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1. 发明申请

US20120255492A1 Large Area Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition Apparatus 审中-公开
标题翻译：大面积大气压等离子体增强化学气相沉积装置
公开(公告)号：US20120255492A1
公开(公告)日：2012-10-11
申请号：US13080874
申请日：2011-04-06
申请人： Mien-Win Wu , Ding-Guey Tsai , Hwei-Lang Chang , Deng-Lain Lin , Cheng-Chang Hsieh , Chi-Fong Ai
发明人： Mien-Win Wu , Ding-Guey Tsai , Hwei-Lang Chang , Deng-Lain Lin , Cheng-Chang Hsieh , Chi-Fong Ai
IPC分类号： C23C16/513 , C23C16/458 , C23C16/50 , C23C16/453
CPC分类号： C23C16/545 , C23C16/0245 , C23C16/4401 , C23C16/45512 , C23C16/45565 , C23C16/50 , C23C16/513 , H01J37/32366 , H01J37/3244 , H01J37/32449 , H01J37/32568 , H01J37/32761 , H01J37/32825 , H01J37/32853
摘要： An apparatus provides large area atmospheric pressure plasma enhanced chemical vapor deposition without contaminations in its electrode assembly and deposited films. The apparatus consists of a large area vertical planar nitrogen plasma activation electrode assembly and its high voltage power supply, a large area vertical planar nitrogen plasma deposition electrode assembly and its high voltage power supply, a long-line uniform precursor jet apparatus, a roll-to-roll apparatus for substrate movement, and a sub-atmospheric pressure deposition chamber and its pumping apparatus. Not only can the deposited film contaminations in the electrode assembly interior and the debris of the deposited films from exterior of the electrode assembly and the air aerosols in the deposition chamber be completely prevented, but a large area roll-to-roll uniform deposition can also be achieved to meet a roll-to-roll continuous production, so as to achieve improved film quality, increased production throughput and reduced manufacturing cost.
摘要翻译：一种装置在其电极组件和沉积膜中提供大面积的大气压等离子体增强化学气相沉积而没有污染。该装置由大面积垂直平面氮等离子体激活电极组件及其高压电源，大面积垂直平面氮等离子体沉积电极组件及其高压电源，长线均匀前驱体喷射装置，用于基板移动的滚动装置和次大气压力沉积室及其抽吸装置。不仅可以完全防止电极组件内部的沉积膜污染物和电极组件外部沉积膜的碎屑和沉积室中的空气气溶胶，而且大面积的卷对卷均匀沉积也可以实现卷对卷连续生产，从而达到提高胶片质量，提高生产量和降低制造成本的目的。

2. 发明申请

US20100225234A1 Hollow-cathode plasma generator 审中-公开
标题翻译：空心阴极等离子体发生器
公开(公告)号：US20100225234A1
公开(公告)日：2010-09-09
申请号：US11896620
申请日：2007-09-04
申请人： Ching-Pei Tseng , Cheng-Chang Hsieh , Chi-Fong Ai , Chia-Cheng Lee , Tien-Hsiang Hsueh , Chun-Han Wang
发明人： Ching-Pei Tseng , Cheng-Chang Hsieh , Chi-Fong Ai , Chia-Cheng Lee , Tien-Hsiang Hsueh , Chun-Han Wang
IPC分类号： H05H1/24
CPC分类号： H05H1/46 , H01J37/32596 , H01J37/32724
摘要： A hollow-cathode plasma generator includes a plurality of hollow cathodes joined together and connected to a power supply for generating plasma in vacuum. Each of the hollow cathodes includes at least one fillister defined therein, a fin formed on a side of the fillister, an air-circulating tunnel in communication with the fillister and a coolant-circulating tunnel defined therein. The fillister is used to contain working gas. The fin receives negative voltage from the power supply for ionizing the working gas to generate the plasma and spread the plasma in a single direction. The working gas travels into the fillister from the air-circulating tunnel. The coolant-circulating tunnel is used to circulate coolant for cooling the hollow cathode.
摘要翻译：中空阴极等离子体发生器包括多个连接在一起的中空阴极，并连接到用于在真空中产生等离子体的电源。每个中空阴极包括限定在其中的至少一个填充器，形成在填充器一侧的翅片，与填充器连通的空气循环隧道和限定在其中的冷却剂循环通道。灌装机用于容纳工作气体。翅片从电源接收负电压，用于电离工作气体以产生等离子体并且在单个方向上扩散等离子体。工作气体从空气循环通道进入灌装机。冷却剂循环隧道用于循环冷却剂以冷却空心阴极。

