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1. 发明授权

US08142877B2 Nano transfer and nanoreplication using deterministically grown sacrificial nanotemplates 有权
标题翻译：使用确定性生长的牺牲纳米模板进行纳米转移和纳米应用
公开(公告)号：US08142877B2
公开(公告)日：2012-03-27
申请号：US11985551
申请日：2007-11-13
申请人： Anatoli V. Melechko , Timothy E. McKnight , Michael A. Guillorn , Bojan Ilic , Vladimir I. Merkulov , Mitchel J. Doktycz , Douglas H. Lowndes , Michael L. Simpson
发明人： Anatoli V. Melechko , Timothy E. McKnight , Michael A. Guillorn , Bojan Ilic , Vladimir I. Merkulov , Mitchel J. Doktycz , Douglas H. Lowndes , Michael L. Simpson
IPC分类号： B32B1/08 , B32B23/00 , B32B25/00
CPC分类号： B01D67/0062 , B01D67/0069 , B01D67/0072 , B01D71/02 , B01D71/027 , B01D2323/24 , B01D2325/08 , B01J23/755 , B01J35/0013 , B01J35/006 , B01J37/0238 , B01J37/342 , B01L3/5027 , B01L2300/0663 , B01L2300/0896 , B81B2201/058 , B81B2203/0361 , B81C1/00119 , B82Y30/00 , Y10S977/70 , Y10S977/781 , Y10S977/784 , Y10T428/13 , Y10T428/1303 , Y10T428/1352 , Y10T428/1359 , Y10T428/139 , Y10T428/24174 , Y10T428/24273 , Y10T428/24322 , Y10T428/2902 , Y10T428/2991 , Y10T428/31504 , Y10T428/31678
摘要： Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. An apparatus, includes a substrate and a nanoconduit material coupled to a surface of the substrate. The substrate defines an aperture and the nanoconduit material defines a nanoconduit that is i) contiguous with the aperture and ii) aligned substantially non-parallel to a plane defined by the surface of the substrate.
摘要翻译：使用确定性生长的牺牲纳米模板描述了用于纳米转移和纳米应用的方法，制造商，机器和组合物。一种装置，包括耦合到衬底的表面的衬底和纳米管材料。衬底限定孔径，并且纳米管材料限定纳米管，其是i）与孔相邻并且ii）基本上不平行于由衬底的表面限定的平面排列。

2. 发明申请

US20080182068A1 Nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates 有权
标题翻译：使用确定性生长的牺牲纳米模板进行纳米转移和纳米应用
公开(公告)号：US20080182068A1
公开(公告)日：2008-07-31
申请号：US11985395
申请日：2007-11-13
申请人： Anatoli V. Melechko , Timothy E. McKnight , Michael A. Guillorn , Bojan Ilic , Vladimir L. Merkulov , Mitchel J. Doktycz , Douglas H. Lowndes , Michael L. Simpson
发明人： Anatoli V. Melechko , Timothy E. McKnight , Michael A. Guillorn , Bojan Ilic , Vladimir L. Merkulov , Mitchel J. Doktycz , Douglas H. Lowndes , Michael L. Simpson
IPC分类号： B32B9/04
CPC分类号： B01D67/0062 , B01D67/0069 , B01D67/0072 , B01D71/02 , B01D71/027 , B01D2323/24 , B01D2325/08 , B01J23/755 , B01J35/0013 , B01J35/006 , B01J37/0238 , B01J37/342 , B01L3/5027 , B01L2300/0663 , B01L2300/0896 , B81B2201/058 , B81B2203/0361 , B81C1/00119 , B82Y30/00 , Y10S977/70 , Y10S977/781 , Y10S977/784 , Y10T428/13 , Y10T428/1303 , Y10T428/1352 , Y10T428/1359 , Y10T428/139 , Y10T428/24174 , Y10T428/24273 , Y10T428/24322 , Y10T428/2902 , Y10T428/2991 , Y10T428/31504 , Y10T428/31678
摘要： Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. An apparatus, includes a substrate and a nanoreplicant structure coupled to a surface of the substrate.
摘要翻译：使用确定性生长的牺牲纳米模板描述了用于纳米转移和纳米应用的方法，制造商，机器和组合物。一种装置，包括与衬底的表面耦合的衬底和纳米复合结构。

