专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2007039257A1 ILLUMINATION SYSTEM COMPRISING AN OTPICAL FILTER 审中-公开
标题翻译：包含过滤器的照明系统
公开(公告)号：WO2007039257A1
公开(公告)日：2007-04-12
申请号：PCT/EP2006/009498
申请日：2006-09-30
申请人： FIRMA CARL ZEISS SMT AG , SCHWAB, Markus
发明人： SCHWAB, Markus
IPC分类号： G03F7/20
CPC分类号： G03F7/70075 , G03F7/70191
摘要： The invention relates to a Illumination system for a microlithography exposure apparatus comprising an optical element, especially filter, wherein said optical element comprises: an at least partially hollow body onto which a radiation within an optical system impinges; wherein inside said hollow body a fluid medium is provided, wherein the fluid medium influences at least partially the optical properties of the radiation impinging on said optical element and a device for locally adjusting the optical properties by said fluid medium.
摘要翻译：本发明涉及一种用于微光刻曝光设备的照明系统，其包括光学元件，特别是滤光器，其中所述光学元件包括：至少部分中空的主体，光学系统内的辐射入射到其上; 其中在所述中空体内部设置有流体介质，其中所述流体介质至少部分地影响照射在所述光学元件上的辐射的光学性质以及用于通过所述流体介质局部调节光学性质的装置。

2. 发明申请

WO1986005891A1 RADIATION PROTECTION GLASSES 审中-公开
标题翻译：辐射防护玻璃
公开(公告)号：WO1986005891A1
公开(公告)日：1986-10-09
申请号：PCT/EP1986000180
申请日：1986-03-26
申请人： FIRMA CARL ZEISS , MÜLLER, Gerhard
发明人： FIRMA CARL ZEISS
IPC分类号： G02C07/10
CPC分类号： G02C7/101 , A61F9/023 , A61F9/029
摘要： The glasses are fitted with filters (2, 3) mounted in the glass frame (1) which absorb harmful rays. They are also fitted with sensors (6, 7, 8) for invisible rays. Connected downstream to the sensors is an adjustable threshold value discriminator with a warning device (14) connected to it. No sooner does the user of the glasses arrive in an area where there are invisible rays than the sensors deliver a signal which triggers a warning signal. If the intensity of the harmful rays exceeds a value which can no longer be reduced to a harmless value by the filter lenses, a second warning signal is released which is easily distinguishable from the first.

4. 发明申请

WO1986003958A1 LASER FOR THE SURGERY OF HARD TISSUE 审中-公开
标题翻译：激光治疗硬组织手术
公开(公告)号：WO1986003958A1
公开(公告)日：1986-07-17
申请号：PCT/EP1986000010
申请日：1986-01-11
申请人： FIRMA CARL ZEISS , CARL ZEISS - STIFTUNG HANDELND ALS CARL ZEISS , MÜLLER, Gerhard
发明人： FIRMA CARL ZEISS , CARL ZEISS - STIFTUNG HANDELND ALS CARL ZEISS
IPC分类号： A61B17/36
CPC分类号： A61B18/20 , H01S3/1061 , H01S3/2232
摘要： A laser emitting on the wavelength of 9.6 mum is used for the surgery of hard tissue, particularly calcified tissue portions. A CO2-laser is particularly convenient and comprises in its resonator a second gas container (5) wherein a vacuum may optionally be made by means of a pump (8) or which may be filled through a valve (9) with a selective absorption gas on 10.6 mum. For the surgery of hard tissue, the gas container (5) is filled for example with SF6. The laser then emits on 9.6 mum, the wavelength at which the power coupling of the laser beam on the calcified tissue is particularly good. When the gas container (5) has been evacuated, the laser emits on 10.6 mum and is appropriate for soft tissue surgery.

