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1. 发明专利

FR2594422A1 Storage device comprising a container capable of occupying at least two positions 未知
公开(公告)号：FR2594422A1
公开(公告)日：1987-08-21
申请号：FR8602291
申请日：1986-02-18
申请人： DESPONT MICHEL
IPC分类号： B65G1/10 , E04B1/00
摘要： The invention relates to a device comprising a container 1, such as a cabinet or a chassis equipped with pigeon-holes, this container being capable of occupying an access position, in which a user standing on a ground 2 can insert products into the container or remove them therefrom, and a storage position in which the container does not occupy any space on the ground. The storage position of the container 1 is below the level of the ground 2, vertical with the access position. The device comprises a motorised mechanism for vertical translation of the container, comprising, for example, an electric winch 5 and a carriage 4 guided by rails 18. This mechanism and the container in the storage position are preferably accommodated in a leaktight chamber 3 made from metal or from a synthetic material, which may be buried. The device can be used particularly for fresh storage of foodstuffs or other products, replacing a cellar.

2. 发明申请

WO2006040654A3 MICROSYSTEM AND METHOD FOR POSITIONING A SECOND ELEMENT WITH RESPECT TO A FIRST ELEMENT IN A MICROSYSTEM 审中-公开
标题翻译：用于将第二元件定位在微结构中的第一元件的微结构和方法
公开(公告)号：WO2006040654A3
公开(公告)日：2006-06-01
申请号：PCT/IB2005003037
申请日：2005-09-29
申请人： IBM , DESPONT MICHEL , DUERIG URS T , GOTSMANN BERND W
发明人： DESPONT MICHEL , DUERIG URS T , GOTSMANN BERND W
IPC分类号： B81B3/00
CPC分类号： B81B3/0018 , F03G7/06 , F03G7/065 , H01H2037/008
摘要： A microsystem, comprising a first static element (1), a second, movable and unattached element (2), an actuator (3) for effecting a force between the first and the second element (1, 2), which actuator (3) is designed for controlling a temperature (T1, T2) of one of the first element (1) and the second element (2). A corresponding method for positioning a second element (2) with respect to a first element (1) in a microsystem is introduced.
摘要翻译：一种微系统，包括第一静态元件（1），第二可移动和未附接元件（2），用于在第一和第二元件（1,2）之间产生力的致动器（3），该致动器（3）被设计用于控制第一元件（1）和第二元件（2）之一的温度（T1，T2）。引入了相对于在微系统中相对于第一元件（1）定位第二元件（2）的方法。

3. 发明申请

WO2005058748A1 METHOD AND SYSTEM FOR SELF-ALIGNING PARTS IN MEMS 审中-公开
标题翻译： MEMS自动校准部件的方法与系统
公开(公告)号：WO2005058748A1
公开(公告)日：2005-06-30
申请号：PCT/EP2004/052846
申请日：2004-11-08
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , COMPAGNIE IBM FRANCE , ALBRECHT, Thomas , CASTRIOTTA, Michele , DESPONT, Michel , LANTZ, Mark , OGGIONI, Stefano
发明人： ALBRECHT, Thomas , CASTRIOTTA, Michele , DESPONT, Michel , LANTZ, Mark , OGGIONI, Stefano
IPC分类号： B81B7/00
CPC分类号： B81C3/002 , H05K3/3436 , H05K2201/094 , H05K2201/09418 , H05K2201/2036 , H05K2203/048 , Y02P70/613
摘要： A method and system for efficiently self-aligning parts of a MEMS during manufacturing, as well as controlling distance between these parts, are disclosed. According to the invention each MEMS part comprises at least one pad that is aligned so as to form a pair of pads. In a preferred embodiment, each part comprises three pads. The pad shape of two pairs of pads is rectangular, one pair being rotated of an angle approximately equal to 90° from the other, and the pad shape of the third pair is annular. Therefore, one of the pair of pads allows alignment according to a first direction, a second pair of pads allows alignment according to a second direction, and the third pair of pads allows rotational alignment.
摘要翻译：公开了一种用于在制造期间有效地对准MEMS部件的方法和系统，以及控制这些部件之间的距离。根据本发明，每个MEMS部件包括至少一个对准以形成一对焊盘的焊盘。在优选实施例中，每个部分包括三个焊盘。两对焊盘的焊盘形状是矩形的，一对由另一对旋转大约等于90°的角度，第三对的焊盘形状是环形的。因此，一对衬垫之一允许根据第一方向进行对准，第二对衬垫允许根据第二方向对准，并且第三对衬垫允许旋转对准。