3. 发明申请

US20050180678A1 Optical waveguide displacement sensor 有权
标题翻译：光波导位移传感器
公开(公告)号：US20050180678A1
公开(公告)日：2005-08-18
申请号：US10781339
申请日：2004-02-18
申请人： Roberto Panepucci , Bojan Ilic , Michal Lipson , Vilson Almeida
发明人： Roberto Panepucci , Bojan Ilic , Michal Lipson , Vilson Almeida
IPC分类号： G01D5/26 , G02B6/00 , G02B6/30 , G02B6/35
CPC分类号： G01D5/266 , G01D5/268 , G02B6/305 , G02B6/3502 , G02B6/3566 , G02B6/3578
摘要： A substrate incorporates a mechanical cantilever resonator with passive integrated optics for motion detection. The resonator acts as a waveguide, and enables optical detection of deflection/displacement amplitude, including oscillations. In one embodiment, the cantilever comprises a silicon waveguide suspended over a substrate. A reflector structure faces a free end of the suspending cantilever, or a waveguide is supported facing the free end of the suspended cantilever to receive light transmitted through the silicon waveguide cantilever. Deflection/displacement of the cantilever results in modulation of the light received from its free end that is representative of the displacement. Ring resonators may be used to couple different wavelength light to the waveguides, allowing formation of an array of cantilevers.
摘要翻译：基板采用机械悬臂谐振器和无源集成光学元件进行运动检测。谐振器用作波导，并且能够光学检测包括振荡在内的偏转/位移振幅。在一个实施例中，悬臂包括悬挂在衬底上的硅波导。反射器结构面向悬臂悬臂的自由端，或者波导面向悬臂悬臂的自由端被支撑，以接收透过硅波导悬臂的光。悬臂的偏转/位移导致从其自由端接收的代表位移的光的调制。环形谐振器可用于将不同波长的光耦合到波导，从而形成悬臂阵列。

4. 发明授权

US07943196B2 Nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates 有权
标题翻译：使用确定性生长的牺牲纳米模板进行纳米转移和纳米应用
公开(公告)号：US07943196B2
公开(公告)日：2011-05-17
申请号：US11273316
申请日：2005-11-14
申请人： Anatoli V. Melechko , Timothy E. McKnight , Michael A. Guillorn , Bojan Ilic , Vladimir I. Merkulov , Mitchel J. Doktycz , Douglas H. Lowndes , Michael L. Simpson
发明人： Anatoli V. Melechko , Timothy E. McKnight , Michael A. Guillorn , Bojan Ilic , Vladimir I. Merkulov , Mitchel J. Doktycz , Douglas H. Lowndes , Michael L. Simpson
IPC分类号： B05D3/00 , B05D1/32 , B05D5/12 , C23C16/00 , D02G3/00 , B32B5/12
CPC分类号： B01D67/0062 , B01D67/0069 , B01D67/0072 , B01D71/02 , B01D71/027 , B01D2323/24 , B01D2325/08 , B01J23/755 , B01J35/0013 , B01J35/006 , B01J37/0238 , B01J37/342 , B01L3/5027 , B01L2300/0663 , B01L2300/0896 , B81B2201/058 , B81B2203/0361 , B81C1/00119 , B82Y30/00 , Y10S977/70 , Y10S977/781 , Y10S977/784 , Y10T428/13 , Y10T428/1303 , Y10T428/1352 , Y10T428/1359 , Y10T428/139 , Y10T428/24174 , Y10T428/24273 , Y10T428/24322 , Y10T428/2902 , Y10T428/2991 , Y10T428/31504 , Y10T428/31678
摘要： Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. A method includes depositing a catalyst particle on a surface of a substrate to define a deterministically located position; growing an aligned elongated nanostructure on the substrate, an end of the aligned elongated nanostructure coupled to the substrate at the deterministically located position; coating the aligned elongated nanostructure with a conduit material; removing a portion of the conduit material to expose the catalyst particle; removing the catalyst particle; and removing the elongated nanostructure to define a nanoconduit.
摘要翻译：使用确定性生长的牺牲纳米模板描述了用于纳米转移和纳米应用的方法，制造商，机器和组合物。一种方法包括在衬底的表面上沉积催化剂颗粒以限定确定性定位的位置; 在衬底上生长对准的细长纳米结构，在确定位置的位置处将对准的细长纳米结构的端部耦合到衬底; 用导管材料涂覆对准的细长纳米结构; 去除所述导管材料的一部分以暴露所述催化剂颗粒; 除去催化剂颗粒; 并移除细长的纳米结构以限定纳米管。

