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1. 发明申请

WO2006040654A2 MICROSYSTEM AND METHOD FOR POSITIONING A SECOND ELEMENT WITH RESPECT TO A FIRST ELEMENT IN A MICROSYSTEM 审中-公开
标题翻译：用于在微系统中关于第一元素定位第二元素的微系统和方法
公开(公告)号：WO2006040654A2
公开(公告)日：2006-04-20
申请号：PCT/IB2005/003037
申请日：2005-09-29
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , DESPONT, Michel , DÜRIG, Urs, T. , GOTSMANN, Bernd, W.
发明人： DESPONT, Michel , DÜRIG, Urs, T. , GOTSMANN, Bernd, W.
IPC分类号： B81B3/00
CPC分类号： B81B3/0018 , F03G7/06 , F03G7/065 , H01H2037/008
摘要： A microsystem, comprising a first static element (1), a second, movable and unattached element (2), an actuator (3) for effecting a force between the first and the second element (1, 2), which actuator (3) is designed for controlling a temperature (T1, T2) of one of the first element (1) and the second element (2). A corresponding method for positioning a second element (2) with respect to a first element (1) in a microsystem is introduced.
摘要翻译：一种微系统，包括第一静态元件（1），第二可移动且未附接的元件（2），用于在第一元件和第二元件（1）之间施加力的致动器（3）（3）设计用于控制第一元件（1）和第二元件（2）中的一个的温度（T1，T2）。介绍了用于将第二元件（2）相对于微系统中的第一元件（1）定位的相应方法。

2. 发明申请

WO2003060923A1 MICROSTRUCTURES 审中-公开
标题翻译：显微
公开(公告)号：WO2003060923A1
公开(公告)日：2003-07-24
申请号：PCT/IB2002/004853
申请日：2002-11-21
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , CROSS, Graham , DESPONT, Michel , DÜRIG, Urs, T. , GENOLET, Grégoire , SCHLITTLER, Reto , VETTIGER, Peter
发明人： CROSS, Graham , DESPONT, Michel , DÜRIG, Urs, T. , GENOLET, Grégoire , SCHLITTLER, Reto , VETTIGER, Peter
IPC分类号： G12B21/00
CPC分类号： G11C23/00 , G01Q70/06 , G01Q70/12 , G01Q70/16 , G11B9/1409 , G11B9/1418 , G11C13/025 , G11C2213/81 , Y10S977/732 , Y10S977/733
摘要： A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting microstructure comprises a body portion and a nanotube embedded in the body portion.
摘要翻译：描述了形成微结构的方法。该方法包括：将种子材料沉积在基底上; 从种子材料生长纳米管; 将微结构材料沉积在衬底上以将纳米管嵌入微结构材料中; 并且分离基板以释放微结构。所得到的微结构包括主体部分和嵌入在主体部分中的纳米管。

3. 发明申请

WO2011045753A1 SCANNING PROBE LITHOGRAPHY APPARATUS AND METHOD, AND MATERIAL ACCORDINGLY OBTAINED 审中-公开
标题翻译：扫描探针平移装置和方法以及根据实际获得的材料
公开(公告)号：WO2011045753A1
公开(公告)日：2011-04-21
申请号：PCT/IB2010/054630
申请日：2010-10-13
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , DESPONT, Michel , DUERIG, Urs T. , GOTSMANN, Bernd W. , KNOLL, Armin W. , PIRES, David Santos , VETTIGER, Peter
发明人： DESPONT, Michel , DUERIG, Urs T. , GOTSMANN, Bernd W. , KNOLL, Armin W. , PIRES, David Santos , VETTIGER, Peter
IPC分类号： G03F7/00
CPC分类号： G03F7/0002
摘要： The invention is directed to a scanning probe lithography (or SPL) apparatus (100). The apparatus comprises physical probes (10, 20, 30) having different tip shapes (12, 22, 32). The shapes actually differ such as to be able to form different patterns (P10, P20, and P30) in the surface thickness (M20) of a material (M10). Therefore, the diversity of patterns obtainable during a raster scan of the material surface is increased. Typically, the idea is to use tips with specific shape to imprint their (nano)shapes (or characters) in a polymer, whereby a complex structure can be created in one imprint step. Throughput of SPL is accordingly improved. Most advantageously, the probes are independently actuated, e.g. bydedicated circuitry (101, 103), in order to further increase the diversity of patterns. Character probe lithography is thereby instated.
摘要翻译：本发明涉及扫描探针光刻（或SPL）装置（100）。该装置包括具有不同尖端形状（12,22,32）的物理探针（10,20,30）。形状实际上是不同的，以便能够在材料（M10）的表面厚度（M20）中形成不同的图案（P10，P20和P30）。因此，在材料表面的光栅扫描期间可获得的图案的多样性增加。通常，这个想法是使用具有特定形状的尖端将它们的（纳米）形状（或字符）印在聚合物中，从而可以在一个压印步骤中创建复杂的结构。相应地提高了SPL的吞吐量。最有利的是，探针被独立地致动，例如，逐行电路（101,103），以进一步增加图案的多样性。从而确定了字符探针光刻技术。