3. 发明申请

US20100218896A1 Atmospheric pressure plasma reactor 有权
标题翻译：大气压等离子体反应堆
公开(公告)号：US20100218896A1
公开(公告)日：2010-09-02
申请号：US11898356
申请日：2007-09-11
申请人： Chi-fong Ai , Mien-Win Wu , Cheng-Chang Hsieh
发明人： Chi-fong Ai , Mien-Win Wu , Cheng-Chang Hsieh
IPC分类号： C23F1/08 , C23C16/00
CPC分类号： C23C16/509 , C23C16/452 , H01J37/32348 , H01J37/32825 , H05H1/2406 , H05H2001/2412 , H05H2001/2425
摘要： An atmospheric pressure plasma reactor includes a high-voltage electrode, a common grounded electrode, a bias electrode and at least one dielectric layer. The high-voltage electrode is connected to a high-voltage power supply. The common grounded electrode is used with the high-voltage electrode to discharge and therefore produce planar atmospheric plasma from reactive gas. The bias electrode is used to generate bias for attracting the ions of the planar atmospheric pressure plasma. The dielectric layer is used to suppress undesirable arc discharge during the discharging.
摘要翻译：大气压等离子体反应器包括高压电极，公共接地电极，偏置电极和至少一个电介质层。高压电极连接到高压电源。公共接地电极与高电压电极一起使用以放电，因此从反应气体产生平面大气等离子体。偏置电极用于产生用于吸引平面大气压等离子体的离子的偏压。电介质层用于抑制放电期间的不期望的电弧放电。

4. 发明申请

US20100218721A1 Hollow-cathode discharge apparatus for plasma-based processing 审中-公开
标题翻译：用于等离子体处理的空心阴极放电装置
公开(公告)号：US20100218721A1
公开(公告)日：2010-09-02
申请号：US11896738
申请日：2007-09-05
申请人： Der-Jun Jan , Shin-Wu Wei , Chi-Fong Ai
发明人： Der-Jun Jan , Shin-Wu Wei , Chi-Fong Ai
IPC分类号： C23C16/513 , C23C16/448 , C23C16/505
CPC分类号： C23C16/505 , H01J37/32009 , H01J37/32596 , H01J37/32761
摘要： A hollow-cathode discharge apparatus is disclosed for plasma-based processing. The hollow-cathode discharge apparatus includes a vacuum chamber, a hollow cathode disposed in the center of the vacuum chamber, a carrier for synchronously carrying a plurality of work-pieces in the vacuum chamber and a driving element for driving the carrier.
摘要翻译：公开了一种用于等离子体处理的中空阴极放电装置。中空阴极放电装置包括真空室，设置在真空室中心的中空阴极，用于同时承载真空室中的多个工件的载体和用于驱动载体的驱动元件。

5. 发明申请

US20090197014A1 Apparatus and method for coating diamond on work pieces via hot filament chemical vapor deposition 审中-公开
标题翻译：通过热丝化学气相沉积在工件上涂覆金刚石的装置和方法
公开(公告)号：US20090197014A1
公开(公告)日：2009-08-06
申请号：US12068249
申请日：2008-02-04
申请人： Jin-Yu Wu , Chun-Han Wang , Ding-Guey Tsai , Ming-Ruesy Tsai , Chi-Fong Ai
发明人： Jin-Yu Wu , Chun-Han Wang , Ding-Guey Tsai , Ming-Ruesy Tsai , Chi-Fong Ai
IPC分类号： H05H1/24 , B05C11/00
CPC分类号： H01J37/32522 , C23C16/27 , C23C16/271 , C23C16/4411 , C23C16/4412 , C23C16/45523 , C23C16/45565 , C23C16/52 , H01J37/32009 , H01J2237/3321
摘要： There is a disclosed apparatus for coating diamond on work pieces via hot filament chemical vapor deposition. The apparatus includes a chamber, a pump for pumping air from the chamber, a pressure controller for con trolling the pressure in the chamber, a grid disposed in the chamber, a grid-bias power supply for providing a positive bias to the grid, a holder for carrying the work pieces, a holder-bias power supply for providing a negative bias to the holder, filaments provided between the grid and the carrier, a filament power supply for energizing the filaments to heat up, a programmable temperature controller for controlling the temperature in the chamber and a pipe for transferring reaction gas into the chamber.
摘要翻译：公开了一种用于通过热丝化学气相沉积在工件上涂覆金刚石的公开的装置。该装置包括：腔室，用于从腔室抽空气的泵，用于控制腔室内的压力的压力控制器，设置在腔室中的格栅，用于向栅格提供正偏压的栅极偏置电源; 用于承载工件的保持器，用于向保持器提供负偏压的保持器偏置电源，设置在电网和载体之间的灯丝，用于使灯丝加热的灯丝电源，用于控制灯丝的可编程温度控制器室内的温度和用于将反应气体输送到室中的管道。

