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81. 发明申请

US20180054183A2 MICRO-ELECTROMECHANICAL RESONATORS AND METHODS OF PROVIDING A REFERENCE FREQUENCY 审中-公开
公开(公告)号：US20180054183A2
公开(公告)日：2018-02-22
申请号：US15114734
申请日：2015-02-11
申请人： Agency for Science, Technology and Research
发明人： Jinghui Xu , Nan Wang , Yuandong Alex Gu
IPC分类号： H03H9/19 , H03H9/56
CPC分类号： H03H9/02409 , B81B2201/0271 , H01H2001/0078 , H03H9/02448 , H03H9/19 , H03H9/2457 , H03H9/2463 , H03H9/56 , H03H2009/02291 , H03H2009/02488
摘要： According to various embodiments, there is provided a micro-electromechanical resonator, including a substrate with a cavity therein; and a resonating structure suspended over the cavity, the resonating structure having a first end anchored to the substrate, wherein the resonating structure is configured to flex in a flexural mode along a width direction of the resonating structure, wherein the width direction is defined at least substantially perpendicular to a length direction of the resonating structure, wherein the length direction is defined from the first end to a second end of the resonating structure, wherein the second end opposes the first end.

82. 发明申请

US20170170802A1 MEMS RESONATOR 审中-公开
公开(公告)号：US20170170802A1
公开(公告)日：2017-06-15
申请号：US15152866
申请日：2016-05-12
申请人： Hyundai Motor Company
发明人： Ilseon Yoo
IPC分类号： H03H9/02 , B81B3/00
CPC分类号： H03H9/02244 , B81B3/0021 , B81B2201/0271 , B81B2203/0118 , B81B2203/0136 , B81B2207/015 , G01C19/5719 , G01P15/097 , H03H9/02275 , H03H9/02393 , H03H9/02409 , H03H9/2447 , H03H2009/02165 , H03H2009/02291
摘要： A MEMS resonator includes a main substrate forming a receiving part at a center of the main substrate; a mass body having one end part and a center part elastically supported by both sides of the main substrate; a driving unit configured at one side of the receiving part on the main substrate and producing a driving torque by a voltage applied to both sides of the one end part of the mass body to move a position of the mass body with respect to the main substrate; and a tuning part including a pair of tuning units provided symmetrically with respect to the second elastic member, and having a beam member changing a length of the second elastic member by an actuating operation of each tuning unit to control a frequency.

83. 发明授权

US09117593B2 Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs 有权
标题翻译：使用双压电晶片的单晶压电MEMS器件中的可调谐和可切换谐振器和滤波器结构
公开(公告)号：US09117593B2
公开(公告)日：2015-08-25
申请号：US14071173
申请日：2013-11-04
申请人： RF Micro Devices, Inc.
发明人： Kushal Bhattacharjee
IPC分类号： H03H9/46 , H03H9/54 , H01G5/18 , H03H9/02 , H03H9/24 , B81B3/00
CPC分类号： H01G5/18 , B81B3/0086 , B81B2201/018 , B81B2201/0271 , B81B2201/032 , H03H9/02275 , H03H9/02409 , H03H9/2405 , H03H9/2463 , H03H9/462 , H03H9/467 , H03H2009/241
摘要： A MEMS device includes a substrate, one or more anchors formed on a first surface of the substrate, and a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors. Notably, the piezoelectric layer is a bimorph including a first bimorph layer and a second bimorph layer. A first electrode may be provided on a first surface of the piezoelectric layer facing the first surface of the substrate, such that the first electrode is in contact with the first bimorph layer of the piezoelectric layer. A second electrode may be provided on a second surface of the piezoelectric layer opposite the substrate, such that the second electrode is in contact with the second bimorph layer of the piezoelectric layer. The second electrode may include a first conducting section and a second conducting section, which are inter-digitally dispersed on the second surface.
摘要翻译： MEMS器件包括衬底，形成在衬底的第一表面上的一个或多个锚固体和通过一个或多个锚固件悬挂在衬底的第一表面上的压电层。值得注意的是，压电层是包括第一双晶片层和第二双晶片层的双晶片。第一电极可以设置在面对基板的第一表面的压电层的第一表面上，使得第一电极与压电层的第一双压电晶片层接触。第二电极可以设置在与衬底相对的压电层的第二表面上，使得第二电极与压电层的第二双压电晶片层接触。第二电极可以包括第一导电部分和第二导电部分，其在数字上分散在第二表面上。