4. 发明申请

WO2005058748A1 METHOD AND SYSTEM FOR SELF-ALIGNING PARTS IN MEMS 审中-公开
标题翻译： MEMS自动校准部件的方法与系统
公开(公告)号：WO2005058748A1
公开(公告)日：2005-06-30
申请号：PCT/EP2004/052846
申请日：2004-11-08
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , COMPAGNIE IBM FRANCE , ALBRECHT, Thomas , CASTRIOTTA, Michele , DESPONT, Michel , LANTZ, Mark , OGGIONI, Stefano
发明人： ALBRECHT, Thomas , CASTRIOTTA, Michele , DESPONT, Michel , LANTZ, Mark , OGGIONI, Stefano
IPC分类号： B81B7/00
CPC分类号： B81C3/002 , H05K3/3436 , H05K2201/094 , H05K2201/09418 , H05K2201/2036 , H05K2203/048 , Y02P70/613
摘要： A method and system for efficiently self-aligning parts of a MEMS during manufacturing, as well as controlling distance between these parts, are disclosed. According to the invention each MEMS part comprises at least one pad that is aligned so as to form a pair of pads. In a preferred embodiment, each part comprises three pads. The pad shape of two pairs of pads is rectangular, one pair being rotated of an angle approximately equal to 90° from the other, and the pad shape of the third pair is annular. Therefore, one of the pair of pads allows alignment according to a first direction, a second pair of pads allows alignment according to a second direction, and the third pair of pads allows rotational alignment.
摘要翻译：公开了一种用于在制造期间有效地对准MEMS部件的方法和系统，以及控制这些部件之间的距离。根据本发明，每个MEMS部件包括至少一个对准以形成一对焊盘的焊盘。在优选实施例中，每个部分包括三个焊盘。两对焊盘的焊盘形状是矩形的，一对由另一对旋转大约等于90°的角度，第三对的焊盘形状是环形的。因此，一对衬垫之一允许根据第一方向进行对准，第二对衬垫允许根据第二方向对准，并且第三对衬垫允许旋转对准。

5. 发明申请

WO2011121531A1 INTEGRATED ELECTRO-MECHANICAL ACTUATOR 审中-公开
标题翻译：集成电机械执行器
公开(公告)号：WO2011121531A1
公开(公告)日：2011-10-06
申请号：PCT/IB2011/051322
申请日：2011-03-29
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , DESPONT, Michel
发明人： DESPONT, Michel
IPC分类号： H01H59/00
CPC分类号： H01H49/00 , H01H59/00 , H01H59/0009
摘要： The present invention provides an integrated electro -mechanical actuator and a manufacturing method for manufacturing such an integrated electro-mechanical actuator. The integrated electro-mechanical actuator comprises an electrostatic actuator gap between actuator electrodes and an electrical contact gap between contact electrodes. An inclination with an inclination angle is provided between the actuator electrodes and the contact electrodes. The thickness of this electrical contact gap is equal to the thickness of a sacrificial layer which is etched away in a manufacturing process.
摘要翻译：本发明提供了一种集成的电动机械致动器和用于制造这种集成的机电致动器的制造方法。集成的机电致动器包括致动器电极之间的静电致动器间隙和接触电极之间的电接触间隙。在致动器电极和接触电极之间设置有倾斜角度的倾斜。该电接触间隙的厚度等于在制造过程中被蚀刻掉的牺牲层的厚度。

