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1. 发明申请

WO2012129011A1 HIGH-VOLTAGE MEMS APPARATUS AND METHOD 审中-公开
标题翻译：高电压MEMS器件及方法
公开(公告)号：WO2012129011A1
公开(公告)日：2012-09-27
申请号：PCT/US2012/028942
申请日：2012-03-13
申请人： INVENSENSE, INC. , SHAEFFER, Derek , CAGDASER, Baris , SEEGER, Joseph
发明人： SHAEFFER, Derek , CAGDASER, Baris , SEEGER, Joseph
IPC分类号： H01L29/66
CPC分类号： H01L27/092 , B81B7/008 , B81B2207/015 , H01L21/823892
摘要： A high-voltage MEMS system compatible with low-voltage semiconductor process technology is disclosed. The system comprises a MEMS device coupled to a high-voltage bias generator employing an extended-voltage isolation residing in a semiconductor technology substrate. The system avoids the use of high- voltage transistors so that special high-voltage processing steps are not required of the semiconductor technology, thereby reducing process cost and complexity. MEMS testing capability is addressed with a self-test circuit allowing modulation of the bias voltage and current so that a need for external high-voltage connections and associated electro-static discharge protection circuitry are also avoided.
摘要翻译：公开了一种兼容低压半导体工艺技术的高压MEMS系统。该系统包括耦合到高电压偏置发生器的MEMS器件，其采用驻留在半导体技术衬底中的扩展电压隔离。该系统避免使用高压晶体管，从而不需要半导体技术的特殊高压处理步骤，从而降低工艺成本和复杂性。利用允许调制偏置电压和电流的自检电路解决MEMS测试能力，从而也避免了外部高压连接和相关静电放电保护电路的需要。

2. 发明申请

WO2012097384A3 MICROMACHINED RESONANT MAGNETIC FIELD SENSORS 审中-公开
公开(公告)号：WO2012097384A3
公开(公告)日：2012-07-19
申请号：PCT/US2012/023849
申请日：2012-02-03
申请人： INVENSENSE, INC. , SEEGER, Joseph , LO, Chiung, C. , CAGDASER, Baris , SHAEFFER, Derek
发明人： SEEGER, Joseph , LO, Chiung, C. , CAGDASER, Baris , SHAEFFER, Derek
IPC分类号： G01R33/02
摘要： A micromachined magnetic field sensor is disclosed. The micromachined magnetic field sensor comprises a substrate; and a drive subsystem partially supported by the substrate with a plurality of beams, and at least one anchor; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field vector along a third axis. The micromachined magnetic field sensor also includes a position transducer to detect the motion of the drive subsystem and an electrostatic offset cancellation mechanism coupled to the drive subsystem.

3. 发明申请

WO2012121821A2 MICROMACHINED RESONANT MAGNETIC FIELD SENSORS 审中-公开
标题翻译：微机械共振磁场传感器
公开(公告)号：WO2012121821A2
公开(公告)日：2012-09-13
申请号：PCT/US2012/023756
申请日：2012-02-03
申请人： INVENSENSE, INC. , SEEGER, Joseph , LO, Chiung, C. , CAGDASER, Baris , SHAEFFER, Derek
发明人： SEEGER, Joseph , LO, Chiung, C. , CAGDASER, Baris , SHAEFFER, Derek
IPC分类号： G01R33/028 , G01R33/02
CPC分类号： G01R33/038 , G01R33/0286
摘要： A micromachined magnetic field sensor comprising is disclosed. The micromachined magnetic field comprises a substrate; a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis. The micromachined magnetic field sensor also includes a sense subsystem, the sense subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; wherein a portion of the sense subsystem moves along a fourth axis; a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and a position transducer to detect the motion of the sense subsystem.
摘要翻译：公开了一种微机械磁场传感器。微机械磁场包括衬底; 驱动子系统，所述驱动子系统包括多个梁，以及至少一个连接到所述衬底的锚; 用于沿着第一轴线提供通过所述驱动子系统的电流的机构; 以及响应于沿着第三轴的磁场而沿着第二轴作用在驱动子系统上的洛伦兹力。微机械磁场传感器还包括感测子系统，感测子系统包括多个束以及连接到衬底的至少一个锚; 其中感测子系统的一部分沿着第四轴线移动; 在驱动子系统和感测子系统之间的耦合弹簧，其响应于磁场而引起感测子系统的运动; 和一个位置传感器来检测传感子系统的运动。

