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    • 7. 发明申请
    • MICROMACHINED RESONANT MAGNETIC FIELD SENSORS
    • 微型谐振磁场传感器
    • WO2012121821A3
    • 2012-11-01
    • PCT/US2012023756
    • 2012-02-03
    • INVENSENSE INCSEEGER JOSEPHLO CHIUNG CCAGDASER BARISSHAEFFER DEREK
    • SEEGER JOSEPHLO CHIUNG CCAGDASER BARISSHAEFFER DEREK
    • G01R31/00
    • G01R33/038G01R33/0286
    • A micromachined magnetic field sensor comprising is disclosed. The micromachined magnetic field comprises a substrate; a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis. The micromachined magnetic field sensor also includes a sense subsystem, the sense subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; wherein a portion of the sense subsystem moves along a fourth axis; a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and a position transducer to detect the motion of the sense subsystem.
    • 公开了一种微加工磁场传感器。 微加工磁场包括基片; 驱动子系统,所述驱动子系统包括多个梁,以及连接到所述基板的至少一个锚固件; 用于沿着第一轴线提供穿过所述驱动子系统的电流的机构; 以及响应于沿着第三轴的磁场沿第二轴作用在驱动子系统上的洛伦兹力。 微加工磁场传感器还包括感测子系统,感测子系统包括多个光束,以及至少一个连接到衬底的锚; 其中所述感测子系统的一部分沿着第四轴线移动; 驱动子系统和感测子系统之间的耦合弹簧,其引起感测子系统响应于磁场的运动; 以及用于检测感测子系统的运动的位置传感器。
    • 8. 发明申请
    • MICROMACHINED RESONANT MAGNETIC FIELD SENSORS
    • 微机械共振磁场传感器
    • WO2012121821A2
    • 2012-09-13
    • PCT/US2012/023756
    • 2012-02-03
    • INVENSENSE, INC.SEEGER, JosephLO, Chiung, C.CAGDASER, BarisSHAEFFER, Derek
    • SEEGER, JosephLO, Chiung, C.CAGDASER, BarisSHAEFFER, Derek
    • G01R33/028G01R33/02
    • G01R33/038G01R33/0286
    • A micromachined magnetic field sensor comprising is disclosed. The micromachined magnetic field comprises a substrate; a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis. The micromachined magnetic field sensor also includes a sense subsystem, the sense subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; wherein a portion of the sense subsystem moves along a fourth axis; a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and a position transducer to detect the motion of the sense subsystem.
    • 公开了一种微机械磁场传感器。 微机械磁场包括衬底; 驱动子系统,所述驱动子系统包括多个梁,以及至少一个连接到所述衬底的锚; 用于沿着第一轴线提供通过所述驱动子系统的电流的机构; 以及响应于沿着第三轴的磁场而沿着第二轴作用在驱动子系统上的洛伦兹力。 微机械磁场传感器还包括感测子系统,感测子系统包括多个束以及连接到衬底的至少一个锚; 其中感测子系统的一部分沿着第四轴线移动; 在驱动子系统和感测子系统之间的耦合弹簧,其响应于磁场而引起感测子系统的运动; 和一个位置传感器来检测传感子系统的运动。