6. 发明申请

WO2003062742A1 SCANNING PROBE FOR DATA STORAGE AND MICROSCOPY 审中-公开
标题翻译：数据存储和显微镜扫描探针
公开(公告)号：WO2003062742A1
公开(公告)日：2003-07-31
申请号：PCT/IB2002/005292
申请日：2002-12-11
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , BINNIG, Gerd, K. , DESPONT, Michel , HÄBERLE, Walter , LANTZ, Mark
发明人： BINNIG, Gerd, K. , DESPONT, Michel , HÄBERLE, Walter , LANTZ, Mark
IPC分类号： G01B7/34
CPC分类号： G11B9/1418 , G01Q70/06 , G01Q80/00 , G11B9/14 , G11B9/1409 , G11B2005/0021
摘要： A cantilever device (30, 50, 70) for scanning a surface comprises a support (32, 52, 72), a tip platform (31, 51, 71) and a flexible arm arrangement (33, 53, 73). The tip platform (31, 51, 71) has a plurality of tips. These comprise at least two contact tips (34; 55a-55c; 74, 75) providing points of contact with a surface to be scanned, and a scanning tip (36; 55a, 55b; 75) for scanning the surface, where the scanning tip may be one of the two or more contact tips provided on the platform. The flexible arm arrangement (33, 53, 73) connects the tip platform to the support and allows orientation of the platform, via flexing of the arm arrangement, to bring the contact tips into contact with a surface to be scanned. The platform (31, 51, 71) is then at a well-defined orientation relative to the scan surface, and the scanning tip (36; 55a, 55b; 75) is appropriately positioned for the scanning operation. Scanning probe microscopes and data storage devices incorporating such cantilever devices are also provided.
摘要翻译：用于扫描表面的悬臂装置（30,50,70）包括支撑件（32,52,72），尖端平台（31,51,71）和柔性臂装置（33,53,73）。尖端平台（31,51,71）具有多个尖端。这些包括提供与待扫描表面的接触点的至少两个接触尖端（34; 55a-55c; 74,75）和用于扫描表面的扫描尖端（36; 55a，55b; 75）提示可以是在平台上提供的两个或更多个接触提示之一。柔性臂布置（33,53,73）将尖端平台连接到支撑件，并且允许平台的取向通过臂布置的弯曲，以使接触尖端与待扫描的表面接触。然后，平台（31,51,71）相对于扫描表面处于相当明确的方向，并且扫描尖端（36; 55a，55b; 75）被适当地定位用于扫描操作。还提供了包括这种悬臂装置的扫描探针显微镜和数据存储装置。

7. 发明申请

WO2004020328A1 THERMAL MOVEMENT SENSOR 审中-公开
标题翻译：热运动传感器
公开(公告)号：WO2004020328A1
公开(公告)日：2004-03-11
申请号：PCT/IB2003/003749
申请日：2003-08-22
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , BINNIG, Gerd, K. , DESPONT, Michel , LANTZ, Mark, A. , VETTIGER, Peter
发明人： BINNIG, Gerd, K. , DESPONT, Michel , LANTZ, Mark, A. , VETTIGER, Peter
IPC分类号： B81B3/00
CPC分类号： G01Q60/58 , G11B9/1418
摘要： A transducer for detecting movement of an article mounted for movement in a plane, the transducer comprising: a heater facing the plane of movement of the article and having a temperature dependent resistance; and, an edge defined in the article between regions of different thermal conductivity; wherein, as the article describes the movement, the edge moves relative to the heater producing a corresponding variation in heat loss from the heater and a corresponding variation in resistance of the heater.
摘要翻译：一种用于检测安装成用于在平面中移动的物品的运动的换能器，所述换能器包括：加热器，其面向所述物品的运动平面并具有温度依赖性电阻; 以及在不同热导率的区域之间在物品中限定的边缘; 其中，当制品描述移动时，边缘相对于加热器移动，产生来自加热器的热损失的对应变化和加热器的相应的电阻变化。

8. 发明申请

WO2002064495A2 ENHANCED SACRIFICIAL LAYER ETCHING TECHNIQUE FOR MICROSTRUCTURE RELEASE 审中-公开
标题翻译：用于微结构释放的增强型真空层蚀刻技术
公开(公告)号：WO2002064495A2
公开(公告)日：2002-08-22
申请号：PCT/IB2002/000395
申请日：2002-02-08
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , DESPONT, Michel , DRECHSLER, Ute , GENOLET, Gregoire , VETTIGER, Peter
发明人： DESPONT, Michel , DRECHSLER, Ute , GENOLET, Gregoire , VETTIGER, Peter
IPC分类号： B81B3/00
CPC分类号： B81C1/00476 , B81C2201/0109
摘要： A method for at least partially releasing microstructures from a substrate is provided. The method comprises the steps of: a) providing a substrate (2); b) depositing onto said substrate (2) a first layer (4) and a second layer (6), the first layer (4) and the second layer (6) each comprising an electrically conducting material and each having a different oxido-reduction potential; c) electrically connecting the first layer (4) and the second layer (6); d) forming a microstructure (8) on the first (4) and second (6) layers deposited in step b) to produce an intermediate structure (10); and e) electrochemically etching said second layer (6) by immersing the intermediate structure (10) formed in step d) in an electrolyte (12).
摘要翻译：提供了一种至少部分地从基板上释放微结构的方法。该方法包括以下步骤：a）提供衬底（2）; b）在所述衬底（2）上沉积第一层（4）和第二层（6），所述第一层（4）和所述第二层（6）各自包含导电材料并且各自具有不同的氧化还原潜在; c）电连接第一层（4）和第二层（6）; d）在步骤b）中沉积的第一（4）和第二（6）层上形成微结构（8）以产生中间结构（10）; 以及e）通过将步骤d）中形成的中间结构（10）浸入电解质（12）中来电化学蚀刻所述第二层（6）。

