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1. 发明申请

WO2012121821A3 MICROMACHINED RESONANT MAGNETIC FIELD SENSORS 审中-公开
标题翻译：微型谐振磁场传感器
公开(公告)号：WO2012121821A3
公开(公告)日：2012-11-01
申请号：PCT/US2012023756
申请日：2012-02-03
申请人： INVENSENSE INC , SEEGER JOSEPH , LO CHIUNG C , CAGDASER BARIS , SHAEFFER DEREK
发明人： SEEGER JOSEPH , LO CHIUNG C , CAGDASER BARIS , SHAEFFER DEREK
IPC分类号： G01R31/00
CPC分类号： G01R33/038 , G01R33/0286
摘要： A micromachined magnetic field sensor comprising is disclosed. The micromachined magnetic field comprises a substrate; a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis. The micromachined magnetic field sensor also includes a sense subsystem, the sense subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; wherein a portion of the sense subsystem moves along a fourth axis; a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and a position transducer to detect the motion of the sense subsystem.
摘要翻译：公开了一种微加工磁场传感器。微加工磁场包括基片; 驱动子系统，所述驱动子系统包括多个梁，以及连接到所述基板的至少一个锚固件; 用于沿着第一轴线提供穿过所述驱动子系统的电流的机构; 以及响应于沿着第三轴的磁场沿第二轴作用在驱动子系统上的洛伦兹力。微加工磁场传感器还包括感测子系统，感测子系统包括多个光束，以及至少一个连接到衬底的锚; 其中所述感测子系统的一部分沿着第四轴线移动; 驱动子系统和感测子系统之间的耦合弹簧，其引起感测子系统响应于磁场的运动; 以及用于检测感测子系统的运动的位置传感器。

2. 发明申请

WO2012097384A2 MICROMACHINED RESONANT MAGNETIC FIELD SENSORS 审中-公开
标题翻译：微型谐振磁场传感器
公开(公告)号：WO2012097384A2
公开(公告)日：2012-07-19
申请号：PCT/US2012023849
申请日：2012-02-03
申请人： INVENSENSE INC , SEEGER JOSEPH , LO CHIUNG C , CAGDASER BARIS , SHAEFFER DEREK
发明人： SEEGER JOSEPH , LO CHIUNG C , CAGDASER BARIS , SHAEFFER DEREK
IPC分类号： G01R33/02
CPC分类号： G01R33/038 , G01R33/0286
摘要： A micromachined magnetic field sensor is disclosed. The micromachined magnetic field sensor comprises a substrate; and a drive subsystem partially supported by the substrate with a plurality of beams, and at least one anchor; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field vector along a third axis. The micromachined magnetic field sensor also includes a position transducer to detect the motion of the drive subsystem and an electrostatic offset cancellation mechanism coupled to the drive subsystem.
摘要翻译：公开了一种微加工磁场传感器。微加工磁场传感器包括基板; 以及驱动子系统，其由具有多个梁的所述衬底部分地支撑，以及至少一个锚; 用于沿着第一轴线提供穿过所述驱动子系统的电流的机构; 以及响应于沿着第三轴的磁场矢量沿第二轴作用在驱动子系统上的洛伦兹力。微加工磁场传感器还包括位置传感器以检测驱动子系统的运动和耦合到驱动子系统的静电偏移消除机构。

3. 发明申请

WO2007061963A3 METHOD OF MAKING AN X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING 审中-公开
标题翻译：使用垂直集成电子技术制造X-Y轴双质量调谐陀螺仪的方法和WAFER-SCALE包装
公开(公告)号：WO2007061963A3
公开(公告)日：2009-05-07
申请号：PCT/US2006044919
申请日：2006-11-17
申请人： INVENSENSE INC , NASIRI STEVEN S , SEEGER JOSEPH , LIM MARTIN , FLANNERY JR ANTHONY FRANCIS , CASTRO ALEXANDER
发明人： NASIRI STEVEN S , SEEGER JOSEPH , LIM MARTIN , FLANNERY JR ANTHONY FRANCIS , CASTRO ALEXANDER
IPC分类号： G01P3/00 , G01C19/56
CPC分类号： G01C19/56 , G01C19/5712 , G01C19/5719 , G01C19/574
摘要： A dual-axis sensor for measuring X and Y components of angular velocity in an X-Y sensor plane is provided. The dual-axis sensor includes a first subsensor for measuring the X component of angular velocity, and a second subsensor for measuring the Y component of angular velocity. The first subsensor and the second subsensor are contained within a single hermetic seal within the dual-axis sensor.
摘要翻译：提供了用于测量X-Y传感器平面中的角速度的X和Y分量的双轴传感器。双轴传感器包括用于测量角速度的X分量的第一子传感器和用于测量角速度的Y分量的第二子传感器。第一子传感器和第二子传感器包含在双轴传感器内的单个气密封中。