5. 发明授权

US07654140B2 Heat pumped parametric MEMS device 有权
标题翻译：热泵参数MEMS器件
公开(公告)号：US07654140B2
公开(公告)日：2010-02-02
申请号：US10097178
申请日：2002-03-12
申请人： Maxim Zalalutdinov , Anatoli Olkhovets , Alan T. Zehnder , Bojan Ilic , David Alan Czaplewski , Lidija Sekaric , Jeevak M. Parpia , Harold G. Craighead
发明人： Maxim Zalalutdinov , Anatoli Olkhovets , Alan T. Zehnder , Bojan Ilic , David Alan Czaplewski , Lidija Sekaric , Jeevak M. Parpia , Harold G. Craighead
IPC分类号： G01N29/12
CPC分类号： H02N1/006
摘要： A micro-electrical mechanical oscillator has a resonant frequency of oscillation that is varied by application of heat. The resonant frequency is varied at a frequency different from the resonant frequency of the oscillator to amplify oscillations. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated by a laser to provide a time varying shift of the resonant frequency (or equivalently the stiffness) of the disc. Feedback from movement of the disc is used to modulate the intensity of the laser, and thus the stiffness of the disc to provide parametric amplification of sensed vibrations, using heating as a pump. Various other shapes of micro-electrical mechanical oscillators are used in other embodiment, including an array of such oscillators on a substrate, each having different resonant frequencies.
摘要翻译：微电机械振荡器具有通过施加热量而变化的振荡的谐振频率。谐振频率以与振荡器的谐振频率不同的频率变化以放大振荡。在一个实施例中，振荡器是由比该盘小得多的直径支柱支撑的材料盘。盘的周边被激光加热，以提供盘的共振频率（或等效的刚度）的时变位移。使用盘的运动的反馈来调制激光的强度，并因此调节光盘的刚度，以使用加热作为泵来提供所感测的振动的参数放大。在另一实施例中使用各种其他形状的微电机械振荡器，包括在衬底上的每个具有不同谐振频率的这种振荡器的阵列。

6. 发明申请

US20060176122A1 MEMS OSCILLATOR DRIVE 有权
标题翻译： MEMS振荡器驱动器
公开(公告)号：US20060176122A1
公开(公告)日：2006-08-10
申请号：US11275653
申请日：2006-01-20
申请人： Keith Aubin , Bojan Ilic , Maxim Zalalutdinov , Robert Reichenbach , Jeevak Parpia , Harold Craighead
发明人： Keith Aubin , Bojan Ilic , Maxim Zalalutdinov , Robert Reichenbach , Jeevak Parpia , Harold Craighead
IPC分类号： H03L1/00
CPC分类号： H03B5/30 , B81B3/0029 , B81B2203/0118 , H03H9/02259 , H03H9/2457 , H03H2009/02511
摘要： The temperature of a remote portion of device having a microelectromechanical oscillator is modulated to create oscillation of the oscillators. In one embodiment, a localized heat source is placed on a device layer of a multilayered stack, consisting of device, sacrificial and substrate layers. The localized heat source may be a laser beam in one embodiment. The oscillator is supported by the device layer and may be formed in the device layer in various embodiments. The oscillator may be spaced apart from the localized heat source.
摘要翻译：具有微机电振荡器的器件的远端部分的温度被调制以产生振荡器的振荡。在一个实施例中，将局部热源放置在由器件，牺牲层和衬底层组成的多层叠层的器件层上。在一个实施例中，局部热源可以是激光束。振荡器由器件层支撑，并且可以在各种实施例中形成在器件层中。振荡器可以与局部热源间隔开。

