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    • 9. 发明申请
    • High capacitive density stacked decoupling capacitor structure
    • 高电容密度堆叠去耦电容器结构
    • US20050064673A1
    • 2005-03-24
    • US10670037
    • 2003-09-24
    • Edmund BurkeBenjamin McKeeFrank Johnson
    • Edmund BurkeBenjamin McKeeFrank Johnson
    • H01L27/04H01L21/02H01L21/822H01L27/08H01L21/20
    • H01L28/40H01L27/0805
    • A capacitive structure (10). The capacitive structure comprises a semiconductor base region (30) having an upper surface, a well (12) formed within the semiconductor base region and adjacent the upper surface, a first dielectric layer (38) adjacent at least a portion of the upper surface, and a polysilicon layer (16) adjacent the first dielectric layer. The well, the first dielectric layer, and the first polysilicon layer form a first capacitor and are aligned along a planar dimension. The capacitive structure further comprises a first conductive layer (201) positioned with at least a portion overlying at least a portion of the polysilicon layer, a second dielectric layer (202) adjacent the first conductive layer, and a second conductive layer (203) adjacent the second dielectric layer. The first conductive layer, the second dielectric layer, and the second conductive layer form a second capacitor and are aligned along the planar dimension.
    • 电容结构(10)。 电容结构包括具有上表面的半导体基区(30),形成在半导体基区内且邻近上表面的阱(12),邻近上表面的至少一部分的第一介电层(38) 和与第一介电层相邻的多晶硅层(16)。 阱,第一电介质层和第一多晶硅层形成第一电容器并且沿着平面尺寸对准。 所述电容结构还包括第一导电层(201),其位于至少覆盖所述多晶硅层的至少一部分的部分,邻近所述第一导电层的第二介电层(202)和与所述多晶硅层相邻的第二导电层(203) 第二电介质层。 第一导电层,第二介电层和第二导电层形成第二电容器并且沿平面尺寸排列。