4. 发明申请

WO2003060923A1 MICROSTRUCTURES 审中-公开
标题翻译：显微
公开(公告)号：WO2003060923A1
公开(公告)日：2003-07-24
申请号：PCT/IB2002/004853
申请日：2002-11-21
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , CROSS, Graham , DESPONT, Michel , DÜRIG, Urs, T. , GENOLET, Grégoire , SCHLITTLER, Reto , VETTIGER, Peter
发明人： CROSS, Graham , DESPONT, Michel , DÜRIG, Urs, T. , GENOLET, Grégoire , SCHLITTLER, Reto , VETTIGER, Peter
IPC分类号： G12B21/00
CPC分类号： G11C23/00 , G01Q70/06 , G01Q70/12 , G01Q70/16 , G11B9/1409 , G11B9/1418 , G11C13/025 , G11C2213/81 , Y10S977/732 , Y10S977/733
摘要： A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting microstructure comprises a body portion and a nanotube embedded in the body portion.
摘要翻译：描述了形成微结构的方法。该方法包括：将种子材料沉积在基底上; 从种子材料生长纳米管; 将微结构材料沉积在衬底上以将纳米管嵌入微结构材料中; 并且分离基板以释放微结构。所得到的微结构包括主体部分和嵌入在主体部分中的纳米管。

5. 发明申请

WO2003062742A1 SCANNING PROBE FOR DATA STORAGE AND MICROSCOPY 审中-公开
标题翻译：数据存储和显微镜扫描探针
公开(公告)号：WO2003062742A1
公开(公告)日：2003-07-31
申请号：PCT/IB2002/005292
申请日：2002-12-11
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , BINNIG, Gerd, K. , DESPONT, Michel , HÄBERLE, Walter , LANTZ, Mark
发明人： BINNIG, Gerd, K. , DESPONT, Michel , HÄBERLE, Walter , LANTZ, Mark
IPC分类号： G01B7/34
CPC分类号： G11B9/1418 , G01Q70/06 , G01Q80/00 , G11B9/14 , G11B9/1409 , G11B2005/0021
摘要： A cantilever device (30, 50, 70) for scanning a surface comprises a support (32, 52, 72), a tip platform (31, 51, 71) and a flexible arm arrangement (33, 53, 73). The tip platform (31, 51, 71) has a plurality of tips. These comprise at least two contact tips (34; 55a-55c; 74, 75) providing points of contact with a surface to be scanned, and a scanning tip (36; 55a, 55b; 75) for scanning the surface, where the scanning tip may be one of the two or more contact tips provided on the platform. The flexible arm arrangement (33, 53, 73) connects the tip platform to the support and allows orientation of the platform, via flexing of the arm arrangement, to bring the contact tips into contact with a surface to be scanned. The platform (31, 51, 71) is then at a well-defined orientation relative to the scan surface, and the scanning tip (36; 55a, 55b; 75) is appropriately positioned for the scanning operation. Scanning probe microscopes and data storage devices incorporating such cantilever devices are also provided.
摘要翻译：用于扫描表面的悬臂装置（30,50,70）包括支撑件（32,52,72），尖端平台（31,51,71）和柔性臂装置（33,53,73）。尖端平台（31,51,71）具有多个尖端。这些包括提供与待扫描表面的接触点的至少两个接触尖端（34; 55a-55c; 74,75）和用于扫描表面的扫描尖端（36; 55a，55b; 75）提示可以是在平台上提供的两个或更多个接触提示之一。柔性臂布置（33,53,73）将尖端平台连接到支撑件，并且允许平台的取向通过臂布置的弯曲，以使接触尖端与待扫描的表面接触。然后，平台（31,51,71）相对于扫描表面处于相当明确的方向，并且扫描尖端（36; 55a，55b; 75）被适当地定位用于扫描操作。还提供了包括这种悬臂装置的扫描探针显微镜和数据存储装置。

