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    • 2. 发明申请
    • WEAR-LESS OPERATION OF A MATERIAL SURFACE WITH A SCANNING PROBE MICROSCOPE
    • 使用扫描探针显微镜对材料表面进行无磨损操作
    • WO2011055346A2
    • 2011-05-12
    • PCT/IB2010055062
    • 2010-11-08
    • IBMDUERIG URS TGOTSMANN BERND WKNOLL ARMIN WLANTZ MARK A
    • DUERIG URS TGOTSMANN BERND WKNOLL ARMIN WLANTZ MARK A
    • G01Q60/363G01Q70/10
    • The invention concerns a method for scanning a surface (52) of a material (50) with a scanning probe microscope or SPM (10), the SPM having a cantilever sensor (100) configured to exhibit distinct spring behaviors (C, Ck), the method comprising: - operating the SPM in contact mode, whereby the sensor is scanned on the material surface and a first spring behavior (C) of the sensor (e.g. a fundamental mode of flexure thereof) is excited by deflection of the sensor by the material surface; and - exciting with excitation means a second spring behavior (Ck) of the sensor at a resonance frequency thereof (e.g. one or more higher-order resonant modes) of the cantilever sensor to modulate an interaction of the sensor and the material surface and thereby reduce the wearing of the material surface.
    • 本发明涉及一种用扫描探针显微镜或SPM(10)扫描材料(50)的表面(52)的方法,SPM具有悬臂传感器(100),其被配置为呈现明显的弹簧行为(C,Ck), 该方法包括: - 以接​​触模式操作SPM,由此在材料表面上扫描传感器,并且传感器的第一弹性(C)(例如其基本弯曲模式)被传感器的偏转激发 材料表面; 和 - 激发激励意味着传感器在悬臂传感器的共振频率(例如一个或多个高阶谐振模式)下的第二弹簧行为(Ck),以调制传感器和材料表面的相互作用,从而减少 材料表面的磨损。