9. 发明申请

WO2012001554A1 ELECTROMECHANICAL SWITCH DEVICE AND METHOD OF OPERATING THE SAME 审中-公开
标题翻译：电动开关装置及其操作方法
公开(公告)号：WO2012001554A1
公开(公告)日：2012-01-05
申请号：PCT/IB2011/052490
申请日：2011-06-08
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , DESPONT, Michel , HAGLEITNER, Christoph , POZIDIS, Charalampos , SEBASTIAN, Abu
发明人： DESPONT, Michel , HAGLEITNER, Christoph , POZIDIS, Charalampos , SEBASTIAN, Abu
IPC分类号： H01H59/00 , H01H47/00
CPC分类号： H01H59/00 , H01H47/00 , H01H59/0009
摘要： The invention relates to an electromechanical switch device (100, 200), comprising a first switch portion (111, 112, 211, 212), a second switch portion (121, 122, 220) and an actuator device (130, 230). The actuator device (130, 230) is configured to provide an actuation force, thereby actuating the first and second switch portion (111, 112, 121, 122, 211, 212, 220) relative to each other in order to change from a disconnected to a connected state. The actuator device (130, 230) is further configured to provide the actuation force with a modulation at least when the first and second switch portion (111, 112, 121, 122, 211, 212, 220) are in the connected state. The invention furthermore relates to a method of operating an electromechanical switch device (100, 200).
摘要翻译：本发明涉及一种机电开关装置（100,200），其包括第一开关部分（111,112,211,212），第二开关部分（121,122,220）和致动器装置（130,230）。致动器装置（130,230）构造成提供致动力，从而相对于彼此致动第一和第二开关部分（111,112,121,122,211,212,220），以便从断开的到连接状态。致动器装置（130,230）进一步构造成至少当第一和第二开关部分（111,112,121,122,211,212,220）处于连接状态时，提供具有调制的致动力。本发明还涉及一种操作机电开关装置（100,200）的方法。

10. 发明申请

WO2010086759A1 HIGH-SPEED SCANNING PROBE MICROSCOPE 审中-公开
标题翻译：高速扫描探针显微镜
公开(公告)号：WO2010086759A1
公开(公告)日：2010-08-05
申请号：PCT/IB2010/050186
申请日：2010-01-15
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , BHASKARAN, Harish , DESPONT, Michel , SEBASTIAN, Abu
发明人： BHASKARAN, Harish , DESPONT, Michel , SEBASTIAN, Abu
IPC分类号： G01Q60/16
CPC分类号： G01Q60/16
摘要： The invention is directed to a probe for scanning probe microscopy. The probe 20 comprises a tunnel-current conducting part 30 and a tunnel-current insulating part 40. The said parts are configured such that the insulating part determines a minimal distance between the conducting part 30 and the sample surface. The invention may further concern a scanning probe microscope having such a probe, and a corresponding scanning probe microscopy method. Since the distance to the sample surface 100 is actually determined by the insulating part 40, controlling the vertical position of the probe 20 relative to the sample surface is easily and rapidly achieved. The configuration of the parts allows for a fast scan of the sample surface, whereby high-speed imaging can be achieved. Further, embodiments allow for topographical variations to be accurately captured through tunneling effect.
摘要翻译：本发明涉及用于扫描探针显微镜的探针。探针20包括隧道电流传导部分30和隧道电流绝缘部分40.所述部分被构造成使得绝缘部分确定导电部分30和样品表面之间的最小距离。本发明还可以涉及具有这种探针的扫描探针显微镜和相应的扫描探针显微镜方法。由于到达样品表面100的距离实际上由绝缘部件40确定，因此容易且快速地实现了探针20相对于样品表面的垂直位置的控制。部件的构造允许对样品表面进行快速扫描，由此可以实现高速成像。此外，实施例允许通过隧道效应准确地捕获地形变化。

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