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    • 3. 发明申请
    • METHOD AND APPARATUS FOR MEASURING AERIAL IMAGE OF EUV MASK
    • 用于测量EUV掩蔽的空气影像的方法和装置
    • US20130056642A1
    • 2013-03-07
    • US13542936
    • 2012-07-06
    • Dong-gun LEESeong-sue Kim
    • Dong-gun LEESeong-sue Kim
    • G01J1/04
    • G03F1/82B82Y10/00B82Y40/00G01J1/4228G01J1/4257G03F1/22
    • An aerial image measuring apparatus includes an extreme ultra-violet (EUV) light generation unit configured to generate EUV light, a moving unit configured to mount an EUV mask and to move the EUV mask in x and y axis directions, a primary reduction optics configured to primarily reduce a divergence of the EUV light generated by the EUV light generation unit, a secondary reduction optics configured to secondarily reduce the divergence of the primarily reduced EUV light, and a detection unit configured to sense energy information from the secondarily reduced EUV light reflected from the plurality of regions on the EUV mask, the secondarily reduced EUV light being incident on and reflected from a plurality of regions on the EUV mask.
    • 一种空间图像测量装置,包括:被配置为产生EUV光的极紫外(EUV)光产生单元,被配置为安装EUV掩模并在x轴和y轴方向上移动EUV掩模的移动单元, 以主要减少由EUV光发生单元产生的EUV光的发散,配置成二次减少主要减少的EUV光的发散的次级减光光学元件和被配置为从二次降低的EUV光中检测能量信息的检测单元 在EUV掩模上的多个区域中,二次还原的EUV光入射到EUV掩模上的多个区域并从其反射。
    • 5. 发明申请
    • POLYURETHANE-COATED SPANDEX FABRIC-FUSED MIDSOLE AND APPARATUS AND METHOD FOR MANUFACTURING THE SAME
    • US20120056345A1
    • 2012-03-08
    • US13320160
    • 2010-05-12
    • Dong-gun Lee
    • Dong-gun Lee
    • B29C44/06
    • B29D35/148A43D2200/20B29C43/08B29C43/18B29D35/142
    • The present invention relates to a polyurethane-coated (PU-coated) spandex fabric-fused midsole, and an apparatus and method for manufacturing the same, which allow a shoe midsole to be easily and conveniently manufactured through a single automatic process, and allows a PU-coated spandex fabric to be easily fused to a surface of the midsole in the process of manufacturing the midsole. For this purpose, there is provided a polyurethane-coated (PU-coated) spandex fabric-fused midsole manufacturing apparatus including: a central axis rotated by a driving force of a motor; a rotary disc fitted on the central axis to be rotated together with the central axis; a plurality of midsole forming mold units, which are mounted on the outer ends of support members radially extending from the outer circumference of the rotary disc, respectively; a PU-coated spandex fabric supply apparatus installed above the trace of rotation of the midsole forming mold units to provide a PU-coated spandex fabric to each of the midsole forming mold units; vacuum means installed between the rotary disc and the midsole forming mold units to vacuum the inside of a midsole forming mold unit supplied with a PU-coated spandex fabric to such an extent that the PU-coated spandex fabric comes into close contact with the inner surface of the midsole forming mold unit; a resin introducing apparatus installed outside of the trace of rotation of the midsole forming mold units to introduce polyurethane (PU) resin into the midsole forming mold unit having the PU-coated spandex fabric film in contact with inner surface thereof; and a foam-molded product removal apparatus installed outside of the trace of rotation of the midsole forming mold units to remove a foam-molded product formed by foaming the polyurethane resin introduced into the midsole forming unit by leaving the polyurethane resin in the midsole forming mold unit at a predetermined temperature for a predetermined length of time.
    • 7. 发明申请
    • Method of manufacturing mask structure
    • 掩模结构的制造方法
    • US20110065029A1
    • 2011-03-17
    • US12882652
    • 2010-09-15
    • Hwan-Seok SeoByoung-Sup AhnDong-Gun Lee
    • Hwan-Seok SeoByoung-Sup AhnDong-Gun Lee
    • G03F1/00
    • G03F1/24B82Y10/00B82Y40/00
    • A method of forming a mask structure for an extreme ultraviolet ray lithography (EUVL) process includes defining a substrate including a first area and a second area, such that the first area has a pattern structure configured to selectively transmit light for the EUVL process and the second area encloses the first area, forming a reflection layer on the substrate, the reflection layer including alternately stacked molybdenum layers and silicon layers on the substrate, forming a capping layer on the reflection layer, forming an absorption pattern on the capping layer, the absorption pattern including a central portion corresponding to the first area of the substrate and a peripheral portion corresponding to the second area of the substrate, and forming a blind layer on the peripheral portion of the absorption pattern.
    • 形成用于极紫外线光刻(EUVL)工艺的掩模结构的方法包括限定包括第一区域和第二区域的衬底,使得第一区域具有被配置为选择性地透射EUVL工艺的光的图案结构, 第二区域包围第一区域,在衬底上形成反射层,反射层在衬底上包括交替堆叠的钼层和硅层,在反射层上形成覆盖层,在覆盖层上形成吸收图案,吸收 图案包括对应于基板的第一区域的中心部分和对应于基板的第二区域的周边部分,并且在吸收图案的周边部分上形成盲层。