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1. 发明授权

US06252197B1 Method and apparatus for separating non-metallic substrates utilizing a supplemental mechanical force applicator 有权
标题翻译：使用补充机械力施加器分离非金属基底的方法和设备
公开(公告)号：US06252197B1
公开(公告)日：2001-06-26
申请号：US09240056
申请日：1999-01-29
申请人： Brian L. Hoekstra , Javier A. Pierola , Aravinda Kar
发明人： Brian L. Hoekstra , Javier A. Pierola , Aravinda Kar
IPC分类号： B23K2600
CPC分类号： H01L21/3043 , B23K26/0604 , B23K26/0608 , B23K26/0624 , B23K26/067 , B23K26/073 , B23K26/146 , B23K26/1462 , B23K26/40 , B23K26/53 , B23K2101/40 , B23K2103/50 , C03B33/093 , H05K3/0029 , H05K3/0052
摘要： An apparatus and method for physically separating non-metallic substrates by forming a microcrack in the substrate and controllingly propagating the microcrack. An initial mechanical or pulsed laser scribing device forms a microcrack in the substrate. A scribe beam is applied onto the substrate on a separation line. A coolant stream intersects with, or is adjacent to, the trailing edge of the scribe beam. The temperature differential between the heat affected zone of the substrate and the coolant stream propagates the microcrack. Two breaking beams on opposing sides of the separation line follow the coolant stream. The breaking beams create controlled tensile forces that extend the crack to the bottom surface of the substrate for full separation. The scribe and break beams and coolant stream are simultaneously moved relative to the substrate. A preheat beam preheats the heat affected area on the substrate. The beams are formed by an arrangement of lasers and mirrors and lenses. A movable mirror selectively diverts a beam to form either the preheat beam or one or more of the break and scribe beams. Spherical aberration is introduced in the break and scribe beams to flatten their energy distribution profiles and evenly apply the beam energy. A supplemental mechanical force, applied by vertically movable wheels or by restraining the substrate against a curved frame, creates a bending moment to facilitate the separation process.
摘要翻译：一种用于通过在衬底中形成微裂纹并且控制地传播微裂纹来物理分离非金属衬底的装置和方法。初始机械或脉冲激光划线装置在基片中形成微裂纹。划线在分离线上施加到基板上。冷却剂流与划线的后缘相交或相邻。衬底的热影响区域与冷却剂流之间的温差传播微裂纹。在分离线的相对侧上的两个断裂梁遵循冷却剂流。断裂梁产生受控的拉伸力，其将裂纹延伸到基底的底部表面以进行完全分离。划片和断裂梁和冷却剂流同时相对于基板移动。预热梁预热衬底上的热影响区域。光束由激光和反射镜和透镜的布置形成。可动镜子选择性地转向光束以形成预热光束或断裂和划线中的一个或多个。在断裂和划线中引入球面像差以平坦化其能量分布曲线并均匀地施加光束能量。通过垂直移动的轮施加或通过将基板限制在弯曲的框架上的补充机械力产生弯矩以便于分离过程。

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