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    • 3. 发明申请
    • FABRICATING METHOD OF SEMICONDUCTOR DEVICE
    • 半导体器件制造方法
    • US20140273432A1
    • 2014-09-18
    • US13841132
    • 2013-03-15
    • BYUNG-HEE KIMTae-Soo KimSeong-Ho ParkYoung-Ju ParkJu-Young Jung
    • BYUNG-HEE KIMTae-Soo KimSeong-Ho ParkYoung-Ju ParkJu-Young Jung
    • H01L21/768
    • H01L21/76816H01L21/31144
    • A semiconductor device is fabricated by forming a lower conductor in a first interlayer dielectric film. A second interlayer dielectric film is formed on the lower conductor and the first interlayer dielectric film. A first hard mask pattern is formed on the second interlayer dielectric film. The first mask pattern has a first opening extending in a first direction. A planarization layer is formed on the first hard mask pattern. A mask pattern is formed on the planarization layer. The mask pattern has a second opening extending in a second direction perpendicular to the first direction. The lower conductor is positioned under an region where the first opening and the second opening overlap. A via hole and a trench connected to the via hole is formed using the first hard mask pattern and the mask pattern. The via hole exposes an upper surface of the lower conductor.
    • 通过在第一层间电介质膜中形成下导体来制造半导体器件。 第二层间电介质膜形成在下导体和第一层间电介质膜上。 在第二层间电介质膜上形成第一硬掩模图案。 第一掩模图案具有沿第一方向延伸的第一开口。 在第一硬掩模图案上形成平坦化层。 在平坦化层上形成掩模图案。 掩模图案具有沿垂直于第一方向的第二方向延伸的第二开口。 下导体位于第一开口和第二开口重叠的区域的下方。 使用第一硬掩模图案和掩模图案形成通孔和连接到通孔的沟槽。 通孔露出下导体的上表面。
    • 4. 发明授权
    • Methods of forming wiring structures
    • 形成布线结构的方法
    • US08501606B2
    • 2013-08-06
    • US12836081
    • 2010-07-14
    • Eun-Ok LeeDae-Yong KimGil-Heyun ChoiByung-Hee Kim
    • Eun-Ok LeeDae-Yong KimGil-Heyun ChoiByung-Hee Kim
    • H01L21/3205H01L21/4763
    • H01L29/66621H01L21/76831H01L21/76885H01L21/76889H01L21/76897H01L27/10814H01L27/10855H01L27/10885H01L27/10888H01L27/10894H01L29/4236H01L29/665H01L29/78
    • A semiconductor memory wiring method includes: receiving a substrate having a cell array region and a peripheral circuit region; depositing a first insulating layer on the substrate; forming a first contact plug in the cell array region, the first contact plug having a first conductive material extending through the first insulating layer; forming a first elongated conductive line at substantially the same time as forming the first contact plug, the first elongated conductive line having the first conductive material directly covering and integrated with the first contact plug; forming a second contact plug in the peripheral circuit region at substantially the same time as forming the first contact plug, the second contact plug having the first conductive material extending through the first insulating layer; and forming a second elongated conductive line at substantially the same time as forming the second contact plug, the second elongated conductive line having the first conductive material directly covering and integrated with the second contact plug.
    • 一种半导体存储器布线方法,包括:接收具有单元阵列区域和外围电路区域的基板; 在衬底上沉积第一绝缘层; 在所述电池阵列区域中形成第一接触插塞,所述第一接触插塞具有延伸穿过所述第一绝缘层的第一导电材料; 在形成第一接触插塞的基本上同时形成第一细长导线,所述第一细长导线具有直接覆盖并与第一接触插塞一体化的第一导电材料; 在形成第一接触插塞的基本上相同的时间在外围电路区域中形成第二接触插塞,第二接触插塞具有延伸穿过第一绝缘层的第一导电材料; 并且在与形成所述第二接触插塞的基本同时形成第二细长导电线,所述第二细长导电线具有直接覆盖并与所述第二接触插塞一体化的所述第一导电材料。
    • 9. 发明授权
    • Methods of forming integrated circuit devices having stacked gate electrodes
    • 形成具有层叠栅电极的集成电路器件的方法
    • US07998810B2
    • 2011-08-16
    • US12424922
    • 2009-04-16
    • Byung-hee KimGil-heyun ChoiSang-woo LeeChang-won LeeJin-ho ParkEun-ji JungJeong-gil Lee
    • Byung-hee KimGil-heyun ChoiSang-woo LeeChang-won LeeJin-ho ParkEun-ji JungJeong-gil Lee
    • H01L21/336
    • H01L27/11521H01L21/28273H01L29/66545
    • A method of forming a gate electrode of a semiconductor device is provided, the method including: forming a plurality of stacked structures each comprising a tunnel dielectric layer, a first silicon layer for floating gates, an intergate dielectric layer, a second silicon layer for control gates, and a mask pattern, on a semiconductor substrate in the stated order; forming a first interlayer dielectric layer between the plurality of stacked structures so that a top surface of the mask pattern is exposed; selectively removing the mask pattern of which the top surface is exposed; forming a third silicon layer in an area from which the hard disk layer was removed, and forming a silicon layer comprising the third silicon layer and the second silicon layer; recessing the first interlayer dielectric layer so that an upper portion of the silicon layer protrudes over the he first interlayer dielectric layer; and forming a metal silicide layer on the upper portion of the silicon layer.
    • 提供一种形成半导体器件的栅电极的方法,所述方法包括:形成多个堆叠结构,每个堆叠结构包括隧道介电层,用于浮置栅极的第一硅层,栅极间介电层,用于控制的第二硅层 栅极和掩模图案,以所述顺序在半导体衬底上; 在所述多个堆叠结构之间形成第一层间电介质层,使得所述掩模图案的顶表面露出; 选择性地去除其顶表面暴露的掩模图案; 在去除所述硬盘层的区域中形成第三硅层,以及形成包含所述第三硅层和所述第二硅层的硅层; 使第一层间电介质层凹陷,使得硅层的上部突出在第一层间介电层上; 以及在所述硅层的上部形成金属硅化物层。