84. 发明授权

US09083308B2 MEMS device 有权
标题翻译： MEMS器件
公开(公告)号：US09083308B2
公开(公告)日：2015-07-14
申请号：US13349197
申请日：2012-01-12
申请人： Florian Schoen , Mohsin Nawaz , Mihail Sararoiu
发明人： Florian Schoen , Mohsin Nawaz , Mihail Sararoiu
IPC分类号： H03H9/24 , H03H9/46 , H03H9/02
CPC分类号： H03H9/2431 , H03H9/02409 , H03H9/02417 , H03H9/2463 , H03J2200/19
摘要： System and method for a microelectromechanical system (MEMS) is disclosed. A preferred embodiment comprises a first anchor region, a vibrating MEMS structure fixed to the first anchor region, a first electrode adjacent the vibrating MEMS structure, a second electrode adjacent the vibrating MEMS structure wherein the vibrating MEMS structure is arranged between the first and the second electrode.
摘要翻译：公开了一种用于微机电系统（MEMS）的系统和方法。优选实施例包括第一锚定区域，固定到第一锚定区域的振动MEMS结构，与振动MEMS结构相邻的第一电极，与振动MEMS结构相邻的第二电极，其中振动MEMS结构布置在第一和第二电极。

85. 发明申请

US20140300246A1 VOLUME WAVE RESONATOR USING EXCITATION/DETECTION OF VIBRATIONS 有权
标题翻译：使用振动/振动检测的波浪谐振器
公开(公告)号：US20140300246A1
公开(公告)日：2014-10-09
申请号：US14131341
申请日：2012-07-06
申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (C.N.R.S.) , ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DE MICROTECHNIQUE , UNIVERSITE DE FRANCHE-COMTE
发明人： Bernard Dulmet , Mihaela Ivan , Sylvain Ballandras
IPC分类号： H03H9/24
CPC分类号： H03H9/2405 , B06B1/0292 , H03H9/02259 , H03H9/02409 , H03H9/174 , H03H9/2463
摘要： The invention relates to an acoustic volume wave resonator configured to resonate at a predetermined work frequency comprising: a mounting (12), comprising a first surface (14) and a second surface (16), a resonating substrate (18), comprising a first surface (20) and a second surface (22), and a diaphragm (24) rigidly connecting the second surface (16) of the mounting on the one hand and the first surface (20) of the resonating substrate on the other hand, The mounting comprises an internal cavity (28) and an internal electrode (32), so as to form a gap area (34) between the internal electrode (24) and a portion (35) of the diaphragm.The resonating substrate is configured to generate, between its first surface and its second surface, longitudinal mode acoustic waves vibrating at the work frequency of the resonator, when an electrostatic field having a sinusoidal component at the work frequency is generated in the gap area by applying a differential voltage between the diaphragm or the first surface of the resonating substrate on the one hand and the internal electrode on the other hand.
摘要翻译：本发明涉及一种配置成以预定工作频率谐振的声体积波谐振器，包括：安装件（12），包括第一表面（14）和第二表面（16），谐振基板（18），包括第一表面（20）和第二表面（22）以及另一方面将固定装置的第二表面（16）与谐振基板的第一表面（20）刚性连接的隔膜（24）安装包括内部空腔（28）和内部电极（32），以在内部电极（24）和隔膜的一部分（35）之间形成间隙区域（34）。谐振衬底被构造成在其第一表面和第二表面之间产生在谐振器的工作频率下振动的纵向模式的声波，当通过施加在间隙区域中产生在工作频率处具有正弦分量的静电场时另一方面，隔膜或谐振基板的第一表面与内部电极之间的差分电压。

