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    • 2. 发明授权
    • Reducing the reverse recovery charge of thyristors by nuclear irradiation
    • 通过核辐射降低晶闸管的反向恢复电荷
    • US4311534A
    • 1982-01-19
    • US163548
    • 1980-06-27
    • John BartkoKrishan S. TarnejaChang K. ChuEarl S. Schlegel
    • John BartkoKrishan S. TarnejaChang K. ChuEarl S. Schlegel
    • H01L21/322H01L21/263H01L29/167H01L29/74H01L7/54
    • H01L29/167H01L21/263Y10S148/084
    • A method of reducing the reverse recovery charge of thyristors without substantially increasing forward voltage drop by first determining the depth of the anode PN junction from a major surface adjoining a cathode emitter region. The depth of maximum defect generation in thyristor on irradiation through the major surface with a given radiation source radiating particles with molecular weight greater than one, preferably proton or alpha particles, and adjusting the energy level at the major surface of the thyristor from the radiation source to provide the depth of maximum defect generation adjacent the anode PN junction and preferably in the anode base region within 20 micrometers of the anode PN junction or in the anode emitter region within 15 micrometers of the anode PN junction. Thereafter the thyristor is irradiated through said major surface with the adjusted energy level from the radiation source to a given dosage to reduce the reverse recovery stored charge of the thyristor without substantially increasing the forward voltage drop.
    • 一种减少晶闸管的反向恢复电荷的方法,而不会通过首先确定来自邻接阴极发射极区的主表面的阳极PN结的深度而基本上增加正向压降。 通过具有给定辐射源的主表面照射的晶闸管中的最大缺陷产生的深度辐射分子量大于1的颗粒,优选质子或α粒子,并且从辐射源调节晶闸管的主表面处的能级 以提供邻近阳极PN结的最佳缺陷产生的深度,优选在阳极PN结的20微米内的阳极基极区域或阳极PN结的15微米内的阳极发射极区域中提供最大缺陷产生的深度。 此后,晶闸管通过所述主表面照射具有从辐射源到给定剂量的调节能级,以减少晶闸管的反向恢复存储电荷,而不会基本上增加正向压降。