4. 发明申请

WO2014158728A1 DUTY-CYCLED GYROSCOPE 审中-公开
标题翻译：带周期的陀螺仪
公开(公告)号：WO2014158728A1
公开(公告)日：2014-10-02
申请号：PCT/US2014/019665
申请日：2014-02-28
申请人： INVENSENSE, INC.
发明人： SHAEFFER, Derek , WANG, Stanley
IPC分类号： H03L7/08 , G01C19/00 , G01C19/04
CPC分类号： G01C19/10 , G01C19/065 , G01C19/5776 , H03G3/20 , H03L7/0891 , H03L7/093 , H03L7/099 , Y10T74/1229
摘要： A gyroscope system comprises a MEMS gyroscope coupled to a drive system and a sense system. The drive system maintains the MEMS gyroscope in a state of oscillation and the sense system for receiving, amplifying, and demodulating an output signal of the MEMS gyroscope that is indicative of the rate of rotation. The gyroscope system further includes a phase-locked look (PLL) which receives a reference clock (REFCLK) from the drive system and produces a system clock (CLK). Finally, the gyroscope system includes a controller operating on the system clock sets an operating state of the drive system and the sense system and also controls a state of the PLL. One or more system state variables are maintained in a substantially fixed state during a protect mode thereby enabling rapid transitions between a low-power mode and a normal operating mode of the gyroscope system.
摘要翻译：陀螺仪系统包括耦合到驱动系统和感测系统的MEMS陀螺仪。驱动系统将MEMS陀螺仪维持在振荡状态，以及用于接收，放大和解调表示旋转速率的MEMS陀螺仪的输出信号的感测系统。陀螺仪系统还包括从驱动系统接收参考时钟（REFCLK）并产生系统时钟（CLK）的锁相外观（PLL）。最后，陀螺仪系统包括在系统时钟上操作的控制器设置驱动系统和感测系统的操作状态，并且还控制PLL的状态。在保护模式期间，一个或多个系统状态变量保持在基本上固定的状态，从而实现陀螺仪系统的低功率模式和正常操作模式之间的快速转换。

5. 发明授权

EP2987242B1 DUTY-CYCLED GYROSCOPE 有权
公开(公告)号：EP2987242B1
公开(公告)日：2020-02-05
申请号：EP14775783.5
申请日：2014-02-28
申请人： InvenSense, Inc.
发明人： SHAEFFER, Derek , WANG, Stanley
IPC分类号： G01C19/00 , G01C19/04 , G01C19/5776 , G01C19/10 , H03L7/08 , H03G3/20 , H03L7/093 , H03L7/089 , H03L7/099 , G01C19/06

6. 发明申请

WO2014163988A2 LINEAR CAPACITIVE DISPLACEMENT SENSOR 审中-公开
标题翻译：线性电容式位移传感器
公开(公告)号：WO2014163988A2
公开(公告)日：2014-10-09
申请号：PCT/US2014/019680
申请日：2014-02-28
申请人： INVENSENSE, INC.
发明人： CAGDASER, Baris , CHEN, Du , AKYOL, Hasan , SHAEFFER, Derek
IPC分类号： G01B7/14
CPC分类号： G01B7/14 , G01D5/24 , G01D5/2412 , G01L1/144
摘要： A method and system for measuring displacement of a structure is disclosed. The method and system comprise providing a first capacitance and providing a second capacitance. The first and second capacitances share a common terminal. The method and system further include determining a difference of the inverses of the value of the first and second capacitances when the structure is displaced. The first capacitance varies in inverse relation to the displacement of the structure.
摘要翻译：公开了一种用于测量结构位移的方法和系统。该方法和系统包括提供第一电容并提供第二电容。第一和第二电容共享公共端子。所述方法和系统还包括当所述结构被移位时确定所述第一和第二电容的值的反转的差异。第一电容与结构的位移成反比关系。

7. 发明公开

EP2972066A2 LINEAR CAPACITIVE DISPLACEMENT SENSOR 有权
标题翻译：线性电容式位移传感器
公开(公告)号：EP2972066A2
公开(公告)日：2016-01-20
申请号：EP14779809.4
申请日：2014-02-28
申请人： InvenSense, Inc.
发明人： CAGDASER, Baris , CHEN, Du , AKYOL, Hasan , SHAEFFER, Derek
IPC分类号： G01B7/00 , G01R27/26
CPC分类号： G01B7/14 , G01D5/24 , G01D5/2412 , G01L1/144
摘要： A method and system for measuring displacement of a structure is disclosed. The method and system comprise providing a first capacitance and providing a second capacitance. The first and second capacitances share a common terminal. The method and system further include determining a difference of the inverses of the value of the first and second capacitances when the structure is displaced. The first capacitance varies in inverse relation to the displacement of the structure.
摘要翻译：公开了一种测量结构位移的方法和系统。该方法和系统包括提供第一电容和提供第二电容。第一和第二电容共用一个公共端子。该方法和系统还包括当结构被移位时确定第一和第二电容的值的倒数的差值。第一个电容与结构的位移成反比关系变化。