5. 发明申请

WO1984004810A1 METHOD AND DEVICE FOR THE CONTACT-FREE MEASUREMENT OF THE ACTUAL POSITION AND/OR THE PROFILE OF ROUGH SURFACES 审中-公开
标题翻译：用于实时位置的接触式测量和/或粗糙表面轮廓的方法和装置
公开(公告)号：WO1984004810A1
公开(公告)日：1984-12-06
申请号：PCT/EP1984000152
申请日：1984-05-19
申请人： FIRMA CARL ZEISS , FERCHER, Adolf, Friedrich , HU, Hong, Zhang
发明人： FIRMA CARL ZEISS
IPC分类号： G01B11/30
CPC分类号： G01B9/02007 , G01B9/02002 , G01B11/303
摘要： Laser light having at least two different wavelengths is directed to the surface (8) to be measured. On the path of the light beams there is arranged a ray divider (4) generating a reference light beam which is reflected on a reference plane surface (5). In the interference plane of the reflected light a frange pattern is formed amongst which a bright laser frange is selected for all wavelengths by means of a measuring diaphragm (31) of which the diameter is smaller than that of a laser frange. Behind the measuring diaphragm (21), the two wavelengths are separated from each other and the phase difference between the signals of the different wavelengths is measured. Said phase difference is transformed into a signal proportional to the distance between the measuring point and the reference surface and is displayed. It is advisable to frequency-shift the reference light beam with respect to the object light by means of a heterodyne device (7).
摘要翻译：具有至少两个不同波长的激光被引导到待测量的表面（8）。在光束的路径上布置有产生参考光束的光线分割器（4），该参考光束被反射在参考平面（5）上。在反射光的干涉平面中，形成一个奇异的图案，其中通过其直径小于激光轮廓的直径的测量膜（31）为所有波长选择明亮的激光器。在测量光圈（21）的后面，两个波长彼此分离，并且测量不同波长的信号之间的相位差。所述相位差被变换为与测量点和参考表面之间的距离成比例的信号并被显示。建议通过外差装置（7）将参考光束相对于物体光进行频移。

6. 发明专利

ES2033492T3 未知
公开(公告)号：ES2033492T3
公开(公告)日：1993-03-16
申请号：ES89112800
申请日：1989-07-13
申请人： FIRMA CARL ZEISS , CARL ZEISS-STIFTUNG HANDELND ALS CARL ZEISS
发明人： ENDERLE, ECKHARD , AEHNELT, HANS-PETER , AUBELE, KARL-EUGEN , WIRTH, MICHAEL
IPC分类号： G01B21/20 , G01B7/00 , G01B11/00 , G01B21/00

7. 发明专利

AT219300B 未知
公开(公告)号：AT219300B
公开(公告)日：1962-01-25
申请号：AT238860
申请日：1960-03-29
申请人： FIRMA CARL ZEISS

8. 发明专利

AT195139B 未知
公开(公告)号：AT195139B
公开(公告)日：1958-01-25
申请号：AT195139D
申请日：1955-07-15
申请人： FIRMA CARL ZEISS

9. 发明专利

AT10881T 未知
公开(公告)号：AT10881T
公开(公告)日：1985-01-15
申请号：AT82105362
申请日：1982-06-18
申请人： FIRMA CARL ZEISS
发明人： PILLER, HORST, DR. , WEBER, KLAUS, DR.
IPC分类号： G02B21/00 , G02B21/06 , G02B21/08 , G02B21/14

10. 发明专利

AT3087T 未知
公开(公告)号：AT3087T
公开(公告)日：1983-04-15
申请号：AT80107083
申请日：1980-11-15
申请人： FIRMA CARL ZEISS
发明人： WEBER, KLAUS, DR.
IPC分类号： G02B21/26 , G02B21/34
摘要： The invention contemplates an upright microscope construction and a system of interchangeable specimen holders for selective use therewith, to accommodate a variety of types and sizes of specimens, such that, whatever the inserted specimen-bearing holder, the specimen surface to be observed, whether by transmitted light or by reflected light, will be in focus, i.e., in the focal plane or effectively in the focal plane of the microscope. This result is achieved by building into the microscope stage a reference-abutment surface having a predetermined relation to the focal plane of the microscope, and by devising all holders of the interchangeable system to support their intended kinds of specimens in such relation to the part of the holder which abuts the reference-abutment surface, that the inserted holder places the desired specimen surface in the focal plane of the microscope.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式