6. 发明申请

WO02064495A3 ENHANCED SACRIFICIAL LAYER ETCHING TECHNIQUE FOR MICROSTRUCTURE RELEASE 审中-公开
标题翻译：用于微结构释放的增强型真空层蚀刻技术
公开(公告)号：WO02064495A3
公开(公告)日：2003-06-05
申请号：PCT/IB0200395
申请日：2002-02-08
申请人： IBM , DESPONT MICHEL , DRECHSLER UTE , GENOLET GREGOIRE , VETTIGER PETER
发明人： DESPONT MICHEL , DRECHSLER UTE , GENOLET GREGOIRE , VETTIGER PETER
IPC分类号： B81B3/00 , B81C1/00
CPC分类号： B81C1/00476 , B81C2201/0109
摘要： A method for at least partially releasing microstructures from a substrate is provided. The method comprises the steps of: a) providing a substrate (2); b) depositing onto said substrate (2) a first layer (4) and a second layer (6), the first layer (4) and the second layer (6) each comprising an electrically conducting material and each having a different oxido-reduction potential; c) electrically connecting the first layer (4) and the second layer (6); d) forming a microstructure (8) on the first (4) and second (6) layers deposited in step b) to produce an intermediate structure (10); and e) electrochemically etching said second layer (6) by immersing the intermediate structure (10) formed in step d) in an electrolyte (12).
摘要翻译：提供了一种至少部分地从基板上释放微结构的方法。该方法包括以下步骤：a）提供衬底（2）; b）在所述基板（2）上沉积第一层（4）和第二层（6），所述第一层（4）和所述第二层（6）各自包括导电材料并且各自具有不同的氧化还原潜在; c）电连接第一层（4）和第二层（6）; d）在步骤b）中沉积的第一（4）和第二（6）层上形成微结构（8）以产生中间结构（10）; 以及e）通过将步骤d）中形成的中间结构（10）浸入电解质（12）中来电化学蚀刻所述第二层（6）。