7. 发明申请

US20060068127A1 Nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates 有权
标题翻译：使用确定性生长的牺牲纳米模板进行纳米转移和纳米应用
公开(公告)号：US20060068127A1
公开(公告)日：2006-03-30
申请号：US11273316
申请日：2005-11-14
申请人： Anatoll Melechko , Timothy McKnight , Michael Guillorn , Bojan Ilic , Vladimir Merkulov , Mitchel Doktycz , Douglas Lowndes , Michael Simpson
发明人： Anatoll Melechko , Timothy McKnight , Michael Guillorn , Bojan Ilic , Vladimir Merkulov , Mitchel Doktycz , Douglas Lowndes , Michael Simpson
IPC分类号： H01L21/00 , C23F1/00 , H05H1/24 , H01L21/311
CPC分类号： B01D67/0062 , B01D67/0069 , B01D67/0072 , B01D71/02 , B01D71/027 , B01D2323/24 , B01D2325/08 , B01J23/755 , B01J35/0013 , B01J35/006 , B01J37/0238 , B01J37/342 , B01L3/5027 , B01L2300/0663 , B01L2300/0896 , B81B2201/058 , B81B2203/0361 , B81C1/00119 , B82Y30/00 , Y10S977/70 , Y10S977/781 , Y10S977/784 , Y10T428/13 , Y10T428/1303 , Y10T428/1352 , Y10T428/1359 , Y10T428/139 , Y10T428/24174 , Y10T428/24273 , Y10T428/24322 , Y10T428/2902 , Y10T428/2991 , Y10T428/31504 , Y10T428/31678
摘要： Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. A method includes depositing a catalyst particle on a surface of a substrate to define a deterministically located position; growing an aligned elongated nanostructure on the substrate, an end of the aligned elongated nanostructure coupled to the substrate at the deterministically located position; coating the aligned elongated nanostructure with a conduit material; removing a portion of the conduit material to expose the catalyst particle; removing the catalyst particle; and removing the elongated nanostructure to define a nanoconduit.
摘要翻译：使用确定性生长的牺牲纳米模板描述了用于纳米转移和纳米应用的方法，制造商，机器和组合物。一种方法包括在衬底的表面上沉积催化剂颗粒以限定确定性定位的位置; 在衬底上生长对准的细长纳米结构，对准的细长纳米结构的端部在确定性位置处耦合到衬底; 用导管材料涂覆对准的细长纳米结构; 去除所述导管材料的一部分以暴露所述催化剂颗粒; 除去催化剂颗粒; 并移除细长的纳米结构以限定纳米管。

8. 发明申请

US20050103993A1 Vertically aligned nanostructure scanning probe microscope tips 失效
标题翻译：垂直取向的纳米结构扫描探针显微镜技巧
公开(公告)号：US20050103993A1
公开(公告)日：2005-05-19
申请号：US10716770
申请日：2003-11-19
申请人： Michael Guillorn , Bojan Ilic , Anatoli Melechko , Vladimir Merkulov , Douglas Lowndes , Michael Simpson
发明人： Michael Guillorn , Bojan Ilic , Anatoli Melechko , Vladimir Merkulov , Douglas Lowndes , Michael Simpson
IPC分类号： G01Q70/12 , G01Q70/16 , G12B21/02
CPC分类号： G01Q70/16 , G01Q70/12
摘要： Methods and apparatus are described for cantilever structures that include a vertically aligned nanostructure, especially vertically aligned carbon nanofiber scanning probe microscope tips. A method includes A method, includes fabricating a cantilever structure having a vertically aligned nanostructure including: forming a doped layer at a first side of a substrate; depositing an etch mask layer on a second side of the substrate; forming a plurality of alignment marks that are coupled to the first side of the substrate; depositing a catalyst nanoparticle at a deterministic site that is coupled to the doped layer; growing the vertically aligned nanostructure at the deterministic site with the catalyst nanoparticle; depositing a first protective layer that surrounds at least a portion of the vertically aligned nanostructure; patterning the first protective layer to define an outline of a cantilever body; transferring the outline of the cantilever body from the first protective layer into the doped layer to form the cantilever body from the doped layer; depositing a second protective layer that coats at least a portion of a surface of the cantilever body; patterning the etch mask layer to define an outline of a relieved volume; transferring the outline of the relieved volume from the etch mask layer into the second side of the substrate to remove the relieved volume from the substrate, where the cantilever body is not removed.
摘要翻译：描述了包括垂直排列的纳米结构，特别是垂直排列的碳纳米纤维扫描探针显微镜尖端的悬臂结构的方法和装置。一种方法包括一种方法，包括制造具有垂直排列的纳米结构的悬臂结构，包括：在衬底的第一侧形成掺杂层; 在所述衬底的第二侧上沉积蚀刻掩模层; 形成耦合到所述基板的第一侧的多个对准标记; 在耦合到掺杂层的确定性位点沉积催化剂纳米颗粒; 用催化剂纳米颗粒在确定性位点生长垂直排列的纳米结构; 沉积围绕所述垂直排列的纳米结构的至少一部分的第一保护层; 图案化第一保护层以限定悬臂体的轮廓; 将悬臂体的轮廓从第一保护层转移到掺杂层中以从掺杂层形成悬臂体; 沉积涂覆悬臂体表面的至少一部分的第二保护层; 图案化蚀刻掩模层以限定释放体积的轮廓; 将缓冲体积的轮廓从蚀刻掩模层转移到衬底的第二侧，以从衬底移除释放体积，其中悬臂体不被去除。

