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    • 9. 发明授权
    • Method and apparatus for separating non-metallic substrates utilizing a supplemental mechanical force applicator
    • 使用补充机械力施加器分离非金属基底的方法和设备
    • US06252197B1
    • 2001-06-26
    • US09240056
    • 1999-01-29
    • Brian L. HoekstraJavier A. PierolaAravinda Kar
    • Brian L. HoekstraJavier A. PierolaAravinda Kar
    • B23K2600
    • H01L21/3043B23K26/0604B23K26/0608B23K26/0624B23K26/067B23K26/073B23K26/146B23K26/1462B23K26/40B23K26/53B23K2101/40B23K2103/50C03B33/093H05K3/0029H05K3/0052
    • An apparatus and method for physically separating non-metallic substrates by forming a microcrack in the substrate and controllingly propagating the microcrack. An initial mechanical or pulsed laser scribing device forms a microcrack in the substrate. A scribe beam is applied onto the substrate on a separation line. A coolant stream intersects with, or is adjacent to, the trailing edge of the scribe beam. The temperature differential between the heat affected zone of the substrate and the coolant stream propagates the microcrack. Two breaking beams on opposing sides of the separation line follow the coolant stream. The breaking beams create controlled tensile forces that extend the crack to the bottom surface of the substrate for full separation. The scribe and break beams and coolant stream are simultaneously moved relative to the substrate. A preheat beam preheats the heat affected area on the substrate. The beams are formed by an arrangement of lasers and mirrors and lenses. A movable mirror selectively diverts a beam to form either the preheat beam or one or more of the break and scribe beams. Spherical aberration is introduced in the break and scribe beams to flatten their energy distribution profiles and evenly apply the beam energy. A supplemental mechanical force, applied by vertically movable wheels or by restraining the substrate against a curved frame, creates a bending moment to facilitate the separation process.
    • 一种用于通过在衬底中形成微裂纹并且控制地传播微裂纹来物理分离非金属衬底的装置和方法。 初始机械或脉冲激光划线装置在基片中形成微裂纹。 划线在分离线上施加到基板上。 冷却剂流与划线的后缘相交或相邻。 衬底的热影响区域与冷却剂流之间的温差传播微裂纹。 在分离线的相对侧上的两个断裂梁遵循冷却剂流。 断裂梁产生受控的拉伸力,其将裂纹延伸到基底的底部表面以进行完全分离。 划片和断裂梁和冷却剂流同时相对于基板移动。 预热梁预热衬底上的热影响区域。 光束由激光和反射镜和透镜的布置形成。 可动镜子选择性地转向光束以形成预热光束或断裂和划线中的一个或多个。 在断裂和划线中引入球面像差以平坦化其能量分布曲线并均匀地施加光束能量。 通过垂直移动的轮施加或通过将基板限制在弯曲的框架上的补充机械力产生弯矩以便于分离过程。
    • 10. 发明授权
    • Optical device and method of making
    • 光学装置及制作方法
    • US09064798B2
    • 2015-06-23
    • US13134091
    • 2011-05-27
    • Nathaniel R. QuickAravinda KarIslam A. Salama
    • Nathaniel R. QuickAravinda KarIslam A. Salama
    • H01L21/268H01L21/02G01J5/08G01J5/58G01K11/12
    • H01L21/268G01J5/08G01J5/0809G01J5/58G01K11/125H01L21/02678
    • An optical device and method is disclosed for forming the optical device within the wide-bandgap semiconductor substrate. The optical device is formed by directing a thermal energy beam onto a selected portion of the wide-bandgap semiconductor substrate for changing an optical property of the selected portion to form the optical device in the wide-bandgap semiconductor substrate. The thermal energy beam defines the optical and physical properties of the optical device. The optical device may take the form of an electro-optical device with the addition of electrodes located on the wide-bandgap semiconductor substrate in proximity to the optical device for changing the optical property of the optical device upon a change of a voltage applied to the optional electrodes. The invention is also incorporated into a method of using the optical device for remotely sensing temperature, pressure and/or chemical composition.
    • 公开了用于在宽带隙半导体衬底内形成光学器件的光学器件和方法。 通过将热能束引导到宽带隙半导体衬底的选定部分上以改变所选部分的光学特性以形成宽带隙半导体衬底中的光学器件而形成光学器件。 热能束限定光学装置的光学和物理性质。 光学装置可以采用电光装置的形式,其中添加位于宽带隙半导体衬底上的电极附近的光学装置,用于在施加到所述光学装置的电压变化时改变光学装置的光学特性 可选电极 本发明还包括在使用该光学装置用于远程感测温度,压力和/或化学成分的方法中。