7. 发明申请

WO03014789A2 MICROSYSTEM SWITCHES 审中-公开
标题翻译：微结构开关
公开(公告)号：WO03014789A2
公开(公告)日：2003-02-20
申请号：PCT/IB0202117
申请日：2002-06-07
申请人： IBM , DESPONT MICHEL , DRECHSLER UTE , ROTHUIZEN HUGO E , VETTIGER PETER , WIDMER ROLAND W
发明人： DESPONT MICHEL , DRECHSLER UTE , ROTHUIZEN HUGO E , VETTIGER PETER , WIDMER ROLAND W
IPC分类号： G02B26/08 , B81B3/00 , G02B6/122 , G02B6/35 , G11C23/00 , H01H1/00 , H01H61/02
CPC分类号： G11C23/00 , G02B6/122 , G02B6/3514 , G02B6/3518 , G02B6/3546 , G02B6/3576 , G02B6/358 , H01H1/0036 , H01H61/02 , H01H2001/0042 , H01H2001/0084 , H01H2061/006
摘要： A microsystem switch (1, 20, 25, 30, 33) has a support (2) defining a recess (3), and a flexible bridge (6) is mounted on the support (2) bridging the recess (3). The bridge (6) is shaped so as to hold selectively a concave support stable state, in which the bridge bulges out of the recess (3). The switch includes an actuator (8, 9; 26, 27) for effecting flexing of the bridge (6) between the stable states, and a switching element (7, 31, 34) is mounted on the bridge (6) such that movement of the bridge between the stable states moves the switching element between an on position and an off position. According to another design, a microsystem switch (40, 55) has a support (41) defining a recess (42), and an elongate torsion member (44) is mounted on the support (41) bridging the recess (42). A flexible bridge (43, 56) is mounted on the support (41) bridging the recess (42) in a direction substantially perpendicular to the torsion member (44). The bridge (43, 56) is connected to the torsion member (44) at the cross-point thereof so that a first section of the bridge extends between the cross-point and one side of the recess (42) and a second section of the bridge extends between the cross-point and the opposite side of the recess (42). The bridge (43, 56) is shaped so as to hold selectively a first stable state, in which the first section of the bridge bulges into the recess and the second section of the bridge bulges out of the recess, and a second stable state in which this configuration is reversed. A switching element (45) is mounted at the cross-point of the bridge (43, 56) and torsion member (44), and an actuator (46a, 46b; 58a, 58b) is again provided for effecting flexing of the bridge (43, 56) between the stable states. Here, movement of the bridge (43, 56) between the stable states effects twisting of the torsion member (44) and rotation of the switching element (45) between an on position and an off position. Switching devices incorporating these switches, and switching apparatus comprising arrays of such switching devices, are also provided.
摘要翻译：微系统开关（1,20,25,30,33）具有限定凹部（3）的支撑件（2），并且柔性桥（6）安装在桥接凹部（3）的支撑件（2）上。桥（6）成形为能够选择性地保持凹形支撑件稳定状态，其中桥从凸出部（3）突出。所述开关包括用于在所述稳定状态之间实现所述桥梁（6）的弯曲的致动器（8,9; 26,27），并且将开关元件（7,31,34）安装在所述桥架（6）上，在稳定状态之间的桥接器之间的开关元件在接通位置和关闭位置之间移动。根据另一种设计，微系统开关（40,55）具有限定凹部（42）的支撑件（41），并且细长扭转构件（44）安装在桥接凹部（42）的支撑件（41）上。柔性桥（43,46）安装在基本上垂直于扭转构件（44）的方向上桥接凹部（42）的支撑件（41）上。桥（43,46）在其交叉点处连接到扭转构件（44），使得桥的第一部分在凹部（42）的交叉点和一侧之间延伸，并且第二部分该桥在凹口（42）的交叉点和相对侧之间延伸。桥（43,56）成形为能够选择性地保持第一稳定状态，其中桥的第一部分凸起到凹部中，并且桥的第二部分从凹部膨胀出来，并且第二稳定状态在这个配置是相反的。开关元件（45）安装在桥（43,56）和扭转构件（44）的交叉点处，并且再次提供致动器（46a，46b; 58a，58b）以实现桥的弯曲 43，56）之间的稳定状态。这里，桥梁（43,46）在稳定状态之间的移动使得扭转构件（44）扭转和开关元件（45）的旋转在接通位置和关闭位置之间。还提供了包括这些开关的开关装置和包括这种开关装置的阵列的开关装置。

8. 发明申请

WO2011121531A1 INTEGRATED ELECTRO-MECHANICAL ACTUATOR 审中-公开
标题翻译：集成电机械执行器
公开(公告)号：WO2011121531A1
公开(公告)日：2011-10-06
申请号：PCT/IB2011/051322
申请日：2011-03-29
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , DESPONT, Michel
发明人： DESPONT, Michel
IPC分类号： H01H59/00
CPC分类号： H01H49/00 , H01H59/00 , H01H59/0009
摘要： The present invention provides an integrated electro -mechanical actuator and a manufacturing method for manufacturing such an integrated electro-mechanical actuator. The integrated electro-mechanical actuator comprises an electrostatic actuator gap between actuator electrodes and an electrical contact gap between contact electrodes. An inclination with an inclination angle is provided between the actuator electrodes and the contact electrodes. The thickness of this electrical contact gap is equal to the thickness of a sacrificial layer which is etched away in a manufacturing process.
摘要翻译：本发明提供了一种集成的电动机械致动器和用于制造这种集成的机电致动器的制造方法。集成的机电致动器包括致动器电极之间的静电致动器间隙和接触电极之间的电接触间隙。在致动器电极和接触电极之间设置有倾斜角度的倾斜。该电接触间隙的厚度等于在制造过程中被蚀刻掉的牺牲层的厚度。