86. 发明申请

US20140203796A1 NANOELECTROMECHANICAL RESONATORS 审中-公开
标题翻译：纳米电子谐振器
公开(公告)号：US20140203796A1
公开(公告)日：2014-07-24
申请号：US13968836
申请日：2013-08-16
申请人： Purdue Research Foundation
发明人： Saeed Mohammadi , Hossein Pajouhi , Jeffrey Frederick Rhoads , Lin Yu
IPC分类号： H01L27/12 , G01R19/00 , H01L29/02
CPC分类号： H01L27/1203 , B82Y10/00 , B82Y15/00 , H01L29/0673 , H01L29/16 , H01L29/775 , H03H3/0072 , H03H3/0073 , H03H9/02409 , H03H9/2463 , H03H2009/02314
摘要： A silicon device, e.g., a nanoelectromechanical resonator, has a silicon substrate; an oxide layer having a trench therein; a silicon device layer over the oxide layer; and a nanowire disposed at least partly over the trench. Substantially no oxide or polysilicon is over the nanowire in the trench. A polyimide layer over the silicon device layer includes an opening over the trench. A silicon device can include silicon-on-insulator layers and at least one complementary metal-oxide semiconductor transistor in addition to a nanowire substantially suspended over a trench. A system for measurement of a nanoresonator includes an AC source in series with the nanoresonator to provide an electrical signal thereto at a selected first frequency. Electrode(s) adjacent to and spaced apart from the nanoresonator are driven by voltage source. A detector detects a current through the nanoresonator.
摘要翻译：硅器件，例如纳米机电谐振器，具有硅衬底; 其中具有沟槽的氧化物层; 氧化物层上的硅器件层; 以及至少部分地布置在沟槽上的纳米线。在沟槽中的纳米线上基本上没有氧化物或多晶硅。硅器件层上的聚酰亚胺层包括在沟槽上的开口。除了基本上悬在沟槽上的纳米线之外，硅器件可以包括绝缘体上硅层和至少一个互补金属氧化物半导体晶体管。纳米谐振器的测量系统包括与纳米谐振器串联的AC源，以选定的第一频率向其提供电信号。与纳米谐振器相邻并间隔开的电极由电压源驱动。检测器检测通过纳米谐振器的电流。

87. 发明授权

US08450913B1 Tunable Piezoelectric MEMS Resonators suitable for real-time clock applications 有权
标题翻译：可调谐压电MEMS谐振器适用于实时时钟应用
公开(公告)号：US08450913B1
公开(公告)日：2013-05-28
申请号：US13077545
申请日：2011-03-31
申请人： Farrokh Ayazi , Diego Emilio Serrano
发明人： Farrokh Ayazi , Diego Emilio Serrano
IPC分类号： H01L41/047 , H01L41/053 , H01L41/08
CPC分类号： H03H9/02409 , H03H9/2463 , H03H2009/02488 , H03H2009/2442
摘要： A microelectromechanical resonator can include a suspended frame-shaped beam anchored at four corners thereof to a surrounding substrate along with a suspended resonator plate tethered on four sides thereof to corresponding sides of the frame-shaped beam. A pair of drive electrodes are provided on first and third diametrically opposite corners of the frame-shaped beam and a pair of sense electrodes are provided on second and fourth diametrically opposite corners of the frame-shaped beam. The resonator may also include a ground electrode on the frame-shaped beam and a piezoelectric layer sandwiched between each of the drive and sense electrodes and the ground electrode.
摘要翻译：微机电谐振器可以包括悬挂的框形梁，其四个角部锚固在周围的基板上，以及连接在其四个侧面上的悬挂的谐振器板到框架形梁的相应侧面。一对驱动电极设置在框架形梁的第一和第三直径相对的角上，并且一对感测电极设置在框架形梁的第二和第四直径相对的拐角上。谐振器还可以包括框架形梁上的接地电极和夹在每个驱动电极和感测电极和接地电极之间的压电层。