6. 发明授权

US08414980B2 Method for hydrophobic and oleophobic modification of polymeric materials with atmospheric plasmas 失效
标题翻译：具有大气等离子体的聚合材料疏水和疏油改性的方法
公开(公告)号：US08414980B2
公开(公告)日：2013-04-09
申请号：US12545664
申请日：2009-08-21
申请人： Tien-Hsiang Hsueh , Mien-Win Wu , Chi-Fong Ai
发明人： Tien-Hsiang Hsueh , Mien-Win Wu , Chi-Fong Ai
IPC分类号： C08J7/18
CPC分类号： B05D3/142 , C08J7/18 , C08J2427/12 , D06M10/025 , D06M14/18 , D06M14/22 , D06M14/26 , D06M14/28 , D06M14/32 , D06M14/34 , D06M2200/11 , D06M2200/12
摘要： A method of fabricating hydrophobic and oleophobic polymer fabric through two stages of modification using atmospheric plasmas including (a) moving a substrate into an atmospheric plasma area, generating an atmospheric filamentary discharge plasma with a first plasma working gas to obtain a first rough surface of said substrate, (b) exposing plasma treated substrate to air to obtain highly active peroxide on said first rough surface of said substrate, (c) immersing said substrate in a solution of fluorocarbon compound and processing a first stage of graft of a fluorocarbon monomer or oligomer on said substrate to obtain a grafted fluorocarbon monomer or oligomer layer on said first rough surface of said substrate, (d) processing a second stage of graft a fluorocarbon functional group to said grafted fluorocarbon monomer or oligomer layer by generating a carbon tetrafluoride plasma from a second plasma working gas and irradiating said carbon tetrafluoride plasma on said grafted fluorocarbon monomer or oligomer layer; and (e) curing and drying said substrate.
摘要翻译：一种通过使用大气等离子体的两个阶段的修饰制造疏水和疏油聚合物织物的方法，包括：（a）将基底移动到大气等离子体区域，用第一等离子体工作气体产生大气丝状放电等离子体，以获得所述（b）将等离子体处理的基板暴露于空气中以在所述基板的所述第一粗糙表面上获得高活性过氧化物，（c）将所述基材浸入氟碳化合物溶液中，并处理氟碳单体或低聚物的第一接枝段在所述基板上在所述基板的所述第一粗糙表面上获得接枝的碳氟单体或低聚物层，（d）通过从所述基板上生成碳氟化合物单体或低聚物层，第二等离子体工作气体，并且在所述接枝的氟碳上照射所述四氟化碳等离子体单体或低聚物层; 和（e）固化和干燥所述基材。

7. 发明授权

US08062964B2 Solar cell defect passivation method 有权
标题翻译：太阳能电池缺陷钝化法
公开(公告)号：US08062964B2
公开(公告)日：2011-11-22
申请号：US12853232
申请日：2010-08-09
申请人： Wen-Fa Tsai , Jyong-Fong Liao , Yen-Yu Chen , Chee Wee Liu , Chi-Fong Ai
发明人： Wen-Fa Tsai , Jyong-Fong Liao , Yen-Yu Chen , Chee Wee Liu , Chi-Fong Ai
IPC分类号： H01L21/26
CPC分类号： H01L31/1868 , Y02E10/50 , Y02P70/521
摘要： The present disclosure passivates solar cell defects. Plasma immersion ion implantation (PIII) is used to repair the defects during or after making the solar cell. Hydrogen ion is implanted into absorption layer with different sums of energy to fill gaps of defects or surface recombination centers. Thus, solar cell defects are diminished and carriers are transferred with improved photovoltaic conversion efficiency.
摘要翻译：本公开钝化太阳能电池缺陷。在制造太阳能电池期间或之后，使用等离子体浸没离子注入（PIII）来修复缺陷。将氢离子注入到具有不同的能量之和的吸收层中以填充缺陷或表面复合中心的间隙。因此，太阳能电池缺陷减少，并且载流子随着光伏转换效率的提高而被转移。

8. 发明申请

US20090291226A1 Apparatus and Method for Double-Plasma Graft Polymerization at Atmospheric Pressure 失效
标题翻译：在大气压下双等离子体接枝聚合的装置和方法
公开(公告)号：US20090291226A1
公开(公告)日：2009-11-26
申请号：US12124685
申请日：2008-05-21
申请人： Mien-Win WU , Tien-Hsiang Hsueh , Cheng-Chang Hsieh , Chi-fong Ai
发明人： Mien-Win WU , Tien-Hsiang Hsueh , Cheng-Chang Hsieh , Chi-fong Ai
IPC分类号： C08F2/46 , C23C16/513
CPC分类号： C08F2/52 , B05D1/18 , B05D3/0446 , B05D3/144 , B05D3/147 , B05D7/04 , B05D2252/02
摘要： Disclosed is a n atmospheric-pressure double-plasma graft polymerization apparatus. The apparatus includes a workbench, an initial roller of a roll-to-roll device, an atmospheric-pressure plasma activation device, a peroxide formation device, a coating and grafting device, a drying device, a graft polymerization and curing device, a curing device and a final roller of a roll-to-roll device. The devices are sequentially provided on the workbench.
摘要翻译：公开了一种n大气压双等离子体接枝聚合装置。该装置包括工作台，卷对卷装置的初始辊，大气压等离子体激活装置，过氧化物形成装置，涂覆和接枝装置，干燥装置，接枝聚合和固化装置，固化装置和卷对卷装置的最终辊。设备依次设置在工作台上。