9. 发明申请

WO2011045753A1 SCANNING PROBE LITHOGRAPHY APPARATUS AND METHOD, AND MATERIAL ACCORDINGLY OBTAINED 审中-公开
标题翻译：扫描探针平移装置和方法以及根据实际获得的材料
公开(公告)号：WO2011045753A1
公开(公告)日：2011-04-21
申请号：PCT/IB2010/054630
申请日：2010-10-13
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , DESPONT, Michel , DUERIG, Urs T. , GOTSMANN, Bernd W. , KNOLL, Armin W. , PIRES, David Santos , VETTIGER, Peter
发明人： DESPONT, Michel , DUERIG, Urs T. , GOTSMANN, Bernd W. , KNOLL, Armin W. , PIRES, David Santos , VETTIGER, Peter
IPC分类号： G03F7/00
CPC分类号： G03F7/0002
摘要： The invention is directed to a scanning probe lithography (or SPL) apparatus (100). The apparatus comprises physical probes (10, 20, 30) having different tip shapes (12, 22, 32). The shapes actually differ such as to be able to form different patterns (P10, P20, and P30) in the surface thickness (M20) of a material (M10). Therefore, the diversity of patterns obtainable during a raster scan of the material surface is increased. Typically, the idea is to use tips with specific shape to imprint their (nano)shapes (or characters) in a polymer, whereby a complex structure can be created in one imprint step. Throughput of SPL is accordingly improved. Most advantageously, the probes are independently actuated, e.g. bydedicated circuitry (101, 103), in order to further increase the diversity of patterns. Character probe lithography is thereby instated.
摘要翻译：本发明涉及扫描探针光刻（或SPL）装置（100）。该装置包括具有不同尖端形状（12,22,32）的物理探针（10,20,30）。形状实际上是不同的，以便能够在材料（M10）的表面厚度（M20）中形成不同的图案（P10，P20和P30）。因此，在材料表面的光栅扫描期间可获得的图案的多样性增加。通常，这个想法是使用具有特定形状的尖端将它们的（纳米）形状（或字符）印在聚合物中，从而可以在一个压印步骤中创建复杂的结构。相应地提高了SPL的吞吐量。最有利的是，探针被独立地致动，例如，逐行电路（101,103），以进一步增加图案的多样性。从而确定了字符探针光刻技术。

10. 发明申请

WO2006040654A2 MICROSYSTEM AND METHOD FOR POSITIONING A SECOND ELEMENT WITH RESPECT TO A FIRST ELEMENT IN A MICROSYSTEM 审中-公开
标题翻译：用于在微系统中关于第一元素定位第二元素的微系统和方法
公开(公告)号：WO2006040654A2
公开(公告)日：2006-04-20
申请号：PCT/IB2005/003037
申请日：2005-09-29
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , DESPONT, Michel , DÜRIG, Urs, T. , GOTSMANN, Bernd, W.
发明人： DESPONT, Michel , DÜRIG, Urs, T. , GOTSMANN, Bernd, W.
IPC分类号： B81B3/00
CPC分类号： B81B3/0018 , F03G7/06 , F03G7/065 , H01H2037/008
摘要： A microsystem, comprising a first static element (1), a second, movable and unattached element (2), an actuator (3) for effecting a force between the first and the second element (1, 2), which actuator (3) is designed for controlling a temperature (T1, T2) of one of the first element (1) and the second element (2). A corresponding method for positioning a second element (2) with respect to a first element (1) in a microsystem is introduced.
摘要翻译：一种微系统，包括第一静态元件（1），第二可移动且未附接的元件（2），用于在第一元件和第二元件（1）之间施加力的致动器（3）（3）设计用于控制第一元件（1）和第二元件（2）中的一个的温度（T1，T2）。介绍了用于将第二元件（2）相对于微系统中的第一元件（1）定位的相应方法。

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