88. 发明授权

US08258893B2 Out-of-plane MEMS resonator with static out-of-plane deflection 有权
标题翻译：具有静态超平面偏转的平面外的MEMS谐振器
公开(公告)号：US08258893B2
公开(公告)日：2012-09-04
申请号：US13173432
申请日：2011-06-30
申请人： Emmanuel P. Quevy , David H. Bernstein , Mehrnaz Motiee
发明人： Emmanuel P. Quevy , David H. Bernstein , Mehrnaz Motiee
IPC分类号： H03H9/24 , H03H9/125 , H03H9/46
CPC分类号： H03H9/2457 , H03H3/0072 , H03H3/0076 , H03H9/02409 , H03H9/2463 , H03H2009/02299 , H03H2009/02307 , H03H2009/0233 , H03H2009/02472 , H03H2009/02511 , H03H2009/02519
摘要： A microelectromechanical systems (MEMS) device includes a tuning electrode, a drive electrode, and a resonator. The resonator is anchored to a substrate and is configured to resonate in response to a signal on the drive electrode. The MEMS device includes a tuning plate coupled to the resonator and positioned above the tuning electrode. The tuning plate is configured to adjust a resonant frequency of the resonator in response to a voltage difference between the resonator and the tuning electrode. In at least one embodiment of the MEMS device, the tuning plate and the tuning electrode are configured to adjust the resonant frequency of the resonator substantially independent of the signal on the drive electrode.
摘要翻译：微机电系统（MEMS）装置包括调谐电极，驱动电极和谐振器。谐振器被锚固到衬底并且被配置为响应于驱动电极上的信号而谐振。 MEMS器件包括耦合到谐振器并且定位在调谐电极上方的调谐板。调谐板被配置为响应谐振器和调谐电极之间的电压差来调节谐振器的谐振频率。在MEMS器件的至少一个实施例中，调谐板和调谐电极被配置为基本上独立于驱动电极上的信号来调节谐振器的谐振频率。

89. 发明授权

US08115573B2 Resonance frequency tunable MEMS device 有权
标题翻译：谐振频率可调MEMS器件
公开(公告)号：US08115573B2
公开(公告)日：2012-02-14
申请号：US12474368
申请日：2009-05-29
申请人： Florian Schoen , Mohsin Nawaz , Mihail Sararoiu
发明人： Florian Schoen , Mohsin Nawaz , Mihail Sararoiu
IPC分类号： H03H9/24 , H03H9/46
CPC分类号： H03H9/2431 , H03H9/02409 , H03H9/02417 , H03H9/2463 , H03J2200/19
摘要： System and method for a microelectromechanical system (MEMS) is disclosed. A preferred embodiment comprises a first anchor region, a vibrating MEMS structure fixed to the first anchor region, a first electrode adjacent the vibrating MEMS structure, a second electrode adjacent the vibrating MEMS structure wherein the vibrating MEMS structure is arranged between the first and the second electrode.
摘要翻译：公开了一种用于微机电系统（MEMS）的系统和方法。优选实施例包括第一锚定区域，固定到第一锚定区域的振动MEMS结构，与振动MEMS结构相邻的第一电极，与振动MEMS结构相邻的第二电极，其中振动MEMS结构布置在第一和第二电极。

90. 发明申请

US20110128083A1 MICROELECTROMECHANICAL RESONANT STRUCTURE HAVING IMPROVED ELECTRICAL CHARACTERISTICS 有权
标题翻译：具有改善电气特性的微电子谐振结构
公开(公告)号：US20110128083A1
公开(公告)日：2011-06-02
申请号：US12953930
申请日：2010-11-24
申请人： Anna Pomarico , Pasquale Flora , Annarita Morea , Giuditta Roselli
发明人： Anna Pomarico , Pasquale Flora , Annarita Morea , Giuditta Roselli
IPC分类号： H03B5/30 , H01L21/02 , H01L29/84
CPC分类号： H03H9/02338 , H03H9/02259 , H03H9/02409 , H03H9/02433 , H03H9/2436 , H03H2009/02511 , H03H2009/2442
摘要： The present disclosure is directed to a MEMS resonant structure, provided with a substrate of semiconductor material; a mobile mass suspended above the substrate and anchored to the substrate by constraint elements to be free to oscillate at a resonance frequency; and a fixed-electrode structure capacitively coupled to the mobile mass to form a capacitor with a capacitance that varies as a function of the oscillation of the mobile mass; the fixed-electrode structure arranged on a top surface of the substrate, and the constraint elements being configured in such a way that the mobile mass oscillates, in use, in a vertical direction, transverse to the top surface of the substrate, keeping substantially parallel to the top surface.
摘要翻译：本公开涉及一种设置有半导体材料的衬底的MEMS谐振结构; 悬浮在衬底上方并通过约束元件锚固到衬底以便以共振频率自由振荡的移动质量; 以及电容耦合到所述移动质量块的固定电极结构，以形成电容器，所述电容器随着所述移动质量块的振荡而变化; 所述固定电极结构布置在所述衬底的顶表面上，并且所述约束元件被配置成使得所述移动质量块在使用中在垂直方向上垂直于所述衬底的顶表面振荡，保持基本平行到顶面。

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