9. 发明授权

US08695407B2 Microtensiometer sensor, probe and method of use 有权
标题翻译：微量计传感器，探头和使用方法
公开(公告)号：US08695407B2
公开(公告)日：2014-04-15
申请号：US13264964
申请日：2010-04-16
申请人： Abraham D. Stroock , Alan N. Lakso , Vinay Pagay , Bojan Ilic , Meredith Metzler
发明人： Abraham D. Stroock , Alan N. Lakso , Vinay Pagay , Bojan Ilic , Meredith Metzler
IPC分类号： G01N19/10 , A01G27/00
CPC分类号： G01N13/02 , G01N33/0098 , G01N2013/0275 , Y10T137/189
摘要： A microtensiometer sensor includes a substrate layer fluidly coupled to an enclosed reservoir. A porous membrane is disposed on a surface of the substrate layer. The membrane defines a liquid side fluidly coupled to the reservoir and a vapor side fluidly coupled to a vapor interface. The porous membrane includes a plurality of through holes fluidly coupling the liquid reservoir to the vapor interface, and a nanoporous filler material disposed within the plurality of through holes. The filler material includes a plurality of open pores having a maximum diameter in the range of 0.2 to 200 nanometers. In one embodiment, the microtensiometer sensor includes a molecular membrane disposed adjacent to the vapor side of the porous membrane. In one example, the molecular membrane is formed of a highly crystalline polytetrafluoroethylene polymer having a microstructure characterized by nodes interconnected by fibrils. In one application, the microtensiometer sensor may be used in a probe to measure the average water potential within a network of plant or tree xylem. In another application, the microtensiometer sensor may be useful in real-time determination of the water potential in soil.
摘要翻译：微量计传感器包括流体耦合到封闭储存器的基底层。多孔膜设置在基底层的表面上。膜限定液体侧流体耦合到储存器和蒸气侧，其流体地耦合到蒸汽界面。多孔膜包括将液体储存器流体耦合到蒸汽界面的多个通孔，以及设置在多个通孔内的纳米孔填料。填充材料包括多个开孔，其最大直径在0.2至200纳米的范围内。在一个实施例中，微量计传感器包括邻近多孔膜的蒸汽侧设置的分子膜。在一个实例中，分子膜由具有微结构特征的高度结晶的聚四氟乙烯聚合物形成，其中纤维通过原纤维相互连接。在一个应用中，微量计传感器可用于探针中以测量植物或树木质部分网络内的平均水势。在另一个应用中，微量计传感器可用于实时测定土壤中的水势。

10. 发明授权

US08003220B2 Nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates 有权
标题翻译：使用确定性生长的牺牲纳米模板进行纳米转移和纳米应用
公开(公告)号：US08003220B2
公开(公告)日：2011-08-23
申请号：US11985395
申请日：2007-11-13
申请人： Anatoli V. Melechko , Timothy E. McKnight , Michael A. Guillorn , Bojan Ilic , Vladimir I. Merkulov , Mitchel J. Doktycz , Douglas H. Lowndes , Michael L. Simpson
发明人： Anatoli V. Melechko , Timothy E. McKnight , Michael A. Guillorn , Bojan Ilic , Vladimir I. Merkulov , Mitchel J. Doktycz , Douglas H. Lowndes , Michael L. Simpson
IPC分类号： B32B9/00
CPC分类号： B01D67/0062 , B01D67/0069 , B01D67/0072 , B01D71/02 , B01D71/027 , B01D2323/24 , B01D2325/08 , B01J23/755 , B01J35/0013 , B01J35/006 , B01J37/0238 , B01J37/342 , B01L3/5027 , B01L2300/0663 , B01L2300/0896 , B81B2201/058 , B81B2203/0361 , B81C1/00119 , B82Y30/00 , Y10S977/70 , Y10S977/781 , Y10S977/784 , Y10T428/13 , Y10T428/1303 , Y10T428/1352 , Y10T428/1359 , Y10T428/139 , Y10T428/24174 , Y10T428/24273 , Y10T428/24322 , Y10T428/2902 , Y10T428/2991 , Y10T428/31504 , Y10T428/31678
摘要： Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. An apparatus, includes a substrate and a nanoreplicant structure coupled to a surface of the substrate.
摘要翻译：使用确定性生长的牺牲纳米模板描述了用于纳米转移和纳米应用的方法，制造商，机器和组合物。一种装置，包括与衬底的表面耦合的衬底和纳米复合结构。

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