for providing a tunable absorption-emission band in a wavelength selective device are disclosed. A device for selectively absorbing incident electromagnetic radiation includes an electrically conductive surface layer including an arrangement of multiple surface elements. The surface layer is disposed at a nonzero height above a continuous electrically conductive layer. An electrically isolating intermediate layer defines a first surface that is in communication with the electrically conductive surface layer. The continuous electrically conductive backing layer is provided in communication with a second surface of the electrically isolating intermediate layer. When combined with an infrared source, the wavelength selective device emits infrared radiation in at least one narrow band determined by a resonance of the device. In some embodiments, the device includes a control feature that allows the resonance to be selectively modified. The device has broad applications including gas detection devices and infrared imaging.
    • 公开了一种用于在波长选择装置中提供可调吸收发射带的方法和装置。 用于选择性地吸收入射电磁辐射的装置包括包括多个表面元件的布置的导电表面层。 表层设置在连续导电层上方的非零高度处。 电隔离中间层限定与导电表面层连通的第一表面。 连续导电背衬层设置成与电绝缘中间层的第二表面连通。 当与红外源组合时,波长选择装置在由装置的谐振确定的至少一个窄带中发射红外辐射。 在一些实施例中,该装置包括允许选择性地修改共振的控制特征。 该装置具有广泛的应用,包括气体检测装置和红外成像。
    • 7. 发明授权
    • Fiber optic reflectance apparatus for in situ characterization of thin films
    • 用于薄膜原位表征的光纤反射装置
    • US06278809B1
    • 2001-08-21
    • US09086768
    • 1998-05-29
    • Edward A. JohnsonTheodore F. Morse
    • Edward A. JohnsonTheodore F. Morse
    • G01N2175
    • G01N21/41G01B11/0683G01B11/303
    • A fiber optic reflectometer employs an optical fiber near a target substrate in a deposition chamber. The optical fiber is positioned within the chamber so that deposition of a thin film on the substrate also occurs on a portion of the optical fiber. A combination of monochromatic and broadband white light is transmitted through the optical fiber to the film deposited on it, and light reflectance measurements are made to determine, in situ and substantially in real time, such characteristics of the film as its growth rate, thickness, composition, surface roughness and refractive index. Such measurements can be made without bulk optics and without the precise alignment requirements of ellipsometry techniques and apparatus.
    • 光纤反射计在沉积室中使用靠近目标衬底的光纤。 光纤位于室内,使得薄膜在衬底上的沉积也发生在光纤的一部分上。 单色和宽带白光的组合通过光纤传输到沉积在其上的膜,并且进行光反射测量,以原位和实质上实时确定膜的这种特性,因为其生长速率,厚度, 组成,表面粗糙度和折射率。 这样的测量可以在没有体光学元件的情况下进行,并且没有椭偏仪技术和设备的精确对准要求。