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    • 4. 发明授权
    • Process to separate the doping of polygate and source drain regions in dual gate field effect transistors
    • 在双栅场效应晶体管中分离多晶硅栅极和源极漏极区域的掺杂过程
    • US06319804B1
    • 2001-11-20
    • US08624910
    • 1996-03-27
    • David GreenlawScott Luning
    • David GreenlawScott Luning
    • H01L2102
    • H01L29/66575H01L21/28061H01L29/4933H01L29/665H01L29/6659H01L29/7833
    • The present invention is directed toward a method for independently doping the gate and the source-drain regions of a semiconductor device. The method is initiated by the provision. of a substrate having isolation regions and a thin insulating layer. Over the substrate is formed a polysilicon layer which is doped with a first type of dopant at a first doping level. Over the polysilicon layer is formed a conducting layer of material that can withstand temperatures of 1000° C., and over the conducting layer is formed a blocking layer. The polysilicon layer, the conducting layer and the blocking layer are etched to form a gate stack. Source-drain regions are subsequently doped with a second type of dopant at a second doping level. Source-drain regions are activated in a 1000° C. heat cycle, and, subsequently, TiSi2 is formed on the source-drain regions. Contacts are then formed. The blocking layer on the gate stack need not be removed, which aids in minimizing substrate damage and in prevention of shorting a source-drain contact region to the substrate.
    • 本发明涉及用于独立地掺杂半导体器件的栅极和源极 - 漏极区域的方法。 该方法由该条款开始。 具有隔离区域和薄绝缘层的衬底。 在衬底上形成多晶硅层,其以第一掺杂级别掺杂有第一类型的掺杂剂。 在多晶硅层上形成能够承受1000℃的温度的导电层,并且在导电层上形成阻挡层。 蚀刻多晶硅层,导电层和阻挡层以形成栅叠层。 源极 - 漏极区域随后以第二掺杂水平掺杂第二类型的掺杂剂。 源极 - 漏极区域在1000℃的热循环中被激活,随后在源极 - 漏极区域上形成TiSi 2。 然后形成接触。 栅堆叠上的阻挡层不需要去除,这有助于最小化衬底损伤并防止将源 - 漏接触区域短路到衬底。
    • 5. 发明授权
    • Toner container having rotary seal
    • 具有旋转密封的调色剂容器
    • US5878307A
    • 1999-03-02
    • US022989
    • 1998-02-12
    • David GreenlawArthur KrollDaniel LymanAntonio Russo
    • David GreenlawArthur KrollDaniel LymanAntonio Russo
    • G03G15/08
    • G03G15/0886G03G15/0868G03G15/0872G03G2215/0668G03G2215/0692
    • A toner cartridge for supplying toner to a replenishment apparatus of an electrophotographic imaging device has an elongated cylindrical container filled with toner. The container has a longitudinal axis, an open end and a closed end. An end cap is adapted and arranged to close the open end and to accommodate relative rotational motion between the container and the end cap. The end cap has a flange portion defining an open end terminating in an end portion having an edge. An elastomeric seal is provided to effect a positive, relatively low-friction toner seal between a relatively rotating container and the end cap. The seal in an exemplary embodiment comprises an elastomeric band, which is sized properly to affix onto the outside diameter of the cap end portion, with a portion of the seal extending beyond the cap end portion. This extending part of the seal conforms around the inside of the cap end portion such that when the cap is slid over the container during assembly, the seal rides over, and conforms to, the outside diameter of the container. Accordingly, as the bottle and cap are rotated relative to one another, the seal conforms and seals. The toner is discharged through an opening in the end cap.
    • 用于向电子照相成像装置的补充装置供应调色剂的调色剂盒具有填充有调色剂的细长圆柱形容器。 容器具有纵轴,开口端和封闭端。 端帽被适配和布置成闭合开口端并容纳容器和端盖之间的相对旋转运动。 端盖具有限定开口端的凸缘部分,其终止于具有边缘的端部部分。 提供弹性体密封件以在相对旋转的容器和端盖之间实现正的,相对低摩擦的调色剂密封。 在示例性实施例中的密封件包括弹性体带,其尺寸适当地固定到帽端部的外径上,其中一部分密封件延伸超过帽端部。 密封件的该延伸部分围绕盖端部的内部配合,使得当在组装期间盖在容器上滑动时,密封件越过并符合容器的外径。 因此,当瓶和盖相对于彼此旋转时,密封件符合并密封。 调色剂通过端盖中的开口排出。
    • 7. 发明授权
    • Gate structure and a transistor having asymmetric spacer elements and methods of forming the same
    • 栅极结构和具有不对称间隔元件的晶体管及其形成方法
    • US07354839B2
    • 2008-04-08
    • US11247367
    • 2005-10-11
    • Andy WeiGert BurbachDavid Greenlaw
    • Andy WeiGert BurbachDavid Greenlaw
    • H01L21/336
    • H01L29/66659H01L21/26586H01L21/823864H01L29/66772H01L29/7835
    • Methods for forming asymmetric gate structures comprising spacer elements disposed on the opposed sides of a gate electrode and having a different width are disclosed. The asymmetric gate structures are employed to form an asymmetric design of a halo region and extension regions of a field effect transistor using a symmetric implantation scheme, or to further enhance the effectiveness of asymmetric implantation schemes. The transistor performance may be significantly enhanced for a given basic transistor architecture. In particular, a large overlap area may be created at the source side with a steep concentration gradient of the PN junction due to the provision of the halo region, whereas the drain overlap may be significantly reduced or may even be completely avoided to further enhance the transistor performance.
    • 公开了形成非对称栅极结构的方法,其包括设置在栅电极的相对侧上且具有不同宽度的间隔元件。 采用不对称栅结构来形成使用对称注入方案的场效应晶体管的晕区和扩展区的非对称设计,或进一步提高非对称注入方案的有效性。 对于给定的基本晶体管架构,晶体管的性能可以显着提高。 特别地,由于提供卤素区域,可能在源极侧产生具有PN结的陡峭浓度梯度的大的重叠区域,而漏极重叠可以被显着地减少或者甚至可以被完全避免以进一步增强 晶体管性能。