9. 发明申请

US20070154650A1 Method and apparatus for glow discharge plasma treatment of flexible material at atmospheric pressure 审中-公开
标题翻译：用于在大气压力下对柔性材料进行辉光放电等离子体处理的方法和装置
公开(公告)号：US20070154650A1
公开(公告)日：2007-07-05
申请号：US11320609
申请日：2005-12-30
申请人： Mien-Win Wu , Cheng-Chang Hsieh , Chi-Fong Ai , Kuo-Chuan Cheng , Tien-Hsiang Hsuch
发明人： Mien-Win Wu , Cheng-Chang Hsieh , Chi-Fong Ai , Kuo-Chuan Cheng , Tien-Hsiang Hsuch
IPC分类号： B05D3/00 , H05H1/24 , C23C16/00 , B29C71/04
CPC分类号： H01J37/32825 , B29C59/14 , H01J37/32348 , H01J37/3244 , H01J37/3277 , H05H1/2406 , H05H2001/2412 , H05H2240/10
摘要： Abstract of the disclosure The present invention provides a method and an apparatus for a glow discharge plasma surface treatment of flexible sheet materials under atmospheric pressure. The apparatus comprises electrodes, a single plasma-gas flow channel, uniform gas inlet-and-outlet devices, gas-seal devices for the horizontal movements of sheet materials and reel devices, so as to attain an uniform distribution of plasma gases in the gap between electrodes. As a result, not only a great amount of expensive plasma gas is saved, but also an uniform glow discharge plasma is generated at the lowest input power to obtain a good quality of uniform plasma treatment with continuous processing and high production.
摘要翻译：发明内容本发明提供一种用于在大气压下对柔性片材进行辉光放电等离子体表面处理的方法和装置。该装置包括电极，单个等离子体气体流动通道，均匀的气体入口和出口装置，用于片材和卷轴装置的水平运动的气体密封装置，以便获得等离子体气体在间隙中的均匀分布电极之间。结果，不仅节省了大量昂贵的等离子体气体，而且在最低输入功率下产生均匀的辉光放电等离子体，以通过连续加工和高产量获得均匀等离子体处理的良好质量。

10. 发明申请

US20110192348A1 RF Hollow Cathode Plasma Generator 审中-公开
标题翻译：射频空心阴极等离子体发生器
公开(公告)号：US20110192348A1
公开(公告)日：2011-08-11
申请号：US12701035
申请日：2010-02-05
申请人： Ching-Pei Tseng , Cheng-Chang Hsieh , Chi-Fong Ai , Chia-Cheng Lee , Deng-Lain Lin
发明人： Ching-Pei Tseng , Cheng-Chang Hsieh , Chi-Fong Ai , Chia-Cheng Lee , Deng-Lain Lin
IPC分类号： C23C16/00 , H05H1/24
CPC分类号： C23C16/509 , H01J37/3244 , H01J37/32596
摘要： An RF hollow cathode plasma source consists of a vacuum chamber, a pipe, a hollow cathode, at least two compartments, a conduit and input electrodes. The pipe is inserted into the chamber for introducing working gas into the chamber. The hollow cathode is disposed in the chamber and formed with a large number of apertures. At least two compartments are located below the hollow cathode. Each of the compartments includes small apertures for uniformly spreading the working gas into the apertures of the hollow cathode. The conduit is disposed along two sides of the hollow cathode to circulate cooling water around the hollow cathode. The plural input power leads are arranged near the hollow cathode. The input power leads, the pipe and the conduits are connected to the hollow cathode though the electrically-insulated walls of the grounded vacuum chamber.
摘要翻译： RF空心阴极等离子体源由真空室，管，中空阴极，至少两个隔室，导管和输入电极组成。将管插入腔室中以将工作气体引入腔室。中空阴极设置在室中并形成有大量孔。至少两个隔室位于空心阴极的下面。每个隔室包括用于将工作气体均匀地分散到中空阴极的孔中的小孔。导管沿空心阴极的两侧设置，以将冷却水循环在中空阴极周围。多个输入电源引线设置在中空阴极附近。输入功率引线，管道和导管通过接地真空室的电绝缘壁连接到空心阴极。

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