8. 发明公开

EP2987242A1 DUTY-CYCLED GYROSCOPE 有权
公开(公告)号：EP2987242A1
公开(公告)日：2016-02-24
申请号：EP14775783.5
申请日：2014-02-28
申请人： InvenSense, Inc.
发明人： SHAEFFER, Derek , WANG, Stanley
IPC分类号： H03L7/08 , G01C19/00 , G01C19/04
摘要： A gyroscope system comprises a MEMS gyroscope coupled to a drive system and a sense system. The drive system maintains the MEMS gyroscope in a state of oscillation and the sense system for receiving, amplifying, and demodulating an output signal of the MEMS gyroscope that is indicative of the rate of rotation. The gyroscope system further includes a phase-locked look (PLL) which receives a reference clock (REFCLK) from the drive system and produces a system clock (CLK). Finally, the gyroscope system includes a controller operating on the system clock sets an operating state of the drive system and the sense system and also controls a state of the PLL. One or more system state variables are maintained in a substantially fixed state during a protect mode thereby enabling rapid transitions between a low-power mode and a normal operating mode of the gyroscope system.
摘要翻译：陀螺仪系统包括耦合到驱动系统和感测系统的MEMS陀螺仪。驱动系统将MEMS陀螺仪保持在振荡状态，并且用于接收，放大和解调MEMS陀螺仪的输出信号的传感系统，其指示旋转速率。陀螺仪系统还包括从驱动系统接收参考时钟（REFCLK）并产生系统时钟（CLK）的锁相环（PLL）。最后，陀螺仪系统包括在系统时钟上工作的控制器设定驱动系统和感测系统的操作状态，并且还控制PLL的状态。一个或多个系统状态变量在保护模式期间被维持在基本上固定的状态，从而实现陀螺仪系统的低功率模式和正常操作模式之间的快速转换。

9. 发明授权

EP2972066B1 LINEAR CAPACITIVE DISPLACEMENT SENSOR 有权
标题翻译：线性电容式位移传感器
公开(公告)号：EP2972066B1
公开(公告)日：2018-03-28
申请号：EP14779809.4
申请日：2014-02-28
申请人： InvenSense, Inc.
发明人： CAGDASER, Baris , CHEN, Du , AKYOL, Hasan , SHAEFFER, Derek
IPC分类号： G01L9/12 , G01L1/14 , G01B7/14 , G01R27/26 , G01L9/00 , G01D5/24 , G01D5/241
CPC分类号： G01B7/14 , G01D5/24 , G01D5/2412 , G01L1/144
摘要： A method and system for measuring displacement of a structure is disclosed. The method and system comprise providing a first capacitance and providing a second capacitance. The first and second capacitances share a common terminal. The method and system further include determining a difference of the inverses of the value of the first and second capacitances when the structure is displaced. The first capacitance varies in inverse relation to the displacement of the structure.

10. 发明公开

EP2689461A1 HIGH-VOLTAGE MEMS APPARATUS AND METHOD 有权转让
标题翻译：高压MEMS装置及其方法
公开(公告)号：EP2689461A1
公开(公告)日：2014-01-29
申请号：EP12760080.7
申请日：2012-03-13
申请人： Invensense Inc.
发明人： SHAEFFER, Derek , CAGDASER, Baris , SEEGER, Joseph
IPC分类号： H01L29/66
CPC分类号： H01L27/092 , B81B7/008 , B81B2207/015 , H01L21/823892
摘要： A high-voltage MEMS system compatible with low-voltage semiconductor process technology is disclosed. The system comprises a MEMS device coupled to a high-voltage bias generator employing an extended-voltage isolation residing in a semiconductor technology substrate. The system avoids the use of high-voltage transistors so that special high-voltage processing steps are not required of the semiconductor technology, thereby reducing process cost and complexity. MEMS testing capability is addressed with a self-test circuit allowing modulation of the bias voltage and current so that a need for external high-voltage connections and associated electro-static discharge protection circuitry are also avoided.

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