4. 发明申请

WO2013003784A3 PROCESS FOR A SEALED MEMS DEVICE WITH A PORTION EXPOSED TO THE ENVIRONMENT 审中-公开
标题翻译：具有暴露于环境的部件的密封MEMS器件的工艺
公开(公告)号：WO2013003784A3
公开(公告)日：2014-05-08
申请号：PCT/US2012045061
申请日：2012-06-29
申请人： INVENSENSE INC , DANEMAN MICHAEL J , LIM MARTIN , SEEGER JOSEPH , TCHERTKOV IGOR , NASIRI STEVEN S
发明人： DANEMAN MICHAEL J , LIM MARTIN , SEEGER JOSEPH , TCHERTKOV IGOR , NASIRI STEVEN S
IPC分类号： H01L21/00
CPC分类号： H01L23/10 , B81B2201/0264 , B81B2201/047 , B81B2207/115 , B81C1/00238 , B81C2203/0109 , B81C2203/0145 , B81C2203/0792 , G01P15/0802 , G01P15/125 , G02B26/0833 , H01L2224/48091 , H01L2924/1461 , H01L2924/00014 , H01L2924/00
摘要： A method and system for providing a MEMS device with a portion exposed to an outside environment are disclosed. The method comprises bonding a handle wafer to a device wafer to form a MEMS substrate with a dielectric layer disposed between the handle and device wafers. The method includes lithographically defining at least one standoff on the device wafer and bonding the at least one standoff to an integrated circuit substrate to form a sealed cavity between the MEMS substrate and the integrated circuit substrate. The method includes defining at least one opening in the handle wafer, standoff, or integrated circuit substrate to expose a portion of the to expose a portion of the device wafer to the outside environment.
摘要翻译：公开了一种用于向MEMS器件提供暴露于外部环境的部分的方法和系统。该方法包括将处理晶片结合到器件晶片以形成具有设置在手柄和器件晶片之间的介电层的MEMS衬底。该方法包括光刻地限定器件晶片上的至少一个间隔，并将至少一个支架结合到集成电路衬底，以在MEMS衬底和集成电路衬底之间形成密封空腔。该方法包括在处理晶片，支座或集成电路基板中限定至少一个开口，以暴露一部分将器件晶片的一部分暴露于外部环境。

5. 发明申请

WO2009130554A2 X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING 审中-公开
标题翻译： X-Y AXIS双质量调音枪具有垂直集成电子和水平放大包装
公开(公告)号：WO2009130554A2
公开(公告)日：2009-10-29
申请号：PCT/IB2009005063
申请日：2009-02-05
申请人： INVENSENSE , SEEGER JOSEPH , NASIRI STEVEN S , CASTRO ALEXANDER
发明人： SEEGER JOSEPH , NASIRI STEVEN S , CASTRO ALEXANDER
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5712 , G01C19/5719 , G01C19/574
摘要： An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses and an ambient environment.
摘要翻译：角速度传感器具有横向设置在X-Y平面中并间接连接到框架的两个质量块。两个质量通过联动使得它们必须沿着相反方向移动。传感器绕Y轴的角速度可以通过将两个质量驱动为Z向反相振荡并测量角振荡幅度来感测传给框架。在优选实施例中，角速度传感器由体MEMS陀螺仪晶片，盖晶片和参考晶片制成。在另一优选实施例中，晶片组件提供了质量和周围环境之间的密封屏障。

6. 发明申请

WO2005043079A3 X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING 审中-公开
标题翻译： X-Y AXIS双质量调音枪具有垂直集成电子和水平放大包装
公开(公告)号：WO2005043079A3
公开(公告)日：2005-08-11
申请号：PCT/US2004034431
申请日：2004-10-12
申请人： INVENSENSE INC
发明人： NASIRI STEVEN S , SEEGER JOSEPH
IPC分类号： G01C19/00 , G01P9/04
CPC分类号： G01C19/5712 , G01C19/5719 , H03H2009/02354
摘要： An angular velocity sensor has two masses (22,24) which are laterally disposed in an X-Y plane and indirectly connected to a frame (34). The two masses (22,24) are linked together by a linkage (28,56,58) such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses (22,24) into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame (34). In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer (20), a cap wafer (42) and a reference wafer (44). In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses (22,24) and an ambient environment.
摘要翻译：角速度传感器具有横向设置在X-Y平面中并间接连接到框架（34）的两个质量（22,24）。两个质量块（22,24）通过连杆（28,56,58）连接在一起，使得它们必须沿着相反的方向移动。传感器绕Y轴的角速度可以通过驱动两个质量 22,24）转换成Z向反相振荡并测量由此赋予框架（34）的角振荡幅度。在优选实施例中，角速度传感器由体MEMS陀螺仪晶片（20），盖晶片（42）和参考晶片（44）制成。在另一优选实施例中，晶片组件提供了质量（22,24）和环境环境之间的密封屏障。

