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    • 2. 发明授权
    • Method of forming a metal silicide film
    • 形成金属硅化物膜的方法
    • US5047111A
    • 1991-09-10
    • US110580
    • 1987-10-16
    • Akitoshi IshizakaYasuhiro ShirakiTakashi Ohshima
    • Akitoshi IshizakaYasuhiro ShirakiTakashi Ohshima
    • C30B1/02H01L21/285
    • H01L21/28518C30B1/023C30B29/10
    • Films of desired metal, e.g., Ni or Co, and of Si are laminated alternatelyn a single crystal silicon substrate to form a multi-layered structure, and thereafter the substrate is heated to grow an epitaxial NiSi.sub.2 or CoSi.sub.2 film in solid phase with less diffusion of Ni or Co atoms into the silicon substrate. Each layer in the multi-layered structure has a thickness selected in the range of 30-300 A with the overall composition ratio Si/Ni (or Si/Co) in the range of 1.8-2.0. The lamination process is done at a substrate temperature which does not cause the laminated films to react with the substrate and does not cause the multi-layered structure to become polycrystalline, e.g. below 350.degree. C. for the formation of an NiSi.sub.2 film or below 450.degree. C. for the formation of a CoSi.sub.2 film. The solid phase epitaxy is achieved at a substrate heating temperature in a range of 350.degree.-750.degree. C. for the formation of an epitaxial NiSi.sub.2 film or 450.degree.-1000.degree. C. for the formation of a CoSi.sub.2 film.
    • 将期望的金属(例如Ni或Co)和Si的膜交替层叠在单晶硅衬底上以形成多层结构,然后将衬底加热以生长外延NiSi 2或CoSi 2膜,固相少 Ni或Co原子扩散到硅衬底中。 多层结构中的每个层具有在30-300A范围内选择的厚度,Si / Ni(或Si / Co)的总组成比在1.8-2.0的范围内。 层压方法是在不使层压膜与基板反应而不会使多层结构变得多晶的基板温度下进行的。 低于350℃以形成NiSi2膜或低于450℃以形成CoSi 2膜。 在350〜-750℃的衬底加热温度下实现固相外延,用于形成外延NiSi2膜或450-1000℃以形成CoSi 2膜。
    • 8. 发明授权
    • Image display and method of driving image display
    • 图像显示和驱动图像显示的方法
    • US07116291B1
    • 2006-10-03
    • US10031377
    • 2000-09-04
    • Mutsumi SuzukiToshiaki KusunokiMakoto OkaiMasakazu SagawaAkitoshi Ishizaka
    • Mutsumi SuzukiToshiaki KusunokiMakoto OkaiMasakazu SagawaAkitoshi Ishizaka
    • G09G3/30
    • G09G3/22H01J31/127
    • The present invention provides an image display capable of reducing power used up or consumed by a thin-film electron-emitter matrix. As a typical one, there is provided an image display which comprises a display device including a first plate which has a plurality of electron-emitter elements each having a structure comprised of a base electrode, an insulating layer and a top electrode stacked on one another in this order, the electron-emitter element emitting electrons from the surface of the top electrode when a voltage of positive polarity is applied to the top electrode; a plurality of first electrodes for respectively applying driving voltages to the base electrodes of the electron-emitter elements lying in a row direction, of the plurality of electron-emitter elements; and a plurality of second electrodes for respectively applying driving voltages to the top electrodes of the electron-emitter elements lying in a column direction, of the plurality of electron-emitter elements, a frame component, and a second plate having phosphors, wherein a space surrounded by the first plate, the frame component and the second plate is brought into vacuum. In the image display, the first electrode and/or the second electrode held in a non-selected state is set to a high-impedance state.
    • 本发明提供能够减少由薄膜电子发射器矩阵使用或消耗的功率的图像显示器。 作为典型的图像显示器,提供了一种图像显示器,其包括显示装置,该显示装置包括第一板,该第一板具有多个电子发射元件,每个电子发射元件具有由彼此堆叠的基极,绝缘层和顶电极组成的结构 按照该顺序,当正极性的电压施加到顶部电极时,从顶部电极的表面发射电子的电子 - 发射体元件; 多个第一电极,分别向多个电子发射元件的行方向的电子发射元件的基极施加驱动电压; 以及多个第二电极,用于分别向多个电子发射元件的列方向上的电子发射元件的顶部电极,框架部件和具有荧光体的第二板分别施加驱动电压,其中空间 被第一板包围,框架部件和第二板被置于真空中。 在图像显示中,保持在未选择状态的第一电极和/或第二电极被设置为高阻抗状态。