7. 发明公开

EP2689461A4 HIGH-VOLTAGE MEMS APPARATUS AND METHOD 有权转让
标题翻译：高压MEMS装置及其方法
公开(公告)号：EP2689461A4
公开(公告)日：2015-01-07
申请号：EP12760080
申请日：2012-03-13
申请人： INVENSENSE INC
发明人： SHAEFFER DEREK , CAGDASER BARIS , SEEGER JOSEPH
IPC分类号： H01L29/66 , B81B7/00 , H01L21/8238 , H01L27/092
CPC分类号： H01L27/092 , B81B7/008 , B81B2207/015 , H01L21/823892

8. 发明公开

EP2727136A4 PROCESS FOR A SEALED MEMS DEVICE WITH A PORTION EXPOSED TO THE ENVIRONMENT 失效
标题翻译：方法的密封式MEMS器件具有杰出PART
公开(公告)号：EP2727136A4
公开(公告)日：2015-06-10
申请号：EP12804454
申请日：2012-06-29
申请人： INVENSENSE INC
发明人： DANEMAN MICHAEL J , LIM MARTIN , SEEGER JOSEPH , TCHERTKOV IGOR , NASIRI STEVEN S
IPC分类号： H01L21/50 , H01L29/84
CPC分类号： H01L23/10 , B81B2201/0264 , B81B2201/047 , B81B2207/115 , B81C1/00238 , B81C2203/0109 , B81C2203/0145 , B81C2203/0792 , G01P15/0802 , G01P15/125 , G02B26/0833 , H01L2224/48091 , H01L2924/1461 , H01L2924/00014 , H01L2924/00
摘要： A method and system for providing a MEMS device with a portion exposed to an outside environment are disclosed. The method comprises bonding a handle wafer to a device wafer to form a MEMS substrate with a dielectric layer disposed between the handle and device wafers. The method includes lithographically defining at least one standoff on the device wafer and bonding the at least one standoff to an integrated circuit substrate to form a sealed cavity between the MEMS substrate and the integrated circuit substrate. The method includes defining at least one opening in the handle wafer, standoff, or integrated circuit substrate to expose a portion of the to expose a portion of the device wafer to the outside environment.

9. 发明授权

EP2689461B1 HIGH-VOLTAGE MEMS APPARATUS AND METHOD 有权转让
标题翻译： HOCHSPANNUNGS-MEMS-VORRICHTUNG UND VERFAHRENDAFÜR
公开(公告)号：EP2689461B1
公开(公告)日：2017-05-03
申请号：EP12760080
申请日：2012-03-13
申请人： INVENSENSE INC
发明人： SHAEFFER DEREK , CAGDASER BARIS , SEEGER JOSEPH
IPC分类号： H01L29/66 , B81B7/00 , H01L21/8238 , H01L27/092
CPC分类号： H01L27/092 , B81B7/008 , B81B2207/015 , H01L21/823892

10. 发明公开

EP2972417A4 MAGNETOMETER USING MAGNETIC MATERIALS ON ACCELEROMETER 有权
标题翻译： MAGNETOMETER MIT MAGNETISCHEN MATERIALIEN AUF EINEM BESCHLEUNIGUNGSMESSER
公开(公告)号：EP2972417A4
公开(公告)日：2016-08-10
申请号：EP14768229
申请日：2014-03-13
申请人： INVENSENSE INC
发明人： SEEGER JOSEPH , QIU JIN , THOMPSON MATTHEW JULIAN
IPC分类号： G01P15/08
CPC分类号： G01R33/02 , B81B2201/00 , G01P15/08 , G01R33/0286 , H01L21/00 , H01L2221/00
摘要： A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient magnetic field.
摘要翻译：一种MEMS装置，包括第一检测质量体，部分地设置在第一检验质量块的表面上的第一磁化磁性材料，锚固到基板以支撑第一检测质量块的第一弹簧，以及耦合到第一检测质量块的第一感测元件并且可操作以感测由环境加速度引起的第一检验质量块的运动。 MEMS器件还包括耦合到第一检测质量块的第二感测元件，并可操作以感测由环境磁场引起的第一检验质量块的运动。

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